EP0815439A1 - Materiaux sensibles et dispositifs de detection de constituants organiques et de vapeurs de solvants dans l'air - Google Patents

Materiaux sensibles et dispositifs de detection de constituants organiques et de vapeurs de solvants dans l'air

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Publication number
EP0815439A1
EP0815439A1 EP96907270A EP96907270A EP0815439A1 EP 0815439 A1 EP0815439 A1 EP 0815439A1 EP 96907270 A EP96907270 A EP 96907270A EP 96907270 A EP96907270 A EP 96907270A EP 0815439 A1 EP0815439 A1 EP 0815439A1
Authority
EP
European Patent Office
Prior art keywords
polymers
transducers
layer
receptor
acid esters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96907270A
Other languages
German (de)
English (en)
Inventor
Klaus Buhlmann
Alexander Shulga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Institut fuer Chemo und Biosensorik Muenster eV ICB
Original Assignee
Institut fuer Chemo und Biosensorik Muenster eV ICB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Institut fuer Chemo und Biosensorik Muenster eV ICB filed Critical Institut fuer Chemo und Biosensorik Muenster eV ICB
Publication of EP0815439A1 publication Critical patent/EP0815439A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/02863—Electric or magnetic parameters

Definitions

  • the devices according to the invention consist of layers sensitive to organic compounds in air, which are applied directly to suitable transducers. These receptor layers are composed of polymer, plasticizer and optionally additives.
  • the sensors based on the receptor layers according to the invention can be used for workplace monitoring, where online monitoring of the organic components in the air is required. Due to the low power consumption of these receptor layers working at room temperature, small devices can be developed that can be carried by the vulnerable people at all times.
  • Flame ionization detectors oxidize and ionize organic molecules in a sample stream. The amount of ionized particles is then related to the analyte concentration in the sample flow. There Many substances can be burned and ionized in the flame, this type of detection is unselective.
  • Semiconductor gas sensors are another way of determining organic ones
  • an oxidizable molecule now occurs, e.g. Solvent vapor molecule at this limit it is oxidized.
  • the oxidation lowers the potential barrier at the limit and thereby reduces the electrical resistance.
  • This change in resistance is proportional to the concentration of the oxidizable substances in the surrounding atmosphere. Since many compounds are oxidized at the operating temperatures of the semiconductor, semiconductor sensors are relatively unselective. The high operating temperatures require additional energy consumption.
  • Optical sensors which are mainly based on infra-red
  • the concentration of the analyte in the examined atmosphere can be inferred from the difference in intensity of the two light beams.
  • Systems with optical filters are also used which only allow a certain wavelength of the radiation used to reach the detector. In this way, group-specific absorption bands can be investigated, which are used for substance classes such as Aldehydes or alcohols are characteristic.
  • Another method for the detection of organic vapors is based on chemical receptor layers that are applied to a suitable transducer.
  • the interaction of the substances to be determined cause changes in the receptor layer e.g. the mass, the energetic, electrical, or optical properties.
  • These layer changes are then converted by a “transducer” into an evaluable electrical signal that is proportional to the change [K. Cammann et al, “Chemo- and Biosensors Fundamentals of Applications”, Angew. Chem. 103 (1991) 519-541].
  • receptor layers Different materials can be used as receptor layers:
  • the analyte molecules Two effects that are triggered by the analyte molecules are responsible for the change in the polymer layers.
  • the analyte molecules accumulate on and in the polymer through adsorption and absorption, on the other hand, the polymer layer can swell due to the influence of the analyte molecules. Both effects can be exploited using suitable transducers.
  • the disadvantage is the insufficient selectivity. Due to their simple structure, only polar or non-polar analyte molecules are often absorbed, depending on the polarities of the polymer. In order to change the non-crosslinked side chains that determine the selectivity, complex syntheses are required.
  • Supramolecular cage compounds are used as more selective receptor layers [W. Göpel, K.D. Schierbaum, "Specific molecular interaction and detection principles", sensors,
