EP0882890A2 - Procédé et dispositif de transport de liquide, procédé de décharge de liquide et tête de décharge de liquide utilisant un tel procédé et un tel dispositif de transport de liquide - Google Patents

Procédé et dispositif de transport de liquide, procédé de décharge de liquide et tête de décharge de liquide utilisant un tel procédé et un tel dispositif de transport de liquide Download PDF

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Publication number
EP0882890A2
EP0882890A2 EP98304489A EP98304489A EP0882890A2 EP 0882890 A2 EP0882890 A2 EP 0882890A2 EP 98304489 A EP98304489 A EP 98304489A EP 98304489 A EP98304489 A EP 98304489A EP 0882890 A2 EP0882890 A2 EP 0882890A2
Authority
EP
European Patent Office
Prior art keywords
liquid
flow path
air bubble
liquid flow
separation film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98304489A
Other languages
German (de)
English (en)
Other versions
EP0882890A3 (fr
EP0882890B1 (fr
Inventor
Aya Yoshihira
Hiroyuki Ishinaga
Toshio Kashino
Kiyomitsu Kudo
Yoichi Taneya
Hiroyuki Sugiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0882890A2 publication Critical patent/EP0882890A2/fr
Publication of EP0882890A3 publication Critical patent/EP0882890A3/fr
Application granted granted Critical
Publication of EP0882890B1 publication Critical patent/EP0882890B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14056—Plural heating elements per ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14064—Heater chamber separated from ink chamber by a membrane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/10—Pumps having fluid drive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter

