EP0801026A4 - - Google Patents

Info

Publication number
EP0801026A4
EP0801026A4 EP95941874A EP95941874A EP0801026A4 EP 0801026 A4 EP0801026 A4 EP 0801026A4 EP 95941874 A EP95941874 A EP 95941874A EP 95941874 A EP95941874 A EP 95941874A EP 0801026 A4 EP0801026 A4 EP 0801026A4
Authority
EP
European Patent Office
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95941874A
Other versions
EP0801026B1 (en
EP0801026A1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6322561A external-priority patent/JPH08175821A/ja
Priority claimed from JP32256294A external-priority patent/JP3936751B2/ja
Priority claimed from JP28072695A external-priority patent/JP3884783B2/ja
Application filed filed Critical
Publication of EP0801026A1 publication Critical patent/EP0801026A1/en
Publication of EP0801026A4 publication Critical patent/EP0801026A4/xx
Application granted granted Critical
Publication of EP0801026B1 publication Critical patent/EP0801026B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C03B19/1065—Forming solid beads by chemical vapour deposition; by liquid phase reaction by liquid phase reactions, e.g. by means of a gel phase
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/113—Silicon oxides; Hydrates thereof
    • C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
    • C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/80—Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Silicon Compounds (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
EP95941874A 1994-12-26 1995-12-25 Process for producing synthetic quartz powder Expired - Lifetime EP0801026B1 (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP32256194 1994-12-26
JP6322561A JPH08175821A (ja) 1994-12-26 1994-12-26 合成石英ガラス粉の製造方法
JP32256294A JP3936751B2 (ja) 1994-12-26 1994-12-26 合成石英ガラス粉の製造法
JP322562/94 1994-12-26
JP322561/94 1994-12-26
JP32256294 1994-12-26
JP280726/95 1995-10-27
JP28072695A JP3884783B2 (ja) 1995-10-27 1995-10-27 合成石英粉の製造方法
JP28072695 1995-10-27
PCT/JP1995/002666 WO1996020128A1 (fr) 1994-12-26 1995-12-25 Procede de production de poudre de quartz synthetique

Publications (3)

Publication Number Publication Date
EP0801026A1 EP0801026A1 (en) 1997-10-15
EP0801026A4 true EP0801026A4 (ja) 1997-11-19
EP0801026B1 EP0801026B1 (en) 2000-08-30

Family

ID=27336766

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95941874A Expired - Lifetime EP0801026B1 (en) 1994-12-26 1995-12-25 Process for producing synthetic quartz powder

Country Status (6)

Country Link
US (1) US6110852A (ja)
EP (1) EP0801026B1 (ja)
KR (1) KR100414962B1 (ja)
DE (1) DE69518669T2 (ja)
TW (1) TW355704B (ja)
WO (1) WO1996020128A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990008146A (ko) * 1995-04-28 1999-01-25 미우라아끼라 합성 석영 분말의 제조방법 및 석영 유리 성형체의 제조방법
DE60123878T2 (de) * 2000-06-28 2007-05-24 Japan Super Quartz Corp. Synthetisches Quarzpulver, Verfahren zur Herstellung und synthetischer Quarztiegel
EP1411032B1 (en) * 2001-07-19 2016-12-28 Mitsubishi Chemical Corporation Process for producing a high purity powder
TWI413868B (zh) * 2007-06-12 2013-11-01 Ind Tech Res Inst 製作週期性圖案的步進排列式干涉微影方法及其裝置
US8197782B2 (en) * 2010-02-08 2012-06-12 Momentive Performance Materials Method for making high purity metal oxide particles and materials made thereof
US9249028B2 (en) 2010-02-08 2016-02-02 Momentive Performance Materials Inc. Method for making high purity metal oxide particles and materials made thereof
KR102622058B1 (ko) * 2021-11-23 2024-01-09 수현첨단소재 주식회사 고순도 쿼츠 분말의 제조방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236618A (ja) * 1985-04-11 1986-10-21 Seiko Epson Corp 石英ガラスの製造方法
EP0384284A2 (en) * 1989-02-20 1990-08-29 Nitto Chemical Industry Co., Ltd. Process for preparing silica having a low silanol content
JPH02289416A (ja) * 1989-02-20 1990-11-29 Nitto Chem Ind Co Ltd 低シラノールシリカの製造方法
JPH03228817A (ja) * 1990-02-01 1991-10-09 Nippon Steel Chem Co Ltd 無水シリカの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977993A (en) * 1975-03-12 1976-08-31 Gulf Research & Development Company Metal oxide aerogels
US4979973A (en) * 1988-09-13 1990-12-25 Shin-Etsu Chemical Co., Ltd. Preparation of fused silica glass by hydrolysis of methyl silicate
US5141786A (en) * 1989-02-28 1992-08-25 Shin-Etsu Chemical Co., Ltd. Synthetic silica glass articles and a method for manufacturing them
JPH02307830A (ja) * 1989-05-18 1990-12-21 Chisso Corp 石英ガラス粉末の製造方法
JPH0393638A (ja) * 1989-09-04 1991-04-18 Shin Etsu Chem Co Ltd 合成石英ガラス粉の製造方法
JP2899080B2 (ja) * 1990-07-23 1999-06-02 新日鐵化学株式会社 無水シリカの製造方法
EP0486004B1 (en) * 1990-11-16 1996-09-11 Mitsubishi Chemical Corporation Method for producing a high-purity silica glass powder
JP2839725B2 (ja) * 1990-12-28 1998-12-16 新日鐵化学株式会社 高純度結晶質シリカの製造方法
JPH072513A (ja) * 1993-06-15 1995-01-06 Kimmon Mfg Co Ltd 合成石英ガラス粉の製造方法
JPH0826742A (ja) * 1994-07-11 1996-01-30 Mitsubishi Chem Corp 合成石英ガラス粉

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236618A (ja) * 1985-04-11 1986-10-21 Seiko Epson Corp 石英ガラスの製造方法
EP0384284A2 (en) * 1989-02-20 1990-08-29 Nitto Chemical Industry Co., Ltd. Process for preparing silica having a low silanol content
JPH02289416A (ja) * 1989-02-20 1990-11-29 Nitto Chem Ind Co Ltd 低シラノールシリカの製造方法
JPH03228817A (ja) * 1990-02-01 1991-10-09 Nippon Steel Chem Co Ltd 無水シリカの製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHEMICAL ABSTRACTS, vol. 106, no. 14, 6 April 1987, Columbus, Ohio, US; abstract no. 106738, MIYASHITA SATORU & AL.: "Manufacture of quartz glass" XP002041307 *
CHEMICAL ABSTRACTS, vol. 116, no. 10, 9 March 1992, Columbus, Ohio, US; abstract no. 89801, NAKAMURA KUNIHIKO & AL.: "Manufacture of heat-resistant anhydrous silica" XP002041308 *

Also Published As

Publication number Publication date
DE69518669D1 (de) 2000-10-05
TW355704B (en) 1999-04-11
EP0801026B1 (en) 2000-08-30
WO1996020128A1 (fr) 1996-07-04
EP0801026A1 (en) 1997-10-15
KR980700932A (ko) 1998-04-30
US6110852A (en) 2000-08-29
DE69518669T2 (de) 2001-04-12
KR100414962B1 (ko) 2004-04-13

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Inventor name: YAMAGUCHI, TAKAHI, MITSUBISHI CHEMICAL CORP.

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Inventor name: YOSHIKAWA, TOKIFUMI, MITSUBISHI CHEMICAL CORP.

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Inventor name: KATSURO, YOSHIRO, MITSUBISHI CHEMICAL CORPORATION

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