EP0914876A1 - Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten durch elektrische Entladungen zwischen zwei Elektroden in einer Gasmmischung - Google Patents

Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten durch elektrische Entladungen zwischen zwei Elektroden in einer Gasmmischung Download PDF

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Publication number
EP0914876A1
EP0914876A1 EP98402730A EP98402730A EP0914876A1 EP 0914876 A1 EP0914876 A1 EP 0914876A1 EP 98402730 A EP98402730 A EP 98402730A EP 98402730 A EP98402730 A EP 98402730A EP 0914876 A1 EP0914876 A1 EP 0914876A1
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EP
European Patent Office
Prior art keywords
substrate
roller
rollers
electrode
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98402730A
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English (en)
French (fr)
Other versions
EP0914876B1 (de
Inventor
Alain Villermet
François Coeuret
Panayotis Cocolios
Bernd c/o Softal Electronic GmbH Martens
Eckhard C/O Softal Electronic Gmbh Prinz
Jürgen c/o Softal Electronic GmbH Salge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Softal Elektronik GmbH
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Softal Elektronik GmbH
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Softal Elektronik GmbH, Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Softal Elektronik GmbH
Publication of EP0914876A1 publication Critical patent/EP0914876A1/de
Application granted granted Critical
Publication of EP0914876B1 publication Critical patent/EP0914876B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/007—Processes for applying liquids or other fluent materials using an electrostatic field
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/02—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber
    • B05D7/04—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to macromolecular substances, e.g. rubber to surfaces of films or sheets
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06B—TREATING TEXTILE MATERIALS USING LIQUIDS, GASES OR VAPOURS
    • D06B1/00—Applying liquids, gases or vapours onto textile materials to effect treatment, e.g. washing, dyeing, bleaching, sizing or impregnating
    • D06B1/10—Applying liquids, gases or vapours onto textile materials to effect treatment, e.g. washing, dyeing, bleaching, sizing or impregnating by contact with a member carrying the treating material
    • D06B1/14—Applying liquids, gases or vapours onto textile materials to effect treatment, e.g. washing, dyeing, bleaching, sizing or impregnating by contact with a member carrying the treating material with a roller
    • D06B1/148—Applying liquids, gases or vapours onto textile materials to effect treatment, e.g. washing, dyeing, bleaching, sizing or impregnating by contact with a member carrying the treating material with a roller the treating material being supplied to the roller by spraying or pouring
    • D—TEXTILES; PAPER
    • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
    • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
    • D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
    • D06M10/025—Corona discharge or low temperature plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2252/00—Sheets
    • B05D2252/02—Sheets of indefinite length

