EP0663045A1 - Method of operating a claw-type vacuum pump, and a claw-type vacuum pump suitable for carrying out the method. - Google Patents

Method of operating a claw-type vacuum pump, and a claw-type vacuum pump suitable for carrying out the method.

Info

Publication number
EP0663045A1
EP0663045A1 EP93919226A EP93919226A EP0663045A1 EP 0663045 A1 EP0663045 A1 EP 0663045A1 EP 93919226 A EP93919226 A EP 93919226A EP 93919226 A EP93919226 A EP 93919226A EP 0663045 A1 EP0663045 A1 EP 0663045A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
pump according
claw
cooler
claw vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP93919226A
Other languages
German (de)
French (fr)
Other versions
EP0663045B1 (en
Inventor
Andreas Kobus
Uwe Gottschlich
Lothar Brenner
Hartmut Kriehn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0663045A1 publication Critical patent/EP0663045A1/en
Application granted granted Critical
Publication of EP0663045B1 publication Critical patent/EP0663045B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a method for operating a claw vacuum pump with two or more stages, each of which has a scooping chamber with a pair of claw rotors and suction or outlet openings arranged on the end face.
  • the invention also relates to a claw vacuum pump suitable for carrying out this operating method.
  • a claw vacuum pump is known from EU-A 365 695.
  • Each rotor of the claw rotor pairs is equipped with a claw (tooth) and a recess. They perform their rotary movement in a combing and non-contact manner in the ladle.
  • the claws have the task of separating the suction side from the pressure side.
  • the peripheral surface areas of the claws form the necessary sealing gaps with the peripheral scoop inner wall.
  • the claws cannot fulfill their task of separating the suction side from the pressure side, since they no longer move in this phase Move close to the peripheral inner chamber wall. In this phase it is therefore necessary that the Separation of the suction and pressure side is ensured by the fact that the suction or outlet opening - or both - is / are closed. This is done in a known manner by the rotors themselves.
  • the suction and outlet openings are arranged and designed on the end face in such a way that they can be opened or closed with the aid of the recesses in the rotors.
  • the object of the present invention is to operate and design a claw vacuum pump in such a way that its operation is not endangered by liquids entering the pump - be it condensation or by operating errors of the system to be evacuated - liquids entering the pump.
  • this object is achieved in that the pump is operated without internal compression and in that the gases emerging from at least one - preferably all - stage (s) are cooled.
  • "Without internal compression” means that there must be no smaller delivery volumes that are not connected to the respective outlet opening. For the design and arrangement of the respective outlet opening, this means that they must open immediately after the completion of the immersion phase and must remain open until the beginning of the next immersion phase.
  • the operation of a claw vacuum pump operated or designed in this way is not endangered even if the scooping spaces are completely filled with liquid.
  • Shrinking, closed delivery volumes which would lead to the pump being blocked due to the incompressibility of the liquids, do not occur.
  • the compression work to be performed is greater than with a pump operated with internal compression.
  • Thermal problems that occur as a result are avoided by the cooling provided.
  • the gases are expediently cooled with the aid of a cooling device which is arranged downstream of the respective outlet opening of the pump stages.
  • the gas ejected from one stage is in cooled at the outlet opening cooling device. Since during the operation of the pump - except in the start-up phase - the suction pressure of one stage is lower than the discharge pressure, part of the cooled gases flows back into the pumping chamber immediately after opening the outlet opening and reduces the temperature in the next Extraction phase of extracted gases.
  • a particularly expedient development of the invention consists in the fact that a disc separating the two scoops of successive stages is designed as a cooler.
  • the cooler is arranged immediately downstream of the outlet opening of the first of the two stages, so that effective cooling of the gas components flowing back is effected.
  • FIG. 1 shows a section through a two-stage claw vacuum pump at one of the two shafts
  • Figure 2 is a plan view of a pair of rotors in the suction-side stage or - in the case of more than two stages - in an intermediate stage and
  • Figure 3 is a plan view of a pair of rotors in the pressure side stage.
  • FIGS. 1 to 3 are each parts of a claw vacuum pump 1 with two shafts 2, 3, on which the rotor pairs 4, 5 and 6, 7 are fastened.