  • Zeolites are used as inorganic cage compounds, but because of their crystal structure they can be applied with difficulty reproducibly and because of their inflexible tunnel structure they show slow adsorption behavior [K. Alberti, F. Fetting, "Zeoli tes as sensitive aterials for di elctric gas sensors", Sensors and Actuators, B 21, (1994) 39-50].
  • organic cage compounds e.g.
  • Crown ethers, cryptands, calixarenes, cyclodextrins and clathrates can be used. These compounds have the disadvantage of requiring special application techniques such as Langmuir-Blodgett films in order to To be able to take up analyte molecules quickly and reversibly.
  • the good selectivity is linked to the analyte molecule through strong interactions of the cage molecule, which is noticeable through poor reversibility and hysteresis properties.
  • Complex syntheses are undertaken to obtain new, more powerful supramolecular compounds.
  • Suitable transducers can be e.g. Mass-sensitive transducers such as quartz microbalances based on the piezo effect.
  • SAW transducers can take advantage of both the change in mass and electronic changes in the receptor layer.
  • Optical and integrated fiber optic transducers, as well as the optical and fiber optic transducers based on surface plasmon resonance can e.g. detect the change in the refractive index that occurs due to the adsorption of the analyte molecules.
  • Thermal transducers can take advantage of the enthalpy change in the receptor layers accompanying the adsorption. Impediometric transducers such as interdigital
  • Electrodes register changes in the layer impedance, which are made up of the conductivity and the capacitance of the layer.
  • IDE are caramel-like electrodes, two of which are pushed into each other without touching each other. There If there is no direct contact between the two electrodes, the conductivity of a coating can be examined by considering the resistance between the individual electrodes.
  • IDE can also be used as a planar capacitor, with the applied receptor layer acting as a dielectric. Changes in the dielectric due to analyte molecules lead to changes in the IDE capacity. For the sensitivity of an IDE
  • Chemo sensors are responsible for several parameters.
  • the coated IDE area exposed to the atmosphere under investigation is proportional to the electrical signal from the sensor.
  • the width of the electrode fingers and the distance between two electrode fingers determine the number of "individual capacitors" from which the total area of the IDE unit is constructed.
  • the number of these individual capacitors is also proportional to the sensor signal [H.-E. Endres, S. Drost, " Optimization of the geometry of gas sensitive interdigital capacitors ", Sensors ans Actuators, B 4 (1991) 95-98].
  • the receptor layers can be produced inexpensively from commercially available materials, and there is no need for complex syntheses.
  • the selectivities and sensitivities for the substance or substances to be detected can be optimized by varying the layer composition.
  • the layer properties such as e.g. Sensitivity and selectivity to the organic components to be detected are greatly changed and improved.
  • the components required for realizing the receptor layers according to the invention are usually commercially available. As a result, the receptor layers can be produced inexpensively. 3.)
  • the use of artificial noses requires a number of sensors that deliver different signals for the analyte or analytes to be detected. Combined with pattern recognition, individual substances in a mixture can be recognized. By changing the component composition, the receptor layers according to the invention allow simple adaptation of the individual sensor signals to the desired analyte in order to optimize the use of artificial noses.
  • the receptor layers according to the invention can be easily applied to the selected transducer. All components can be dissolved in suitable solvents. By using spin coating, dip coating, thick film technologies or spraying, clear, homogeneous layers of any thickness can be realized.
  • the device according to the invention can be used in different fields of application. For workplace monitoring of paint shops and printing plants, for example, in which the employee is permanently exposed to small amounts of solvents, monitoring can constantly monitor the solvent concentration in the air.
  • the low energy requirement of the device according to the invention enables mobile use as a miniature measuring device directly on the body of the employee. By combining several on the
