EP0741310A1 - Matrice de miroirs commandés à couches minces pour système de projection optique - Google Patents

Matrice de miroirs commandés à couches minces pour système de projection optique Download PDF

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Publication number
EP0741310A1
EP0741310A1 EP96102744A EP96102744A EP0741310A1 EP 0741310 A1 EP0741310 A1 EP 0741310A1 EP 96102744 A EP96102744 A EP 96102744A EP 96102744 A EP96102744 A EP 96102744A EP 0741310 A1 EP0741310 A1 EP 0741310A1
Authority
EP
European Patent Office
Prior art keywords
thin film
array
layer
actuating
active matrix
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96102744A
Other languages
German (de)
English (en)
Other versions
EP0741310B1 (fr
Inventor
Yong-Ki Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019950009394A external-priority patent/KR0154923B1/ko
Priority claimed from KR1019950009398A external-priority patent/KR0177250B1/ko
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of EP0741310A1 publication Critical patent/EP0741310A1/fr
Application granted granted Critical
Publication of EP0741310B1 publication Critical patent/EP0741310B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/904—Micromirror
EP96102744A 1995-04-21 1996-02-23 Matrice de miroirs commandés à couches minces pour système de projection optique Expired - Lifetime EP0741310B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR1019950009394A KR0154923B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치의 제조방법
KR9509394 1995-04-21
KR1019950009398A KR0177250B1 (ko) 1995-04-21 1995-04-21 광로 조절 장치
KR9509398 1995-04-21

Publications (2)

Publication Number Publication Date
EP0741310A1 true EP0741310A1 (fr) 1996-11-06
EP0741310B1 EP0741310B1 (fr) 2002-06-05

Family

ID=36955856

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96102744A Expired - Lifetime EP0741310B1 (fr) 1995-04-21 1996-02-23 Matrice de miroirs commandés à couches minces pour système de projection optique

Country Status (16)

Country Link
US (1) US5757539A (fr)
EP (1) EP0741310B1 (fr)
JP (1) JP3734271B2 (fr)
CN (1) CN1082770C (fr)
AR (1) AR001107A1 (fr)
AU (1) AU698094B2 (fr)
BR (1) BR9608226A (fr)
CA (1) CA2218655A1 (fr)
CZ (1) CZ328097A3 (fr)
DE (1) DE69621516T2 (fr)
HU (1) HUP9801824A3 (fr)
PL (1) PL179925B1 (fr)
RU (1) RU2166784C2 (fr)
TW (1) TW305943B (fr)
UY (1) UY24183A1 (fr)
WO (1) WO1996033576A1 (fr)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2313451A (en) * 1996-05-23 1997-11-26 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror array
GB2314939A (en) * 1996-06-29 1998-01-14 Daewoo Electronics Co Ltd Thin film actuated mirror array having an increased tilt angle.
EP0825467A1 (fr) * 1996-08-21 1998-02-25 Daewoo Electronics Co., Ltd Réseau de miroirs actionnés à couche mince pour utilisation dans un système optique de projection
US5754330A (en) * 1997-02-26 1998-05-19 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
WO1998039922A1 (fr) * 1997-03-05 1998-09-11 Daewoo Electronics Co., Ltd. Groupement de miroirs actionnes, a couche mince, utilise dans un systeme de projection optique et son procede de fabrication
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2323678A (en) * 1997-03-28 1998-09-30 Daewoo Electronics Co Ltd Thin film actuated mirror array
FR2762687A1 (fr) * 1997-04-29 1998-10-30 Daewoo Electronics Co Ltd Groupement de miroirs commandes a films minces et procede pour la fabrication de celui-ci
WO1998054911A1 (fr) * 1997-05-23 1998-12-03 Daewoo Electronics Co., Ltd. Procede de fabrication de reseau de miroirs actionnes par un film mince
WO1999000991A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Reseau miroir a activation par film mince
WO1999000989A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Miroir active par film mince, comprenant un element semence et un element a electrodeplacement dont les materiaux ont la meme structure et la meme direction de croissance des cristaux
WO1999000990A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Reseau miroir a activation par film mince et procede de fabrication
WO1999023832A1 (fr) * 1997-10-31 1999-05-14 Daewoo Electronics Co., Ltd. Procede de production d'un ensemble de miroirs actionne a couche mince dans un systeme de projection optique
GB2332750A (en) * 1997-12-23 1999-06-30 Daewoo Electronics Co Ltd Thin film actuated mirror array
US5920421A (en) * 1997-12-10 1999-07-06 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2341693A (en) * 1997-05-27 2000-03-22 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror array
AU722330B2 (en) * 1997-02-26 2000-07-27 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
CN101038582B (zh) * 2007-04-02 2010-05-12 中国科学院光电技术研究所 用于自适应光学波前复原运算的脉动阵列处理方法及电路

