CN116576107A - Rotor and vacuum pump - Google Patents

Rotor and vacuum pump Download PDF

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Publication number
CN116576107A
CN116576107A CN202310677529.6A CN202310677529A CN116576107A CN 116576107 A CN116576107 A CN 116576107A CN 202310677529 A CN202310677529 A CN 202310677529A CN 116576107 A CN116576107 A CN 116576107A
Authority
CN
China
Prior art keywords
rotor
holes
weight
reducing
lightening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202310677529.6A
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Chinese (zh)
Other versions
CN116576107B (en
Inventor
魏民
雷晓宏
刘建伟
王鑫
丁印明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Tongjia Hongrui Technology Co ltd
Original Assignee
Beijing Tongjia Hongrui Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Tongjia Hongrui Technology Co ltd filed Critical Beijing Tongjia Hongrui Technology Co ltd
Priority to CN202310677529.6A priority Critical patent/CN116576107B/en
Publication of CN116576107A publication Critical patent/CN116576107A/en
Application granted granted Critical
Publication of CN116576107B publication Critical patent/CN116576107B/en
Active legal-status Critical Current
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/20Rotors

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The application provides a rotor and a vacuum pump, the rotor comprises: a body having an outer peripheral surface; a blade integrally provided with the body and extending from the outer peripheral surface in a direction away from the body; wherein the outer peripheral surface is provided with a lightening hole, and the axis of the lightening hole is perpendicular to the outer peripheral surface. The application can reduce the dead weight of the rotor by arranging the lightening holes on the outer peripheral surface of the body, lighten the load of the bearing and the motor in the vacuum pump using the rotor, thereby prolonging the service life of the vacuum pump.