  • Invention based sensors that show different sensor signals for different analytes can be realized an artificial nose. This enables quality controls in a wide variety of applications [J. W. Gardner, P.N.
  • Sensors working with the receptor layers according to the invention can be used as a warning device when certain concentrations of organic substances in the air are exceeded.
  • the invention is a device for the detection of organic compounds in air.
  • This device consists of sensitive receptor layers that are applied directly to suitable transducers (page 7, lines 20-28).
  • the receptor layer is in direct contact with the analyte-containing atmosphere.
  • the receptor layer consists of one or more polymers, to which one or more plasticizers have been added.
  • the Receptor layer still contain one or more additives.
  • Polyvinyls such as polyvinyl chloride, polyvinyl stearate or polyvinyl acetate
  • Cellulose derivatives such as cellulose esters and
  • Silicon-containing polymers such as silicones, halogenated
  • Polyisoprene polyketones Polymaleic acid (derivatives) polysaccharides polyols polypeptides polyphenylene polypropylene lignin chitin
  • Modified, copolymerized polymers or polymer mixtures of two or more polymers or copolymerized polymers can also be used as part of the receptor layers.
  • the receptor layers contain one or more plasticizers.
  • Plasticizers are liquid or solid, indifferent organic substances with low vapor pressure, mostly those of an ester-like nature. You can without chemical reaction, mainly by their dissolving and / or
  • plasticizers Swelling capacity, but possibly also without such a thing, occur in physical interactions with highly polymeric substances and form a homogeneous system with them [DIN 55945 (Dec. 1988)].
  • plasticizers can be used according to the invention, such as, for example: phthalic acid ester trimellitic acid ester aliphatic dicarboxylic acid ester sebacate Polyester from adipine, sebacin, azelaine and
  • Phthalic acid with diols such as 1,3-butanediol, 1,2-
  • Hydroxycarboxylic acid esters in particular epoxidized fatty acid derivatives
  • Polyamide plasticizers e.g. Benzenesulfonamides or p-toluenesulfonamides long-chain aliphatic alcohols
  • the receptor layers can contain one or more additives. These additives can optimize the properties of the layers for the transducers used. For example, by adding inert polar
  • additives can be, for example: organic salts such as e.g. Potassium tetraphenylborate, tetraheptylammonium bromide,
  • Triphenyl bismuth Triphenyl bismuth.
  • Surface-active substances such as surfactants and / or lipids, compounds capable of luminescence, dyes, inert fillers or builders
  • the receptor layers can be constructed from different parts by weight of polymer, plasticizer and additives.
  • the polymer content can be between 5% and 90% of the
  • the proportion of plasticizers can be between 3% and 90%.
  • Additives can be added to the receptor layers up to a percentage of 70%, but do not have to be present according to the invention.
  • the polymer forming the receptor layer can also have liquid-crystalline phases. These can be produced, for example, by polycondensation of aromatic dicarboxylic acids with aromatic diamines or phenols.
  • liquid-crystalline phases for example cholesteric, smecatic or nematic
  • inert polymer matrix cholesteric, smecatic or nematic
  • plasticizers and optionally one or more additives can be added to the polymers.
  • the sensitive receptor layer described above can be applied directly to different transducers known from the prior art (page 9, line 11f).
  • the receptor layers according to the invention are advantageous to use on novel impediometric interdigital transducers.
  • Conventional technologies that are used to manufacture semiconductor components can be used to implement these novel interdigital transducers.
  • the conductors can be formed on an insulating support in the form of thick or thin layers (the terms refer to the established use of the terms thick-film and thin-film technology in the field of microelectronics), produced with the aid of
  • the conductors can be arranged on the same or opposite sides of the carrier, in a plane or vertically separated from one another.
  • Small electrode spacings in the sub- ⁇ range are achieved by vertically separating the individual electrodes. This means that two adjacent electrodes are no longer applied in one plane, but the respective adjacent electrode has a height difference. This vertical separation allows small electrode spacings in the sub- ⁇ range to be produced using conventional processes, which in other cases can only be achieved using precise and / or complex production processes.
