EP1444440B1 - Cooled screw-type vacuum pump - Google Patents
Cooled screw-type vacuum pump Download PDFInfo
- Publication number
- EP1444440B1 EP1444440B1 EP02790310.3A EP02790310A EP1444440B1 EP 1444440 B1 EP1444440 B1 EP 1444440B1 EP 02790310 A EP02790310 A EP 02790310A EP 1444440 B1 EP1444440 B1 EP 1444440B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- screw
- pump
- cooling
- vacuum pump
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 13
- 239000000110 cooling liquid Substances 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000002826 coolant Substances 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 238000005192 partition Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
- F04C2240/603—Shafts with internal channels for fluid distribution, e.g. hollow shaft
Definitions
- the invention relates to a screw vacuum pump having the features of the preamble of patent claim 1.
- a screw compressor known in the pumping chamber oil is injected.
- the injected oil lubricates and cools the rotors. It is being circulated.
- Part of the circuit is a heat exchanger, which is assigned a fan for cooling the cooling liquid.
- Heat exchanger and screw machine are located in the fan generated air flow, in such a way that first the screw machine is flowed around from the outside and then the heat exchanger is flowed through.
- liquid ring pumps From the DE 2 217 022 and the US 5,542,822 are known liquid ring pumps. They have a pump chamber with a circular interior and an eccentrically arranged impeller. In the housing contained operating fluid (usually water) forms with a rotation of the impeller by centrifugal force a uniform liquid ring and a sickle-shaped suction chamber. The wings of the impeller and the liquid ring form closed, their volume-changing chambers in which the gas to be transported is transported. The pump, its drive and a fan are arranged axially one behind the other. Both versions also have the always required liquid container into which the operating fluid enters after passing through the pump together with the pumped gas.
- the liquid containers 1 and 14 each extend parallel to the longitudinal axis of the machines. In the liquid containers 1 and 14 gas and liquid are separated from each other.
- the present invention has for its object to improve the cooling of a screw vacuum pump with the features mentioned. According to the invention this object is achieved by the characterizing features of the claims.
- a forced air flow which is generated for example by a coupled with the drive motor fan relieves the liquid cooling of the rotors located in the pump considerably.
- the invention makes it possible to realize a cooling concept for a screw vacuum pump in which the entire machine is air-cooled, although in addition a liquid cooling for the rotors is present. Although the resulting heat is absorbed by two different heat transfer media (liquid for the inner rotor cooling, outer cooling air flow), but ultimately dissipated in total by the cooling air flow. This also applies to the discharge of secondary heat fluxes, generated by engine losses, transmission and bearing losses etc.
- the gear compartment 7 In the housing 6 are the gear compartment 7, the engine compartment 8 with the drive motor 9 and another space 10, which is part of the coolant circuit for the rotors 3, 4.
- the rotors 3, 4 are equipped with shafts 11, 12 which pass through the gear chamber 7 and the engine compartment 8. About bearings in the dividing walls between the pump chamber and gear chamber 7 (partition wall 13) and the engine compartment 8 and cooling liquid chamber 10 (partition 14), the rotors 3, 4 are cantilevered.
- the partition between gear chamber 7 and engine compartment 8 is denoted by 15.
- the gear shaft 7 is the synchronous rotation of the rotors 3, 4 causing gear pair 16, 17.
- the rotor shaft 11 is also the drive shaft of the motor 9.
- the motor 9 may also have one of the shafts 11, 12 different drive shaft. In such a solution, its drive shaft ends in the gear chamber 7 and is equipped there with a gear which is in engagement with one of the synchronization gears 16, 17 (or another, not shown gear of the shaft 12).
- the shaft 11 passes through the space 10, is guided out of the housing 6 of the pump 1 and carries at its free end the wheel 20 of a fan or fan 21.
- the guidance of the air movement generated by the fan 20 is a pump 1 comprehensive housing 22, which is open in the region of both end faces (openings 23, 24).
- the fan 21 is operated so that the fan / motor-side opening 24 forms the air inlet opening.
- a heat exchanger 25 which is flowed through by the cooling liquid of the rotor internal cooling.
- the heat exchanger 25 is upstream of the fan 21, so that it simultaneously forms a contact protection for the fan 20.
- the advantage of this arrangement is that of the pump chamber 2 of the pump 1 cooling Air flow is preheated. This ensures that thermal expansions of the pump chamber 2 are allowed to the extent that the rotors 3, 4 assuming relatively high temperatures during operation of the pump 1 do not touch the housing 2.