Description

Rotor and vacuum pump
Technical Field
The application relates to the technical field of vacuum compression, in particular to a rotor and a vacuum pump.
Background
In the prior art, in the rotating process of the rotor, the larger the weight of the rotor is, the larger the load influence on the structures such as a bearing, a motor and the like is, so that the service life of the equipment such as the bearing, the motor and the like is influenced, and the service life of the vacuum pump is further influenced.
Disclosure of Invention
In view of the foregoing, the present application is directed to a rotor and a vacuum pump for improving the problem that the service life of the vacuum pump is affected by the dead weight of the rotor in the prior art.
The application provides a rotor, which is applied to a vacuum pump and comprises: a body having an outer peripheral surface; a blade integrally provided with the body and extending from the outer peripheral surface in a direction away from the body; wherein the outer peripheral surface is provided with a lightening hole, and the axis of the lightening hole is perpendicular to the outer peripheral surface.
According to the rotor provided by the application, the weight reducing holes are formed in the outer peripheral surface of the body, so that the dead weight of the rotor is reduced, the loads of the bearing and the motor in the vacuum pump using the rotor are reduced, and the service life of the vacuum pump is prolonged. At the same time, the influence of the weight reducing hole on the vacuum pump pumping function can be reduced by making the axis of the weight reducing hole perpendicular to the outer peripheral surface by reducing the dead weight of the rotor. In addition, the reduction of the dead weight of the rotor is also beneficial to improving the rotating speed, so that the vacuum compression amount of the vacuum pump is improved.
In an embodiment, the number of the lightening holes is plural, and the lightening holes are arranged at intervals along the circumferential direction of the body.
According to the rotor provided by the application, the number of the lightening holes is multiple, so that the dead weight of the rotor is further reduced, and the lightening holes are arranged at intervals along the circumferential direction of the body, so that the structural stability of the rotor is ensured.
In an embodiment, the plurality of lightening holes are equally angularly spaced along the circumference of the body.
According to the rotor provided by the application, the plurality of lightening holes are arranged at equal angular intervals along the circumferential direction of the body, so that the mass center of the rotor is positioned on the axis of the rotating shaft on the basis of ensuring the structural stability of the rotor, and the vibration of the rotor in the rotating process is reduced.
In one embodiment, the plurality of lightening holes have the same cross-sectional shape.
According to the rotor provided by the application, the cross section shapes of the plurality of lightening holes are the same, so that the mass center of the rotor is positioned on the axis of the rotating shaft on the basis of ensuring the structural stability of the rotor, and the vibration of the rotor in the rotating process is reduced.
In one embodiment, the cross section of each of the plurality of lightening holes is round, square, oval or racetrack.
In one embodiment, the center of the lightening hole is located on a center line of the body in the thickness direction.
According to the rotor provided by the application, the center of the lightening hole is positioned on the center line in the thickness direction of the body, so that on one hand, the structural stability of the rotor is guaranteed, and on the other hand, the influence of the lightening hole on the pumping pressure function of the vacuum pump is further reduced.
In one embodiment, the lightening holes are blind holes.
According to the rotor provided by the application, the weight reducing hole is arranged as the blind hole, so that the compressed gas continuously flows out of the weight reducing hole in the process of continuously filling the compressed gas into the weight reducing hole even if the compressed gas is filled into the weight reducing hole, and the influence of the weight reducing hole on the pumping function of the vacuum pump is reduced.
In one embodiment, the lightening holes are circular holes, square holes, oval holes or racetrack holes.
In one embodiment, the rotor is a Roots rotor or a claw rotor.
The application also provides a vacuum pump which comprises the rotor.
The details of one or more embodiments of the application are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the application will be apparent from the description and drawings, and from the claims.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural view of a rotor according to an embodiment of the present application.
Fig. 2 is a top view of fig. 1.
Icon: a rotor-10; a body-11; blade-13; -111 an outer peripheral surface; lightening holes-1111.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to fall within the scope of the application.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present application, the term "exemplary" is used to mean "serving as an example, instance, or illustration. Any embodiment described as "exemplary" in this disclosure is not necessarily to be construed as preferred or advantageous over other embodiments. The following description is presented to enable any person skilled in the art to make and use the application. In the following description, details are set forth for purposes of explanation. It will be apparent to one of ordinary skill in the art that the present application may be practiced without these specific details. In other instances, well-known structures and processes have not been described in detail so as not to obscure the description of the application with unnecessary detail. Thus, the present application is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed herein.
Referring to fig. 1 and 2, a rotor 10 is provided in an embodiment of the application. The rotor 10 may be applied to a vacuum pump. The rotor 10 may be a Roots rotor or a claw rotor. In the embodiment shown in fig. 1, the rotor 10 is a claw rotor.
In some embodiments, the rotor 10 includes a body 11 and blades 13.
The body 11 is used for connecting with the rotating shaft. It will be appreciated that the body 11 may be integrally formed with the shaft, or the body 11 may be provided with a through hole along an axial direction thereof, and the shaft may be inserted through the through hole and fixedly connected with the body 11.