  • the rotor pairs 4, 5 and 6, 7 are of the claw type. They rotate in the scoops 8, 9, which are formed by a plurality of housing parts 11, 12, 13.
  • FIG. 1 shows that the housing part 11 is a disk into which the exhaust channels 14, 15 are inserted.
  • the disc 11 is supported on a housing part 16, in which the shafts 2, 3 are mounted lying in the bearings 17 f and in which the drive motor, not shown, is located.
  • the scoops 8, 9 are formed by the pot-like housing parts 12, 13 which are placed on the disk 11.
  • the housing part 12 simultaneously forms the separating disk 18 between the two scoops 8, 9.
  • the shafts 2, 3 pass through the disks 11 and 18. At the level of these disks, they are equipped with bushings 21, 22, the outside of which is disks 11, Form 18 labyrinth seals. In a manner not shown, the individual housing parts are held together by bolts.
  • the intake duct 24 passes through the housing part 13 and opens into. the suction opening 25 arranged at the end (FIG. 2).
  • the slot-shaped suction opening 25, which extends along an arc of a circle, is concentric with the shaft 2 and is controlled by the recess 26 in the rotor 4.
  • the outlet opening 27, which also extends along an arc, is of slot-shaped design and is arranged concentrically to the shaft 3 and is located in the disk 18. Its open or closed state is controlled by the cutout 28 in the rotor 5.
  • the outlet opening 27 is followed by a channel 29 passing through the disk 18 and opening into the suction opening 30 (FIG. 3) of the second stage.
  • Exhaust pipes 33, 34 connect to the exhaust gas channels 14, 15 outside the pump 1 and open into the housing 35 of a cooler 36. Gases sucked in from a recipient (not shown) connected to the suction channel 24 and conveyed by the pump 1 leave the cooler 36 through the outlet connection 37. In the jacket regions of the housing parts 12, 13 there are cooling channels 38, 39 which during operation of are flowed through a coolant. Additional cooling channels 40 can be provided in the disks 11, 18 if they also function as a cooler.
  • the claw rotor pair 4, 5 is shown in two different positions. In their position shown in long lines, the claws and recesses of the rotors 4, 5 have just ended their immersion phase.
  • the continuation of the rotary movement (cf. arrows 41, 42) causes an enlargement of the (small) space 43 located between the claws and a reduction of the (large) space 44 also located between the claws.
  • the small, enlarging space 43 is the suction space and will be connected to the suction opening 25 after a brief continuation of the rotary movement.
  • the large, decreasing extension space 44 is connected to the outlet opening 27 immediately after the immersion phase so that internal compression does not occur.
  • the claws and recesses are just beginning their immersion phase.
  • the suction space 43 ' has its largest volume.
  • the recess 26 has just closed the suction opening 25.
  • the extension space 44 ' has assumed its smallest volume.
  • the outlet opening 27 was continuously open during the previous reduction in the volume of the extension space 44 '. There was no compression of the conveyed gases.
  • the cutout 28 has just closed the outlet opening 27.
  • FIG. 3 shows a top view of a pressure stage.
  • the rotors 6, 7 with their cutouts 45, 46 are again shown in different positions, the positions shown in short and long lines corresponding to the exemplary embodiment according to FIG. 2. Another position is shown in dash-dotted lines in order to explain a difference to the embodiment according to FIG. 2.
  • the second stage pressure stage according to FIG. 3 differs from the suction stage shown in FIG. 2 (or intermediate stage for a pump with more than two stages) in that two outlet openings (31, 32) are provided. So that the goal of "no internal compression" remains fulfilled, the distance between the two outlet openings must not be greater than the width of the recess 46, all based on the circular arc on which the outlet openings 31, 32 lie. It is thereby achieved that the shrinking extension space 44 is constantly connected to one of the two outlet openings 31, 32.
  • Claw vacuum pump for performing the method according to claim 1 with two or more stages, each having a scooping chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and suction or outlet openings (25, 27) arranged on the end face 30, 31, 32), characterized in that in each stage the outlet opening (27; 31, 32) is arranged and designed such that it opens immediately after the end of a dive phase and only at the beginning of the next dive phase is closed.
  • claw vacuum pump according to claim 2, characterized in that the cooling of the gases takes place with the aid of a cooling device (18, 38; 36) which is arranged downstream of the respective outlet opening (27; 31, 32).

