EP0899354A1 - Revêtement d'un alliage al-si hyper-eutectique respectivement un al-si composite - Google Patents

Revêtement d'un alliage al-si hyper-eutectique respectivement un al-si composite Download PDF

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Publication number
EP0899354A1
EP0899354A1 EP98113379A EP98113379A EP0899354A1 EP 0899354 A1 EP0899354 A1 EP 0899354A1 EP 98113379 A EP98113379 A EP 98113379A EP 98113379 A EP98113379 A EP 98113379A EP 0899354 A1 EP0899354 A1 EP 0899354A1
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EP
European Patent Office
Prior art keywords
silicon
particles
coating
weight
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98113379A
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German (de)
English (en)
Other versions
EP0899354B1 (fr
Inventor
Harald Pfeffinger
Michael Voit
Tilman Dr. Haug
Patrick Izguierdo
Herbert Gasthuber
Oliver Storz
Axel Heuberger
Franz Dr. Rückert
Peter Stocker
Helmut Pröfrock
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mercedes Benz Group AG
Original Assignee
DaimlerChrysler AG
Daimler Benz AG
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Publication date
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Publication of EP0899354A1 publication Critical patent/EP0899354A1/fr
Application granted granted Critical
Publication of EP0899354B1 publication Critical patent/EP0899354B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/02—Alloys based on aluminium with silicon as the next major constituent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • B22F1/148—Agglomerating
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/0408—Light metal alloys
    • C22C1/0416—Aluminium-based alloys
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02F—CYLINDERS, PISTONS OR CASINGS, FOR COMBUSTION ENGINES; ARRANGEMENTS OF SEALINGS IN COMBUSTION ENGINES
    • F02F7/00—Casings, e.g. crankcases or frames
    • F02F7/0085—Materials for constructing engines or their parts
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • Y10T428/12063—Nonparticulate metal component
    • Y10T428/12097—Nonparticulate component encloses particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • Y10T428/12063—Nonparticulate metal component
    • Y10T428/12104—Particles discontinuous
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12014—All metal or with adjacent metals having metal particles
    • Y10T428/12028—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, etc.]
    • Y10T428/12063—Nonparticulate metal component
    • Y10T428/12139—Nonmetal particles in particulate component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736—Al-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736—Al-base component
    • Y10T428/1275—Next to Group VIII or IB metal-base component
    • Y10T428/12757—Fe

