EP0695813A2 - Procédé pour la carburation de pièces carburables par des impulsions à plasma - Google Patents

Procédé pour la carburation de pièces carburables par des impulsions à plasma Download PDF

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Publication number
EP0695813A2
EP0695813A2 EP95109082A EP95109082A EP0695813A2 EP 0695813 A2 EP0695813 A2 EP 0695813A2 EP 95109082 A EP95109082 A EP 95109082A EP 95109082 A EP95109082 A EP 95109082A EP 0695813 A2 EP0695813 A2 EP 0695813A2
Authority
EP
European Patent Office
Prior art keywords
voltage
pulse
plasma
volts
pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95109082A
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German (de)
English (en)
Other versions
EP0695813B1 (fr
EP0695813A3 (fr
Inventor
Frank Dr. Schnatbaum
Albrecht Dr. Melber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of EP0695813A2 publication Critical patent/EP0695813A2/fr
Publication of EP0695813A3 publication Critical patent/EP0695813A3/fr
Application granted granted Critical
Publication of EP0695813B1 publication Critical patent/EP0695813B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38—Treatment of ferrous surfaces

Definitions

  • the invention relates to a method for carburizing components made of carbonizable materials, in particular steels, by means of a pulsed plasma discharge in a carbon-containing atmosphere at pressures between 0.1 and 30 mbar and at pulse voltages between 200 and 2000 volts, preferably between 300 and 1000 volts.
  • the anode 4 and the cathode 7 are connected to a power supply 9, which is used to generate voltage pulses for the formation of the plasma.
  • a control unit 10 is assigned to the power supply 9, with which the electrical process parameters for influencing the plasma can be set.
  • the power supply 9 also supplies a constant basic voltage which is superimposed on the pulses. Both the amount of Pulses as well as the level of the basic voltage can be influenced by the control device 10.
  • the distance "T” from the component surface is shown on the abscissa, which is designated by 0.0.
  • the carbon content "C” is given in percent on the ordinate.
  • the lower curve 22 shows the conditions for a pulsed DC voltage without superimposing a basic voltage
  • the curve 23 shows the conditions for a Superposition of a pulsed DC voltage with a constantly present basic voltage. A significantly higher carbon content is thus achieved both on the surface and to a depth of 0.5 mm.
  • the following ratios were chosen: The pulsed DC voltage was 600 volts, the ratio of pulse duration t 1 to pause duration t 2 was 1:10, and the level of the constant base voltage was 100 volts.

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Arc Welding In General (AREA)
EP95109082A 1994-08-06 1995-06-13 Procédé pour la carburation de pièces carburables par des impulsions à plasma Expired - Lifetime EP0695813B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4427902A DE4427902C1 (de) 1994-08-06 1994-08-06 Verfahren zum Aufkohlen von Bauteilen aus kohlungsfähigen Werkstoffen mittels einer impulsförmig betriebenen Plasmaentladung
DE4427902 1994-08-06

Publications (3)

Publication Number Publication Date
EP0695813A2 true EP0695813A2 (fr) 1996-02-07
EP0695813A3 EP0695813A3 (fr) 1997-02-12
EP0695813B1 EP0695813B1 (fr) 1999-09-08

Family

ID=6525098

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95109082A Expired - Lifetime EP0695813B1 (fr) 1994-08-06 1995-06-13 Procédé pour la carburation de pièces carburables par des impulsions à plasma

Country Status (5)

Country Link
US (1) US5558725A (fr)
EP (1) EP0695813B1 (fr)
JP (1) JPH08170162A (fr)
AT (1) ATE184329T1 (fr)
DE (2) DE4427902C1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999031291A2 (fr) * 1997-12-15 1999-06-24 Volkswagen Aktiengesellschaft Boruration au plasma
DE10021583A1 (de) * 2000-05-04 2001-11-15 Ald Vacuum Techn Ag Verfahren und Vorrichtung zum Aufkohlen und Härten von Werkstückchargen

