EP0836012B1 - Microsoupape - Google Patents

Microsoupape Download PDF

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Publication number
EP0836012B1
EP0836012B1 EP97113979A EP97113979A EP0836012B1 EP 0836012 B1 EP0836012 B1 EP 0836012B1 EP 97113979 A EP97113979 A EP 97113979A EP 97113979 A EP97113979 A EP 97113979A EP 0836012 B1 EP0836012 B1 EP 0836012B1
Authority
EP
European Patent Office
Prior art keywords
valve
openings
valve flap
supporting structure
microvalve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97113979A
Other languages
German (de)
English (en)
Other versions
EP0836012A2 (fr
EP0836012A3 (fr
Inventor
Martin Dipl.-Phys. Richter
Stefan Dipl.-Phys. Kluge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0836012A2 publication Critical patent/EP0836012A2/fr
Publication of EP0836012A3 publication Critical patent/EP0836012A3/fr
Application granted granted Critical
Publication of EP0836012B1 publication Critical patent/EP0836012B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Definitions

  • the situation shown in Fig. 6 relates to an existing one Fluid flow 180 through the valve ports 140 that valve 160 moves to an open state. Becomes now between the support structure 120 and the valve flap 160 an electrical voltage is applied, then the Move the valve flap 160 towards the support structure 120 and that Close microvalve 100, thereby controlling fluid flow 180 can be.
  • the microvalve 100 in FIG. 6 exists the support plate provided with the valve openings 140 120 made of glass, whereas the valve flap 160 made of silicon is made.
  • the plurality of valve openings 140 are formed in the glass plate 120 by means of laser drilling.
  • valve openings 140 can contribute because the fluid flow 180 through the Valve flap 160 suspended on one side is severely hindered.
  • the essential part of the fluid flow is therefore the Valve openings arranged rather on the left are deliver, whereby an "effective valve opening cross section" much smaller in the known microvalve than a "practically effective valve opening cross section".
  • EP 0314285 discloses a silicon valve arrangement for Control the flow of a fluid.
  • the silicon valve assembly consists of a nozzle plate and an elastic one Silicon plate, the two mutually offset openings exhibit.
  • the valve plate has a protruding peripheral edge, through which the valve plate with the nozzle plate firmly connected is.
  • the object of the present invention is a To create microvalve with minimal flow resistance.
  • valve opening for fluid power or pneumatic in the case of a gas as fluid Force that acts on the valve flap is decisive.
  • the influence should thus be the pneumatic force can be minimized.
  • the opening and Closing forces of the fluid on the valve flap should essentially not caused by the fluid, but be applied to the microvalve from the outside. If the Influence of the pneumatic forces can be neglected could, it would be possible to move the microvalve in either direction to operate. In contrast, the state of the Technology is not an opening force, but this force effected solely by the pneumatic force. This well known So valve is indeed a valve that only in one Direction can be operated.
  • Fig. 1 shows schematically a section of a micro valve 10 in cross-sectional representation, its flow resistance should be optimized.
  • the microvalve 10 has a support structure 12 with a valve opening 14 and one Valve flap 16 open.
  • An arrow 18 indicates a fluid flow to be controlled by the microvalve 10.
  • the Valve 10 of FIG. 1 and all others described below micro valves are also for the other Fluid flow direction can be used, even if it is not explicit it is said.
  • electrostatic forces can the valve flap 16 with respect to the support structure 12th are moved such that the valve opening 14 through the Valve flap 16 can be closed. However, it is not possible to open the flap with electrostatic forces.
  • the two electrodes overlap and support structure
  • electrical charge carriers of the same name be applied that repel each other.
  • the capacity of this arrangement is so small that for a given voltage almost no charge carriers of the same name be brought onto the valve flap and support structure can. In practice, therefore, electrostatic forces are always there attractive.
  • the opening force for the microvalve is then, for example, a mechanical preload, e.g. by a resilient suspension of the valve flap, or a tilted mounting of the flap or a force by a suitable piezoelectric coating.
  • valve flap 16 In the micro valve 10 there are both the valve flap 16 as well as the support structure 12 made of silicon.
  • the support structure 12 also with respect to FIG the valve flap 16 can be moved, depending on the which of the two elements is fixed or elastic is.
  • valve flap is in a de-energized or depressurized state 16 spaced a few micrometers from the support structure 12, whereby the valve opening 14 is opened.
  • the microvalve 10 is activated by the application of an electrical one Tension (not shown) between the support structure 12 and the valve flap 16 is actuated. Charges flow onto the opposite sides of the two components. This Charges attract each other, causing the valve flap 16 is moved towards the support structure 12.
  • an electrical one Tension (not shown) between the support structure 12 and the valve flap 16 is actuated. Charges flow onto the opposite sides of the two components. This Charges attract each other, causing the valve flap 16 is moved towards the support structure 12.
  • Fig. 10 it is only is a schematic view because, for example between the two components 12 and 16 necessary insulation layer to prevent charge flow between the same is not shown.
  • the fluid force or, in the case of a gas, the pneumatic Force acts in the microvalve in Fig. 1 in Closing direction of the microvalve 10, whereby the supply lines 20 to the valve opening 14 when the microvalve is open 10 can be reduced, which in turn is the inconvenient
  • the effect is that the flow resistance is increased.
  • closed state of the microvalve 10 acts the pneumatic Force on the valve flap 16 only on the surface the valve flap 16, which lies opposite the valve opening 14. If the cross-sectional area of the valve opening is large, then can lead to the destruction of the valve flap 16 in a corresponding pneumatic pressure come.