Definitions

  • the invention relates to a coating of a hypereutectic Aluminum / silicon alloy or an aluminum / silicon Composite material for the production of wear-resistant, low-friction layers and method for producing the Coating how both are used in the industry.
  • this bushing solution with constructive, manufacturing technology and last but not least economic disadvantages such as limited adhesion of the AlSi10 melt to the sleeve surface, complex handling and high price.
  • To the bushing wall thickness influences the minimum cylinder distance.
  • the web width should be smaller, especially in future engines Design to be as small as possible because it has the minimum outside dimensions of the engine.
  • Thermal spraying offers other wear-resistant options Coatings on the cylinder wall of the crankcase to apply.
  • the basic principle of thermal Spraying is that a meltable or partially meltable Material in a high speed hot gas jet small droplets melted and towards the coated surface is accelerated (DIN 32530). When bouncing the spray droplets solidify on the relatively cold one Metal surface and form layer by layer Layer.
  • Advantage of this coating technology over the Electrodeposition, chemical or physical vapor deposition is the high order rate that allow one Coating the cylinder bore economically in a few minutes.
  • the methods of thermal spraying differ according to the type of production and the properties of the high-speed hot gas jet.
  • High-speed flame spraying uses an acetylene-oxygen flame generated in the spray particles Supersonic speed accelerates and on impact at the surface to be coated.
  • the HVOF procedure was used to coat cylinder bores with a Aluminum-bronze alloy (US 5,080,056) or an iron-aluminum composite (EP 0 607 779 A1) already used, but produces excess heat, often only from additional, complex cooling of the crankcase can be dissipated can (US 5,271,967).
  • gases are like Argon, helium, nitrogen and / or hydrogen through one transferred to an electric arc in a plasma state, in which the powder (EP 0 585 203 A1 and US 4,661,682) or wire-shaped (US 5,442,153) spray material introduced laterally is redirected moderately compared to the HVOF and being melted.
  • the spray particles heated to a higher temperature than the HVOF, so that they collide in a molten state when hitting the substrate Condition for an intimate, cohesive connection the layer to the substrate.
  • the powder plasma spraying was used to coat cylinder bores with a Iron-based layer already applied (US 3,991,240).
  • the Wire plasma spraying was used to coat cylinder bores used with an AISI 1045 steel (DE 195 68 687).
  • the object of the invention is to provide a thermally sprayed wear-resistant layer especially for engine construction in With regard to wear resistance and lubricating oil consumption develop, while still the risk of wear for the counter component Is decreased.
  • the layer surface of a coating according to the invention can be machined economically in short machining, which can presumably be attributed to the oxides finely distributed on the layer surface and preferably also within the coating.
  • the coating also has improved wear resistance.
  • a cylinder barrel surface in a die cast Engine block made of light metal such as aluminum or Magnesium coated using a thermal spray process can be, resulting in the previous usual but complex Liner solution can be dispensed with. It can also Thickness of the actual, tribological running layer on the tribological not executable, but easy to pour and to machine Crankcase can be significantly reduced. It is For example, with 0.1 to 0.2 mm less than 1/10 of the usual today Rifle wall thickness and therefore offers the opportunity to clear build more compact engines.
  • the coating according to the invention can advantageously be without Change in manufacturing facilities installed today in the series can be integrated, reducing the cost of manufacturing and handling of the cylinder liners are eliminated and considerable Amounts of material can be saved.
  • the method according to the invention can coat at high Order rates occur in particularly short cycle times, whereby the coating very precisely on the cylinder barrel wall of the Crankcase applied and a fine surface quality is set.
  • the Spray powders value the shape of the individual spray powder particles, the powder grain distribution and the flow behavior of the Spray powder placed.
  • FIG 1 is a micrograph of the spherical spray particles made of alloy A, from which the aluminum mixed crystal structure and the Si primary separations clearly are evident. The cut was etched around the aluminum mixed crystal to attack and thus to clarify the structure. In addition to the silicon primary excretions, this also exists Structure of primary aluminum mixed crystal dendrites, in which the dendrite arms are encased in eutectic silicon. The The size of the dendrite arms fluctuates widely, so that they are only conditional can be resolved. The fluctuations in the precision of the The present structure comes on the one hand from the fluctuations Temperature and speed of individual melt drops and for others from the different nucleation during solidification different melting drops. Such a fine structure identifies thermally sprayed layers compared to microstructures, which is obtained via powder metal routes are and is responsible for the good wear resistance of this Layers responsible.
  • FIG 2 is a scanning electron microscope image plasma-sprayed layer depicted with the wettable powder alloy A was produced.
  • the one with the wettable powder Alloy A made layer was honed and mechanically exposed. There were tight dimensional tolerances during layer production adhered to, so that there is no turning or twisting could be.
  • the silicon primary deposits are also intermetallic phases and Detect pores that retain small amounts of oil during operation and the formation of a thin film of oil on the surface co-determine the cylinder surface.
  • the agglomerated Composite powders consist of fine silicon particles and fine, metallic particles of an aluminum-silicon alloy, the one another on the basis of inorganic or organic Binders are bound, the proportion of silicon particles 5 to 50% and the proportion of alloy particles 50 is up to 95%.
  • the silicon particles have a medium one Grain size of 0.1 to 10.0 microns, preferably about 5 microns.
  • the metallic Particles have an average particle size of 0.1 up to 50.0 ⁇ m, preferably about 5 ⁇ m and alternatively consist of both usable hypoeutectic alloys C or D, or from both alternative hypereutectic alloys E or F.
  • hypereutectic Alloy particles are the proportion of aluminum mixed crystal maintained in the layer structure during the formation of the aluminum mixed crystal in the layer structure through the use of hypoeutectic Aluminum / silicon particles is suppressed.
  • the coating according to the invention for example a cylinder running surface a cylinder bore requires that the casting of the Light metal blocks in the usual way in the die casting process done, but without the cylinder liners inserted into the mold.
  • the inside of the cylinder bore of the crankcase is then roughly turned in one operation to achieve the required To ensure shape and position tolerances.
  • the aluminum-silicon layer is applied.
  • the coating process can either be done in the form that a suitable, commercially available, Internal burner rotating around the central axis of the cylinder bore inserted and moved axially, or a non-rotating Burner in the cylinder bore of the rotating crankcase introduced and along the central axis of the cylinder bore is led to the layer at an almost right angle on the Spray on the cylinder barrel.
  • the latter is procedural easier and safer, because the supply of the necessary Media such as electrical energy, cooling water, primary and Secondary gas and wettable powder through a rotating aggregate problematic.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Cylinder Crankcases Of Internal Combustion Engines (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
EP98113379A 1997-08-01 1998-07-17 Revêtement d'un alliage al-si hyper-eutectique respectivement un al-si composite Expired - Lifetime EP0899354B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19733204 1997-08-01
DE19733204A DE19733204B4 (de) 1997-08-01 1997-08-01 Beschichtung aus einer übereutektischen Aluminium/Silizium Legierung, Spritzpulver zu deren Herstellung sowie deren Verwendung