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6849471B2 (en) * 2003-03-28 2005-02-01 Reflectivity, Inc. Barrier layers for microelectromechanical systems
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
US6136390A (en) * 1996-12-11 2000-10-24 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
US6523961B2 (en) 2000-08-30 2003-02-25 Reflectivity, Inc. Projection system and mirror elements for improved contrast ratio in spatial light modulators
US7196740B2 (en) * 2000-08-30 2007-03-27 Texas Instruments Incorporated Projection TV with improved micromirror array
US7027418B2 (en) 2001-01-25 2006-04-11 Bandspeed, Inc. Approach for selecting communications channels based on performance
US7023606B2 (en) * 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
KR100394020B1 (ko) * 2001-10-18 2003-08-09 엘지전자 주식회사 Ｄｍｄ 패널의 제조 방법
US6965468B2 (en) 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US20040006490A1 (en) * 2002-07-08 2004-01-08 Gingrich Mark A. Prescription data exchange system
US7042622B2 (en) * 2003-10-30 2006-05-09 Reflectivity, Inc Micromirror and post arrangements on substrates
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
US20050070049A1 (en) * 2003-09-29 2005-03-31 Cheng S. J. Method for fabricating wafer-level chip scale packages
US8447252B2 (en) * 2009-01-21 2013-05-21 Bandspeed, Inc. Adaptive channel scanning for detection and classification of RF signals
US8849213B2 (en) * 2009-01-21 2014-09-30 Bandspeed, Inc. Integrated circuit for signal analysis
US8629443B2 (en) * 2009-12-01 2014-01-14 Sharp Kabushiki Kaisha Active matrix substrate and display device
JP6613593B2 (ja) 2015-04-01 2019-12-04 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
WO1995023352A1 (fr) * 1994-02-23 1995-08-31 Aura Systems, Inc. Reseau de miroirs commandes par couche mince

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4441791A (en) * 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
CN1062664C (zh) * 1994-06-22 2001-02-28 大宇电子株式会社 改进的制造薄膜可致动反射镜阵列的方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5099353A (en) * 1990-06-29 1992-03-24 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
WO1995023352A1 (fr) * 1994-02-23 1995-08-31 Aura Systems, Inc. Reseau de miroirs commandes par couche mince