  • the main advantage is the saving of the space between the individual electrodes required with conventional IDE. As a result, more electrode pairs can be arranged on the same surface, which increases the sensitivity of the transducer.
  • the conductive materials used for the production of the solid or semi-solid or porous measuring electrodes can be substances which, due to the mobility of electrons or defect sites, have properties of an electrical conductor, a semiconductor or a defect site conductor, for example: «noble metals (Ag, Au , Pt, Pd, ...);
  • the surface of the measuring electrodes need not necessarily be smooth or polished. It can be intentionally made rough to make better contact with the receptor layers and to lower the interfacial resistance.
  • One possible way is to use platinized platinum electrodes.
  • the invention includes not only single, but also multi-analyte probes, which are produced by combining or integrating multiple electrodes on a sensor unit or a support, coated with layers specific for different analytes.
  • Sensors with moderate selectivity can also be integrated in a multi-sensor unit, which leads to the obtaining of so-called “fingerprints" which correspond to the different compositions of the
  • the respective fingerprint can then be assigned to the corresponding sample composition using various methods for pattern recognition.
  • Multisensors is based on the use of microelectronic chips with the required number of the IDE described above, which are coated with a suitable receptor layer.
  • FIG. 1 shows in section the schematic structure of an impediometric interdigital transducer with a planar electrode arrangement coated with the receptor layer according to the invention.
  • Figure 2 shows the basic structure of the interdigital transducer according to the invention with vertically separated individual electrodes.
  • FIG. 3 schematically shows the circuit for evaluating impediometric sensors, as was used for the exemplary embodiments.
  • FIG. 4 shows the response behavior of an impediometric sensor with the receptor layer described in exemplary embodiment 1.
  • FIG. 5 shows the calibration curve for 1-butanol of the sensor described in exemplary embodiment 1.
  • FIG. 6 shows the response behavior of the receptor layers described in exemplary embodiment 2.
  • FIG. 7 shows the response behavior of the receptor layers described in exemplary embodiment 3.
  • FIG. 1 shows in section the schematic structure of a device 1 which is coated with the receptor layer 3 according to the invention.
  • the device 1 is in direct contact with the sample atmosphere 4 and is constructed in such a way that the analyte-sensitive receptor layer 3 is applied to an inert carrier 7.
  • the layer thickness of the sensitive layer 3 can be in the range from 0.1 ⁇ m to 1 mm.
  • the coplanar electrodes 5 and 6 have direct contact with the layer 3.
  • FIG. 2A shows the basic structure of the interdigital transducer 8 according to the invention with vertically separated individual electrodes 9, 10
  • Electrodes 9, 10 are applied to a carrier 7.
  • This carrier 7 is not conductive and can consist of, for example, glass, alumina, Si, which has been passivated with a non-conductive layer of, for example, SiO 2 or Si 3 N 4 , or a suitable plastic.
  • the comb-like electrode 9 is arranged on a continuous electrode 10 which is completely coated on the transducer 8. They are separated from one another by an intermediate layer 11 which, like the support 7, consists of a non-conductive material such as, for example, pyrolytically deposited SiO 2 . The thickness of the layer 11 thus corresponds to the electrode spacing 12.
  • the electrode 10 is like the electrode 9 comb-like and both electrodes are pushed into one another. Again they are Electrodes 9, 10 separated from one another by the intermediate layer 11, which results in the electrode spacing 12.
  • the electrode spacing 12 is preferably 0.3-1 ⁇ m, the electrode widths 13 and 14 are 5-20 ⁇ m.
  • FIG. 3 shows a circuit for evaluation with the receptor layers of impediometric sensors according to the invention.
  • Admittance (impedance) of the sensor and thus the conductivity and the capacitance of the measuring membrane used electrical arrangements is shown in Figure 3.
  • the load resistance, R ⁇ is connected in series with the sensor to be examined and the voltage drop at RL provides the output signal.