Abstract

The invention concerns a method of operating a claw-type vacuum pump (1) with two or more stages, each of which has a suction chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and end-located suction and discharge ports (25, 27; 30, 31, 32). In order to avoid the possibility of liquids affecting the operation of the pump, the invention proposes that the pump (1) is operated without internal compression and that the gas emerging from at least one -- and preferably all -- stage(s) is cooled.

Description

Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durch¬ führung dieses Betriebsverfahrens geeignete KlauenvakuumpumpeMethod for operating a claw vacuum pump and claw vacuum pump suitable for carrying out this operating method
Die Erfindung bezieht sich auf ein Verfahren zum Betrieb einer Klauenvakuumpumpe mit zwei oder mehr Stufen, die jeweils einen Schöpfraum mit einem Klauenrotorpaar und stirnseitig angeordnete Ansaug- bzw. Austrittsöffnungen aufweisen. Außerdem betrifft die Erfindung eine für die Durchführung dieses Betriebsverfahrens geeignete Klauenvakuumpumpe.The invention relates to a method for operating a claw vacuum pump with two or more stages, each of which has a scooping chamber with a pair of claw rotors and suction or outlet openings arranged on the end face. The invention also relates to a claw vacuum pump suitable for carrying out this operating method.
Aus der EU-A 365 695 ist eine KlauenVakuumpumpe bekannt. Jeder Rotor der Klauenrotorpaare ist jeweils mit einer Klaue (Zahn) und einer Aussparung ausgerüstet. Sie führen ihre Drehbewegung kämmend und berührungsfrei im Schöpfräum aus. Während der syn¬ chronen Bewegung der Rotoren bilden sich zunächst vergrößernde und dann wieder verkleinernde Räume aus, die das auf der Saug¬ seite eingeströmte Gas zur Druckseite fördern. Die Klauen haben die Aufgabe, die Saugseite von der Druckseite zu trennen. Die peripheren Oberflächenbereiche der Klauen bilden dazu mit der peripheren Schöpfrau innenwand die notwendigen Dichtspalte. Während des kämmenden Durchgangs der Klauen-Aussparung-Zonen der Rotoren durch den zentralen Bereich des Schöpfraumes (Durch- tauchphase) können die Klauen ihre Aufgabe, die Saugseite von der Druckseite zu trennen, nicht erfüllen, da sie sich in dieser Phase nicht mehr in der Nähe der peripheren Schöpfrauminnenwand bewegen. In dieser Phase ist es deshalb erforderlich, daß die Trennung von Ansaug- und Druckseite dadurch sichergestellt ist, daß die Ansaug- oder Austrittεöffnung - oder beide - geschlossen ist/sind. Dieses geschieht in bekannter Weise durch die Rotoren selbst. Die Ansaug- und Austrittsöffnungen sind stirnseitig derart angeordnet und ausgebildet, daß sie mit Hilfe der Ausspa¬ rungen in den Rotoren geöffnet bzw. geschlossen werden können.A claw vacuum pump is known from EU-A 365 695. Each rotor of the claw rotor pairs is equipped with a claw (tooth) and a recess. They perform their rotary movement in a combing and non-contact manner in the ladle. During the synchronous movement of the rotors, initially enlarging and then again reducing spaces are formed, which convey the gas flowing in on the suction side to the pressure side. The claws have the task of separating the suction side from the pressure side. The peripheral surface areas of the claws form the necessary sealing gaps with the peripheral scoop inner wall. During the intermeshing passage of the claw recess zones of the rotors through the central area of the scooping space (immersion phase), the claws cannot fulfill their task of separating the suction side from the pressure side, since they no longer move in this phase Move close to the peripheral inner chamber wall. In this phase it is therefore necessary that the Separation of the suction and pressure side is ensured by the fact that the suction or outlet opening - or both - is / are closed. This is done in a known manner by the rotors themselves. The suction and outlet openings are arranged and designed on the end face in such a way that they can be opened or closed with the aid of the recesses in the rotors.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Klauenvakuumpumpe derart zu betreiben und auszubilden, daß ihr Betrieb durch in die Pumpe gelangende Flüssigkeiten - seien es Kondensationen oder aufgrund von Betriebsfehlem der zu evakuie¬ renden Anlage in die Pumpe gelangende Flüssigkeiten - nicht gefährdet ist.The object of the present invention is to operate and design a claw vacuum pump in such a way that its operation is not endangered by liquids entering the pump - be it condensation or by operating errors of the system to be evacuated - liquids entering the pump.