EP0663045A1 - Procede pour l'utilisation d'une pompe a vide a griffes et pompe a vide a griffes propre a l'application de ce procede. - Google Patents

Procede pour l'utilisation d'une pompe a vide a griffes et pompe a vide a griffes propre a l'application de ce procede.

Info

Publication number
EP0663045A1
EP0663045A1 EP93919226A EP93919226A EP0663045A1 EP 0663045 A1 EP0663045 A1 EP 0663045A1 EP 93919226 A EP93919226 A EP 93919226A EP 93919226 A EP93919226 A EP 93919226A EP 0663045 A1 EP0663045 A1 EP 0663045A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
claw
cooler
claw vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93919226A
Other languages
German (de)
English (en)
Other versions
EP0663045B1 (fr
Inventor
Andreas Kobus
Uwe Gottschlich
Lothar Brenner
Hartmut Kriehn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0663045A1 publication Critical patent/EP0663045A1/fr
Application granted granted Critical
Publication of EP0663045B1 publication Critical patent/EP0663045B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a method for operating a claw vacuum pump with two or more stages, each of which has a scooping chamber with a pair of claw rotors and suction or outlet openings arranged on the end face.
  • the invention also relates to a claw vacuum pump suitable for carrying out this operating method.
  • a claw vacuum pump is known from EU-A 365 695.
  • Each rotor of the claw rotor pairs is equipped with a claw (tooth) and a recess. They perform their rotary movement in a combing and non-contact manner in the ladle.
  • the claws have the task of separating the suction side from the pressure side.
  • the peripheral surface areas of the claws form the necessary sealing gaps with the peripheral scoop inner wall.
  • the claws cannot fulfill their task of separating the suction side from the pressure side, since they no longer move in this phase Move close to the peripheral inner chamber wall. In this phase it is therefore necessary that the Separation of the suction and pressure side is ensured by the fact that the suction or outlet opening - or both - is / are closed. This is done in a known manner by the rotors themselves.
  • the suction and outlet openings are arranged and designed on the end face in such a way that they can be opened or closed with the aid of the recesses in the rotors.
  • the object of the present invention is to operate and design a claw vacuum pump in such a way that its operation is not endangered by liquids entering the pump - be it condensation or by operating errors of the system to be evacuated - liquids entering the pump.
  • this object is achieved in that the pump is operated without internal compression and in that the gases emerging from at least one - preferably all - stage (s) are cooled.
  • "Without internal compression” means that there must be no smaller delivery volumes that are not connected to the respective outlet opening. For the design and arrangement of the respective outlet opening, this means that they must open immediately after the completion of the immersion phase and must remain open until the beginning of the next immersion phase.
  • the operation of a claw vacuum pump operated or designed in this way is not endangered even if the scooping spaces are completely filled with liquid.
  • Shrinking, closed delivery volumes which would lead to the pump being blocked due to the incompressibility of the liquids, do not occur.
  • the compression work to be performed is greater than with a pump operated with internal compression.
  • Thermal problems that occur as a result are avoided by the cooling provided.
  • the gases are expediently cooled with the aid of a cooling device which is arranged downstream of the respective outlet opening of the pump stages.
  • the gas ejected from one stage is in cooled at the outlet opening cooling device. Since during the operation of the pump - except in the start-up phase - the suction pressure of one stage is lower than the discharge pressure, part of the cooled gases flows back into the pumping chamber immediately after opening the outlet opening and reduces the temperature in the next Extraction phase of extracted gases.
  • a particularly expedient development of the invention consists in the fact that a disc separating the two scoops of successive stages is designed as a cooler.
  • the cooler is arranged immediately downstream of the outlet opening of the first of the two stages, so that effective cooling of the gas components flowing back is effected.
  • FIG. 1 shows a section through a two-stage claw vacuum pump at one of the two shafts
  • Figure 2 is a plan view of a pair of rotors in the suction-side stage or - in the case of more than two stages - in an intermediate stage and
  • Figure 3 is a plan view of a pair of rotors in the pressure side stage.
  • FIGS. 1 to 3 are each parts of a claw vacuum pump 1 with two shafts 2, 3, on which the rotor pairs 4, 5 and 6, 7 are fastened.