- the housing 2 and the rotors 3, 4 to improve the heat conduction of aluminum.
- the housing 2 may have ribs for improving the thermal contact. Due to the size of the heat exchanger 25 and also the Verrippenungsgrades the pump chamber 2, the gap between the rotors 3, 4 and the housing 2 is set.
- the cooling liquid circuit for the cooling of the rotors 4, 5 is indicated only schematically.
- the shafts 11 and 12 serve to transport the coolant (eg oil) to and from the rotors 3, 4.
- the coolant leaving the rotors 3, 4 collects in the engine compartment 8. From there, it is collected via the Line 26 is fed to the heat exchanger 25.
- the air flow generated by the fan 21 absorbs the heat absorbed by the cooling fluid in the rotors 3, 4.
- the liquid leaving the heat exchanger 25 is supplied via the line 26 to the space 10. In a manner not shown in detail, it passes from there through in the waves 11, 12 located holes to the rotors 3, 4, flows through cooling channels and passes through the waves 11, 12 back into the engine compartment. 8
- the features of the invention allow to further increase the power density of a screw pump.
- the pump can be made smaller and operated with higher surface temperatures.
- the outer housing 22 serving for air guidance also has the function of protection against contact.
Description
Die Erfindung bezieht sich auf eine Schraubenvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a screw vacuum pump having the features of the preamble of
Aus der
Aus der
Aus der
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Kühlung einer Schraubenvakuumpumpe mit den eingangs genannten Merkmalen zu verbessern. Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.The present invention has for its object to improve the cooling of a screw vacuum pump with the features mentioned. According to the invention this object is achieved by the characterizing features of the claims.
Die erfindungsgemäße zusätzliche Kühlung des Pumpengehäuses von außen, und zwar mit einer erzwungenen Luftströmung, die beispielsweise von einem mit dem Antriebsmotor gekoppelten Lüfter erzeugt wird, entlastet die in der Pumpe befindliche Flüssigkeitskühlung der Rotoren erheblich. Zusätzlich ist es möglich, mit Hilfe der erzwungenen Luftströmung auch einen Wärmetauscher zu kühlen, der von der Kühlflüssigkeit der Rotorkühlung durchströmt ist.The inventive additional cooling of the pump housing from the outside, with a forced air flow, which is generated for example by a coupled with the drive motor fan relieves the liquid cooling of the rotors located in the pump considerably. In addition, it is possible with the help of forced air flow and a heat exchanger to cool, which is flowed through by the cooling liquid of the rotor cooling.
Die Erfindung ermöglicht es, ein Kühlkonzept für eine Schraubenvakuumpumpe zu realisieren, bei dem die gesamte Maschine luftgekühlt ist, obwohl zusätzlich eine Flüssigkeitskühlung für die Rotoren vorhanden ist. Die entstehende Wärme wird zwar von zwei unterschiedlichen Wärmeträgern (Flüssigkeit für die innere Rotorkühlung, äußerer Kühlluftstrom) aufgenommen, letztlich aber insgesamt vom Kühlluftstrom abgeführt. Dieses gilt auch für die Abführung von Nebenwärmeströmen, erzeugt von Motorverlusten, Getriebe- und Lagerverlusten etc..The invention makes it possible to realize a cooling concept for a screw vacuum pump in which the entire machine is air-cooled, although in addition a liquid cooling for the rotors is present. Although the resulting heat is absorbed by two different heat transfer media (liquid for the inner rotor cooling, outer cooling air flow), but ultimately dissipated in total by the cooling air flow. This also applies to the discharge of secondary heat fluxes, generated by engine losses, transmission and bearing losses etc.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand eines in der Figur schematisch dargestellten. Ausführungsbeispieles erläutert werden.Further advantages and details of the invention will become apparent from a schematically illustrated in the figure. Embodiment will be explained.
