EP0836012A3 - Microvalve - Google Patents

Microvalve Download PDF

Info

Publication number
EP0836012A3
EP0836012A3 EP97113979A EP97113979A EP0836012A3 EP 0836012 A3 EP0836012 A3 EP 0836012A3 EP 97113979 A EP97113979 A EP 97113979A EP 97113979 A EP97113979 A EP 97113979A EP 0836012 A3 EP0836012 A3 EP 0836012A3
Authority
EP
European Patent Office
Prior art keywords
valve
openings
microvalve
recess
influence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97113979A
Other languages
German (de)
French (fr)
Other versions
EP0836012A2 (en
EP0836012B1 (en
Inventor
Martin Dipl.-Phys. Richter
Stefan Dipl.-Phys. Kluge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0836012A2 publication Critical patent/EP0836012A2/en
Publication of EP0836012A3 publication Critical patent/EP0836012A3/en
Application granted granted Critical
Publication of EP0836012B1 publication Critical patent/EP0836012B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

Ein Mikroventil (50a) zum Steuern eines Fluidflusses weist eine Ventilklappe (52) und eine Auflagestruktur (54) auf, die auf ihrer der Ventilklappe (52) entgegengesetzten Seite eine Ausnehmung aufweist, die einen Bereich (60) verminderter Stärke der Auflagestruktur (54) definiert, durch den sich eine Mehrzahl von Ventilöffnungen (56) erstreckt. Ferner ist zur weiteren Minimierug des Einflusses des Fluiddrucks auf das Mikroventil (50a) um jede Ventilöffnung (56) herum eine Ausnehmung (62) vorgesehen, die durch eine Dichtungskante (64) zur Ventilöffnung (56) hin begrenzt ist. Zur Minimierung der Länge der Zuleitungen zu der Mehrzahl von Ventilöffnungen (56) reduzieren zu den Ventilöffnungen versetzt angeordnete Ventilklappenöffnungen (66) den Einfluß von Fluidkräften auf das Ventil (50a).

Figure 00000001
A microvalve (50a) for controlling a fluid flow has a valve flap (52) and a support structure (54), which on its side opposite the valve flap (52) has a recess which has a region (60) of reduced thickness of the support structure (54) through which a plurality of valve openings (56) extend. To further minimize the influence of the fluid pressure on the microvalve (50a), a recess (62) is provided around each valve opening (56) and is delimited by a sealing edge (64) towards the valve opening (56). In order to minimize the length of the supply lines to the plurality of valve openings (56), valve flap openings (66) which are offset from the valve openings reduce the influence of fluid forces on the valve (50a).
Figure 00000001
EP97113979A 1996-09-17 1997-08-13 Microvalve Expired - Lifetime EP0836012B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19637945A DE19637945C2 (en) 1996-09-17 1996-09-17 Microvalve and process for its manufacture
DE19637945 1996-09-17

Publications (3)

Publication Number Publication Date
EP0836012A2 EP0836012A2 (en) 1998-04-15
EP0836012A3 true EP0836012A3 (en) 1998-11-04
EP0836012B1 EP0836012B1 (en) 2003-07-02

Family

ID=7805937

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97113979A Expired - Lifetime EP0836012B1 (en) 1996-09-17 1997-08-13 Microvalve

Country Status (2)

Country Link
EP (1) EP0836012B1 (en)
DE (2) DE19637945C2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6986365B2 (en) 2003-09-30 2006-01-17 Redwood Microsystems High-flow microvalve

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0314285A1 (en) * 1987-10-19 1989-05-03 Ford Motor Company Limited A silicon valve assembly for controlling the flow of fluid
EP0465229A1 (en) * 1990-07-02 1992-01-08 Seiko Epson Corporation Micropump and process for manufacturing a micropump
DE4101575A1 (en) * 1991-01-21 1992-07-23 Bosch Gmbh Robert MICRO VALVE

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4538642A (en) * 1984-04-20 1985-09-03 Eaton Corporation Fast acting valve
BE902865A (en) * 1985-07-12 1986-01-13 Picanol Nv METHOD FOR CONTROLLING THE POSITION OF THE SO-CALLED CANVAS LINE AND BREAST TREE AND BREAST TREE CONTROL IN WEAVING MACHINES
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0314285A1 (en) * 1987-10-19 1989-05-03 Ford Motor Company Limited A silicon valve assembly for controlling the flow of fluid
EP0465229A1 (en) * 1990-07-02 1992-01-08 Seiko Epson Corporation Micropump and process for manufacturing a micropump
DE4101575A1 (en) * 1991-01-21 1992-07-23 Bosch Gmbh Robert MICRO VALVE

Also Published As

Publication number Publication date
DE19637945A1 (en) 1998-04-02
EP0836012A2 (en) 1998-04-15
EP0836012B1 (en) 2003-07-02
DE19637945C2 (en) 1998-10-01
DE59710369D1 (en) 2003-08-07

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