Publications (2)

Publication Number Publication Date
EP0899354A1 true EP0899354A1 (fr) 1999-03-03
EP0899354B1 EP0899354B1 (fr) 2003-09-10

Family

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EP98113379A Expired - Lifetime EP0899354B1 (fr) 1997-08-01 1998-07-17 Revêtement d'un alliage al-si hyper-eutectique respectivement un al-si composite

Country Status (5)

Country Link
US (1) US6221504B1 (fr)
EP (1) EP0899354B1 (fr)
JP (1) JP3049605B2 (fr)
KR (1) KR100304479B1 (fr)
DE (2) DE19733204B4 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0987339A1 (fr) * 1998-09-11 2000-03-22 DaimlerChrysler AG Fil de métallisation pour la production de revêtements de surface
EP1036857A1 (fr) * 1999-03-16 2000-09-20 Praxair S.T. Technology, Inc. Revêtement quasi-crystallin anti-usure
US6257018B1 (en) 1999-06-28 2001-07-10 Praxair Technology, Inc. PFC recovery using condensation
EP1148229A3 (fr) * 2000-04-20 2002-06-05 Federal-Mogul Friedberg GmbH Chemise de cylindre d'un moteur à combustion interne et procédé de fabrication
EP1176228A3 (fr) * 2000-07-26 2005-06-08 DaimlerChrysler AG Couche superficielle et son procédé de fabrication

Families Citing this family (36)