The body 11 has an outer peripheral surface 111. The outer peripheral surface 111 is provided with a lightening hole 1111. By arranging the lightening holes 1111, on one hand, the dead weight of the rotor 10 is reduced, so that transmission parts such as bearings and gears which are matched with the rotor 10 in the vacuum pump and the load of the motor are reduced, the service lives of the parts and the whole vacuum pump are prolonged, and the running cost is saved; on the other hand, the material consumption is reduced, and the cost is saved.
In some embodiments, the lightening holes 1111 may be blind holes. By setting the lightening hole 1111 as a blind hole, even if a part of the compressed gas is filled into the lightening hole 1111 when the vacuum pump is operated, the blind hole can enable the compressed gas to continuously flow out of the lightening hole 1111 during the continuous filling of the compressed gas into the lightening hole 1111, thereby reducing the influence of the lightening hole 1111 on the compression function of the vacuum pump.
In some embodiments, the axis of the lightening holes 1111 may be perpendicular to the outer circumferential surface 111. By making the axis of the lightening holes 1111 perpendicular to the outer peripheral surface 111, when the vacuum pump having the rotor 10 vacuum-compresses the gas, the gas is less likely to stay in the lightening holes 1111, thereby contributing to reducing the influence of the arrangement of the lightening holes 1111 on the vacuum compression performance of the vacuum pump.
In some embodiments, the center of the lightening hole 1111 may be located on a center line of the body 11 in the thickness direction. On the one hand, by locating the center of the weight-reducing hole 1111 on the center line in the thickness direction of the body 11, it is helpful to ensure structural stability of the rotor 11, and on the other hand, since the axis of the weight-reducing hole 1111 is perpendicular to the outer peripheral surface 111, it is also helpful to further reduce the influence of the weight-reducing hole 1111 on the compression function of the vacuum pump by locating the center of the weight-reducing hole 1111 on the center line in the thickness direction of the body 11.
In some embodiments, the number of lightening holes 1111 may be multiple. A plurality of lightening holes 1111 may be provided at intervals along the circumferential direction of the body 11. By setting the number of the weight-reducing holes 1111 to be plural, it is facilitated to reduce the dead weight of the rotor 10 as low as possible, while by arranging the plurality of weight-reducing holes 1111 at intervals in the circumferential direction of the body 11, it is facilitated to secure the structural stability of the rotor 10.
Further, a plurality of lightening holes 1111 may be provided at equal angular intervals along the circumferential direction of the body 11. By arranging the plurality of weight-reducing holes 1111 at equal angular intervals along the circumferential direction of the body 11, the center of mass of the rotor 10 is located on the axis of the rotating shaft as much as possible on the basis of ensuring the structural stability of the rotor 10, thereby reducing the vibration of the rotor 10 during rotation.
In some embodiments, the lightening holes 1111 may be circular holes, square holes, oval holes, or racetrack holes, that is, the lightening holes 1111 may have a circular, square, oval, or racetrack cross-sectional shape. It is understood that the lightening holes 1111 may be tapered holes, truncated cone holes, or the like. In the embodiment shown in FIG. 2, the lightening holes 1111 are circular holes. When the lightening hole 1111 is an elongated hole (for example, a rectangular hole, an elliptical hole, or a racetrack hole), the length direction of the lightening hole 1111 may be parallel to the axial direction (or thickness direction) of the rotor 10. Thereby, it is facilitated to provide as many lightening holes 1111 as possible, thereby further reducing the weight of the rotor 10.
Further, in an embodiment in which the number of the weight reducing holes 1111 is plural, the cross-sectional shapes of the plurality of weight reducing holes 1111 may be the same. The plurality of weight reducing holes 1111 may have a circular, square, oval or racetrack shape in cross section. By making the cross-sectional shapes of the plurality of weight-reducing holes 1111 the same, it is helpful to further locate the center of mass of the rotor 10 on the axis of the rotating shaft on the basis of ensuring the structural stability of the rotor 10, thereby reducing the vibration of the rotor 10 during rotation.
It is understood that the cross-sectional shape of the plurality of lightening holes 1111 may also be different. For example, among the plurality of weight-reducing holes 1111, a part of the weight-reducing holes 1111 have a circular cross-sectional shape, a part of the weight-reducing holes 1111 have a square cross-sectional shape, a part of the weight-reducing holes 1111 have an elliptical cross-sectional shape, and the rest of the weight-reducing holes 1111 have a racetrack shape.
Further, the weight-reducing holes 1111 having different cross-sectional shapes may be staggered and periodically arranged along the circumferential direction of the body 11.
For example, if a part of the weight-reducing holes 1111 have a circular cross-sectional shape and the remaining weight-reducing holes 1111 have an elliptical cross-sectional shape, the weight-reducing holes 1111 having a circular cross-sectional shape and the weight-reducing holes 1111 having an elliptical cross-sectional shape may be alternately arranged along the circumferential direction of the body 11, that is, two adjacent weight-reducing holes 1111 having an elliptical cross-sectional shape are provided with one weight-reducing hole 1111 having a circular cross-sectional shape.
For another example, if a part of the weight-reducing holes 1111 have a circular cross-sectional shape, a part of the weight-reducing holes 1111 have a rectangular cross-sectional shape, and the rest of the weight-reducing holes 1111 have an elliptical cross-sectional shape, the weight-reducing holes 1111 having a rectangular cross-sectional shape and the weight-reducing holes 1111 having an elliptical cross-sectional shape may be alternately arranged in the circumferential direction of the body 11, that is, any one of the weight-reducing holes 1111 having a circular cross-sectional shape is located between the weight-reducing holes 1111 having a rectangular cross-sectional shape and the weight-reducing holes 1111 having an elliptical cross-sectional shape, any one of the weight-reducing holes 1111 having a rectangular cross-sectional shape is located between the weight-reducing holes 1111 having a circular cross-sectional shape and the weight-reducing holes 1111 having an elliptical cross-sectional shape, and any one of the weight-reducing holes 1111 having an elliptical cross-sectional shape is located between the weight-reducing holes 1111 having a circular cross-sectional shape and the weight-reducing holes 1111 having an elliptical cross-sectional shape.