In der Figur sind die zu kühlende Schraubenvakuumpumpe mit 1, ihr Schöpfraumgehäuse mit 2, ihre Rotoren mit 3, 4, ihr Einlass mit 5 und ihr sich an das Schöpfraumgehäuse 2 mit den Rotoren 3, 4 anschließendes Getriebe-/Motorraum-Gehäuse mit 6 bezeichnet. Ein druckseitig gelegener Auslass ist nicht dargestellt. Im Gehäuse 6 befinden sich der Getrieberaum 7, der Motorraum 8 mit dem Antriebsmotor 9 und ein weiterer Raum 10, der Bestandteil des Kühlflüssigkeitskreislaufs für die Rotoren 3, 4 ist.In the figure, the screw vacuum pump to be cooled with 1, their pump chamber with 2, their rotors with 3, 4, their inlet with 5 and her to the
Die Rotoren 3, 4 sind mit Wellen 11, 12 ausgerüstet, die den Getrieberaum 7 und den Motorraum 8 durchsetzen. Über Lagerungen in den Trennwänden zwischen Schöpfraum und Getrieberaum 7 (Trennwand 13) sowie Motorraum 8 und Kühlflüssigkeitsraum 10 (Trennwand 14) sind die Rotoren 3, 4 fliegend gelagert. Die Trennwand zwischen Getrieberaum 7 und Motorraum 8 ist mit 15 bezeichnet. Im Getrieberaum 7 befindet sich das die synchrone Drehung der Rotoren 3, 4 bewirkende Zahnradpaar 16, 17. Die Rotorwelle 11 ist gleichzeitig die Antriebswelle des Motors 9. Der Motor 9 kann auch eine von den Wellen 11, 12 verschiedene Antriebswelle haben. Bei einer solchen Lösung endet seine Antriebswelle im Getrieberaum 7 und ist dort mit einem Zahnrad ausgerüstet, das mit einem der Synchronisationszahnräder 16, 17 (oder einem weiteren, nicht dargestellten Zahnrad der Welle 12) in Eingriff steht.The
Die Welle 11 durchsetzt den Raum 10, ist aus dem Gehäuse 6 der Pumpe 1 heraus geführt und trägt an ihrem freien Ende das Rad 20 eines Ventilators oder Lüfters 21. Der Führung der vom Lüfterrad 20 erzeugten Luftbewegung dient ein die Pumpe 1 umfassendes Gehäuse 22, das im Bereich beider Stirnseiten offen ist (Öffnungen 23, 24).The shaft 11 passes through the
Im Sinne der Erfindung wird der Lüfter 21 so betrieben, dass die lüfter-/motorseitige Öffnung 24 die Lufteintrittsöffnung bildet. Dieser Öffnung zugeordnet ist ein Wärmetauscher 25, der von der Kühlflüssigkeit der Rotorinnenkühlung durchströmt ist. Zweckmäßig ist der Wärmetauscher 25 dem Lüfter 21 vorgelagert, so dass er gleichzeitig einen Berührungsschutz für das Lüfterrad 20 bildet. Der Vorteil dieser Anordnung liegt darin, dass der das Schöpfraumgehäuse 2 der Pumpe 1 kühlende Luftstrom vorgewärmt ist. Dadurch wird erreicht, dass Wärmedehnungen des Schöpfraumgehäuses 2 in dem Umfange zugelassen werden, dass die während des Betriebs der Pumpe 1 relativ hohe Temperaturen annehmenden Rotoren 3, 4 das Gehäuse 2 nicht berühren. Vorzugsweise bestehen das Gehäuse 2 und die Rotoren 3, 4 zur Verbesserung der Wärmeleitung aus Aluminium. Weiterhin kann das Gehäuse 2 zur Verbesserung des Wärmekontaktes Rippen aufweisen. Durch die Größe des Wärmetauschers 25 und auch des Verrippungsgrades des Schöpfraumgehäuses 2 wird der Spalt zwischen den Rotoren 3, 4 und dem Gehäuse 2 eingestellt.For the purposes of the invention, the
Der Kühlflüssigkeitskreislauf für die Kühlung der Rotoren 4, 5 ist nur schematisch angedeutet. In den deutschen Patentanmeldungen
Als zweckmäßig hat es sich erwiesen, das Kühlsystem so einzustellen, dass etwa die Hälfte der von der Pumpe erzeugten Wärme zunächst von der Kühlflüssigkeit aufgenommen und danach über den Wärmetauscher 25 abgeführt wird und dass die andere Hälfte unmittelbar vom Kühlluftstrom abgeführt wird.It has proven to be advantageous to set the cooling system so that approximately half of the heat generated by the pump is first taken up by the cooling liquid and then discharged through the