  • the preferred condition for the use of such an arrangement is that within the frequency range of the input voltage used, the impedance of the sensor under test, Z sensor , should be significantly greater than RL.
  • ⁇ is the angular frequency of the input voltage, Ui n , and U ou t - the output voltage.
  • Ui n the angular frequency of the input voltage
  • U ou t - the output voltage.
  • the dispersion (frequency dependence) of the output signal is mainly determined by the AC impedance of the tested sensor under the conditions specified above.
  • the admittance of the sensor can be calculated using the formula
  • the impedance Z of the sensor is measured instead of the admittance Y.
  • the impedance Z of a system represents the reciprocal of the associated admittance. Impedance measurements can therefore also be used to characterize the electrical properties of a sensor coating. In order to be able to track the changes in the receptor layer, the measurements of the admittance or, alternatively, a phase component of the output signal are used in the preferred implementation of the invention.
  • Figure 4 shows the properties of a realized receptor layer 3 according to the invention consisting of the polymer polyethylene oxide, the plasticizer dibutyl sebacate and the additive tridodecylmethyl ammonium chloride with respect to different solvent vapors.
  • the layer is applied to IDE with coplanar electrodes 9, ⁇ , which has an electrode spacing of 20 ⁇ m and an electrode width of 20 ⁇ m.
  • the sensitive area of the IDE is 0.25cm 2 .
  • alternating voltages with frequencies of 100 kHz and 700 mV effective voltage were used for sensor excitation.
  • An IkOhm precision resistor was used as the load.
  • the specified sensor signals reflect the real part of the impedance.
  • composition of the receptor layer 3 is:
  • FIG. 4 shows the sensor behavior in relation to different solvent vapor concentrations of lOOOppm in synthetic air.
  • the numbers correspond to the following solvents:
  • FIG. 5 shows a calibration curve of this sensor in a concentration range of 20-50 ppm 1-butanol.
  • the solvent vapor concentrations were produced according to the saturation process [VDI 3490].
  • the calibration curve shows an exponential course in this concentration range.
  • the detection limit of such a sensor is 10ppm 1-butanol.
  • Example 2 In this exemplary embodiment, the influence of various plasticizers in a receptor layer 3 consisting of polymer, plasticizer and an organic salt as an additive is to be shown.
  • the transducer find and the evaluation unit corresponds to embodiment 1.
  • FIG. 6 shows the influence of various plasticizers on the behavior of the receptor layers 3 in relation to 100 ppm ethanol 15, perchlorethylene 16 and toluene 17.
  • Sensor A and sensor B only differ in the type of plasticizer.
  • Receptor layer of sensor A 50% polyvinyl acetate
  • Receptor layer of sensor B 50% polyvinyl acetate
  • Tetrahydrofuran (Fluka 87368) manufactured. 5 ⁇ l of this solution was applied to the sensitive surface of the IDE using drop coating.
  • one or more additives can be added to the receptor layer 3.
  • FIG. 7 shows the influence of different additives, in this case different organic salts, on sensors with otherwise the same layer composition.
  • Evaluation unit correspond to embodiment 1.
  • the sensors were exposed to solvent vapor concentrations of 100 ppm ethanol 15, perchloethylene 16 and toluene 17.
  • the receptor layers 3 of sensors C and D are composed as follows:
  • Receptor layer of sensor C 50% polymethacrylic acid methyl ester (PMMA) (Aldrich 18,223-0)
  • Receptor layer of sensor D 50% polymethacrylic acid methyl ester
  • the receptor layers of sensors C and D were applied to the transducers like those of sensors A and B in exemplary embodiment 2.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention concerne un dispositif de détection qualitative et/ou quantitative de composés organiques ou de solvants dans l'air. Dans ce dispositif, une couche sensible (3) contenant au moins un polymère est appliquée sur un transducteur. La couche sensible (3) contient en outre au moins un plastifiant.
EP96907270A 1995-03-20 1996-03-20 Materiaux sensibles et dispositifs de detection de constituants organiques et de vapeurs de solvants dans l'air Withdrawn EP0815439A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19509518 1995-03-20
DE1995109518 DE19509518C2 (de) 1995-03-20 1995-03-20 Vorrichtung zur Detektion organischer Komponenten und Lösungsmitteldämpfen in der Luft
PCT/DE1996/000514 WO1996029594A1 (fr) 1995-03-20 1996-03-20 Materiaux sensibles et dispositifs de detection de constituants organiques et de vapeurs de solvants dans l'air

