EP0836012A3 - Microsoupape - Google Patents
Microsoupape Download PDFInfo
- Publication number
- EP0836012A3 EP0836012A3 EP97113979A EP97113979A EP0836012A3 EP 0836012 A3 EP0836012 A3 EP 0836012A3 EP 97113979 A EP97113979 A EP 97113979A EP 97113979 A EP97113979 A EP 97113979A EP 0836012 A3 EP0836012 A3 EP 0836012A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- valve
- openings
- microvalve
- recess
- influence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Lift Valve (AREA)
- Valve Housings (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19637945A DE19637945C2 (de) | 1996-09-17 | 1996-09-17 | Mikroventil und Verfahren zu seiner Herstellung |
DE19637945 | 1996-09-17 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0836012A2 EP0836012A2 (fr) | 1998-04-15 |
EP0836012A3 true EP0836012A3 (fr) | 1998-11-04 |
EP0836012B1 EP0836012B1 (fr) | 2003-07-02 |
Family
ID=7805937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97113979A Expired - Lifetime EP0836012B1 (fr) | 1996-09-17 | 1997-08-13 | Microsoupape |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0836012B1 (fr) |
DE (2) | DE19637945C2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6986365B2 (en) | 2003-09-30 | 2006-01-17 | Redwood Microsystems | High-flow microvalve |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0314285A1 (fr) * | 1987-10-19 | 1989-05-03 | Ford Motor Company Limited | Assemblage à soupape de silicone pour le contrôle de passage de liquide |
EP0465229A1 (fr) * | 1990-07-02 | 1992-01-08 | Seiko Epson Corporation | Micropompe et son procédé de fabrication |
DE4101575A1 (de) * | 1991-01-21 | 1992-07-23 | Bosch Gmbh Robert | Mikroventil |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585209A (en) * | 1983-10-27 | 1986-04-29 | Harry E. Aine | Miniature valve and method of making same |
US4538642A (en) * | 1984-04-20 | 1985-09-03 | Eaton Corporation | Fast acting valve |
BE902865A (nl) * | 1985-07-12 | 1986-01-13 | Picanol Nv | Werkwijze voor het regelen bij weefmachines van de plaats van de zogenaamde doeklijn en borstboom en borstboomsturing hierbij aangewend |
US5333831A (en) * | 1993-02-19 | 1994-08-02 | Hewlett-Packard Company | High performance micromachined valve orifice and seat |
-
1996
- 1996-09-17 DE DE19637945A patent/DE19637945C2/de not_active Expired - Fee Related
-
1997
- 1997-08-13 DE DE59710369T patent/DE59710369D1/de not_active Expired - Lifetime
- 1997-08-13 EP EP97113979A patent/EP0836012B1/fr not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0314285A1 (fr) * | 1987-10-19 | 1989-05-03 | Ford Motor Company Limited | Assemblage à soupape de silicone pour le contrôle de passage de liquide |
EP0465229A1 (fr) * | 1990-07-02 | 1992-01-08 | Seiko Epson Corporation | Micropompe et son procédé de fabrication |
DE4101575A1 (de) * | 1991-01-21 | 1992-07-23 | Bosch Gmbh Robert | Mikroventil |
Also Published As
Publication number | Publication date |
---|---|
DE19637945A1 (de) | 1998-04-02 |
DE59710369D1 (de) | 2003-08-07 |
DE19637945C2 (de) | 1998-10-01 |
EP0836012B1 (fr) | 2003-07-02 |
EP0836012A2 (fr) | 1998-04-15 |
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Legal Events
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