EP0942172A1 - Pompe à vide à arbres d'entraínements multiples - Google Patents

Pompe à vide à arbres d'entraínements multiples Download PDF

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Publication number
EP0942172A1
EP0942172A1 EP99101291A EP99101291A EP0942172A1 EP 0942172 A1 EP0942172 A1 EP 0942172A1 EP 99101291 A EP99101291 A EP 99101291A EP 99101291 A EP99101291 A EP 99101291A EP 0942172 A1 EP0942172 A1 EP 0942172A1
Authority
EP
European Patent Office
Prior art keywords
rotor
vacuum pump
shaft
pump according
bell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99101291A
Other languages
German (de)
English (en)
Other versions
EP0942172B1 (fr
Inventor
Christopher Mark Rippl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP0942172A1 publication Critical patent/EP0942172A1/fr
Application granted granted Critical
Publication of EP0942172B1 publication Critical patent/EP0942172B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/023—Lubricant distribution through a hollow driving shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a multi-shaft vacuum pump according to the preamble of first claim.
  • Multi-shaft vacuum pumps of the type described here are considered dry Pump systems especially in the chemical industry and in semiconductor technology a wide range of applications. Dry pump systems are characterized by that their scoops no oil for lubrication and sealing, reduction of Dead volume or included for other purposes. This enables them to to create a completely hydrocarbon-free vacuum. To achieve optimal Pump properties can have several pump stages connected in series in one Housing.
  • the drive motor is located outside the pump housing.
  • a shaft bushing for that Coupling to the main shaft requires a shaft bushing.
  • the shaft bushing with a more or less expensive sealing.
  • the invention has set itself the task of a dry multi-shaft vacuum pump to develop, which no longer has the disadvantages mentioned. In front everything should be aimed at a compact design with optimal pump properties which is space-saving and enables easy installation. Other components, such as seals, sealing gas devices and oil supplies, are to be optimally adapted to the new pump concept.
  • the rotors fill up a large part of the pump volume. This room is not used due to the massive construction of the rotors since then.
  • Through the bell-shaped design of at least one rotor it becomes possible to drive the system fully integrated into the interior of a rotor and the one that has not been used since Recycle space. This reduces the geometric dimensions of the Pump considerably.
  • the bearings are encapsulated from the scooping area, and no shaft bushings are required.
  • the Supply pressure is above the range in which the sealing material blocks occurs. Because the gas is distributed in the seal and on the internal surface flows out into the gap between the sealing body and the rotor, creates a gas cushion, which causes gas exchange between the gearbox and Scooping space is prevented.
  • the pump according to the invention has a compact design with optimal pump properties Construction, which is space-saving and enables easy assembly.
  • Other components such as power supply, seals, coolant supply, Purge gas facilities and oil supply were the pump concept optimally adapted.
  • a pump housing 1 which has an intake flange 2 and a gas outlet opening 3 is provided, the main rotor 4, the control rotor 5 in bearings 31, 33 and 32, 34 worn.
  • the outer profile of the main rotor 4 is 50, that it has two working pistons 6 which rotate in the scooping chamber 8.
  • the profile of the control rotor 5 corresponds to these working pistons 6 two recesses 7.
  • the rotor parts 13 are on the inner surface of the bell-shaped Main rotor 4 attached.
  • the stator parts 12 of the drive system are fixedly mounted within the rotor opposite the rotor shaft 13. Camps 31, 33 and 32, 34 are mounted on pins 9 and 10 inside the rotors. These pins are firmly connected to the housing 1 via flanges 17 and 18.
  • a gear arrangement consisting of gears 14 and 15, which in Gearbox 19 are housed, the rotor movement of the main rotor 4th transferred to the control rotor 5.
  • non-contact seals 22 available. These are called threaded shaft pumps designed to counteract the backflows between the stages.
  • sealing gas seals are made of porous Material and allow through the material selection and shape a metered Supply of sealing gas.
  • Oil is delivered to the bearing points 31, 33 and 32, 34 with the help of Threaded shaft pumps 20 and 21, which on the inside of the control rotor 5th are attached and designed symmetrically so that they are in the axial direction pump in the opposite direction and the oil is discharged in the middle. About drilling 42 and 43 in the pins 9 and 10, the oil is fed to the bearings.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP99101291A 1998-03-07 1999-01-25 Pompe à vide à arbres d'entraínements multiples Expired - Lifetime EP0942172B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19809957A DE19809957A1 (de) 1998-03-07 1998-03-07 Mehrwellenvakuumpumpe
DE19809957 1998-03-07

