GB2341693B - Method for manufacturing a thin film actuated mirror array - Google Patents

Method for manufacturing a thin film actuated mirror array

Info

Publication number
GB2341693B
GB2341693B GB9928013A GB9928013A GB2341693B GB 2341693 B GB2341693 B GB 2341693B GB 9928013 A GB9928013 A GB 9928013A GB 9928013 A GB9928013 A GB 9928013A GB 2341693 B GB2341693 B GB 2341693B
Authority
GB
United Kingdom
Prior art keywords
manufacturing
thin film
mirror array
actuated mirror
film actuated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9928013A
Other versions
GB2341693A (en
GB9928013D0 (en
Inventor
Yong-Ki Min
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority claimed from PCT/KR1997/000095 external-priority patent/WO1998054911A1/en
Publication of GB9928013D0 publication Critical patent/GB9928013D0/en
Publication of GB2341693A publication Critical patent/GB2341693A/en
Application granted granted Critical
Publication of GB2341693B publication Critical patent/GB2341693B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
GB9928013A 1997-05-27 1997-05-27 Method for manufacturing a thin film actuated mirror array Expired - Fee Related GB2341693B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR1997/000095 WO1998054911A1 (en) 1997-05-23 1997-05-27 Method for manufacturing a thin film actuated mirror array

Publications (3)

Publication Number Publication Date
GB9928013D0 GB9928013D0 (en) 2000-01-26
GB2341693A GB2341693A (en) 2000-03-22
GB2341693B true GB2341693B (en) 2001-11-14

Family

ID=19494120

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9928013A Expired - Fee Related GB2341693B (en) 1997-05-27 1997-05-27 Method for manufacturing a thin film actuated mirror array

Country Status (4)

Country Link
JP (1) JP2002500783A (en)
AU (1) AU735393B2 (en)
DE (1) DE19782276T1 (en)
GB (1) GB2341693B (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0741310A1 (en) * 1995-04-21 1996-11-06 Daewoo Electronics Co., Ltd Thin film actuated mirror array for use in an optical projection system
GB2304918A (en) * 1995-08-30 1997-03-26 Daewoo Electronics Co Ltd Tin film actuated mirror

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0741310A1 (en) * 1995-04-21 1996-11-06 Daewoo Electronics Co., Ltd Thin film actuated mirror array for use in an optical projection system
GB2304918A (en) * 1995-08-30 1997-03-26 Daewoo Electronics Co Ltd Tin film actuated mirror

Also Published As

Publication number Publication date
AU3049097A (en) 1998-12-30
DE19782276T1 (en) 2000-05-25
GB2341693A (en) 2000-03-22
GB9928013D0 (en) 2000-01-26
JP2002500783A (en) 2002-01-08
AU735393B2 (en) 2001-07-05

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100527