  • the compressive strength of the microvalve 10 can therefore be reduced by reducing the pneumatically effective area can be increased.
  • At the same pneumatic pressure can be used to achieve the same Breaking strength, however, reduces the thickness of the valve flap 16 be, which further miniaturization of the Micro valve 10 can be achieved.
  • FIG. 2A shows a microvalve 50a according to a first exemplary embodiment of the present invention.
  • a valve flap 52 is arranged over a support structure 54.
  • the support structure 54 has a plurality of valve openings 56, through which a fluid flow 58, through which shown schematically in Fig. 2A, can flow.
  • the support structure 54 has a recess that defines a web 60 of the support structure 54.
  • Fig. 2A it is a Cross-section that passes through the centers of the plurality of Valve openings 56 is placed such that the web 60 in the figure appears piece by piece.
  • the web 60 defined by the recess is reduced in FIG. 2A effective the length of the valve openings 56 to them in Framework of the stability requirements for the support structure 54 to optimize for minimal flow resistance.
  • the recess in the support structure 54, which as well as the Valve flap 52 is made of silicon, for example wet-chemical to the required web thickness using KOH 60 pre-etched. A currently available dry etching is for Production of the recess is not suitable since 300 ⁇ m is too thick. In this membrane, i.e. in the bridge 60, then many openings, for example by means of a KOH etching or realized by dry etching, since the web is essentially thinner than 100 ⁇ m.
  • the microvalve 50a of Fig. 2A would be essential have lower flow resistance because the Length of the valve openings 56 compared to the valve openings 140 by the above-mentioned etching of the silicon support structure 54 can be made significantly shorter. Further With the microvalve 50a in FIG. 2A, the elaborate one is eliminated Processing of 2 components, since the support structure 120 6 is formed of glass while the valve flap 160 in Fig. 6 is made of silicon.
  • Fig. 2B shows another way to the microvalve 2A to improve fluidically. Same Parts in Fig. 2B as well as in all other figures with respect 2A are denoted by the same reference numerals.
  • the difference 2A is in Fig. 2B on the valve flap 52 adjacent side of the support structure 54 around each A recess 62 is formed around the valve opening 56. This Recess 62 is from valve opening 56 through a sealing edge 64 separated.
  • the microvalve shown in Fig. 2B has a much lower lead resistance, because the distance between the valve flap 52 and the support structure 54 is enlarged in the recess 62.
  • the variant 2B nevertheless ensures through the sealing edge 64 for reliable control of the fluid flow 58.
  • it is possible to dispense with the production of the depressions and the sealing edge as a kind of inverse depression e.g. can be produced by layer deposition. Compared the height of the sealing edge is therefore also one Deepening available.
  • valve flap openings In contrast to FIG. 2A, the microvalve from FIG. 2C a plurality of openings 66 in the valve flap 52, which are also referred to as valve flap openings.
  • the valve flap openings can be either wet chemical or dry be etched because the thickness of the valve flap is usually smaller than 100 ⁇ m.
  • FIG 3 shows a microvalve 50b according to a second exemplary embodiment of the present invention.
  • the micro valve 50b has a minimal one compared to the microvalve 50a Flow resistance for the fluid flow 58 by the measures for reduction described in FIGS. 2B and 2C the flow resistance into the micro valve 50a of 2A are introduced.
  • the execution of the valve flap 52 offset with a plurality of valve flap openings 66 to the plurality of valve openings 56 provides a maximum Valve opening range compared to the given pneumatic Area.
  • Providing the recesses 62 together with the sealing edges 64 effectively reduces the lead resistance from the valve flap 52 through the plurality of valve openings 56 of the support structure 54.
  • FIG. 4A shows a schematic top view of the support structure 54, the recesses and the sealing edges were omitted for clarity.
  • the circulation structure 3 results from a cross section along line I-I of Fig. 4A.
  • the majority of valve openings 56 are several rectangular parallel to each other arranged valve openings. For professionals, however, it is obvious that the majority of valve openings when it is also necessary to have curved or triangular structures can accept.
  • FIG. 4B shows a further modification of the support structure 54 of Fig. 4A.
  • the rectangular valve openings 56 are to be increased further 4A divided into a plurality of square valve openings 56 Service. It therefore results for the circulation structure 54 a kind of a sieve structure.
  • Fig. 3 can also a cross section through the support structure 54 of FIG. 4B be along the line II-II.
  • the majority of the valve openings 56 in Fig. 4B are not square holes limited.
  • the holes can also be round, oval or any other suitable shape.
  • the Support structure 54 which is implemented as a chip, is pre-etched must be so that the web 60, as already noted was, is a flat web, is formed. Thereby can keep the length of the valve openings to a minimum can be set.
  • FIG. 5 shows a schematic top view of the valve flap 52, the staggered arrangement of the valve flap openings 66 with respect to the valve openings 56 shown in FIG. 5 are shown hatched, is visible.
  • Fig. 5 is a schematic view is that, in a real plan view, the valve openings 56 would not be seen since it is covered by the valve flap 52 are.
  • neither Wells 62 around the valve openings 56 and the Sealing edges 64 that define the recesses 62 from the valve openings Delimit 56 drawn.
  • valve openings 56 compared to the regular or irregular array of valve flap openings 66 thus create a micro valve 50b in which the fluid flow optimized with a minimally effective pneumatic surface is.
  • a fluid can i.e. by creating a distance from the valve flap 52 to the support structure 54, through all valve flap openings 66 flow through the arrangement in a minimal way.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Valve Housings (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Claims (10)