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß die Pumpe ohne innere Verdichtung betrieben wird und daß die aus mindestens einer - vorzugsweise allen - Stufe(n) austretenden Gase gekühlt werden. "Ohne innere Verdichtung" bedeutet, daß sich verklei¬ nernde, nicht mit der jeweiligen Austrittsöffnung in Verbindung stehende Fördervolumina nicht vorhanden sein dürfen. Für die Ausbildung und Anordnung der jeweiligen Austrittsöffnung heißt das, daß sie sich unmittelbar nach dem Abschluß der Durchtauch¬ phase öffnen und bis zum Beginn der nächsten Durchtauchphase ihre Offenstellung beibehalten muß. Der Betrieb einer in dieser Weise betriebenen bzw. ausgebildeten Klauenvakuumpumpe ist selbst dann nicht gefährdet, wenn sich die Schöpfräume vollständig mit Flüssigkeit füllen. Sich verkleinernde, abgeschlossene Fördervo¬ lumina, die wegen der Inkompressibilität der Flüssigkeiten zu einem Blockieren der Pumpe führen würden, treten nicht auf.According to the invention, this object is achieved in that the pump is operated without internal compression and in that the gases emerging from at least one - preferably all - stage (s) are cooled. "Without internal compression" means that there must be no smaller delivery volumes that are not connected to the respective outlet opening. For the design and arrangement of the respective outlet opening, this means that they must open immediately after the completion of the immersion phase and must remain open until the beginning of the next immersion phase. The operation of a claw vacuum pump operated or designed in this way is not endangered even if the scooping spaces are completely filled with liquid. Shrinking, closed delivery volumes, which would lead to the pump being blocked due to the incompressibility of the liquids, do not occur.
Bei einer ohne innere Verdichtung betriebenen Klauenvakuumpumpe ist die zu leistende Verdichtungsarbeit größer als bei einer mit innerer Verdichtung betriebenen Pumpe. Dadurch auftretende thermische Probleme werden durch die vorgesehene Kühlung ver¬ mieden. Zweckmäßig erfolgt die Kühlung der Gase mit Hilfe einer Kühleinrichtung, die der jeweiligen Austrittsöffnung der Pump¬ stufen nachgeordnet ist. Bei in dieser Weise ausgebildeten Klauenpumpen wird das aus einer Stufe ausgeschobene Gas in der sich an die Austrittsöffnung anschließenden Kühleinrichtung gekühlt. Da während des Betriebs der Pumpe - außer in der An¬ fahrphase - der Ansaugdruck einer Stufe kleiner ist als der Ausschubdruck, strömt unmittelbar nach dem öffnen der Austritts¬ öffnung ein Teil der gekühlten Gase in den Schöpfraum zurück und reduziert die Temperatur der in der nächsten Ausschubphase geförderten Gase.With a claw vacuum pump operated without internal compression, the compression work to be performed is greater than with a pump operated with internal compression. Thermal problems that occur as a result are avoided by the cooling provided. The gases are expediently cooled with the aid of a cooling device which is arranged downstream of the respective outlet opening of the pump stages. In the case of claw pumps designed in this way, the gas ejected from one stage is in cooled at the outlet opening cooling device. Since during the operation of the pump - except in the start-up phase - the suction pressure of one stage is lower than the discharge pressure, part of the cooled gases flows back into the pumping chamber immediately after opening the outlet opening and reduces the temperature in the next Extraction phase of extracted gases.
Eine besonders zweckmäßige Weiterbildung der Erfindung besteht darin, daß eine die beiden Schöpfräume aufeinanderfolgender Stufen trennende Scheibe als Kühler ausgebildet ist. Bei dieser Lösung ist der Kühler der Austrittsöffnung der ersten der beiden Stufen unmittelbar nachgeordnet, so daß eine wirksame Kühlung der jeweils zurückströmenden Gasanteile bewirkt wird.A particularly expedient development of the invention consists in the fact that a disc separating the two scoops of successive stages is designed as a cooler. In this solution, the cooler is arranged immediately downstream of the outlet opening of the first of the two stages, so that effective cooling of the gas components flowing back is effected.
Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 bis 3 dargestellten Ausführungsbeispielen erläutert werden. Es zeigenFurther advantages and details of the invention will be explained with reference to the exemplary embodiments shown in FIGS. 1 to 3. Show it
Figur 1 einen Schnitt durch eine zweistufige Klauenvakuum- pumpe in Höhe einer der beiden Wellen,FIG. 1 shows a section through a two-stage claw vacuum pump at one of the two shafts,
Figur 2 eine Draufsicht auf ein Rotorpaar in der saugsei- tigen Stufe oder - bei mehr als zwei Stufen - in einer Zwischenstufe undFigure 2 is a plan view of a pair of rotors in the suction-side stage or - in the case of more than two stages - in an intermediate stage and
Figur 3 eine Draufsicht auf ein Rotorpaar in der drucksei¬ tigen Stufe.Figure 3 is a plan view of a pair of rotors in the pressure side stage.