Insgesamt erlauben es die Merkmale nach der Erfindung, die Leistungsdichte einer Schraubenpumpe weiter zu erhöhen. Die Pumpe kann kleiner ausgebildet und mit höheren Oberflächentemperaturen betrieben werden. Das äußere der Luftführung dienende Gehäuse 22 hat außerdem die Funktion eines Berührungsschutzes.Overall, the features of the invention allow to further increase the power density of a screw pump. The pump can be made smaller and operated with higher surface temperatures. The
Claims (5)
- A screw-type vacuum pump (1) comprising- a pump chamber housing (2) in which two screw rotors (3, 4) are arranged, and- a transmission/motor chamber housing (6) adjoining the pump chamber housing (2);- the rotors (3, 4) being provided with shafts (11, 12) passing through the transmission/motor chamber housing (6);- the rotors (3, 4) being equipped with an internal rotor cooling, wherein bores in the shafts (11, 12) serve to transport a coolant;- a heat exchanger (25) being provided to cool the cooling liquid flowing through the shafts (11, 12) and the rotors (3, 4);
the screw-type vacuum pump (1) being characterized by the following features:- an outer housing (22) is provided that includes the screw-type vacuum pump (1),- the outer housing (22) is provided with openings (23, 24), one of the openings (24) being arranged on the motor side,- a shaft (11) passing through the transmission/motor chamber housing (6) extends therefrom at the motor side, the free end of the shaft supports an impeller (20) of a fan or a blower (21),- the impeller (20) is situated in the region of the motor-side opening (24) of the housing (22) and generates an airflow cooling the pump chamber housing (2) of the pump (1),- the motor-side opening (24) further has the heat exchanger (25), which is designed as a liquid/air heat exchanger, associated thereto such that the airflow cooling the pump chamber housing (2) cools the heat exchanger (25). - The screw-type vacuum pump of claim 1, characterized in that at least the pump chamber (2) is equipped with outer fins.
- The screw-type vacuum pump of one of claims 1 or 2, characterized in that the pump chamber housing (2) and the rotors (3, 4) are constructed of aluminum.
- The screw-type vacuum pump of one of claims 1, 2 or 3, characterized in that the heat exchanger (25) is situated upstream of the fan (21) in the direction of the cooling air flow.
- The screw-type vacuum pump of one of claims 1 to 4, characterized in that the cooling system is designed such that the quantity of heat dissipated by the liquid coolant and the quantity of heat dissipated directly by the airflow are approximately equal.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10156180 | 2001-11-15 | ||
DE10156180.6A DE10156180B4 (en) | 2001-11-15 | 2001-11-15 | Cooled screw vacuum pump |
PCT/EP2002/012086 WO2003042541A1 (en) | 2001-11-15 | 2002-10-30 | Cooled screw-type vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1444440A1 EP1444440A1 (en) | 2004-08-11 |
EP1444440B1 true EP1444440B1 (en) | 2014-06-04 |
Family
ID=7705882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02790310.3A Expired - Lifetime EP1444440B1 (en) | 2001-11-15 | 2002-10-30 | Cooled screw-type vacuum pump |
Country Status (10)
Country | Link |
---|---|
US (1) | US7056108B2 (en) |
EP (1) | EP1444440B1 (en) |
JP (1) | JP4589001B2 (en) |
KR (1) | KR100892530B1 (en) |
CN (1) | CN100422561C (en) |
CA (1) | CA2463617A1 (en) |
DE (1) | DE10156180B4 (en) |
HU (1) | HUP0402372A2 (en) |
PL (1) | PL206617B1 (en) |
WO (1) | WO2003042541A1 (en) |
Families Citing this family (15)
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DE10156179A1 (en) * | 2001-11-15 | 2003-05-28 | Leybold Vakuum Gmbh | Cooling a screw vacuum pump |
CN1656316A (en) * | 2002-05-20 | 2005-08-17 | Ts株式会社 | Vacuum pump |
DE102005033084B4 (en) * | 2005-07-15 | 2007-10-11 | Knorr-Bremse Systeme für Schienenfahrzeuge GmbH | Oil-injected compressor with means for oil temperature control |