Publications (2)

Publication Number Publication Date
EP0942172A1 true EP0942172A1 (fr) 1999-09-15
EP0942172B1 EP0942172B1 (fr) 2004-09-29

Family

ID=7860157

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99101291A Expired - Lifetime EP0942172B1 (fr) 1998-03-07 1999-01-25 Pompe à vide à arbres d'entraínements multiples

Country Status (5)

Country Link
US (1) US6241490B1 (fr)
EP (1) EP0942172B1 (fr)
JP (1) JP4282809B2 (fr)
AT (1) ATE278110T1 (fr)
DE (2) DE19809957A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6729863B2 (en) * 1999-03-22 2004-05-04 Werner Rietschle Gmbh & Co. Kg Rotary pump having high and low pressure ports in the housing cover
US20050095160A1 (en) * 2003-10-29 2005-05-05 Heng-I Lin Pump
US20140161655A1 (en) * 2011-07-08 2014-06-12 Edward L. Simonds Pump
JP6418838B2 (ja) * 2014-07-31 2018-11-07 エドワーズ株式会社 ドライポンプ及び排ガス処理方法
CA3056753C (fr) 2017-04-07 2021-04-27 Stackpole International Engineered Products, Ltd. Pompe a vide epitrochoidale
DE102018001519A1 (de) * 2018-02-27 2019-08-29 Ralf Steffens Lagerung und Antrieb für einen R718-Verdichter
EP3784907B1 (fr) 2018-04-27 2022-03-02 Carrier Corporation Compresseur à vis comprenant un rotor de moteur externe
KR102453438B1 (ko) * 2020-06-15 2022-10-12 주식회사 한중엔시에스 리저버 일체형 진공 펌프

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
EP0472933A2 (fr) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Appareil rotatif à fluide
FR2668209A1 (fr) * 1990-10-18 1992-04-24 Hitachi Koki Kk Pompe d'aspiration moleculaire.
US5674051A (en) * 1994-07-11 1997-10-07 Matsushita Electric Industrial Co., Ltd. Positive displacement pump having synchronously rotated non-circular rotors

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
GB2088957B (en) * 1980-12-05 1984-12-12 Boc Ltd Rotary positive-displacement fluidmachines
SE424760B (sv) * 1980-12-12 1982-08-09 Sullair Tech Ab Forfarande vid en oljeinsprutad skruvkompressor for balansering av axialkrafter hos atminstone en av kompressorns rotorer, for tetning av spalterna mellan rotorhus och rotorernas axlar, samt for kylning och smorjning ..
US4551073A (en) * 1982-05-12 1985-11-05 Walter Schwab Pump for liquid and gaseous fluids, especially blood
US4457680A (en) * 1983-04-27 1984-07-03 Paget Win W Rotary compressor
JPS62243982A (ja) * 1986-04-14 1987-10-24 Hitachi Ltd ２段型真空ポンプ装置およびその運転方法
EP0408792B1 (fr) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Pompe à effet visqueux avec au moins un étage hélicoidal à côté du refoulement
DE4238271A1 (de) * 1992-11-13 1994-05-19 Leybold Ag Zweiwellenvakuumpumpe
DE4244063A1 (de) * 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Wälzkolben-Vakuumpumpe
US5346361A (en) * 1993-04-15 1994-09-13 Goulds Pumps, Incorporated Air seal for pump with vertical shaft
BE1010822A3 (nl) * 1996-12-23 1999-02-02 Atlas Copco Airpower Nv Machine met gelagerde rotoren en vloeistofsmering van de lagers.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
EP0472933A2 (fr) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Appareil rotatif à fluide
FR2668209A1 (fr) * 1990-10-18 1992-04-24 Hitachi Koki Kk Pompe d'aspiration moleculaire.
US5674051A (en) * 1994-07-11 1997-10-07 Matsushita Electric Industrial Co., Ltd. Positive displacement pump having synchronously rotated non-circular rotors

Also Published As

Publication number Publication date
JP4282809B2 (ja) 2009-06-24
US6241490B1 (en) 2001-06-05
DE59910616D1 (de) 2004-11-04
ATE278110T1 (de) 2004-10-15
JPH11294358A (ja) 1999-10-26
DE19809957A1 (de) 1999-09-09
EP0942172B1 (fr) 2004-09-29

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