Definitions

  • the present invention relates to a liquid carrying method and a liquid carrying apparatus, which use a movable separation film displaceable by the application of the bubble generation pressure generated by the film boiling of liquid.
  • the invention also relates to a liquid discharging method and a liquid discharge head, which use such liquid carrying method and apparatus.
  • One of them is a pump that carries liquid using an electric motor.
  • the power supply source is arranged outside the liquid flow path even when the flow of liquid should be produced in a very small quantity by use of a tube whose diameter is several millimeters or less.
  • each of the heat generating devices is driven to generate heat, and create each of the air bubbles by the generated heat.
  • the liquid is then carried by the application of pressure generated by each of the air bubbles thus created.
  • This method is such that a plurality of heat generating devices, which are arranged on the bottom surface of liquid flow path where liquid flows, are driven one after another to create each of the air bubbles in the direction of the liquid flow, and that the liquid is carried by the application of pressure thus generated by each of the created air bubbles.
  • the structure is arranged so that discharge liquid is not allowed to be in contact with any one of the heat generating devices directly, and at the same time, the pressure exerted by generating bubbles of the bubble generating liquid is carried over to the discharge liquid by the deformation of the flexible film.
  • the present invention is designed in consideration of the problems encountered in the conventional art as described above. It is the main object of the invention to provide a liquid carrying method and a liquid carrying apparatus, which are capable of carrying liquid efficiently by use of a movable separation film displaceable by the application of pressure exerted by each of air bubbles created by film boiling generated in liquid.
  • a liquid carrying method of the present invention is to carry liquid by pressure exerted by the creation of air bubble, which comprises the step of using an apparatus provided with a first liquid flow path for enabling the carrying liquid to flow; a second liquid flow path provided with the air bubble generating area for creating air bubble; a heat generating device arranged for the air bubble generating area to genetate heat for the creation of the air bubble; and a movable separation film for separating the first liquid flow path and the second liquid flow path; and the step of carrying liquid in the first liquid flow path by displacing the movable separation film, having direction regulating means for regulating the displacement direction of the movable separation film, to the first liquid flow path side by the pressure exerted by the creation of the air bubble.
  • the term "means for regulating direction" referred to in the description given below is meant to include the structure of the movable separation film itself (for example, the distribution of the elastic modulus, the combination of the stretching portion by deformation and the non-stretching portion thereby, or the like or the additional members that act upon the movable separation film, or those structured by the provision of the first liquid flow path and the like), and all of these combinations besides its structure itself.
  • the typical structure of the present invention is to carry liquid by pressure exerted by the creation of air bubble, which comprise the step of using an apparatus provided with a first liquid flow path for enabling the carrying liquid to flow; a second liquid flow path provided with the air bubble generating area for creating air bubble; a heat generating device arranged for the air bubble generating area to generate heat for the creation of the air bubble; and a movable separation film for separating the first liquid flow path and the second liquid flow path essentially or more preferably, separating them completely, the movable separation film being provided with the pressure direction control member having the free end thereof on one end and the fulcrum point thereof on the other end on the air bubble generating area; and the step of carrying liquid in the first liquid flow path from the fulcrum point side to the free end side of the pressure direction control member by displacing the free end to the first liquid flow path side by enabling pressure exerted by the creation of the air bubble to act upon the pressure direction control member through the movable separation film in order to guide the pressure to the first liquid
  • the liquid in the liquid flow path is pushed to flow by each of the air bubbles created by the application of heat generated by each of the heat generating devices, as well as by means of the movable separation film that is displaceable by the pressure exerted by each of such created air bubbles. In this manner, liquid is carried.
  • the provision of a plurality of heat generating devices makes it possible to obtain the stabilized liquid flow not necessarily by the length of the passage of flow.
  • the displacement of pressure direction control member is arranged to act upon only on the downstream side of the liquid flow. Therefore, it is possible to prevent the liquid from flowing in the reverse direction.
  • Fig. 1 is a cross-sectional view which schematically shows a structure in accordance with a first embodiment of the present invention, taken in the flow direction therein.
  • Figs. 2A, 2B, 2C, 2D and 2E are cross-sectional views which illustrate the first example of a liquid discharging method to which the present invention is applicable, taken in the flow direction therein.
  • Figs. 3A, 3B, 3C, 3D and 3E are cross-sectional views which illustrate the second example of a liquid discharging method to which the present invention is applicable, taken in the flow direction therein.
  • Figs. 4A, 4B and 4C are cross-sectional views which illustrate the displacement process of a movable separation film in accordance with the liquid discharging method of the present invention, taken in the flow direction therein.
  • Fig. 5 is a view which illustrates one example of the arrangement relationship between heat generating devices and the second flow path of a liquid carrying apparatus.
  • Fig. 6 is a view which illustrates another example of the arrangement relationship between heat generating devices and the second flow path of a liquid carrying apparatus.
  • Fig. 7 is a cross-sectional view schematically showing the structure of the second embodiment of a liquid discharge head in accordance with the present invention.
  • Fig. 8 is an external view which shows the state at the time of carriage in accordance with the second embodiment of the present invention.
  • Figs. 9A, 9B, 9C and 9D are cross-sectional views which illustrate the operation in accordance with the second embodiment of the present invention.
  • Figs. 10A, 10B and 10C are cross-sectional views which illustrate the structure and operation of a third embodiment in accordance with the present invention.
  • Fig. 11 is a view which illustrates one example of the arrangement relationship between the heat generating devices that form two groups, and the second flow path.
  • Fig. 12 is a view which illustrates another example of the arrangement relationship between the heat generating devices that form two groups, and the second flow path.
  • Figs. 13A, 13B and 13C are cross-sectional views which illustrate the displacement process of the movable separation film in accordance with a fourth embodiment of the present invention.
  • Figs. 14A and 14B are external views which show the state at the time of carriage in accordance with the fourth embodiment of the present invention.
  • Figs. 15A, 15B, 15C, 15D and 15E are cross-sectional views which illustrate the structure and operation of a fifth embodiment of the present invention.
  • Figs. 16A, 16B, 16C, 16D and 16E are cross-sectional views which illustrate the structure and operation of a sixth embodiment of the present invention.
  • Figs. 17A, 17B, 17C, 17D and 17E are cross-sectional views which illustrate the structure and operation of a seventh embodiment of the present invention.
  • Figs. 18A, 18B, 18C, 18D and 18E are cross-sectional views which illustrate the structure and operation of an eighth embodiment of the present invention.
  • Figs. 19A, 19B, 19C, 19D and 19E are cross-sectional views illustrating the structure and operation of a liquid discharge head (a ninth embodiment), which is one application example of the liquid carrying apparatus in accordance with the present invention.
  • Figs. 20A, 20B, 20C, 20D and 20E are cross-sectional views illustrating the structure and operation of a liquid discharge head (a tenth embodiment), which is another application example of the liquid carrying apparatus in accordance with the present invention.
  • Figs. 21A and 21B are cross-sectional views which show one structural example of the liquid jet apparatus in accordance with the present invention: Fig. 21A shows the apparatus provided with a protection film; Fig. 21B shows the apparatus having no protection film.
  • Fig. 22 is a view which shows the voltage waveform to be applied to the electric resistance layer represented in Fig. 5.
  • Fig. 23 is a view which schematically shows one structural example of the liquid jet apparatus in accordance with the present invention.
  • Fig. 24 is an exploded perspective view which shows one structural example of the liquid jet apparatus in accordance with the present invention.
  • Fig. 1 is a cross-sectional view schematically showing a structure in accordance with a first embodiment of the present invention, taken in the flow direction therein.
  • the discharge opening is arranged in the end zone of the first flow path.
  • the displacement areas of a movable separation film, which is displaceable along the development of created air bubbles are arranged on the upstream side of the discharge opening (with respect to the flow direction of the discharge liquid in the first liquid flow path).
  • a second liquid flow path retains bubble generating liquid or it is filled with bubble generating liquid (preferably, it is capable of being refilled with bubble generating liquid or more preferably, it is capable of carrying bubble generating liquid).
  • this flow path is provided with air bubble generating areas.
  • the present embodiment is provided with the second liquid flow path 4 for use of bubble generating liquid on the substrate 1 where a plurality of heat generating devices (in Fig. 1, three devices are shown, each formed by a heat generating resistor of 40 ⁇ m ⁇ 105 ⁇ m in accordance with the present embodiment) which gives thermal energy to liquid for creating air bubble, respectively.
  • the first flow path 3 is arranged for liquid carriage.
  • a movable separation film 5 formed by a thin elastic film so as to separate the liquid residing on the first liquid flow path 3 for carriage, and the bubble generating liquid residing on the second liquid flow path 4.
  • the air bubble generating area is positioned more on the upstream side of the discharge opening side with respect to the flow direction of discharge liquid described above.