Bei den in den Figuren 1 bis 3 dargestellten Ausführungsbei- spielen handelt es sich jeweils um Teile einer Klauenvakuumpumpe 1 mit zwei Wellen 2, 3, auf denen die Rotorpaare 4, 5 bzw. 6, 7 befestigt sind. Die Rotorpaare 4, 5 und 6, 7 sind vom Klauentyp. Sie rotieren in den Schöpfräumen 8, 9, die von mehreren Gehäuse¬ teilen 11, 12, 13 gebildet werden. Figur 1 zeigt, daß das Gehäu¬ seteil 11 eine Scheibe ist, in die Abgaskanäle 14, 15 eingelassen sind. Die Scheibe 11 stützt sich auf einem Gehäuseteil 16 ab, in dem die Wellen 2, 3 in den Lagern 17 f liegend gelagert sind und in dem sich der nicht dargestellte Antriebmotor befindet. Die Schöpfräume 8, 9 werden von den topfähnlich gestalteten Gehäuse¬ teilen 12, 13 gebildet, die auf die Scheibe 11 aufgesetzt sind. Das Gehäuseteil 12 bildet gleichzeitig die Trennscheibe 18 zwischen den beiden Schöpfräumen 8, 9. Die Wellen 2, 3 durchset¬ zen die Scheiben 11 und 18. In Höhe dieser Scheiben sind sie mit Buchsen 21, 22 ausgerüstet, deren Außenseite mit den Scheiben 11, 18 Labyrinthdichtungen bilden. In nicht näher dargestellter Weise werden die einzelnen Gehäuseteile durch Bolzen zusammengehalten.The exemplary embodiments shown in FIGS. 1 to 3 are each parts of a claw vacuum pump 1 with two shafts 2, 3, on which the rotor pairs 4, 5 and 6, 7 are fastened. The rotor pairs 4, 5 and 6, 7 are of the claw type. They rotate in the scoops 8, 9, which are formed by a plurality of housing parts 11, 12, 13. FIG. 1 shows that the housing part 11 is a disk into which the exhaust channels 14, 15 are inserted. The disc 11 is supported on a housing part 16, in which the shafts 2, 3 are mounted lying in the bearings 17 f and in which the drive motor, not shown, is located. The scoops 8, 9 are formed by the pot-like housing parts 12, 13 which are placed on the disk 11. The housing part 12 simultaneously forms the separating disk 18 between the two scoops 8, 9. The shafts 2, 3 pass through the disks 11 and 18. At the level of these disks, they are equipped with bushings 21, 22, the outside of which is disks 11, Form 18 labyrinth seals. In a manner not shown, the individual housing parts are held together by bolts.
Der Ansaugkanal 24 durchsetzt das Gehäuseteil 13 und mündet in . die stirnseitig angeordnete Ansaugöffnung 25 (Figur 2). Die sich entlang eines Kreisbogens erstreckende, schlitzförmige Ansaug¬ öffnung 25 liegt konzentrisch zur Welle 2 und wird von der Aussparung 26 im Rotor 4 gesteuert. Die sich ebenfalls entlang eines Kreisbogens erstreckende, schlitzförmig ausgebildete und konzentrisch zur Welle 3 angeordnete Austrittsöffnung 27 befindet sich in der Scheibe 18. Ihr Offen- bzw. Schließzustand wird von der Aussparung 28 im Rotor 5 gesteuert. An die Austrittsöffnung 27 schließt sich ein die Scheibe 18 durchsetzender Kanal 29 an, der in die Ansaugöffnung 30 (Figur 3) der zweiten Stufe mündet. In der Scheibe 11 befinden sich zwei Austrittsöffnungen 31 und 32, an die sich jeweils die Abgaskanäle 14, 15 anschließen.The intake duct 24 passes through the housing part 13 and opens into. the suction opening 25 arranged at the end (FIG. 2). The slot-shaped suction opening 25, which extends along an arc of a circle, is concentric with the shaft 2 and is controlled by the recess 26 in the rotor 4. The outlet opening 27, which also extends along an arc, is of slot-shaped design and is arranged concentrically to the shaft 3 and is located in the disk 18. Its open or closed state is controlled by the cutout 28 in the rotor 5. The outlet opening 27 is followed by a channel 29 passing through the disk 18 and opening into the suction opening 30 (FIG. 3) of the second stage. There are two outlet openings 31 and 32 in the disk 11, to each of which the exhaust gas channels 14, 15 are connected.
An die Abgaskanäle 14, 15 schließen sich außerhalb der Pumpe 1 Abgasleitungen 33, 34 an, die in das Gehäuse 35 eines Kühlers 36 münden. Aus einem nicht dargestellten, mit dem Ansaugkanal 24 verbundenen Rezipienten angesaugte und durch die Pumpe 1 geför¬ derte Gase verlassen den Kühler 36 durch den Austrittsstutzen 37. In den Mantelbereichen der Gehäuseteile 12, 13 befinden sich Kühlkanäle 38, 39, die während des Betriebes von einem Kühlmittel durchströmt sind. Weitere Kühlkanäle 40 können in den Scheiben 11, 18 vorgesehen sein, wenn diese gleichzeitig die Funktion eines Kühlers haben.Exhaust pipes 33, 34 connect to the exhaust gas channels 14, 15 outside the pump 1 and open into the housing 35 of a cooler 36. Gases sucked in from a recipient (not shown) connected to the suction channel 24 and conveyed by the pump 1 leave the cooler 36 through the outlet connection 37. In the jacket regions of the housing parts 12, 13 there are cooling channels 38, 39 which during operation of are flowed through a coolant. Additional cooling channels 40 can be provided in the disks 11, 18 if they also function as a cooler.
Um das dargestellte Ausführungsbeispiel einer Klauenvakuumpumpe ohne innere Verdichtung betreiben zu können, ist eine besondere Gestaltung und Anordnung der Austrittsöffnungen 27 bzw. 31, 32 erforderlich.In order to be able to operate the illustrated embodiment of a claw vacuum pump without internal compression, it is a special one Design and arrangement of the outlet openings 27 and 31, 32 required.