JP5197141B2 (en) * | 2008-05-12 | 2013-05-15 | 株式会社神戸製鋼所 | Two-stage screw compressor and refrigeration system |
JP2010127119A (en) * | 2008-11-25 | 2010-06-10 | Ebara Corp | Dry vacuum pump unit |
CN102280965B (en) * | 2010-06-12 | 2013-07-24 | 中国科学院沈阳科学仪器股份有限公司 | Shield motor for vacuum pump |
EP2615307B1 (en) * | 2012-01-12 | 2019-08-21 | Vacuubrand Gmbh + Co Kg | Screw vacuum pump |
CN102659051B (en) * | 2012-05-16 | 2014-04-16 | 宁波三罗机械有限公司 | Traction lifting tool convenient for heat dissipation |
KR101712962B1 (en) * | 2015-09-24 | 2017-03-07 | 이인철 | Vacuum pump with cooling device |
CN105805007B (en) * | 2016-01-21 | 2017-11-21 | 江西五十铃发动机有限公司 | A kind of composite cooling force feed electric vacuum pump |
DE102016216279A1 (en) * | 2016-08-30 | 2018-03-01 | Leybold Gmbh | Vacuum-screw rotor |
KR101869386B1 (en) * | 2016-10-14 | 2018-06-20 | 주식회사 벡스코 | Cooling apparatus of roots type dry vaccum pump |
US11293422B2 (en) | 2019-08-02 | 2022-04-05 | Thermo Finnigan Llc | Methods and systems for cooling a vacuum pump |
CN111594439A (en) * | 2020-04-23 | 2020-08-28 | 浙江佳成机械有限公司 | Three-stage screw compressor |
KR102437094B1 (en) * | 2022-04-25 | 2022-08-30 | ㈜글로텍 | screw type's vacuum pump with cooling screen and cooling apparatus |
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DE10019066A1 (en) * | 2000-04-18 | 2001-10-25 | Leybold Vakuum Gmbh | Vacuum pump with two cooperating rotors has drive shaft with drive pulley engaging directly with take-off hear on rotor shaft to form transmission stage |
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KR100424795B1 (en) * | 2001-08-09 | 2004-03-30 | 코웰정밀주식회사 | the self circulation cooling system vacuum pump |
-
2001
- 2001-11-15 DE DE10156180.6A patent/DE10156180B4/en not_active Expired - Lifetime
-
2002
- 2002-10-30 PL PL369467A patent/PL206617B1/en not_active IP Right Cessation
- 2002-10-30 US US10/495,796 patent/US7056108B2/en not_active Expired - Fee Related
- 2002-10-30 JP JP2003544339A patent/JP4589001B2/en not_active Expired - Fee Related
- 2002-10-30 HU HU0402372A patent/HUP0402372A2/en unknown
- 2002-10-30 EP EP02790310.3A patent/EP1444440B1/en not_active Expired - Lifetime
- 2002-10-30 KR KR1020047007383A patent/KR100892530B1/en not_active IP Right Cessation
- 2002-10-30 CA CA002463617A patent/CA2463617A1/en not_active Abandoned
- 2002-10-30 CN CNB028225880A patent/CN100422561C/en not_active Expired - Lifetime
- 2002-10-30 WO PCT/EP2002/012086 patent/WO2003042541A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5542822A (en) * | 1994-05-19 | 1996-08-06 | Siemens Aktiengesellschaft | Liquid ring pump and separator container assembly |
DE19820523A1 (en) * | 1998-05-08 | 1999-11-11 | Peter Frieden | Spindle screw pump assembly for dry compression of gases |
DE19963172A1 (en) * | 1999-12-27 | 2001-06-28 | Leybold Vakuum Gmbh | Screw-type vacuum pump has shaft-mounted rotors each with central hollow chamber in which are located built-in components rotating with rotor and forming relatively narrow annular gap through which flows cooling medium |
Also Published As
Publication number | Publication date |
---|---|
DE10156180A1 (en) | 2003-05-28 |
JP4589001B2 (en) | 2010-12-01 |
DE10156180B4 (en) | 2015-10-15 |
JP2005509785A (en) | 2005-04-14 |
KR100892530B1 (en) | 2009-04-10 |
KR20050042067A (en) | 2005-05-04 |
EP1444440A1 (en) | 2004-08-11 |
WO2003042541A1 (en) | 2003-05-22 |
US20040265160A1 (en) | 2004-12-30 |
HUP0402372A2 (en) | 2005-03-29 |
CN1585860A (en) | 2005-02-23 |
PL206617B1 (en) | 2010-08-31 |
US7056108B2 (en) | 2006-06-06 |
CA2463617A1 (en) | 2003-05-22 |
CN100422561C (en) | 2008-10-01 |
PL369467A1 (en) | 2005-04-18 |
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