Publications (1)

Publication Number Publication Date
EP0815439A1 true EP0815439A1 (fr) 1998-01-07

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EP96907270A Withdrawn EP0815439A1 (fr) 1995-03-20 1996-03-20 Materiaux sensibles et dispositifs de detection de constituants organiques et de vapeurs de solvants dans l'air

Country Status (4)

Country Link
EP (1) EP0815439A1 (fr)
JP (1) JPH11502922A (fr)
DE (1) DE19509518C2 (fr)
WO (1) WO1996029594A1 (fr)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5951846A (en) * 1995-03-27 1999-09-14 California Institute Of Technology Sensor arrays for detecting analytes in fluids
WO1998020342A1 (fr) 1996-11-01 1998-05-14 Bp Oil International Limited Appareil testeur et procede d'utilisation
RU2094804C1 (ru) * 1997-01-16 1997-10-27 Виталий Васильевич Баранов Химический сенсор для определения пропанона-2 в воздухе, устройство для определения пропанона-2 в выдыхаемом воздухе и способ диагностики гиперкетонемии
DE19708529C1 (de) * 1997-03-03 1998-07-30 Sze Spezial Elektronik Hagenuk Fluidsensor für flüssige und gasförmige organische Verbindungen sowie Verfahren zu seiner Herstellung
WO1999000663A1 (fr) * 1997-06-30 1999-01-07 California Institute Of Technology Elements de capteurs a base de polymeres de compositions differentes et procedes de preparation de ces elements
WO1999067627A1 (fr) * 1998-06-23 1999-12-29 California Institute Of Technology Capteurs a base de polymeres/plastifiant
US6752964B1 (en) 1998-06-23 2004-06-22 California Institute Of Technology Polymer/plasticizer based sensors
DE19907743B4 (de) * 1999-02-23 2012-01-05 Volkswagen Ag Ölqualitätssensor sowie Verfahren zu dessen Herstellung
NL1013012C2 (nl) * 1999-09-09 2001-03-12 Tno Sensor voor het detecteren van de aanwezigheid van vocht.
US6843899B2 (en) 2001-11-06 2005-01-18 North Carolina State University 2D/3D chemical sensors and methods of fabricating and operating the same
JP4030796B2 (ja) * 2002-05-13 2008-01-09 富士フイルム株式会社 測定チップ
JP2010197046A (ja) * 2007-05-28 2010-09-09 Tanaka Holdings Kk バイオセンサー
DE102007047156A1 (de) * 2007-10-02 2009-04-23 Siemens Ag Feuchtigkeitssensor mit hygroskopischer Keramikschicht und Verfahren zur Detektion von Wasser in einem Fluid unter Verwendung des Feuchtigkeitssensors
JP5172595B2 (ja) * 2008-10-21 2013-03-27 理想科学工業株式会社 Ｓａｗセンサ判別装置およびｓａｗセンサ判別方法
US8884771B2 (en) * 2012-08-01 2014-11-11 Microchip Technology Incorporated Smoke detection using change in permittivity of capacitor air dielectric
CN105738470B (zh) * 2016-03-24 2018-10-26 电子科技大学 一种声表面波气体传感器
EP3605153A4 (fr) * 2017-03-28 2020-07-29 FUJIFILM Corporation Procédé de détection d'insecte, capteur de gaz pour la détection d'insecte, réseau de capteurs de gaz pour la détection d'insecte et produit de machine électrique
TWI759573B (zh) * 2018-01-15 2022-04-01 美商羅門哈斯電子材料有限公司 聲波感測器及感測氣相分析物之方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3428892A (en) * 1965-09-20 1969-02-18 James E Meinhard Electronic olfactory detector having organic semiconductor barrier layer structure
FR2460480A1 (fr) * 1979-06-29 1981-01-23 Sicli Cie Cle Procede de detection et d'analyse de gaz, notamment pour la prevention des incendies
JPS60188835A (ja) * 1984-03-08 1985-09-26 Sharp Corp 感湿素子
EP0332935A1 (fr) * 1988-03-14 1989-09-20 Siemens Aktiengesellschaft Matériau pour capteur de mesure de la pression partielle des gaz ou des vapeurs et capteur de gaz
DD292555A5 (de) * 1990-03-12 1991-08-01 Th "Carl Schorlemmer" Leuna-Merseburg Bfsnl,De Photochemisch haertbare und strukturierbare photopolymermischung zur herstellung von anionensensitiven matrixmembranen fuer potentiometrische sensoren
DE4118681C2 (de) * 1991-06-07 1995-05-24 Kernforschungsz Karlsruhe Membran für eine Sensoranordnung zur Konzentrationsbestimmung von Anionen
JPH0727731A (ja) * 1993-07-14 1995-01-31 Oki Electric Ind Co Ltd 匂いセンサ及び匂いセンサユニット

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9629594A1 *

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Publication number Publication date
WO1996029594A1 (fr) 1996-09-26
DE19509518A1 (de) 1996-09-26
JPH11502922A (ja) 1999-03-09
DE19509518C2 (de) 1997-08-28

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