  1. Procédé de fabrication d'une microsoupape (50a ; 50b), aux étapes suivantes consistant à :
    préparer un clapet de soupape (52) ;
    préparer une structure d'appui (54) en silicium ;
       caractérisé par les étapes suivantes consistant à :
    réaliser une gravure chimique en humide d'un évidement dans la structure d'appui (54), pour obtenir une zone (60) d'épaisseur réduite de la structure d'appui (54), l'évidement s'effilant depuis le côté de la structure d'appui (54) opposé au clapet de soupape (52) vers un côté de la zone (60) d'épaisseur réduite opposé au clapet de soupape (52) lorsque la structure d'appui et le clapet de soupape sont disposés l'un par rapport à l'autre ;
    graver une pluralité d'ouvertures de soupape (56) dans la zone (60) d'épaisseur réduite de la structure d'appui (54) ; et
    disposer la structure d'appui (54) et le clapet de soupape (52) l'un par rapport à l'autre de sorte que l'évidement soit disposé du côté de la structure d'appui (54) opposé au clapet de soupape (52) et que le clapet de soupape soit mobile par rapport à la structure d'appui et que le clapet de soupape obture, dans une première position, la pluralité d'ouvertures de soupape (56) et est, dans une seconde position, distant de la pluralité d'ouvertures de soupape (56) de sorte qu'une section d'écoulement définie par la pluralité d'ouvertures de soupape et le clapet de soupape soit déterminée de manière décisive par une distance entre le clapet de soupape et la structure d'appui de laquelle doit être déplacé le clapet de soupape depuis la seconde positon pour obturer la pluralité d'ouvertures de soupape.
  2. Microsoupape (50a ; 50b), avec :
    un clapet de soupape (52) ; et
    une structure d'appui (54) présentant du silicium ;
    une pluralité d'ouvertures de soupape (56) ;
       caractérisée par le fait que :
    la structure d'appui (54) présente, de son côté opposé au clapet de soupape (52), un évidement définissant une zone (60) d'épaisseur réduite de la structure d'appui (54) dans laquelle s'étend la pluralité d'ouvertures de soupape (56) ;
    le clapet de soupape (52) est mobile par rapport à la structure d'appui (54) et obture, dans une première position, la pluralité d'ouvertures de soupape (56) et est, dans une seconde position, distant de la pluralité d'ouvertures de soupape (56) de sorte qu'une section d'écoulement définie par la pluralité d'ouvertures de soupape (56) et le clapet de soupape (52) soit déterminée de manière décisive par une distance entre le clapet de soupape et la structure d'appui de laquelle doit être déplacé le clapet de soupape depuis la seconde positon pour obturer la pluralité d'ouvertures de soupape ; et
    l'évidement s'effile depuis le côté de la structure d'appui (54) opposé au clapet de soupape (52) vers un côté de la zone (60) d'épaisseur réduite opposé au clapet de soupape (52).
  3. Microsoupape (50b) selon la revendication 2, dans laquelle le clapet de soupape (52) présente une pluralité d'ouvertures de clapet de soupape (66) disposées décalées par rapport aux ouvertures de soupape (56) dans la structure d'appui (54), de sorte que puisse être réglé un écoulement de fluide (58) à travers la microsoupape (50b).
  4. Microsoupape (50a ; 50b) selon la revendication 2 ou 3, dans laquelle sont formés, autour des ouvertures de soupape (56) dans la structure d'appui (54), des creux (62) ou des élévations, les creux (62) étant séparés des ouvertures de soupape (56) par des bords d'étanchéité (64), tandis que les élévations sont les bords d'étanchéité (64).
  5. Microsoupape (50a ; 50b) selon l'une des revendications 2 à 4, dans laquelle le clapet de soupape (52) est également réalisé en silicium.
  6. Microsoupape selon l'une des revendications 2 à 5, dans laquelle l'évidement est réalisé à l'aide d'une gravure au KOH, tandis que les ouvertures de soupape (56) et les ouvertures de clapet de soupape (66) sont gravées par gravure chimique en humide ou gravure chimique en sec.
  7. Microsoupape (50a ; 50b) selon l'une des revendications 2 à 6, dans laquelle la pluralité d'ouvertures de soupape (56) est une pluralité de rectangles sensiblement parallèles.
  8. Microsoupape (50a ; 50b) selon l'une des revendications 2 à 6, dans laquelle la pluralité d'ouvertures de soupape (56) est une pluralité d'ouvertures disposées selon une rangée régulière ou irrégulière.
  9. Microsoupape (50a; 50b) selon la revendication 8, dans laquelle les ouvertures de soupape (56) sont rectangulaires, rondes ou ovales.
  10. Microsoupape selon l'une des revendications 3 à 9, dans laquelle la pluralité des ouvertures de clapet de soupape (66) sont disposées et formées décalées par rapport aux ouvertures de soupape (56) respectives dans la structure d'appui (54), de sorte que, lorsque le clapet de soupape (52) est fermé, il n'y ait pas de passage entre le coté de clapet de soupape et le côté de structure d'appui.
EP97113979A 1996-09-17 1997-08-13 Microsoupape Expired - Lifetime EP0836012B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19637945 1996-09-17
DE19637945A DE19637945C2 (de) 1996-09-17 1996-09-17 Mikroventil und Verfahren zu seiner Herstellung