  • the movable separation film is made longer to provide its movable region than the electrothermal transducing device that forms the air bubble generating area.
  • a fixed portion (not shown) should be provided between the end portion of the electrothermal transducing device on the upstream side and the common liquid chamber in the first liquid flow path, or preferably on the aforesaid end portion on the upstream side. Therefore, the essential range within which the separation film can move is understandable with reference to the representations in Figs. 2A to 2E, 3A to 3E and 4A to 4C.
  • Figs. 2A to 2E, 3A to 3E and 4A to 4C are views which illustrate the examples of the liquid discharging method applicable to the present invention.
  • Each state of the movable separation film shown in Figs. 2A to 2E, 3A to 3E and 4A to 4C is the element that represents all of those obtainable from the factors related to the elasticity of the movable separation film itself, the thickness thereof, or any other additional structures needed therefor.
  • Figs. 2A to 2E are cross-sectional views which illustrate the first example of the liquid discharging method applicable to the present invention, taken in the direction of flow path thereof, (the case where the displacement process of the present invention takes place from the midway of the discharging process).
  • the first liquid supplied from the first common liquid chamber 143 is filled in the first liquid flow path 3 which is directly connected with the discharge opening 11.
  • the second liquid flow path 4 which is provided with the air bubble generating area B, the liquid for bubble generation use is filled, which is caused to generate bubbles when thermal energy is given by means of the heat generating device 2.
  • a movable separation film 5 is arranged to separate them from each other.
  • the movable separation film 5 and the orifice plate 9 are closely fixed with each other. As a result, there is no possibility that liquids in each of the flow paths are allowed to be mixed.
  • the movable separation film 5 is not provided usually with any directivity when it is displaced by the creation of air bubble in the air bubble generating area B. In some cases, the movable separation film may be displaced rather toward the common liquid chamber side where a higher degree of freedom is available for displacement.
  • the liquid in the first liquid flow path 3 is drawn into the vicinity of the discharge port 11 by a capillary force.
  • the discharge port 11 is located downstream of the direction of the liquid flow in first liquid flow path 3 with respect to a projected area of the heat generating element 2 to the first liquid flow path 3.
  • the heat generating device 2 for the present example, a heat generating resistor in the shape of 40 ⁇ m ⁇ 105 ⁇ m
  • the heat generating device 2 is heated abruptly.
  • the surface thereof which is in contact with the second liquid in the air bubble generating area B, gives heat to the liquid to generate bubbles (Fig. 2B).
  • the air bubble 10 thus created by the heat bubble generation is an air bubble created on the basis of such film boiling as disclosed in the specification of USP No. 4,723,129. It is created on the entire surface of the heat generating device at a time accompanied by extremely high pressure.
  • the pressure thus exerted at that time becomes pressure waves to propagate the second liquid in the second liquid flow paths 4, hence acting upon the movable separation film 5.
  • the movable separation film 5 is displaced to initiate the discharge of the second liquid in the first liquid flow path 3.
  • the air bubble 10 created on the entire surface of the heat generating device 2 is developed rapidly to present itself in the form of film (Fig. 2C).
  • the expansion of the air bubble 10 brought about by the extremely high pressure exerted in the initial stage causes the movable separation film 5 to be further displaced. In this manner, the discharge of the first liquid in the first liquid flow path 3 from the discharge opening 11 is in progress.
  • the displacement of the movable separation film 5 becomes larger (Fig. 2D).
  • the movable separation film 5 is continuously stretched up to the state shown in Fig. 2D so that the displacement thereof on the portion at 5A on the upstream side and that on the portion at 5B on the downstream side are made substantially equal with respect to the central portion at 5C of the area of the movable separation film 5 that faces the heat generating device 2.
  • the portions of the air bubble 10 and the displacing movable separation film 5 on the downstream side at 5B are displaced relatively larger in the direction toward the discharge opening side than the portions thereof on the upstream side at 5A. In this manner, the first liquid in the first liquid flow path 3 is moved directly in the direction toward the discharge opening 11 (Fig. 2E).
  • Figs. 3A to 3E are cross-sectional views which illustrate the second example of the liquid discharging method applicable to the present invention, taken in the direction of flow path thereof, (the example being such that the displacement process of the present invention is arranged from the initial stage of the processes provided for the method).
  • This example is structured in the same manner as the first example fundamentally.
  • the first liquid supplied from the first common liquid chamber 143 is filled in the first liquid flow path 13 which is directly connected with the discharge opening 11.
  • the second liquid flow path 14 which is provided with the air bubble generating area B, the liquid for bubble generation use is filled, which is caused to generate bubbles when thermal energy is given by means of the heat generating device 12.
  • a movable separation film 15 is arranged to separate them from each other.
  • the movable separation film 15 and the orifice plate 19 are closely fixed with each other. As a result, there is no possibility that liquids in each of the flow paths are allowed to be mixed.
  • liquid in the first liquid flow path 13 is sucked nearer to the discharge opening 11 by means of the attraction of the capillary tube as in Fig. 2A.
  • the discharge opening 11 is positioned on the downstream side in the direction of the liquid flow with respect to the projection area of the heat generating device 12 to the first liquid flow path 13.
  • the heat generating device 12 for the present example, a heat generating resistor in the shape of 40 ⁇ m x 115 ⁇ m
  • the heat generating device 12 is heated abruptly.
  • the surface thereof, which is in contact with the second liquid in the air bubble generating area B gives heat to the liquid to generate bubbles (Fig. 3B).
  • the air bubble 10 thus created by the heat bubble generation is an air bubble created on the basis of such film boiling as disclosed in the specification of USP No. 4,723,129. It is created on the entire surface of the heat generating device at a time accompanied by extremely high pressure.
  • the pressure thus exerted at that time becomes pressure waves to propagate the second liquid in the second liquid flow paths 14, hence acting upon the movable separation film 15. In this manner, the movable separation film 15 is displaced to initiate the discharge of the second liquid in the first liquid flow path 13.
  • the air bubble 10 created on the entire surface of the heat generating device 12 is developed rapidly to present itself in the form of film (Fig. 3C).
  • the expansion of the air bubble 10 brought about by the extremely high pressure exerted in the initial stage causes the movable separation film 15 to be further displaced.
  • the discharge of the first liquid in the first liquid flow path 13 from the discharge opening 11 is in progress.
  • the portion of the movable separation film 15 in the movable region is displaced larger relatively on the downstream side at 15B from the initial stage than the portion thereof on the upstream side at 15A. In this way, the first liquid in the first liquid flow path 13 is efficiently moved to the discharge opening 11 side even from the initial stage.
  • the displacement of the movable separation film 15 and the development of the air bubble are promoted from the state shown in Fig. 3C.
  • the displacement of the movable separation film 10 is displaced larger still (Fig. 3D).
  • the displacement of the movable separation film 10 on the portion on the downstream side at 15B becomes greater than the displacement of the portion on the downstream side at 15A and the central portion at 15C. Therefore, the movement of the first liquid in the first liquid flow path 13 is accelerated in the direction toward the discharge opening directly, while the displacement of the portion on the upstream side at 15A is smaller in the entire process. As a result, the movement of liquid is smaller in the direction toward the upstream side.
  • the portions of the movable separation film 15 on the downstream side at 15B and in the central portion at 15C are displaced and stretched further in the direction toward the discharge opening side.
  • the enhancement of the above-mentioned effects namely, the discharge efficiency and the discharge speed, are implemented (Fig. 3E).
  • the displacement and stretching are made greater not only with respect to the sectional configuration of the movable separation film 15, but also, to the width direction of the liquid flow path. Therefore, the acting area, in which the first liquid in the first liquid flow path 13 is in the direction toward the discharge opening, becomes larger, hence making it possible to enhance the discharge efficiency synergically.
  • the displacement configuration of the movable separation film 15 resembles the shape of human nose.
  • this is called "nose type”.
  • the nose type includes the "S-letter type" where the point B positioned on the upstream side in the initial stage is allowed to be positioned on the downstream side of the point A positioned on the downstream side in the initial stage, as well as the configuration where as shown in Fig. 2E, the points A and B are equally positioned.
  • Figs. 4A to 4C are cross-sectional views which illustrate the displacement process of the movable separation film for the liquid discharging method applicable to the present invention, taken in the direction of flow path thereof.
  • the fundamental structure is arranged in such a manner that the vicinity of the projection area of the heat generating device 22 is the air bubble generating area B in the second liquid flow path 24, and that the second liquid flow path 24 and the first liquid flow path 23 are separated essentially by means of the movable separation film 25 at all times during the period of displacement from the initial stage. Also, with the end portion of the heat generating device 22 (indicated by line H in Fig.
  • the discharge opening is arranged on the downstream side
  • the supply unit of the first liquid is arranged on the upstream side.
  • upstream side and downstream side are meant to describe the direction of liquid flow in the flow path, observed from the central portion of the movable range of the movable separation film.
  • the movable separation film 25 is displaced in order of (1), (2), and (3) from the initial state, and there provided from the initial stage the process in which the downstream side is displaced larger than the upstream side.