Cited By (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2313451A (en) * 1996-05-23 1997-11-26 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror array
US5822109A (en) * 1996-05-23 1998-10-13 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuated mirror array
GB2314939B (en) * 1996-06-29 2000-03-22 Daewoo Electronics Co Ltd Actuated mirror having an increased tilting angle
US5805331A (en) * 1996-06-29 1998-09-08 Daewoo Electronics Co., Ltd. Actuated mirror having an increased tilting angle
GB2314939A (en) * 1996-06-29 1998-01-14 Daewoo Electronics Co Ltd Thin film actuated mirror array having an increased tilt angle.
US5768006A (en) * 1996-08-21 1998-06-16 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
EP0825467A1 (fr) * 1996-08-21 1998-02-25 Daewoo Electronics Co., Ltd Réseau de miroirs actionnés à couche mince pour utilisation dans un système optique de projection
US5754330A (en) * 1997-02-26 1998-05-19 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
WO1998038801A1 (fr) * 1997-02-26 1998-09-03 Daewoo Electronics Co., Ltd. Groupement de miroirs actionnes, a couche mince, utilise dans un systeme de projection optique et son procede de fabrication
AU722330B2 (en) * 1997-02-26 2000-07-27 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
WO1998039922A1 (fr) * 1997-03-05 1998-09-11 Daewoo Electronics Co., Ltd. Groupement de miroirs actionnes, a couche mince, utilise dans un systeme de projection optique et son procede de fabrication
AU741296B2 (en) * 1997-03-05 2001-11-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5815305A (en) * 1997-03-10 1998-09-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
FR2761487A1 (fr) * 1997-03-28 1998-10-02 Daewoo Electronics Co Ltd Reseau de miroirs commandes a couches minces, pour systeme de projection optique, et son procede de fabrication
NL1007843C2 (nl) * 1997-03-28 2002-07-16 Daewoo Electronics Co Ltd Aangedreven spiegelreeks van het dunne filmtype in een optisch projectiestelsel en werkwijze voor het vervaardigen er van.
GB2323678B (en) * 1997-03-28 1999-05-19 Daewoo Electronics Co Ltd Thin film actuated mirror array in an optical projection system and method for manufacturing the same
US5917645A (en) * 1997-03-28 1999-06-29 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2323678A (en) * 1997-03-28 1998-09-30 Daewoo Electronics Co Ltd Thin film actuated mirror array
GB2324882A (en) * 1997-04-29 1998-11-04 Daewoo Electronics Co Ltd Thin film actuated mirror array
GB2324882B (en) * 1997-04-29 2001-05-23 Daewoo Electronics Co Ltd Array of thin film actuated mirrors and method for the manufacture thereof
US6104525A (en) * 1997-04-29 2000-08-15 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors and method for the manufacture thereof
FR2762687A1 (fr) * 1997-04-29 1998-10-30 Daewoo Electronics Co Ltd Groupement de miroirs commandes a films minces et procede pour la fabrication de celui-ci
WO1998054911A1 (fr) * 1997-05-23 1998-12-03 Daewoo Electronics Co., Ltd. Procede de fabrication de reseau de miroirs actionnes par un film mince
GB2341693A (en) * 1997-05-27 2000-03-22 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror array
AU735393B2 (en) * 1997-05-27 2001-07-05 Daewoo Electronics Co., Ltd. Method for manufacturing a thin film actuated mirror array
GB2341693B (en) * 1997-05-27 2001-11-14 Daewoo Electronics Co Ltd Method for manufacturing a thin film actuated mirror array
WO1999000990A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Reseau miroir a activation par film mince et procede de fabrication
WO1999000989A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Miroir active par film mince, comprenant un element semence et un element a electrodeplacement dont les materiaux ont la meme structure et la meme direction de croissance des cristaux
WO1999000991A1 (fr) * 1997-06-30 1999-01-07 Daewoo Electronics Co., Ltd. Reseau miroir a activation par film mince
WO1999023832A1 (fr) * 1997-10-31 1999-05-14 Daewoo Electronics Co., Ltd. Procede de production d'un ensemble de miroirs actionne a couche mince dans un systeme de projection optique
US6204080B1 (en) 1997-10-31 2001-03-20 Daewoo Electronics Co., Ltd. Method for manufacturing thin film actuated mirror array in an optical projection system
US5920421A (en) * 1997-12-10 1999-07-06 Daewoo Electronics Co., Ltd. Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2332750B (en) * 1997-12-23 2000-02-23 Daewoo Electronics Co Ltd Thin film actuated mirror array in an optical projection system and method for manufacturing the same
GB2332750A (en) * 1997-12-23 1999-06-30 Daewoo Electronics Co Ltd Thin film actuated mirror array
CN101038582B (zh) * 2007-04-02 2010-05-12 中国科学院光电技术研究所 用于自适应光学波前复原运算的脉动阵列处理方法及电路

Also Published As

Publication number Publication date
DE69621516T2 (de) 2003-01-16
RU2166784C2 (ru) 2001-05-10
HUP9801824A2 (hu) 1998-11-30
PL322906A1 (en) 1998-03-02
TW305943B (fr) 1997-05-21
UY24183A1 (es) 1996-06-21
CA2218655A1 (fr) 1996-10-24
CZ328097A3 (cs) 1998-04-15
CN1082770C (zh) 2002-04-10
BR9608226A (pt) 1998-12-29
CN1182519A (zh) 1998-05-20
JPH11503843A (ja) 1999-03-30
DE69621516D1 (de) 2002-07-11
EP0741310B1 (fr) 2002-06-05
HUP9801824A3 (en) 2002-07-29
AR001107A1 (es) 1997-09-24
JP3734271B2 (ja) 2006-01-11
US5757539A (en) 1998-05-26
AU698094B2 (en) 1998-10-22
PL179925B1 (pl) 2000-11-30
AU4957096A (en) 1996-11-07
WO1996033576A1 (fr) 1996-10-24

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