Definitions

  • the subject of the present invention is a method and a device for surface treatment of a moving substrate, by electrical discharge in a controlled gas atmosphere between two electrodes, the atmosphere gas comprising in particular one or more compounds capable of generate by-products that can accumulate and / or deposit on discharge electrodes.
  • these by-products could be solid as powders (as for example in the case of silanes), or else liquids or pasty as in the case of certain hydrocarbons (giving rise to example with the deposition of compounds with aliphatic chains).
  • the gas mixtures envisaged can be, depending on the treatment and the very varied target substrates, generally comprising a neutral carrier gas and a or several compounds among the reducing and oxidizing gases, one of the components of the mixture therefore being of the type capable of generating by-products can accumulate and / or deposit on the electrodes of the landfill, as is the case for example with silanes or hydrocarbons.
  • substrates targeted by the present invention can for example be present in sheet or film form, foams, continuous or not depending on the subject considered. We are particularly interested here in non-conductive substrates made of polymer materials, textiles (woven or not), paper etc ...
  • the active gas mixture allowing to obtain good levels of treatment can be of different compositions, which depend essentially the intended application with the treated polymer film. So far, the gas mixture most often included nitrogen as the carrier gas, a oxidizing gas and a few hundred ppm silane.
  • the object of the present invention is therefore in particular to propose a method and device for advantageously solving this problem technique by avoiding the accumulation on the electrodes of by-products (solid and / or liquid and / or still pasty) resulting from chemical reactions caused by electrical discharge to the processing atmosphere.
  • One of the conditions necessary for a good implementation of the invention is to provide a device capable of ensuring an injection homogeneous gas mixture over the entire length of the electrodes used to create the landfill. Indeed a strictly homogeneous distribution is essential to obtain a homogeneous treatment of the polymer film.
  • the two electrodes are rollers on which the running film is applied and which are arranged in parallel to each other at an appropriate interval, and thus a discharge is thus created between two electrode rollers.
  • the method according to the invention for the surface treatment of a substrate running, by electric discharge created between two electrodes in a gas mixture capable of generating by-products which can deposit on the electrodes, in which one of the electrodes is a roller on which can be applied the substrate, means being provided for injecting the gas mixture between the electrodes, is then characterized in that one has at least one substrate processing stage, each stage comprising at least one pair of roller electrodes, and an injector of the gas mixture between the rollers, and in that the treatment of the substrate as follows: successively pass the substrate one first time between the two electrode rollers, applying it to the first electrode roller, where it undergoes a first surface treatment, then a second time between the two electrode rollers, applying it to the second roller electrode, where it undergoes a second surface treatment.
  • the invention relates to the field of "scrolling" surface treatment methods, so the facilities that we qualify as “open”, hence the presence of certain air inlets, the surface treatment also being carried out necessarily at atmospheric pressure or at a pressure close to the atmospheric pressure.
  • the invention also relates to a device for surface treatment. of a moving substrate, by electrical discharge created between two electrodes in a gas mixture capable of generating by-products which can be deposited on the electrodes, in which one of the electrodes is a roller on which the substrate can be applied, means being provided for injecting the gas mixture between the electrodes, and characterized in that that the second electrode is a roller on which the moving substrate can also be applied and which is arranged parallel to the other roller at an appropriate interval, by the fact that the device comprises means, able to pass the substrate a first time between the two electrode rollers, by applying it to the first roller electrode, where it can undergo a first surface treatment, and subsequently pass the substrate a second time between the two electrode rollers, coming apply it on the second electrode roller, where it can undergo a second surface treatment.
  • the device can also include means for ensuring good scrolling of the film in the device, and therefore in particular to bring the substrate into the area discharge and bring it out, or even, when the device includes several processing stages, to transfer the substrate between the stages.
  • the second discharge can be either off or on, which means the substrate can be treated twice or four times. Indeed, the substrate can pass first in the first discharge stage where it is treated by the first discharge zone, then after passing over a tying roller, the film can pass into the second discharge stage where it can again be treated by the second discharge zone (if it is on). After embarrassment on others rolls, the film passes a second time into the second discharge zone then also, after a tie-in roll in the first area of dump.
  • the lengths of the two electrodes in the pair are not necessarily identical, and on the other hand, the ratio of dimensions between one or the other of the electrodes and the substrate.
  • the gas injection width relative to the dimensions of the substrate to be treated.
  • the electrodes remain protected by the substrate itself for the entire duration of the treatment, since the substrate covers all or part of the surface of the electrodes, ie their “useful” surface, in each zone of electric shock, the formation of by-product deposits on the electrodes being in fact the fruit of the combination of the presence of a electric shock and the presence of the gas mixture likely to generate by-products.
  • -X- passes a second time between the two electrode rollers, applying to the second roller electrode of the pair, where it undergoes a second surface treatment (at right now the first electrode mentioned above is covered by an upstream portion of the moving substrate, i.e. which followed -X- in the scrolling).
  • the by-products thus formed are progressively evacuated by suction systems housed in the hood and / or by the surface of the moving substrate, without accumulating on the electrodes.
  • the system can operate almost continuously 24 hours a day.