  • This process makes it possible to enhance the discharge efficiency, and at the same time, to implement the enhancement of discharge speed, because it can act upon the displacement on the downstream side to push out the first liquid in the first liquid flow path 23 in the direction toward the discharge opening side.
  • the movable range described above is substantially constant.
  • the movable separation film 25 is displaced from the initial state indicated by the number (1) to the state indicated by the number (2) uniformly both the upstream and downstream sides or in condition that the upstream side is displaced slightly larger.
  • the downstream side is displaced larger than the upstream side. In this way, the first liquid even in the upper part of the movable region can be moved in the direction toward the discharge opening side, hence enhancing the discharge efficiency, as well as increasing the amount of discharge.
  • the "means for regulating direction" referred to in the specification hereof includes all the means that may result in the "displacement” defined in the application hereof. It is derived from the structure or characteristics of the movable separation film itself, and it uses at least one of the actions or arrangement relationships of the movable separation films with the air bubble generating areas, the relationships with the flow resistance on the circumference of the air bubble generating areas, the members that act upon the movable separation films directly or indirectly, or the members (means) for regulating the displacement or expansion of the movable separation films. Therefore, the invention hereof includes in the embodiments thereof a plurality (more than two) of means for regulating direction described above as a matter of course. However, in the embodiments that have been given below, there is no description as to any arbitrary combination of the plural means for regulating direction. Here, it is to be understood that the present invention is not necessarily limited to the embodiments described below.
  • Fig. 5 is a view which illustrates one example of the arrangement relationship between the heat generating devices and the second liquid flow path of the liquid carrying apparatus.
  • the shape of the second liquid flow path 4 is represented without the movable separation film 5, which is observed from above, and the space is arranged for each of the heat generating devices, respectively, to promote the development of each air bubble on the downstream side so that the movable separation film can be easily displaced on the downstream side.
  • Each of the bottle necked portions becomes an aperture for supplying bubble generating liquid onto each of the heat generating devices in order to remove each of the remaining air bubbles.
  • Fig. 5 is a view which illustrates one example of the arrangement relationship between the heat generating devices and the second liquid flow path of the liquid carrying apparatus.
  • the shape of the second liquid flow path 4 is represented without the movable separation film 5, which is observed from above, and the space is arranged for each of the heat generating devices, respectively, to promote the development of each air bubble on the downstream side so that the movable separation film can be easily
  • FIG. 6 is a view which illustrates the arrangement relationship between the heat generating devices and the second liquid flow path of the liquid carrying apparatus whose structure is different from the one represented in Fig. 5.
  • the downstream side of liquid to be carried is on the lower part of either Fig. 5 and Fig. 6.
  • each of the bottle necked portions 9 is installed in front and back of each of the heat generating devices 2 in the second liquid flow path 4, which is structured like a chamber (for generating bubbles) arranged to suppress the escape of pressure generated at the time of generating bubbles to the adjacent heat generating device 2 by way of the second liquid flow path 4.
  • the structure is arranged to guide the supply of bubble generating liquid underneath the movable separation film 5 as in the supply of carrying liquid.
  • the present invention is not necessarily limited to this structural arrangement.
  • each of the bottle necked portions 9 is installed on both side of each heat generating device 2, and the structure should be arranged to prevent the pressure from escaping to both sides.
  • Fig. 7 is a cross-sectional view schematically showing the liquid carrying apparatus in accordance with a second embodiment of the present invention, taken in the direction of the flow path thereof.
  • the solid lines indicate the state when liquid carriage is at rest.
  • the dotted lines indicate the state when liquid is carried.
  • Fig. 8 is an external view which shows the state at the time of liquid carriage.
  • the present embodiment is provided with the second liquid flow path 4 for use of bubble generating liquid on the substrate 1 where a plurality of heat generating devices (three devices are shown in Fig. 7, each formed by a heat generating resistor of 40 ⁇ m ⁇ 105 ⁇ m in accordance with the present embodiment) which gives thermal energy to liquid for creating air bubble, respectively.
  • the first flow path 3 is arranged for liquid carriage.
  • a movable separation film 5 formed by a thin elastic film so as to separate the liquid residing on the first liquid flow path 3 for carriage, and the bubble generating liquid residing on the second liquid flow path 4.
  • the pressure direction control member 6 which is provided with its free end 6c on the downstream side, is arranged to face the heat generating device 2. As described later, the pressure direction control member 6 is displaced to the first liquid flow 3 side by the bubble generation of bubble generating liquid, and at the same time, it operates so that the deformation of the movable separation film becomes larger.
  • the pressure direction control member 6 may be formed by the same material as the one used for the movable separation film 5 or may be formed by metal.
  • the pressure direction control member is provided with a fulcrum point 6d on the upstream side of the liquid flow running from the supply chamber (not shown) to the downstream side by the carrying operation of liquid.
  • This member is arranged in a position to face the heat generating device 2 away from it by a gap of approximately 10 ⁇ m to 15 ⁇ m in a state to cover the heat generating device 2.
  • the gap between the heat generating device 2 and the movable separation film 5 becomes the air bubble generating area B.
  • each of the air bubbles is created in the bubble generating liquid on the basis of the film boiling phenomenon such as disclosed in the specification of USP No. 4,723,129.
  • the pressure exerted by the created air bubble acts upon the movable separation film preferentially, and as shown in Fig. 7, the movable separation film 5 is displaced to enable the pressure direction control member to open largely on the downstream side. In this manner, each of the air bubbles created in the air bubble generating area B is guided to the downstream side.
  • Figs. 9A to 9D are cross-sectional views which illustrate the operation of the liquid carrying apparatus.
  • Fig. 9A none of energy, such as electric energy, is applied any one of the heat generating devices 2 at all. No heat is generated by any one of the heat generating devices 2.
  • the pressure direction control member 6 is in the first position which is substantially in parallel with the substrate 1.
  • the pressure direction control member 6 is arranged up to the position to face at least the portion of the air bubble on the downstream side, which is created by the application of heat generated by the heat generating device 2.
  • the pressure direction control member 6 is arranged in the structure of the liquid flow path at least up to the downstream position of the area center of the heat generating device 2 (that is, the downstream of the line orthogonal to the longitude direction of the flow path, which runs through the area center of the heat generating device 2).
  • the heat generating device 2 when electric energy or the like is applied to the heat generating device 2 (in the right-hand end in Fig. 9B), the heat generating device 2 is heated to give heat to a part of the bubble generating liquid which is filled in the air bubble generating area B, thus creating an air bubble 10 following film boiling.
  • the movable separation film 5 and the pressure direction control member 6 arranged on it are displaced by the pressure thus exerted by the created air bubble 10 from the first position to the first liquid flow path 3 side in order to guide the propagating direction of the pressure exerted by the air bubble 10 in the downstream (carrying) direction.
  • the movable separation film 5 and the free end 6c of the pressure direction control member 6 are arranged on the downstream side, while the fulcrum point 6d is positioned on the upstream side (supply side), and that at least a part of the pressure direction control member 6 is allowed to face the downstream portion of the heat generating device 2, that is, to face the downstream portion of the air bubble 10.
  • the pressure direction control member 6 on the movable separation film 5 is displaced more to the first liquid flow path 2 side in accordance with the pressure exerted by the created air bubble.
  • the movable separation film on the free end side is largely expanded in the downstream direction.
  • the created air bubble 10 is developed larger on the downstream side than the upstream side.
  • the pressure direction control member 6 is largely displaced from the first position (dotted line) to the second position (Fig. 9B).
  • Fig. 8 is an external view which represents this state. In this way, along with the development of the air bubble 10, the pressure direction control member 6 on the movable separation film 5 is gradually displaced to the first liquid flow path 3 side.
  • the air bubble 10 on the free end side is developed so that the movable separation film is largely expanded in the downstream side.
  • the pressure exerted by the created air bubble 10 is then directed in the downstream direction.
  • the carrying efficiency of the liquid in the first liquid flow path 3 is enhanced.
  • the movable separation film 5 presents almost no obstacle in propagating the bubble generation pressure in the downstream direction. Depending on the size of pressure to be propagated, it is possible to control the propagating direction of pressure and developing direction of air bubble 10 efficiently.
  • liquid is allowed to flow in from the upstream side, namely, the liquid supply side, and also, from the downstream side in order to compensate the voluminal portion of the liquid which has been flown out.
  • Figs. 10A to 10C are views which illustrate the structure and the operation of the liquid carrying apparatus in accordance with the third embodiment.
  • the heat generating devices A and B that constitute two groups are arranged alternately to form the structure of the third embodiment.