According to the application, the weight reducing holes 1111 with different cross-sectional shapes are staggered and periodically arranged along the circumferential direction of the body 11, so that on one hand, the structural stability of the rotor 10 is guaranteed, and on the other hand, the center of mass of the rotor 10 is positioned on the axis of the rotating shaft as much as possible, thereby reducing vibration in the rotating process of the rotor and prolonging the service life of the rotor.
The blades 13 may be integrally provided with the body 11 and extend from the outer peripheral surface 111 in a direction away from the body 11.
According to the rotor provided by the embodiment of the application, the weight reducing holes are formed in the outer peripheral surface of the body, so that the dead weight of the rotor is reduced, the loads of the bearing and the motor in the vacuum pump using the rotor are reduced, and the service life of the vacuum pump is prolonged. At the same time, the influence of the weight reducing hole on the vacuum pump pumping function can be reduced by making the axis of the weight reducing hole perpendicular to the outer peripheral surface by reducing the dead weight of the rotor. In addition, the reduction of the dead weight of the rotor is also beneficial to improving the rotating speed, so that the vacuum compression amount of the vacuum pump is improved.
Based on the same inventive concept, the embodiment of the application also provides a vacuum pump, which comprises a pump body, a rotating shaft, a bearing and the rotor 10. The bearing is arranged on the pump body and used for supporting the rotating shaft. The rotor 10 is disposed on the rotation shaft. It will be appreciated that the vacuum pump may be constructed in a manner known in the art and that the present application will not be described in detail herein.
In the foregoing embodiments, the descriptions of the embodiments are focused on, and the portions of one embodiment that are not described in detail in the foregoing embodiments may be referred to in the foregoing detailed description of other embodiments, which are not described herein again.
While the basic concepts have been described above, it will be apparent to those skilled in the art that the foregoing detailed disclosure is by way of example only and is not intended to be limiting. Although not explicitly described herein, various modifications, improvements and adaptations of the application may occur to one skilled in the art. Such modifications, improvements, and modifications are intended to be suggested within the present disclosure, and therefore, such modifications, improvements, and adaptations are intended to be within the spirit and scope of the exemplary embodiments of the present disclosure.
Meanwhile, the present application uses specific words to describe embodiments of the present application. Reference to "one embodiment," "an embodiment," and/or "some embodiments" means that a particular feature, structure, or characteristic is associated with at least one embodiment of the application. Thus, it should be emphasized and should be appreciated that two or more references to "an embodiment" or "one embodiment" or "an alternative embodiment" in various positions in this specification are not necessarily referring to the same embodiment. Furthermore, certain features, structures, or characteristics of one or more embodiments of the application may be combined as suitable.
Similarly, it should be noted that in order to simplify the description of the present disclosure and thereby aid in understanding one or more inventive embodiments, various features are sometimes grouped together in a single embodiment, figure, or description thereof. This method of disclosure, however, is not intended to imply that more features than are required by the subject application. Indeed, less than all of the features of a single embodiment disclosed above.
In some embodiments, numbers describing the components, number of attributes are used, it being understood that such numbers being used in the description of embodiments are modified in some examples by the modifier "about," approximately, "or" substantially. Unless otherwise indicated, "about," "approximately," or "substantially" indicate that the number allows for a 20% variation. Accordingly, in some embodiments, numerical parameters set forth in the specification and claims are approximations that may vary depending upon the desired properties sought to be obtained by the individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and employ a method for preserving the general number of digits. Although the numerical ranges and parameters set forth herein are approximations in some embodiments for use in determining the breadth of the range, in particular embodiments, the numerical values set forth herein are as precisely as possible.
Each patent, patent application publication, and other material, such as articles, books, specifications, publications, documents, etc., cited herein is hereby incorporated by reference in its entirety except for any application history file that is inconsistent or otherwise conflict with the present disclosure, which places the broadest scope of the claims in this application (whether presently or after it is attached to this application). It is noted that the description, definition, and/or use of the term in the appended claims controls the description, definition, and/or use of the term in this application if there is a discrepancy or conflict between the description, definition, and/or use of the term in the appended claims.
The rotor and the vacuum pump provided by the embodiment of the application are described in detail, and specific examples are applied to illustrate the principle and the implementation of the application, and the description of the above embodiments is only used for helping to understand the method and the core idea of the application; meanwhile, as those skilled in the art will have variations in the specific embodiments and application scope in light of the ideas of the present application, the present description should not be construed as limiting the present application.