* Cited by examiner, † Cited by third party
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DE19532252C2 (de) * 1995-09-01 1999-12-02 Erbsloeh Ag Verfahren zur Herstellung von Laufbuchsen
US6013895A (en) 1997-09-30 2000-01-11 Eastman Machine Company System and method for perforating sheet material
ES2183523T3 (es) * 1998-03-14 2003-03-16 Dana Corp Formacion de un revestimiento de cojinete liso.
DE19814570C2 (de) * 1998-04-01 2000-06-21 Daimler Chrysler Ag Zylinderlaufbuchse
DE19924494C2 (de) * 1998-09-03 2001-06-21 Daimler Chrysler Ag Verfahren zur Oberflächenbearbeitung einer tribologischen Schicht
DE19907105A1 (de) * 1999-02-19 2000-08-31 Volkswagen Ag Verfahren und Vorrichtung zum Herstellen von verschleißfesten, tribologischen Zylinderlaufflächen
DE19936393A1 (de) * 1999-08-03 2001-02-08 Volkswagen Ag Verfahren und Vorrichtung zum Auf- bzw. Einbringen eines Werkstoffes auf bzw. in eine Oberfläche
DE19937934A1 (de) * 1999-08-11 2001-02-15 Bayerische Motoren Werke Ag Zylinderkurbelgehäuse, Verfahren zur Herstellung der Zylinderlaufbuchsen dafür und Verfahren zur Herstellung des Zylinderkurbelgehäuses mit diesen Zylinderlaufbuchsen
US7338699B2 (en) * 2002-10-31 2008-03-04 Tosoh Corporation Island projection-modified part, method for producing the same, and apparatus comprising the same
DE60301723T2 (de) 2003-03-13 2006-06-22 Ford Global Technologies, LLC, A Subsidiary of Ford Motor Company, Dearborn Verfahren zur Herstellung von metallischen Bauteilen
DE10324279B4 (de) * 2003-05-28 2006-04-06 Daimlerchrysler Ag Verwendung von FeC-Legierung zur Erneuerung der Oberfläche von Zylinderlaufbuchsen
US7666353B2 (en) * 2003-05-02 2010-02-23 Brunswick Corp Aluminum-silicon alloy having reduced microporosity
US6923935B1 (en) 2003-05-02 2005-08-02 Brunswick Corporation Hypoeutectic aluminum-silicon alloy having reduced microporosity
US20050129868A1 (en) * 2003-12-11 2005-06-16 Siemens Westinghouse Power Corporation Repair of zirconia-based thermal barrier coatings
US20100089315A1 (en) * 2008-09-22 2010-04-15 Applied Materials, Inc. Shutter disk for physical vapor deposition chamber
KR101453446B1 (ko) * 2008-12-24 2014-10-23 재단법인 포항산업과학연구원 안정성이 우수한 소결 마찰재 및 그 제조방법
CN102312139B (zh) * 2009-11-19 2012-11-14 江苏麟龙新材料股份有限公司 含Al-Zn-Si-RE-Mg的热浸镀铸铝合金及其制备方法
CN101935789B (zh) * 2009-11-19 2012-03-07 江苏麟龙新材料股份有限公司 含Al-Zn-Si-Mg-RE-Ti-Ni的热浸镀铸铝合金及其制备方法
CN101928902B (zh) * 2009-12-28 2012-02-29 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-镁-锰-铬的热浸镀合金及其制备方法
CN101736270B (zh) * 2009-12-28 2011-04-20 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铜-锰-锆的热浸镀合金及其制备方法
CN101736275B (zh) * 2009-12-28 2011-06-01 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铁-锰-锆的热浸镀合金及其制备方法
CN101736236B (zh) * 2009-12-28 2011-07-27 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-镁-锰-锆的热浸镀合金及其制备方法
CN101736217B (zh) * 2009-12-28 2011-07-27 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-镁-铁的热浸镀合金及其制备方法
CN101736273B (zh) * 2009-12-28 2011-09-21 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铁-铜-锆的热浸镀合金及其制备方法
CN101928905B (zh) * 2009-12-28 2012-06-06 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-锰-铬-锆的热浸镀合金及其制备方法
CN101736257B (zh) * 2009-12-28 2011-11-23 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铁-铜-锰-锆的热浸镀合金及其制备方法
CN101736242B (zh) * 2009-12-28 2011-06-29 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铁-锰的热浸镀合金及其制备方法
CN101736266B (zh) * 2009-12-28 2011-07-27 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-镁-铁-锰-锆的热浸镀合金及其制备方法
CN101736248B (zh) * 2009-12-28 2011-04-20 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-镁-铁-铜-锰-铬-锆的热浸镀合金及其制备方法
CN101736240B (zh) * 2009-12-28 2011-06-29 江苏麟龙新材料股份有限公司 含铝-硅-锌-稀土-铜-锆的热浸镀合金及其制备方法
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DE19733204A1 (de) 1999-02-04
US6221504B1 (en) 2001-04-24
JPH11152557A (ja) 1999-06-08
KR100304479B1 (ko) 2001-11-22
EP0899354B1 (fr) 2003-09-10
JP3049605B2 (ja) 2000-06-05
KR19990023259A (ko) 1999-03-25
DE19733204B4 (de) 2005-06-09
DE59809547D1 (de) 2003-10-16

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