  • the heat generating devices of the group A are energized one after another to generate heat from the upstream side in the direction indicated by that arrow.
  • the heat generating devices of the group B are energized one after another to generate heat from the upstream side in the direction indicated by that arrow.
  • the present embodiment is applicable to the liquid discharge head, but it is also usable for carrying such liquid as oily liquid or gasoline which is easily affected by heat, because the directions of liquid carriage are switchable.
  • the present embodiment of the invention hereof is arranged to be able to switch the directions of liquid carriage alternately in a short period of time or at an appropriate sequence and timing.
  • this embodiment can be used for agitating liquid, and it may produce particular effect on the liquid that needs agitation. Since the structure, which is arranged to change directivities simply, makes it possible to change status of liquid as required. Therefore, the range of such structure is not necessarily limited. It is anticipated that the application value of such structure is significantly high.
  • Fig. 11 is a view which illustrates one example of the arrangement relationship between the heat generating devices A and B that constitute two groups and the second liquid flow path of the liquid carrying apparatus.
  • the shape of the second liquid flow path 4 is represented without the movable separation film 5, which is observed from above, and the space is arranged for each of the heat generating devices A and B that constitute the two groups, respectively, to promote the development of each air bubble on the downstream side so that the movable separation film can be easily displaced on the downstream side.
  • Each of the bottle necked portions becomes an aperture for supplying bubble generating liquid onto each of the heat generating devices in order to remove each of the remaining air bubbles.
  • Fig. 11 is a view which illustrates one example of the arrangement relationship between the heat generating devices A and B that constitute two groups and the second liquid flow path of the liquid carrying apparatus.
  • the shape of the second liquid flow path 4 is represented without the movable separation film 5, which is observed from above, and the space is arranged for each of the heat generating devices A and B that constitute
  • FIG. 12 is a view which illustrates the arrangement relationship between the heat generating devices A and B that constitute two groups and the second liquid flow path of the liquid carrying apparatus whose structure is different from the one represented in Fig. 11.
  • the shape of the second liquid flow path 4 is represented without the movable separation film 5, which is observed from above, and the space is arranged, respectively, for each of the heat generating devices A and B that constitute the two groups in order to promote the development of each air bubble on the downstream side so that the movable separation film can be easily displaced on the downstream side.
  • each of the bottle necked portions 9 is installed in front and back of each of the heat generating devices 2 in the second liquid flow path 4, which is structured like a chamber (for generating bubbles) arranged to suppress the escape of pressure generated at the time of generating bubbles to the adjacent heat generating device 2 by way of the second liquid flow path 4.
  • the structure is arranged to guide the supply of bubble generating liquid underneath the movable separation film 5 as in the supply of carrying liquid.
  • the present invention is not necessarily limited to this structural arrangement.
  • each of the bottle necked portions 9 is installed on both side of each heat generating device 2, and the structure should be arranged to prevent the pressure from escaping to both sides.
  • Figs. 13A to 13C are views which illustrate the structure and the operation of the liquid carrying apparatus in accordance with the fourth embodiment.
  • the heat generating devices A and B that constitute two groups are alternately arranged on a substrate. Also, on the movable separation film 5, each of the pressure direction control members 6 is arranged with the mid point of the heat generating devices A and B as its fulcrum point 6d, while its free end 6c is arranged in a position which is beyond each of the area centers of the two heat generating devices.
  • Figs. 14A and 14B are external views which illustrate the respective states of liquid carriage.
  • Figs. 15A to 15E are cross-sectional views which illustrate the structure and operation of the liquid carrying apparatus in accordance with the fifth embodiment.
  • the carrying liquid is carried, it is made possible to effectuate its refilling, as well as the bubble generating liquid carriage and its refilling.
  • the movable separation film is then arranged so that its movable range becomes longer on the downstream side of each of the heat generating devices 2.
  • the pressure direction control member 6 In operating the liquid carriage and refilling, none of energy, such as electric energy, is applied any one of the heat generating devices 2 at all in the initial state as shown in Fig. 15A. No heat is generated by any one of the heat generating devices 2.
  • the pressure direction control member 6 is in the first position which is substantially in parallel with the substrate 1.
  • the liquid in the first liquid flow path 3 begins to flow in the direction indicated by an arrow shown in Fig. 15B.
  • the movable separation film 5 and the pressure direction control member 6 are displaced to the second liquid flow path 14 side beyond the initial position due to the bubble disappearance caused by the negative pressure. Then, on the circumference of the free end 6c of the pressure direction control member 6, the negative pressure is exerted locally. In this manner, assisting action is actuated to supply the carrying liquid from the supply side in the direction indicated by arrows shown in Fig. 15C. At the same time, liquid is sucked in onto the heat generating device from the bubble generating liquid supply side in the second liquid flow path 4 due to the negative pressure exerted by the bubble disappearance on the heat generating device.
  • the state of bubble disappearance takes place as shown in Fig. 15D in the same manner as in Fig. 15C.
  • the pressure direction control member 6 on the upstream side repeats its vibrations until it returns to the initial state.
  • the pressure direction control member and the movable separation film are slightly displaced to the first liquid flow path side. With fine negative pressure exerted at that time, the bubble generating liquid is further sucked in. After that, as shown in Fig. 15E, the process is restored to the initial state.
  • the pressure direction control member is used, but it is still possible to operate the liquid carriage even without the pressure direction control member.
  • Figs. 16A to 16E are cross-sectional views which illustrate the structure and operation of the liquid carrying apparatus in accordance with the sixth embodiment.
  • upper displacement regulating members are used instead of the pressure direction control members used for the embodiments described so far.
  • An upper displacement regulating member 7 is not movable unlike the pressure direction control member that has been used up to now. However, giving attention to the material used for it, and the arrangement relationship with each of the heat generating devices as well, among some other factors, it is possible for this regulating member to provide the action which works effectively upon the guidance of the pressure exerted by the developed air bubble in the carrying direction as in the case of the pressure direction control member used for the embodiments up to now.
  • Figs. 17A to 17E are cross-sectional views which illustrate the structure and operation of the liquid carrying apparatus in accordance with the seventh embodiment.
  • the liquid flow path is bent in the displacement direction of the movable separation film positioned on the end portion thereof.
  • the liquid carrying apparatus is able to perform its function even when the liquid flow path is bent on its midway.
  • the pressure direction control members are used.
  • the liquid carriage is possible even without them.
  • Figs. 18A to 18E are cross-sectional views which illustrate the structure and operation of the liquid carrying apparatus in accordance with the eighth embodiment.
  • the upper displacement regulating members 7 are used for the seventh embodiment instead of the pressure direction control members. It is possible for the upper displacement regulating members to provide the action that works effectively upon the guidance of the pressure exerted by the developed air bubbles in the carrying direction as in the embodiments using the pressure direction control members.
  • a highly viscous liquid such as polyethylene glycol, which cannot generate bubbles good enough easily even by the application of heat
  • the liquid may be selected so that any burnt substance or deposit is accumulated on the surface of each of the heat generating devices when receiving heat. With the selection of such liquid, it becomes possible to stabilize generating bubbles and perform liquid carriage in good condition as well.
  • Figs. 19A to 19E are cross-sectional views of the liquid discharge unit of the liquid discharge head, which illustrate the structure and the operation of the embodiment applicable to it.
  • a reference numeral 11 designates a discharge opening that discharges liquid; 3, a first liquid flow path conductively connected with the discharge opening 11, in the first liquid flow path 3, the first liquid being filled to serve as a discharge liquid discharged from the discharge opening; 4, the second liquid flow path arranged adjacent to the first liquid flow path 3, which are separated by a movable separation film 5 at all times essentially.
  • the separation member may be a film or a flat plate as far as the immovable portion is concerned.
  • a separation wall 8 is used to separate all the areas other than the movable portions of each flow path.
  • a reference numeral 2 designates a heat generating device that heats the second liquid to generate film boiling in it. There is an air bubble generating area B in the second liquid flow path where the air bubble is created by means of the film boiling thus generated.
  • the movable separation film 5 is provided with a movable region where it can be displaced to the first liquid flow path 3 side and to the second liquid flow path 4 side.
  • the movable region faces at least a part of the air bubble generating area, and it is positioned on the downstream side with respect to the flow direction of the first liquid toward the discharge opening side.
  • the discharge opening 11 is positioned on the downstream side of the movable region of the movable separation film 5.
  • the movement of the portions other than the movable region of the movable separation film 5 is suppressed or fixed to the first and second liquid flow path sides.
  • the movable region to the first liquid flow path 3 side is made different from that of the second liquid flow path 4 side, there is no problem if only the movable region to either sides is positioned on the downstream side of the area center of the air bubble generating area B.