Zur Erläuterung dieser Anordnung in der ersten Stufe (Ansaugstu¬ fe, Fig. 2) ist das Klauenrotorpaar 4, 5 in zwei verschiedenen Positionen dargestellt. In ihrer langgestrichelt dargestellten Position haben die Klauen und Aussparungen der Rotoren 4, 5 soeben ihre Durchtauchphase beendet. Die Fortsetzung der Drehbe¬ wegung (vgl. Pfeile 41, 42) bewirkt eine Vergrößerung des zwi¬ schen den Klauen befindlichen (kleinen) Raumes 43 und eine Verkleinerung des ebenfalls zwischen den Klauen befindlichen (großen) Raumes 44. Der kleine, sich vergrößernde Raum 43 ist der Ansaugraum und wird nach kurzer Fortsetzung der Drehbewegung mit der Ansaugöffnung 25 in Verbindung stehen. Der große, sich verkleinernde Ausschubraum 44 wird unmittelbar nach der Durch¬ tauchphase mit der Austrittsöffnung 27 verbunden, damit eine innere Kompression nicht eintritt.To explain this arrangement in the first stage (intake stage, FIG. 2), the claw rotor pair 4, 5 is shown in two different positions. In their position shown in long lines, the claws and recesses of the rotors 4, 5 have just ended their immersion phase. The continuation of the rotary movement (cf. arrows 41, 42) causes an enlargement of the (small) space 43 located between the claws and a reduction of the (large) space 44 also located between the claws. The small, enlarging space 43 is the suction space and will be connected to the suction opening 25 after a brief continuation of the rotary movement. The large, decreasing extension space 44 is connected to the outlet opening 27 immediately after the immersion phase so that internal compression does not occur.
In ihrer in Figur 2 kurzgestrichelt dargestellten Position beginnen die Klauen und Aussparungen soeben ihre Durchtauchphase. Der Ansaugraum 43' hat sein größtes Volumen. Die Aussparung 26 hat soeben die Ansaugöffnung 25 geschlossen. Der Ausschubraum 44' hat sein kleinstes Volumen angenommen. Während der vorhergegan¬ genen Verkleinerung des Volumens des Ausschubraumes 44' war die Austrittsöffnung 27 ständig offen. Eine Kompression der geför¬ derten Gase ist nicht eingetreten. In der kurzgestrichelt darge¬ stellten Positon der Rotoren hat die Aussparung 28 die Austritts¬ öffnung 27 soeben geschlossen.In their position shown in dashed lines in FIG. 2, the claws and recesses are just beginning their immersion phase. The suction space 43 'has its largest volume. The recess 26 has just closed the suction opening 25. The extension space 44 'has assumed its smallest volume. The outlet opening 27 was continuously open during the previous reduction in the volume of the extension space 44 '. There was no compression of the conveyed gases. In the position of the rotors shown in dashed lines, the cutout 28 has just closed the outlet opening 27.
In Figur 3 ist eine Draufsicht auf eine Druckstufe dargestellt. Die Rotoren 6,7 mit ihren Aussparungen 45, 46 sind wieder in verschiedenen Positionen dargestellt, wobei die kurz- und lang- gestrichelt dargestellten Positionen dem Ausführungsbeispiel nach Fig. 2 entsprechen. Eine weitere Stellung ist strichpunktiert dargestellt, um einen Unterschied zur Ausführung nach Figur 2 zu erläutern. Die zweite Stufe (Druckstufe nach Fig. 3) unterschei¬ det sich von der in Figur 2 dargestellten Saugstufe (oder Zwi¬ schenstufe bei einer Pumpe mit mehr als zwei Stufen) dadurch, daß zwei Austrittsöffnungen (31, 32) vorgesehen sind. Damit das Ziel "keine innere Kompression" erfüllt bleibt, darf der Abstand der beiden Austrittsöffnungen nicht größer sein als die Weite der Aussparung 46, alles bezogen auf den Kreisbogen, auf dem die Austrittsöffnungen 31, 32 liegen. Dadurch wird erreicht, daß der sich verkleinernde Ausschubraum 44 ständig mit einer der beiden Austrittsöffnungen 31, 32 verbunden ist.FIG. 3 shows a top view of a pressure stage. The rotors 6, 7 with their cutouts 45, 46 are again shown in different positions, the positions shown in short and long lines corresponding to the exemplary embodiment according to FIG. 2. Another position is shown in dash-dotted lines in order to explain a difference to the embodiment according to FIG. 2. The second stage (pressure stage according to FIG. 3) differs from the suction stage shown in FIG. 2 (or intermediate stage for a pump with more than two stages) in that two outlet openings (31, 32) are provided. So that the goal of "no internal compression" remains fulfilled, the distance between the two outlet openings must not be greater than the width of the recess 46, all based on the circular arc on which the outlet openings 31, 32 lie. It is thereby achieved that the shrinking extension space 44 is constantly connected to one of the two outlet openings 31, 32.