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19547131A1 (de) * 1995-12-16 1997-06-19 Ipsen Ind Int Gmbh Verfahren zur Plasmaaufkohlung metallischer Werkstücke
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising
IT1309928B1 (it) * 1999-12-01 2002-02-05 Bundy S P A Tubo per impianti di alimentazione di fluidi a pressione, inparticolare per l'alimentazione di carburante nei motori diesel,
JP4744019B2 (ja) * 2000-07-12 2011-08-10 大阪府 チタン金属の表面処理方法
DE10109565B4 (de) 2001-02-28 2005-10-20 Vacuheat Gmbh Verfahren und Vorrichtung zur partiellen thermochemischen Vakuumbehandlung von metallischen Werkstücken
KR100614288B1 (ko) * 2005-01-17 2006-08-21 한국에너지기술연구원 주기적 주입방식의 저압식 진공 침탄 제어방법
DE102013006589A1 (de) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Verfahren und Vorrichtung für das thermochemische Härten von Werkstücken
JP7421373B2 (ja) * 2020-03-02 2024-01-24 日立Astemo株式会社 浸炭方法及び被処理基材

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE601847C (de) 1933-04-01 1934-08-25 Siemens Schuckertwerke Akt Ges Verfahren zum Einbringen eines Stoffes in ein Metall
US4490190A (en) 1981-03-13 1984-12-25 Societe Anonyme Dite: Vide Et Traitement Process for thermochemical treatments of metals by ionic bombardment
EP0552460A1 (fr) 1992-01-20 1993-07-28 Leybold Durferrit GmbH Procédé de traitement thermochimique de pièces par des impulsions à plasma

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH342980A (de) * 1950-11-09 1959-12-15 Berghaus Elektrophysik Anst Verfahren zur Diffusionsbehandlung von Rohren aus Eisen und Stahl oder deren Legierungen
DE2842407C2 (de) * 1978-09-29 1984-01-12 Norbert 7122 Besigheim Stauder Vorrichtung zur Oberflächenbehandlung von Werkstücken durch Entladung ionisierter Gase und Verfahren zum Betrieb der Vorrichtung
JPS56105627A (en) * 1980-01-28 1981-08-22 Fuji Photo Film Co Ltd Manufacture of amorphous semiconductor
US5127967A (en) * 1987-09-04 1992-07-07 Surface Combustion, Inc. Ion carburizing
JP2724850B2 (ja) * 1988-11-04 1998-03-09 新電元工業株式会社 金属などの熱化学処理装置
DE4003623A1 (de) * 1990-02-07 1991-08-08 Kloeckner Ionon Verfahren zur steuerung einer anlage zur plasmabehandlung von werkstuecken
US5383980A (en) * 1992-01-20 1995-01-24 Leybold Durferrit Gmbh Process for hardening workpieces in a pulsed plasma discharge
FR2708624A1 (fr) * 1993-07-30 1995-02-10 Neuville Stephane Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié.

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE601847C (de) 1933-04-01 1934-08-25 Siemens Schuckertwerke Akt Ges Verfahren zum Einbringen eines Stoffes in ein Metall
US4490190A (en) 1981-03-13 1984-12-25 Societe Anonyme Dite: Vide Et Traitement Process for thermochemical treatments of metals by ionic bombardment
EP0552460A1 (fr) 1992-01-20 1993-07-28 Leybold Durferrit GmbH Procédé de traitement thermochimique de pièces par des impulsions à plasma

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999031291A2 (fr) * 1997-12-15 1999-06-24 Volkswagen Aktiengesellschaft Boruration au plasma
WO1999031291A3 (fr) * 1997-12-15 1999-09-10 Volkswagen Ag Boruration au plasma
EP1143031A2 (fr) * 1997-12-15 2001-10-10 Volkswagen AG Boruration au plasma
EP1143031A3 (fr) * 1997-12-15 2004-04-28 Volkswagen AG Boruration au plasma
DE10021583A1 (de) * 2000-05-04 2001-11-15 Ald Vacuum Techn Ag Verfahren und Vorrichtung zum Aufkohlen und Härten von Werkstückchargen

Also Published As

Publication number Publication date
DE59506771D1 (de) 1999-10-14
JPH08170162A (ja) 1996-07-02
EP0695813B1 (fr) 1999-09-08
US5558725A (en) 1996-09-24
ATE184329T1 (de) 1999-09-15
EP0695813A3 (fr) 1997-02-12
DE4427902C1 (de) 1995-03-30

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