  • Figs. 20A to 20E are cross-sectional views of a nozzle, which illustrate the structure and operation of the liquid discharge head (particularly, those conditioned subsequent to the maximum generating bubbles).
  • the window for the heat generating device 2 and the separation wall 8 are arranged so that the movable region of the movable separation film 5 on the upstream side becomes longer than that of the heat generating device 2.
  • the structure is also arranged in such a manner that when vibration is given to the movable separation film 5, the undulation thus exerted is directed toward the discharge opening side.
  • the portion that serves as the fulcrum point of the movable separation film on the upstream side is fixed by means of the wall of the second bubble generation liquid flow path 4 and the wall of the nozzle.
  • Figs. 20A and 20E represent the state where the nozzle operation is at rest.
  • the movable separation film 5 is displaced to the first liquid flow path 3 side (Fig. 20B).
  • the air bubble 10 is contracted rapidly to be extinct due to the inner pressure phenomenon of the air bubble characteristic of the film boiling phenomenon as described earlier.
  • the displaced movable separation film 5 is displaced to the second flow path 4 side by the expansion capability of the film itself and more particularly, by the negative pressure exerted by the contracting air bubble 10 as shown in Fig. 20C.
  • the region closer to the displaced area is also displaced following it.
  • the undulation thus in progress causes the liquid in the liquid flow path to be carried. In this manner, the refilling of the discharge liquid is promoted (Figs. 20C and 20D).
  • the undulation becomes attenuated.
  • the refilling of the discharge liquid is completed.
  • the settlement of the undulation may be made by the provision of a vibration absorption member on the discharge opening side of the movable region of the movable separation film.
  • the undulation of the movable separation film promotes the liquid refilling. Therefore, it becomes possible to operate discharges at higher speeds than the conventional ones.
  • Figs. 21A and 21B are cross-sectional view which illustrate one structural example of the liquid jet apparatus in accordance with the present invention: Fig. 21A shows the apparatus which is provided with a protection film to be described later; Fig. 21B shows the apparatus having no protection film.
  • a second liquid flow path 104 As shown in Fig. 21A and 21B, there are arranged on the elemental substrate 110, a second liquid flow path 104; a movable separation film 105 provided with the separation wall; a movable member 131; a first liquid flow path 103; and a grooved member 132 provided with groove that constitutes the first liquid flow path 103.
  • a silicon oxide film or a silicon nitride film 110e is formed on the substrate 110f formed by silicon or the like for the purpose of insulation and heat accumulation.
  • an electric resistance layer 110d formed hafnium boride (HfB 2 ), tantalum nitride (TaN), tantalum aluminum (TaAl) or the like, which forms a heat generating device of 0.01 to 0.2 ⁇ m, and wiring electrodes 110c formed by aluminum or the like in a thickness of 0.2 to 1.0 ⁇ m. Then, a voltage is applied to the electric resistance layer 110d from the two wiring electrodes 110c to cause electric current to run for generating heat.
  • HfB 2 hafnium boride
  • TaN tantalum nitride
  • TaAl tantalum aluminum
  • a protection layer 110b of silicon oxide, silicon nitride, or the like is formed in a thickness of 0.1 to 0.2 ⁇ m. Further on it, an anti-cavitation layer 110a of tantalum or the like is formed in a thickness of 0.1 to 0.6 ⁇ m, hence protecting the electric resistance layer 110d from ink or various other kinds of liquids.
  • tantalum (Ta) or other metallic material is used as the anti-cavitation layer 110a.
  • Fig. 21B shows such example.
  • an alloy of iridium-tantalum-aluminum is adoptable. Now that the present invention makes it possible to separate the liquid for bubble generation use from the liquid for discharging use, it presents its particular advantage when no protection layer is adopted in such a case as this.
  • the structure of the heat generating device 102 adopted for the present embodiment may be provided only the electric resistance layer 110d (heat generating unit) across the wiring electrodes 110c or may be arranged to include a protection layer to protect the electric resistance layer 110d.
  • the heat generating device 102 in use is provided with the heat generating unit formed by the resistance layer that generates heat in accordance with electric signals.
  • the present invention is not necessarily limited to it. It should be good enough if only it can create each of air bubbles in the bubble generating liquid, which is capable enough to discharge the liquid for discharging use.
  • the elemental substrate 110 there may be incorporated functional devices integrally by the semiconductor manufacturing processes, such as transistors, didoes, latches, shift registers, which are needed for selectively driving the electrothermal transducing devices, besides each of the electrothermal transducing devices, which is structured by the electric resistance layer 110d that forms the heat generating unit, and wiring electrodes 110c that supply electric signals to the electric resistance layer 110d.
  • functional devices such as transistors, didoes, latches, shift registers, which are needed for selectively driving the electrothermal transducing devices, besides each of the electrothermal transducing devices, which is structured by the electric resistance layer 110d that forms the heat generating unit, and wiring electrodes 110c that supply electric signals to the electric resistance layer 110d.
  • Fig. 22 is a view which shows the voltage waveform to be applied to the electric resistance layer 110d represented in Figs. 21A and 21B.
  • the electric signal of 6 kHz is applied at a voltage with the pulse width of 7 ⁇ sec, and at the electric current of 150 mA to drive each heat generating device.
  • ink serving as discharge liquid is discharged from each of the discharge openings.
  • the present invention is not necessarily limited to these conditions of driving signal. It may be possible to apply the driving signals under any condition if only such signals can act upon the bubble generating liquid to generate bubbles appropriately.
  • Fig. 23 is a view which schematically shows one structural example of the liquid jet apparatus in accordance with the present invention.
  • the same reference marks are used for the same constituents represented in Figs. 21A and 21B. Here, the detailed description thereof will be omitted.
  • the grooved member 132 for the liquid jet apparatus shown in Fig. 23 roughly comprises an orifice plate 135 having each of the discharge openings 101 thereon; a plurality of grooves that form a plurality of the first liquid flow paths 103; and recessed portion that forms the first common liquid chamber conductively connected with the plural first liquid flow paths 103 in common to supply liquid (discharge liquid) to the first liquid flow path 103.
  • the first liquid supply path 133 is arranged to reach the first common liquid chamber 143 from the upper part thereof.
  • the second liquid supply path 134 is arranged to reach the interior of the second common liquid chamber 144 penetrating the movable member 131 and the movable separation film 105.
  • the first liquid (discharge liquid) is supplied to the first liquid flow path 103 through the first liquid supply path 133 and the first common liquid chamber 143 as indicated by an arrow C in Fig. 23.
  • the second liquid (bubble generating liquid) is supplied to the second liquid flow path 104 through the second liquid supply path 134 and the second common liquid chamber 144 as indicated by an arrow D in Fig. 23.
  • the second liquid supply path 134 is arranged in parallel with the first liquid supply path 133, but the present invention is not necessarily limited to this arrangement. If only the second liquid supply path is formed so as to be conductively connected with the second common liquid chamber 144 penetrating the movable separation film 105 arranged outside the first common liquid chamber 143, this path may be arranged in any way.
  • the thickness (diameter) of the second liquid supply path 134 it is determined in consideration of the supply amount of the second liquid.
  • the configuration of the second liquid supply path 134 is not necessarily circular. It may be rectangular or the like.
  • the second common liquid chamber 144 may be formed by partitioning the grooved member 132 with the movable separation film 105.
  • the formation method thereof is such that the frame of the common liquid chamber and the wall of the second liquid flow path are formed on the substrate 110 by use of dry film, and then, the combined body, which is arranged by the grooved member 132 having the movable separation film 105 fixed thereto, and the movable separation film 105, is adhesively bonded to the substrate 110, hence forming the second common liquid chamber 144 and the second flow path 104.
  • Fig. 24 is a partly exploded perspective view which shows one structural example of the liquid jet apparatus in accordance with the present invention.
  • a plurality of electrothermal transducing devices serving as the heat generating devices 102 are arranged on the elemental substrate 110 on the supporting base 136 formed by metal, such as aluminum, so as to generate heat for creating each of air bubbles in the bubble generating liquid by means of film boiling generated in it.
  • the elemental substrate 110 On the elemental substrate 110, there are arranged, a plurality of grooves formed by DF dry film, which constitute the second liquid flow paths 104; the recessed portion that forms the second common liquid chamber (common bubble generating liquid chamber) 144 which is conductively connected with a plurality of second liquid flow path 104 to supply the bubble generating liquid to each of the second liquid flow paths 104; and the movable separation film 105 adhesively bonded to the movable member 131 described earlier.
  • the grooved member 132 is provided with the groove that constitutes the first liquid flow path (discharge liquid flow path) 103 when it is jointed to the movable separation film 105; the recessed portion that constitutes the first common liquid chamber (common discharge liquid chamber) 143 conductively connected with the discharge liquid flow path to supply discharge liquid to each of the first liquid flow paths 103; the first liquid supply path (discharge liquid supply path) 133 for supplying discharge liquid to the first common liquid chamber 143; and the second liquid supply path (bubble generating liquid supply path) 134 for supplying bubble generating liquid to the second common liquid chamber 144.
  • the second liquid supply path 134 is connected with the conductive path that communicates with the second common liquid chamber 144 penetrating the movable member 131 and the movable separation film 105 arranged outside the first common liquid chamber 133. With the provision of this conductive path, it becomes possible to supply the bubble generating liquid to the second common liquid chamber 144 without causing any mixture with the discharge liquid.