Aufgrund der Tatsache, daß zwei Austrittsöffnungen 31, 32 vor¬ handen sind, wird erreicht, daß ein Teil der durch die Aus¬ trittsöffnung 32 ausgestoßenen und über die sich anschließenden Kanäle 15, 34 in den Kühler 36 gelangenden Gase (Pfeil 47) über die Kanäle 33, 14 (Pfeil 48) durch die Austrittsöffnung 31 in den Schöpfräum 9 zurückströmt, wenn sich die Austrittsöffnung 31 bei der nächsten Umdrehung des Rotors 7 wieder öffnet. Da die Lei¬ tungen 33, 34 derart an das Gehäuse des Kühlers 36 angeschlossen sind, daß der zurückströmende Anteil auch den Kühler selbst durchströmt hat, kann ein Kühlluftkreislauf aufrechterhalten werden, der die aufgrund der erhöhten Verdichtungsarbeit entste¬ hende Wärme abführt.Due to the fact that two outlet openings 31, 32 are present, it is achieved that part of the gases expelled through the outlet opening 32 and entering the cooler 36 via the adjoining channels 15, 34 (arrow 47) Channels 33, 14 (arrow 48) flows back through the outlet opening 31 into the scoop chamber 9 when the outlet opening 31 opens again the next time the rotor 7 rotates. Since the lines 33, 34 are connected to the housing of the cooler 36 in such a way that the portion flowing back has also flowed through the cooler itself, a cooling air circuit can be maintained which dissipates the heat generated due to the increased compression work.
Auch bei der ohne innere Verdichtung betriebenen Saug- oder Zwischenstufe mit den Rotoren 4,5 (Fig. 2) tritt der Effekt des Einströmens von Gasen in den Schöpfraum 8 unmittelbar nach der Öffnung der Austrittsöffnung 27 auf, solange der Ansaugdruck ausreichend niedrig ist. Nur bei hohen Ansaugdrücken in der Anfahrphase ist das nicht der Fall. Durch Kühlung der Zwischen¬ scheibe 18 (Kühlkanal 40) mit dem Gasförderkanal 29 kann die entstehende Wärme abgeführt werden. Wird eine Aufteilung der Austrittsöffnung 27 entsprechend Fig. 3 (Austrittsöffnungen 31, 32) vorgenommen, dann wird der Kühleffekt noch verbessert. Zweckmäßig hat der Abgaskanal 29 einen vergrößerten Strömungs- querschnitt, so daß die Gasverweilzeit und damit die Kühlwirkung ebenfalls größer wird. Durch die Kühlung insbesondere im Kanal 29 entstehendes Kondensat gelangt über die Ansaugöffnung 30 in die sich anschließende Stufe und wird durch diese Stufe ausgefördert. Verfahren zum Betrieb einer Klauenvakuumpumpe und für die Durch¬ führung dieses Betriebsverfahrens geeignete KlauenvakuumpumpeEven when the suction or intermediate stage with the rotors 4, 5 (FIG. 2) is operated without internal compression, the effect of gases flowing into the scooping chamber 8 occurs immediately after the opening of the outlet opening 27, as long as the suction pressure is sufficiently low. This is not the case only at high intake pressures during the start-up phase. The heat generated can be dissipated by cooling the intermediate disk 18 (cooling channel 40) with the gas delivery channel 29. If the outlet opening 27 is divided as shown in FIG. 3 (outlet openings 31, 32), the cooling effect is further improved. The exhaust duct 29 expediently has an enlarged flow cross section, so that the gas residence time and thus the cooling effect also increase. Due to the cooling, in particular in the conduit 29, condensate passes through the suction opening 30 into the subsequent stage and is conveyed through this stage. Method for operating a claw vacuum pump and claw vacuum pump suitable for carrying out this operating method
PATENTANSPRÜCHEPATENT CLAIMS
1. Verfahren zum Betrieb einer Klauenvakuumpumpe (1) mit zwei oder mehr Stufen, die jeweils einen Schöpfräum (8, 9) mit einem Klauenrotorpaar (4, 5; 6, 7) und stirnseitig angeord¬ nete Ansaug- bzw. Austrittsöffnungen ( 25, 27; 30, 31, 32) aufweisen, dadurch gekennzeichnet, daß die Pumpe (1) ohne innere Verdichtung betrieben wird und daß die aus mindestens einer - vorzugsweise allen - Stufe(n) austretenden Gase gekühlt werden.1. Method for operating a claw vacuum pump (1) with two or more stages, each of which has a pumping chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and suction or outlet openings (25, 27; 30, 31, 32), characterized in that the pump (1) is operated without internal compression and that the gases emerging from at least one - preferably all - stage (s) are cooled.
2. Klauenvakuumpumpe zur Durchführung des Verfahrens nach Anspruch 1 mit zwei oder mehr Stufen, die jeweils einen Schöpfräum (8, 9) mit einem Klauenrotorpaar (4, 5; 6, 7) und stirnseitig angeordnete Ansaug- bzw. Austrittsöffnungen (25, 27: 30, 31, 32) aufweisen, dadurch gekennzeichnet, daß in jeder Stufe die Austrittsöffnung (27; 31, 32) derart ange¬ ordnet und ausgebildet ist, daß sie unmittelbar nach dem Ende einer Durchtauchphase geöffnet und erst mit dem Beginn der nächst folgenden Durchtauchphase geschlossen wird.2. Claw vacuum pump for performing the method according to claim 1 with two or more stages, each having a scooping chamber (8, 9) with a pair of claw rotors (4, 5; 6, 7) and suction or outlet openings (25, 27) arranged on the end face 30, 31, 32), characterized in that in each stage the outlet opening (27; 31, 32) is arranged and designed such that it opens immediately after the end of a dive phase and only at the beginning of the next dive phase is closed.
3. Klauenvakuumpumpe nach Anspruch 2, dadurch gekennzeichnet, daß die Kühlung der Gase mit Hilfe eint.- Kühleinrichtung (18, 38; 36) erfolgt, die der jeweiligen Austrittsöffnung (27; 31, 32) nachgeordnet ist. 3. claw vacuum pump according to claim 2, characterized in that the cooling of the gases takes place with the aid of a cooling device (18, 38; 36) which is arranged downstream of the respective outlet opening (27; 31, 32).