  • the device shown is intended for the surface treatment of substrates, for example of polymer films, by electrical discharge between two electrodes in a gas mixture likely to give rise to the formation of by-products during treatment, for example in a gas mixture containing monosilane.
  • the embodiment represented here comprises two stages (or zones) 1, 2 superimposed surface treatment of a polymer film 3, a block suction 4 arranged below the upper treatment stage 2, and a second block 5 for suction and evacuation of the gaseous effluents resulting from the treatment, located below the first treatment stage 1.
  • the assembly is contained inside a cover 6, the film entering and emerging from the system through the spaces provided between the suction unit 5 and the tying roller 21 and the tying roller 19 respectively.
  • Each treatment or discharge stage 1, 2 includes for the mode embodiment shown two electrode rollers 9, 11 arranged parallel to each other and with their longitudinal axis horizontal. These rollers 9, 11 therefore constitute two electrodes, produced in an appropriate metallic material. They can be, at least for one of them, covered with a suitable dielectric material. Means not shown and known per se are provided for placing the electrodes 9, 11 under high voltage (several thousand volts) to cause a discharge electric between them. At the ends of each roller 9, 11 are arranged here jacks 12, 13 allowing the associated roller 11, 9 to be moved forward or backward. This mode is only illustrative of one of the possible functioning of the system, we could indeed also work with fixed rollers.
  • each pair of roller electrodes 9, 11 and in a plane vertical passing between them is positioned an injector 14 of a mixture gas from a gas chamber 15 placed above the injector 14 (referenced 32 in FIG. 2), which as well as the associated chamber 15 preferably extend over the entire length of the respective rollers 9, 11.
  • rollers 9, 11 are supported at their ends by the walls opposite sides 16, 17 of the cover 6 and can be rotated by the film 3 itself driven by a not shown motorization system.
  • electrode rollers driven by a motor or simply by the film itself (depending on the film considered and its resistance characteristics mechanical).
  • first treatment stage 1 Below the first treatment stage 1 are arranged here two tying rollers 19, 21.
  • a second pair of tying rollers 22, 23 is arranged above the first discharge zone 1, and finally two interlocking rollers 24, 25 are mounted above the electrode rollers 9, 11 of the second discharge zone 2.
  • Each tying roller (19, 21, 22, 23 ..) is here driven by a motor (not shown), in order to facilitate the movement of the film 3.
  • the tying rollers could be driven by the film itself in certain cases.
  • the film 3 enters the cover 6 through the slot formed between the roller 21 and the block 44 which will be described later, then comes apply to the first tying roller 21, then passes between the two electrodes 9, 11 of the first discharge stage 1, from there the film 3 passes over the interlocking roller 23, located above the discharge stage 1, comes then apply to the roller electrode 9 of the upper stage 2, then to the upper tying roller 25.
  • the film is then returned by the roller 24 to the electrode roller 11, then is applied to the interlocking roller 22 from which it is returned to the electrode roller 11 of the first floor. After which the film is discharged through the exit slot formed between the lower feed roller 19 and the suction block 44.
  • the film 3 undergoes four consecutive phases of treatment by electrical discharge, for example by corona discharge, between the electrodes 9, 11 of the two floors.
  • the device comprises two discharge stages 1, 2, a single stage 1 being able sufficient for many applications.
  • the film 3 passes directly from the interlocking roller 23 onto the roller 22 before being returned to the inter-electrode space where there undergoes a second surface treatment before emerging from the cover by the tether roller 19.
  • Each chamber 15 is supplied with a gas mixture with at least one from its ends by a pipe crossing the wall of the cover 6. From this compartment the gas mixture enters the injection nozzle 14 extending here continuously from one end to the other of the gas 15 and roller electrodes.
  • the nozzle 14 can be fixed under the chamber 15 by any suitable means known to those skilled in the art.
  • the gas injection nozzle is here provided, quite advantageously with means making it possible to obscure part of the length of this nozzle, in order to limit the length over which the gas mixture is injected. In fact, it is then possible to adapt this length of gaseous injection to the width of the film 3 to be treated, when this width is less than the length of the electrode roller 9.
  • a roller 11 a constituting an electrode roll supported by a longitudinal axis 34, the ends of which are supported by the side walls 16, 17 of the cover 6, the length of the roll 11 a then being equal to the width of the film 3 to be treated.
  • the aforementioned means may include for example as is the case here flaps 36 articulated on the nozzle 32, each provided with a curved end to close the injection slot of the nozzle 32, and of hooks 38 for maneuvering. The upper ends of these can be hung on a retainer.
  • flaps 36 can thus be staggered along the injector 32, in order to adjust its effective injection length.
  • the treatment device is finally provided, at its lower part below the interlocking rollers 19, 21, with a unit 42 (FIGS. 1 and 3) for sucking off the gaseous effluents from the electric discharges, as well as the air entrained on the surface of the film 3 in its movement.
  • the suction unit 42 comprises, associated with each roller 19/21, a block 43 and an intermediate block 44 interposed between the block 43 and the roller (19, 21).
  • Each intermediate block 44 has a lower face 45 bearing on the end of the block 43 and which may be planar, and an upper face 46 concave, forming a conjugate cylindrical portion of the cylindrical surface of the associated roller (19, 21).
  • an appropriate spacing e (FIG. 5), through which the film 3 kept applied applied to the surface of the respective roller 19, 21 passes.
  • each block 44 is provided a respective slot 47, 48 suction of the gaseous effluents resulting from the treatment and the air entrained by the film in its running, this slot 47, 48 opening into the block 43.
  • the two slots 47, 48 are respectively placed opposite the rollers 21 and 19.
  • Figure 1 describes, for reasons of ease of viewing and reading, especially a vertical arrangement of discharge zones and therefore of the displacement of the film in space, we conceive that any other type of arrangement of the discharge areas is possible (vertical, horizontal, mixed) the whole being to provide the rollers of embarrassment necessary to bring the substrate to treatment in the one or more discharge areas and therefore in particular to transport it between each discharge zone when the device comprises several.