  • the arrangement relationship between the elemental substrate 110, the movable separation film 105, and the grooved member 132 is such that the movable member 131 is arranged to face the heat generating device 102 on the elemental substrate 110, and that the first liquid flow path 103 is arranged to face this movable member 131.
  • the second liquid supply path 134 being provided for one grooved member 132 is described, but it may be possible to provide a plurality of second supply paths depending on the supply amount of the second liquid.
  • the sectional areas of the flow paths of the first liquid supply path 133 and the second liquid supply path 134 can be determined in proportion to the supply amounts of the respective liquids. By optimizing the sectional areas of the liquid flow paths, it becomes possible to minimize the parts needed for the formation of the grooved member 132 and others.
  • the second liquid supply path 134 that supplies the second liquid to the second liquid flow path 104 and the first liquid supply path 133 that supplies the first liquid to the first liquid flow path 103 can be arranged on the grooved ceiling plate that serves as one and the same grooved member. As a result, it becomes possible to curtail the number of parts, and to make the required processing steps shorter, which contributes to the significant reduction of costs.
  • the movable separation film 105, the grooved member 132, and the substrate 110 having the heat generating devices formed on it are bonded by only one process. It becomes easier to carry on the manufacturing steps, while enhancing the accuracy with which these members are bonded, leading to a better condition of liquid discharging.
  • the second liquid is supplied to the second common liquid chamber 144 penetrating the movable separation film 105, hence making it possible to supply the second liquid to the second liquid flow path 104 reliably and secure the amount of supply sufficiently for the stabilized discharges.
  • the structure is arranged to provide the movable separation film 105 to which the movable member 131 is bonded.
  • the structure is arranged to provide the movable separation film 105 to which the movable member 131 is bonded.
  • liquids are: methanol, ethanol, n-propanol, isopropanol, n-hexan, n-heptane, n-octane, toluene, xylene, methyl dioxide, trichrene, Freon TF, Freon BF, ethyl ether, dioxane, cychrohexane, methyl acetate, ethyl acetate, acetone, methyl ether ketone, water, and its mixtures.
  • the discharge liquid it is possible to use various kinds of liquids irrespective of the presence or absence of its bubble generation capability and thermal properties. Also, it is possible to use even the liquid whose bubble generation capability is so low that its discharge is made difficult, the liquid whose quality is easily changeable or easily deteriorated due to heat, or a highly viscous liquid, among some others.
  • discharge liquids other than such ink it may also be possible to use such liquid as a medical product or perfume, which is weaker against heat.
  • the wall of the second liquid flow path is formed on the elemental substrate.
  • the movable separation film is installed on it. Further on it, there is installed the grooved member provided with the groove and others that constitute the first liquid flow path, or after the wall of the second liquid flow path has been formed, the grooved member, having installed on it the movable separation film provided with the movable member bonded thereto, is bonded onto the wall of the second liquid flow path. In this way, the apparatus is manufactured.
  • electrothermal transducing devices provided with the heat generating devices formed by hafnium boride, tantalum, or the like are formed by use of the same manufacturing system as the one used for manufacturing semiconductors. After that, the surface of each elemental substrate is rinsed for the purpose of enhancing the close contactness with the photosensitive resin in the next step of processing. Further, in order to enhance such close contactness, the surface of the elemental substrate is given the surface improvement treatment by the application of ultraviolet - ozone or the like.
  • the liquid which is, for example, prepared by diluting silane coupling agent (manufactured by Nihon Unika Inc.: A189) to one wt% by use of ethylalcohol, is spin coated on the surface to be improved.
  • silane coupling agent manufactured by Nihon Unika Inc.: A189
  • an ultraviolet photosensitive resin film manufactured by Tokyo Ohka Inc.: dry film Odil SY-318
  • a photomask PM is arranged, and ultraviolet rays are irradiated on the portion of the dry film DF, which should remain as the wall of the second liquid flow path, through the photomask PM.
  • This exposure process is conducted by use of MPA-600 manufactured by Canon Incorporated with the exposure amount of approximately 600 mj/cm 2 .
  • the dry film DF is developed by use of a development liquid (manufactured by Tokyo Ohka Inc.: BMRC-3) formed by the mixture of xylene and butyl-cellsorbi-acetate so that non-exposed portion is dissolved.
  • a development liquid manufactured by Tokyo Ohka Inc.: BMRC-3
  • the portion that has been exposed and hardened is formed as the wall portion of the second liquid flow path.
  • the residue remaining on the surface of the elemental substrate is removed by the treatment of approximately 90 seconds using the oxygen plasma ashing equipment (manufactured by Alkantec Inc.: MAS-800).
  • the exposed portion is completely hardened at 150°C by means of the ultraviolet irradiation of 100 mj/cm 2 for two hours.
  • the silicon substrate is cut into each of the heater boards by use of the dicing machine (manufactured by Tokyo Seimitsu Inc.: AWD-4000) having the diamond blade of 0.05 mm thick mounted on it.
  • the dicing machine manufactured by Tokyo Seimitsu Inc.: AWD-4000
  • Each of the separated heater boards is fixed to the aluminum base plate by the application of bonding agent (manufactured by Toray Inc.: SE4400).
  • the printed-circuit board which is adhesively bonded to the aluminum base plate in advance is connected with the heater board by means of aluminum wire of 0.05 mm diameter.
  • the coupled body of the grooved member and the movable separation film by use of the method described above is positioned and bonded together.
  • the grooved member provided with the movable separation film is positioned to the heater board, and then, coupled with the board together by means of the pressure spring and fixed.
  • the ink and bubble generating liquid supply member is adhesively bonded to the aluminum base plate for fixation, and the silicone sealant (manufactured by Toshiba Silicone Inc.: TSE399) is applied to seal the gaps between the aluminum wires, the groove member, the heater board, and ink and bubble generating liquid supply member, thus completing the manufacture of the second liquid flow path.
  • the second liquid flow path With the formation of the second liquid flow path by the method of manufacture described above, it becomes possible to obtain the flow path in good precision without any positional deviation with respect to each heater of the heater boards.
  • the grooved member and the movable separation film are coupled in advance in the preceding process. In this manner, the accuracy is enhanced in positioning the first liquid flow path and the movable member.
  • the stabilized liquid discharge is implemented for the enhancement of print quality. Also, it is possible to form the devices on the wafer at a time for the large-scale manufacture at lower costs.
  • the dry film of the ultraviolet hardening type is used for the formation of the second liquid flow path, but it may also be possible to remove resin directly from the portion that becomes the second liquid flow path by use of the resin having the absorption zone in the ultraviolet region, particularly in the region close to 248 nm, and then, after laminating, it is hardened by the application of excimer laser.
  • the first liquid flow path or the like is formed by bonding the ceiling plate, which is provided with the recessed portion having the orifice plate with the discharge openings formed thereon; the groove that constitutes the first liquid flow path; and the first common liquid chamber that supplied the first liquid to a plurality of the first liquid flow path in common; to the aforesaid combined body of the substrate and the movable separation film.
  • the movable separation film is fixed by being nipped by the grooved ceiling plate and the wall of the second liquid flow path.
  • the movable separation film is not only fixed on the substrate side, but also, it may be positioned to the substrate and fixed after having been fixed on the grooved ceiling plate as described above.
  • the materials for the movable member 131 that serves as means for regulating it is preferable to use highly durable metal, such as silver, nickel gold, iron titanium, aluminum, platinum, tantalum, stainless steel, or phosphor bronze, or alloys thereof, or resin having acrylonitrile, butadiene, styrene or other nitrile group, resin having polyamide or other amide group, resin having polycarbonate or other carboxyl group, resin having polyacetal or other aldehyde group, resin having polysulfone or other sulfone group, or resin having liquid crystal polymer or the like and its chemical compound, such metal as having high resistance to ink as gold, tungsten, tantalum, nickel, stainless steel, or tantalum, or its alloys and those having them coated on its surface for obtaining resistant of ink, or resin having poly amide or other amide group, resin having polyacetal or other aldehyde group, resin having polyether ketone or other ketone group, resin having polyime or other im
  • the materials for the movable separation film 105 it is preferable to use, besides the polyime described earlier, resin having good properties of resistance to heat and solvent, and presenting a good formability as typically represented by engineering plastics in recent years, which also has elasticity and capability of being made thinner, and its compound as well.
  • resin having good properties of resistance to heat and solvent, and presenting a good formability as typically represented by engineering plastics in recent years, which also has elasticity and capability of being made thinner, and its compound as well.
  • resin such as polyethylene, polypropylene, polyamide, polyethylene telephthalate, melamine resin phenol resin, polybutadiene, polyurethane, polyether etherketone, polyether sulfone, polyarylate, silicone rubber, polysulfone.
  • the thickness of the movable separation film 105 may be determined in consideration of the materials, configurations, and the like from the viewpoint of whether or not it can obtain a good strength as the separation wall, and also, whether or not its expansion and contraction are made in good condition. However, it is desirable to make the thickness thereof approximately 0.5 ⁇ m to 10 ⁇ m.
  • liquid discharge head which is structured to make the liquid carrying apparatus of the present invention applicable to it:

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Ink Jet (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Reciprocating Pumps (AREA)
EP98304489A 1997-06-06 1998-06-05 Procédé et dispositif de transport de liquide, procédé de décharge de liquide et tête de décharge de liquide utilisant un tel procédé et un tel dispositif de transport de liquide Expired - Lifetime EP0882890B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14938097 1997-06-06
JP149380/97 1997-06-06
JP14938097A JP3625357B2 (ja) 1997-06-06 1997-06-06 液体輸送方法および液体輸送装置

Publications (3)

Publication Number Publication Date
EP0882890A2 true EP0882890A2 (fr) 1998-12-09
EP0882890A3 EP0882890A3 (fr) 1999-09-29
EP0882890B1 EP0882890B1 (fr) 2004-08-25

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EP98304489A Expired - Lifetime EP0882890B1 (fr) 1997-06-06 1998-06-05 Procédé et dispositif de transport de liquide, procédé de décharge de liquide et tête de décharge de liquide utilisant un tel procédé et un tel dispositif de transport de liquide

Country Status (4)

Country Link
US (1) US6206505B1 (fr)
EP (1) EP0882890B1 (fr)
JP (1) JP3625357B2 (fr)
DE (1) DE69825816T2 (fr)

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CN104265610A (zh) * 2014-09-09 2015-01-07 江苏大学 一种新型气泡泵结构
US9995295B2 (en) 2007-12-03 2018-06-12 Medipacs, Inc. Fluid metering device
US10000605B2 (en) 2012-03-14 2018-06-19 Medipacs, Inc. Smart polymer materials with excess reactive molecules
US10208158B2 (en) 2006-07-10 2019-02-19 Medipacs, Inc. Super elastic epoxy hydrogel

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JP4095368B2 (ja) 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP2003311982A (ja) * 2002-04-23 2003-11-06 Canon Inc 液体吐出ヘッド
US7887662B2 (en) * 2006-04-20 2011-02-15 Certainteed Corporation Corrugated hose with non-conforming outer layer for dispensing loose-fill insulation
US9238102B2 (en) 2009-09-10 2016-01-19 Medipacs, Inc. Low profile actuator and improved method of caregiver controlled administration of therapeutics
US9500186B2 (en) 2010-02-01 2016-11-22 Medipacs, Inc. High surface area polymer actuator with gas mitigating components
US9004651B2 (en) 2013-09-06 2015-04-14 Xerox Corporation Thermo-pneumatic actuator working fluid layer
US9004652B2 (en) 2013-09-06 2015-04-14 Xerox Corporation Thermo-pneumatic actuator fabricated using silicon-on-insulator (SOI)
US9096057B2 (en) 2013-11-05 2015-08-04 Xerox Corporation Working fluids for high frequency elevated temperature thermo-pneumatic actuation

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Also Published As

Publication number Publication date
JP3625357B2 (ja) 2005-03-02
DE69825816T2 (de) 2005-09-01
EP0882890A3 (fr) 1999-09-29
EP0882890B1 (fr) 2004-08-25
JPH10337883A (ja) 1998-12-22
US6206505B1 (en) 2001-03-27
DE69825816D1 (de) 2004-09-30

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