  • the rotor pairs 4, 5 and 6, 7 are of the claw type. They rotate in the scoops 8, 9, which are formed by a plurality of housing parts 11, 12, 13.
  • FIG. 1 shows that the housing part 11 is a disk into which the exhaust channels 14, 15 are inserted.
  • the disc 11 is supported on a housing part 16, in which the shafts 2, 3 are mounted lying in the bearings 17 f and in which the drive motor, not shown, is located.
  • the scoops 8, 9 are formed by the pot-like housing parts 12, 13 which are placed on the disk 11.
  • the housing part 12 simultaneously forms the separating disk 18 between the two scoops 8, 9.
  • the shafts 2, 3 pass through the disks 11 and 18. At the level of these disks, they are equipped with bushings 21, 22, the outside of which is disks 11, Form 18 labyrinth seals. In a manner not shown, the individual housing parts are held together by bolts.
  • the intake duct 24 passes through the housing part 13 and opens into. the suction opening 25 arranged at the end (FIG. 2).
  • the slot-shaped suction opening 25, which extends along an arc of a circle, is concentric with the shaft 2 and is controlled by the recess 26 in the rotor 4.
  • the outlet opening 27, which also extends along an arc, is of slot-shaped design and is arranged concentrically to the shaft 3 and is located in the disk 18. Its open or closed state is controlled by the cutout 28 in the rotor 5.
  • the outlet opening 27 is followed by a channel 29 passing through the disk 18 and opening into the suction opening 30 (FIG. 3) of the second stage.
  • Exhaust pipes 33, 34 connect to the exhaust gas channels 14, 15 outside the pump 1 and open into the housing 35 of a cooler 36. Gases sucked in from a recipient (not shown) connected to the suction channel 24 and conveyed by the pump 1 leave the cooler 36 through the outlet connection 37. In the jacket regions of the housing parts 12, 13 there are cooling channels 38, 39 which during operation of are flowed through a coolant. Additional cooling channels 40 can be provided in the disks 11, 18 if they also function as a cooler.
  • the claw rotor pair 4, 5 is shown in two different positions. In their position shown in long lines, the claws and recesses of the rotors 4, 5 have just ended their immersion phase.
  • the continuation of the rotary movement (cf. arrows 41, 42) causes an enlargement of the (small) space 43 located between the claws and a reduction of the (large) space 44 also located between the claws.
  • the small, enlarging space 43 is the suction space and will be connected to the suction opening 25 after a brief continuation of the rotary movement.
  • the large, decreasing extension space 44 is connected to the outlet opening 27 immediately after the immersion phase so that internal compression does not occur.
  • the claws and recesses are just beginning their immersion phase.
  • the suction space 43 ' has its largest volume.
  • the recess 26 has just closed the suction opening 25.
  • the extension space 44 ' has assumed its smallest volume.
  • the outlet opening 27 was continuously open during the previous reduction in the volume of the extension space 44 '. There was no compression of the conveyed gases.
  • the cutout 28 has just closed the outlet opening 27.
  • FIG. 3 shows a top view of a pressure stage.
  • the rotors 6, 7 with their cutouts 45, 46 are again shown in different positions, the positions shown in short and long lines corresponding to the exemplary embodiment according to FIG. 2. Another position is shown in dash-dotted lines in order to explain a difference to the embodiment according to FIG. 2.
  • the second stage pressure stage according to FIG. 3 differs from the suction stage shown in FIG. 2 (or intermediate stage for a pump with more than two stages) in that two outlet openings (31, 32) are provided. So that the goal of "no internal compression" remains fulfilled, the distance between the two outlet openings must not be greater than the width of the recess 46, all based on the circular arc on which the outlet openings 31, 32 lie. It is thereby achieved that the shrinking extension space 44 is constantly connected to one of the two outlet openings 31, 32.
  • Claw vacuum pump for performing the method according to claim 1 with two or more stages, each having a scooping chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and suction or outlet openings (25, 27) arranged on the end face 30, 31, 32), characterized in that in each stage the outlet opening (27; 31, 32) is arranged and designed such that it opens immediately after the end of a dive phase and only at the beginning of the next dive phase is closed.
  • claw vacuum pump according to claim 2, characterized in that the cooling of the gases takes place with the aid of a cooling device (18, 38; 36) which is arranged downstream of the respective outlet opening (27; 31, 32).