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  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Cleaning In General (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
EP98402730A 1997-11-05 1998-11-02 Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten durch elektrische Entladungen zwischen zwei Elektroden in einer Gasmmischung Expired - Lifetime EP0914876B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9713910A FR2770425B1 (fr) 1997-11-05 1997-11-05 Procede et dispositif pour le traitement de surface d'un substrat par decharge electrique entre deux electrodes dans un melange gazeux
FR9713910 1997-11-05

Publications (2)

Publication Number Publication Date
EP0914876A1 true EP0914876A1 (de) 1999-05-12
EP0914876B1 EP0914876B1 (de) 2001-10-10

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EP98402730A Expired - Lifetime EP0914876B1 (de) 1997-11-05 1998-11-02 Verfahren und Vorrichtung zur Oberflächenbehandlung von Substraten durch elektrische Entladungen zwischen zwei Elektroden in einer Gasmmischung

Country Status (15)

Country Link
US (1) US6312767B2 (de)
EP (1) EP0914876B1 (de)
JP (1) JPH11221519A (de)
KR (1) KR19990044989A (de)
CN (1) CN1216729A (de)
AR (1) AR017567A1 (de)
AT (1) ATE206642T1 (de)
AU (1) AU730583B2 (de)
BR (1) BR9804566A (de)
CA (1) CA2253082A1 (de)
DE (1) DE69801972T2 (de)
FR (1) FR2770425B1 (de)
NZ (1) NZ332508A (de)
TW (1) TW425312B (de)
ZA (1) ZA9810064B (de)

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US7864938B2 (en) * 2000-12-26 2011-01-04 Polycom, Inc. Speakerphone transmitting URL information to a remote device
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US8705719B2 (en) 2001-12-31 2014-04-22 Polycom, Inc. Speakerphone and conference bridge which receive and provide participant monitoring information
US7787605B2 (en) 2001-12-31 2010-08-31 Polycom, Inc. Conference bridge which decodes and responds to control information embedded in audio information
US8126029B2 (en) * 2005-06-08 2012-02-28 Polycom, Inc. Voice interference correction for mixed voice and spread spectrum data signaling
DE102005029360B4 (de) * 2005-06-24 2011-11-10 Softal Corona & Plasma Gmbh Zwei Verfahren zur kontinuierlichen Atmosphärendruck Plasmabehandlung von Werkstücken, insbesondere Materialplatten oder -bahnen
US7666766B2 (en) * 2005-09-27 2010-02-23 Semiconductor Energy Laboratory Co., Ltd. Film formation apparatus, method for forming film, and method for manufacturing photoelectric conversion device
DE102009006484A1 (de) 2009-01-28 2010-07-29 Ahlbrandt System Gmbh Vorrichtung zum Modifizieren der Oberflächen von Bahn-, Platten- und Bogenware mit einer Einrichtung zur Erzeugung eines Plasmas
DE102009048824A1 (de) 2009-10-09 2011-04-28 Linde Ag Vorrichtung zur Strahlungshärtung von Werkstücken
JP5649510B2 (ja) * 2010-08-19 2015-01-07 キヤノンアネルバ株式会社 プラズマ処理装置，成膜方法，ｄｌｃ皮膜を有する金属板の製造方法，セパレータの製造方法
EP2934765A4 (de) * 2012-12-20 2016-08-24 Teijin Aramid Bv Vibrierender spreizstock zum spreizen unidirektionaler garne
CN104210227B (zh) * 2013-06-05 2017-12-08 广东隆兴包装实业有限公司 平面印盖机的电晕装置
JP6183870B1 (ja) * 2016-05-31 2017-08-23 春日電機株式会社 表面改質装置

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Title
G.M. ABBOTT: "The corona Treatment of Cotton Part I Sliver Cohesion", TEXTILE RESEARCH JOURNAL., vol. 47, no. 2, February 1977 (1977-02-01), US, pages 141 - 144, XP002073389 *
PATENT ABSTRACTS OF JAPAN vol. 007, no. 034 (C - 150) 10 February 1983 (1983-02-10) *

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ZA9810064B (en) 1999-05-04
AU8956398A (en) 2000-06-08
BR9804566A (pt) 1999-12-14
JPH11221519A (ja) 1999-08-17
US6312767B2 (en) 2001-11-06
TW425312B (en) 2001-03-11
NZ332508A (en) 2000-04-28
EP0914876B1 (de) 2001-10-10
FR2770425B1 (fr) 1999-12-17
AU730583B2 (en) 2001-03-08
US20010002288A1 (en) 2001-05-31
ATE206642T1 (de) 2001-10-15
KR19990044989A (ko) 1999-06-25
DE69801972T2 (de) 2002-04-11
FR2770425A1 (fr) 1999-05-07
DE69801972D1 (de) 2001-11-15
AR017567A1 (es) 2001-09-12
CN1216729A (zh) 1999-05-19
CA2253082A1 (fr) 1999-05-05

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