Claims

. Klauenvakuumpumpe nach Anspruch 3, dadurch gekennzeichnet, daß eine die Schöpfräume (8, 9) von zwei aufeinanderfolgen¬ den Stufen trennende Scheibe (18) oder/und eine vom druck¬ seitigen Auslaßkanal durchsetzte Scheibe (11) als Kühler ausgebildet ist. . Claw vacuum pump according to claim 3, characterized in that a disk (18) separating the scoops (8, 9) from two successive stages and / or a disk (11) penetrated by the pressure-side outlet channel is designed as a cooler.
5. Klauenvakuumpumpe nach Anspruch 4, dadurch gekennzeichnet, daß der die Scheibe (18) durchsetzende, die beiden Stufen miteinander verbindende Gasförderkanal (29) zum Zwecke der Erhöhung der Verweilzeit der Gase einen vergrößerten Strö¬ mungsquerschnitt hat.5. claw vacuum pump according to claim 4, characterized in that the disc (18) passing through, the two stages interconnecting gas delivery channel (29) for the purpose of increasing the residence time of the gases has an enlarged flow cross-section.
6. Klauenvakuumpumpe nach Anspruch 3, dadurch gekennzeichnet, daß der Kühler (36) extern angeordnet ist.6. claw vacuum pump according to claim 3, characterized in that the cooler (36) is arranged externally.
7. Klauenvakuumpumpe nach Anspruch 2 , 3 oder 4, dadurch ge¬ kennzeichnet, daß die Abgasleitung (14, 15; 29; 33, 34, 37) die sich an eine Austrittsöffnung (27; 31, 32) einer Stufe anschließt, mit einem Kühler (36) in Verbindung steht.7. claw vacuum pump according to claim 2, 3 or 4, characterized ge indicates that the exhaust pipe (14, 15; 29; 33, 34, 37) which adjoins an outlet opening (27; 31, 32) of a step with a Radiator (36) communicates.
8. Klauenvakuumpumpe nach einem der Ansprüche 2 bis 7, dadurch gekennzeichnet, daß zwei Austrittsöffnungen (31, 32) vor¬ handen sind und daß ihr Abstand kleiner ist als die Weite der die Austrittsöffnungen steuernden Aussparung (46).8. claw vacuum pump according to one of claims 2 to 7, characterized in that two outlet openings (31, 32) are present and that their distance is smaller than the width of the opening controlling the opening (46).
9. Klauenvakuumpumpe nach den Ansprüchen 7 und 8, dadurch gekennzeichnet, daß sich an jede der beiden Austrittsöff¬ nungen (31, 32) eine separate Abgasleitung (33, 34) an¬ schließt und daß beide Abgasleitungen in das Gehäuse (35) des Kühlers (36) münden.9. claw vacuum pump according to claims 7 and 8, characterized in that each of the two outlet openings (31, 32) a separate exhaust pipe (33, 34) an¬ and that both exhaust pipes in the housing (35) of the cooler (36) open out.
10. Klauenvakuumpumpe nach Anspruch 8, dadurch gekennzeichnet, daß die beiden Abgasleitungen (33, 34) derart in das Gehäus (35) des Kühlers (36) münden, daß durch eine (34) der beide Abgasleitungen in den Kühler eintretendes und durch die zweite Abgasleitung (33) zum Schöpfräum (8, 9) zurückströ¬ mendes Gas den Kühler (36) durchströmt. 11. Klauenvakuumpumpe nach einem der Ansprüche 2 bis 10, dadurch gekennzeichnet, daß sie zweistufig ausgebildet ist, daß die die beiden Stufen trennende Scheibe (18) als Kühler für die aus der Saugstufe angeschobenen Gase ausgebildet ist und daß der Druckstufe ein externer Kühler (36) für die aus der Druckstufe ausgeschobenen Gase zugeordnet ist.10. claw vacuum pump according to claim 8, characterized in that the two exhaust pipes (33, 34) open into the housing (35) of the cooler (36) such that one (34) of the two exhaust pipes entering the cooler and through the second Exhaust gas line (33) flowing back to the scoop (8, 9) flows through the cooler (36). 11. claw vacuum pump according to one of claims 2 to 10, characterized in that it is designed in two stages, that the disc separating the two stages (18) is designed as a cooler for the gases pushed from the suction stage and that the pressure stage an external cooler (36 ) for the gases expelled from the pressure stage.
12. Klauenvakuumpumpe nach einem der Ansprüche 2 bis 11, dadurch gekennzeichnet, daß die rotierenden Systeme (Wellen 2, 7; Rotoren 4, 5; 6, 7) fliegend in einem Gehäuse (16) gelagert sind.12. Claw vacuum pump according to one of claims 2 to 11, characterized in that the rotating systems (shafts 2, 7; rotors 4, 5; 6, 7) are overhung in a housing (16).
13. Klauenvakuumpumpe nach einem der Ansprüche 2 bis 12, dadurch gekennzeichnet, daß topfähnlich gestaltete Gehäuseteile (12, 13) die Schöpfräume (8, 9) bilden.13. claw vacuum pump according to one of claims 2 to 12, characterized in that pot-shaped housing parts (12, 13) form the scoops (8, 9).
14. Klauenvakuumpumpe nach einem der Ansprüche 2 bis 13, dadurch gekennzeichnet, daß neben im Gehäusemantel befindlichen Kühlkanälen (38, 39) weitere Kühlkanäle (40) vorgesehen sind, die sich in Scheiben (11, 18) befinden, die die sich an die Austrittsöffnungen (27; 31, 32) anschließenden Abgaskanäle (29; 14, 15) aufnehmen. 14. Claw vacuum pump according to one of claims 2 to 13, characterized in that in addition to the cooling channels (38, 39) located in the housing jacket, further cooling channels (40) are provided which are located in disks (11, 18) which are located at the outlet openings (27; 31, 32) subsequent exhaust gas channels (29; 14, 15).
EP93919226A 1992-10-02 1993-08-31 Method of operating a claw-type vacuum pump, and a claw-type vacuum pump suitable for carrying out the method Expired - Lifetime EP0663045B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4233142A DE4233142A1 (en) 1992-10-02 1992-10-02 Method for operating a claw vacuum pump and claw vacuum pump suitable for carrying out this operating method
DE4233142 1992-10-02
PCT/EP1993/002349 WO1994008141A1 (en) 1992-10-02 1993-08-31 Method of operating a claw-type vacuum pump, and a claw-type vacuum pump suitable for carrying out the method

Publications (2)

Publication Number Publication Date
EP0663045A1 true EP0663045A1 (en) 1995-07-19
EP0663045B1 EP0663045B1 (en) 1997-05-14

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US (1) US5660535A (en)
EP (1) EP0663045B1 (en)
JP (1) JPH09502001A (en)
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WO (1) WO1994008141A1 (en)

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Also Published As

Publication number Publication date
WO1994008141A1 (en) 1994-04-14
EP0663045B1 (en) 1997-05-14
JPH09502001A (en) 1997-02-25
DE59306466D1 (en) 1997-06-19
US5660535A (en) 1997-08-26
DE4233142A1 (en) 1994-04-07

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