Publications (3)

Publication Number Publication Date
EP0836012A2 EP0836012A2 (fr) 1998-04-15
EP0836012A3 EP0836012A3 (fr) 1998-11-04
EP0836012B1 true EP0836012B1 (fr) 2003-07-02

Family

ID=7805937

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97113979A Expired - Lifetime EP0836012B1 (fr) 1996-09-17 1997-08-13 Microsoupape

Country Status (2)

Country Link
EP (1) EP0836012B1 (fr)
DE (2) DE19637945C2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6986365B2 (en) 2003-09-30 2006-01-17 Redwood Microsystems High-flow microvalve

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
US4538642A (en) * 1984-04-20 1985-09-03 Eaton Corporation Fast acting valve
BE902865A (nl) * 1985-07-12 1986-01-13 Picanol Nv Werkwijze voor het regelen bij weefmachines van de plaats van de zogenaamde doeklijn en borstboom en borstboomsturing hierbij aangewend
EP0314285B1 (fr) * 1987-10-19 1993-09-22 Ford Motor Company Limited Assemblage à soupape de silicone pour le contrôle de passage de liquide
US5259737A (en) * 1990-07-02 1993-11-09 Seiko Epson Corporation Micropump with valve structure
DE4101575A1 (de) * 1991-01-21 1992-07-23 Bosch Gmbh Robert Mikroventil
US5333831A (en) * 1993-02-19 1994-08-02 Hewlett-Packard Company High performance micromachined valve orifice and seat

Also Published As

Publication number Publication date
EP0836012A2 (fr) 1998-04-15
DE19637945A1 (de) 1998-04-02
DE19637945C2 (de) 1998-10-01
DE59710369D1 (de) 2003-08-07
EP0836012A3 (fr) 1998-11-04

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