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

La présente invention concerne un procédé pour l'utilisation d'une pompe à vide à griffes (1) comportant au moins deux étages dont chacun présente une chambre d'aspiration (8, 9) avec une paire de rotors à griffes (4, 5; 6, 7) ainsi que des orifices d'aspiration et d'échappement (25, 27; 30, 31, 32) disposés à l'avant. Pour éliminer le risque que les liquides n'affectent le bon fonctionnement de la pompe, il est proposé d'utiliser la pompe (1) sans compression intérieure et de refroidir les gaz s'échappant d'au moins un étage - et de préférence ceux de tous les étages.
EP93919226A 1992-10-02 1993-08-31 Procede pour l'utilisation d'une pompe a vide a griffes et pompe a vide a griffes propre a l'application de ce procede Expired - Lifetime EP0663045B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4233142A DE4233142A1 (de) 1992-10-02 1992-10-02 Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe
DE4233142 1992-10-02
PCT/EP1993/002349 WO1994008141A1 (fr) 1992-10-02 1993-08-31 Procede pour l'utilisation d'une pompe a vide a griffes et pompe a vide a griffes propre a l'application de ce procede

Publications (2)

Publication Number Publication Date
EP0663045A1 true EP0663045A1 (fr) 1995-07-19
EP0663045B1 EP0663045B1 (fr) 1997-05-14

Family

ID=6469471

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93919226A Expired - Lifetime EP0663045B1 (fr) 1992-10-02 1993-08-31 Procede pour l'utilisation d'une pompe a vide a griffes et pompe a vide a griffes propre a l'application de ce procede

Country Status (5)

Country Link
US (1) US5660535A (fr)
EP (1) EP0663045B1 (fr)
JP (1) JPH09502001A (fr)
DE (2) DE4233142A1 (fr)
WO (1) WO1994008141A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4438878A1 (de) * 1994-10-31 1996-05-02 Leybold Ag Dichtungssystem für eine vertikal angeordnete Welle
DE4439724A1 (de) * 1994-11-09 1996-05-15 Leybold Ag Trockenverdichtende Zweiwellen-Verdrängermaschine
US6575719B2 (en) 2000-07-27 2003-06-10 David B. Manner Planetary rotary machine using apertures, volutes and continuous carbon fiber reinforced peek seals
TW200506217A (en) * 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
JP5313260B2 (ja) * 2008-10-10 2013-10-09 株式会社アルバック ドライポンプ
WO2011019048A1 (fr) * 2009-08-14 2011-02-17 株式会社アルバック Pompe désamorcée
JP2014029114A (ja) * 2010-11-17 2014-02-13 Ulvac Japan Ltd 真空排気装置の連結構造及び真空排気装置
US9273568B2 (en) 2010-11-17 2016-03-01 Ulvac, Inc. Coupling structure for vacuum exhaust device and vacuum exhaust system
JP2014029115A (ja) * 2010-11-17 2014-02-13 Ulvac Japan Ltd 真空排気装置の接続構造及び真空排気システム
JP7008955B1 (ja) * 2021-07-16 2022-01-25 オリオン機械株式会社 クローポンプ
CN116576107B (zh) * 2023-06-08 2024-05-17 北京通嘉宏瑞科技有限公司 转子及真空泵
CN116838609B (zh) * 2023-07-05 2024-02-27 山东亿宁环保科技有限公司 爪式真空泵冷却系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1531607A (en) * 1923-01-24 1925-03-31 Thomas W Green High-pressure rotary pump
DE677150C (de) * 1933-08-25 1939-06-20 Northey Rotary Engines Ltd Drehkolbenpumpe mit zwei in einem Gehaeuse umlaufenden Laeufern, die je einen fluegelartigen Drehkolben und eine den Kolben entsprechende Aussparung aufweisen
US4137022A (en) * 1976-06-02 1979-01-30 Lassota Marek J Rotary compressor and process of compressing compressible fluids
US4504201A (en) * 1982-11-22 1985-03-12 The Boc Group Plc Mechanical pumps
JPS59115489A (ja) * 1982-12-23 1984-07-03 Unozawagumi Tekkosho:Kk 逆流冷却式多段ル−ツ型真空ポンプ
JPS61197793A (ja) * 1985-02-26 1986-09-02 Ebara Corp 多段複葉型真空ポンプにおける冷却方法
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
EP0409287B1 (fr) * 1987-05-15 1994-04-06 Leybold Aktiengesellschaft Pompe à vide avec espace de déplacement
DE3786917D1 (de) * 1987-05-15 1993-09-09 Leybold Ag Ein- oder mehrstufige zweiwellenvakuumpumpe.
EP0365695B1 (fr) * 1988-10-24 1992-11-25 Leybold Aktiengesellschaft Pompe à vide à déplacement positif avec deux arbres
GB8825284D0 (en) * 1988-10-28 1988-11-30 Boc Group Plc Improvements in mechanical pumps
FR2642479B1 (fr) * 1989-02-02 1994-03-18 Alcatel Cit Pompe a vide du type roots, multietagee
JP2537696B2 (ja) * 1990-09-21 1996-09-25 株式会社荏原製作所 多段真空ポンプ
JPH06505076A (ja) * 1991-02-01 1994-06-09 ライボルト　アクチエンゲゼルシヤフト 乾式運転型の２軸式真空ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9408141A1 *

Also Published As

Publication number Publication date
DE59306466D1 (de) 1997-06-19
US5660535A (en) 1997-08-26
EP0663045B1 (fr) 1997-05-14
WO1994008141A1 (fr) 1994-04-14
DE4233142A1 (de) 1994-04-07
JPH09502001A (ja) 1997-02-25

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