Claims (10)

1. A rotor for use in a vacuum pump, comprising:
a body having an outer peripheral surface;
a blade integrally provided with the body and extending from the outer peripheral surface in a direction away from the body;
wherein the outer peripheral surface is provided with a lightening hole, and the axis of the lightening hole is perpendicular to the outer peripheral surface.
2. The rotor of claim 1, wherein the number of weight-reducing holes is plural and is spaced apart along the circumference of the body.
3. A rotor according to claim 2, wherein a plurality of said lightening holes are equiangularly spaced along the circumference of said body.
4. A rotor according to claim 2, wherein the plurality of weight-reducing apertures are of the same cross-sectional shape.
5. The rotor of claim 4, wherein a plurality of said lightening holes each have a circular, square, oval or racetrack cross-section.
6. The rotor of claim 1, wherein the weight-reducing aperture is centered on a center line of the body in a thickness direction.
7. The rotor of claim 1, wherein the lightening holes are blind holes.
8. The rotor of claim 1, wherein the lightening holes are circular holes, square holes, oval holes, or racetrack holes.
9. The rotor of claim 1, wherein the rotor is a roots rotor or a claw rotor.
10. A vacuum pump comprising a rotor as claimed in any one of claims 1 to 9.
CN202310677529.6A 2023-06-08 2023-06-08 Rotor and vacuum pump Active CN116576107B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310677529.6A CN116576107B (en) 2023-06-08 2023-06-08 Rotor and vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310677529.6A CN116576107B (en) 2023-06-08 2023-06-08 Rotor and vacuum pump

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CN116576107A true CN116576107A (en) 2023-08-11
CN116576107B CN116576107B (en) 2024-05-17

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Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332183A (en) * 1986-07-25 1988-02-10 Mitsui Seiki Kogyo Co Ltd Scroll compressor
US5660535A (en) * 1992-10-02 1997-08-26 Leybold Aktiengesellschaft Method of operating a claw-type vacuum pump and a claw-type vacuum pump suitable for carrying out the method
CN101033747A (en) * 2007-04-23 2007-09-12 马容 Pawl-type dry vacuum pump rotor
CN101668950A (en) * 2007-04-23 2010-03-10 爱德华兹有限公司 Vacuum pump
CN205117724U (en) * 2015-10-27 2016-03-30 易先杰 Claw shape dry -type pump
CN208734539U (en) * 2018-08-28 2019-04-12 中北大学 Spiral jaw rotor and vacuum pump with spiral jaw rotor
CN110440127A (en) * 2019-09-18 2019-11-12 湖南机油泵股份有限公司 A kind of blade pump rotor and the vane pump that noise can be reduced
CN215566616U (en) * 2021-06-04 2022-01-18 天津锐昇兴业科技有限公司 Variable-pitch screw rotor and vacuum pump
CN116066365A (en) * 2023-03-23 2023-05-05 北京通嘉宏瑞科技有限公司 Vacuum pump assembly capable of improving process object accommodating capacity and dry vacuum pump
CN116538089A (en) * 2023-06-08 2023-08-04 北京通嘉宏瑞科技有限公司 Rotor structure and vacuum pump

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332183A (en) * 1986-07-25 1988-02-10 Mitsui Seiki Kogyo Co Ltd Scroll compressor
US5660535A (en) * 1992-10-02 1997-08-26 Leybold Aktiengesellschaft Method of operating a claw-type vacuum pump and a claw-type vacuum pump suitable for carrying out the method
CN101033747A (en) * 2007-04-23 2007-09-12 马容 Pawl-type dry vacuum pump rotor
CN101668950A (en) * 2007-04-23 2010-03-10 爱德华兹有限公司 Vacuum pump
CN205117724U (en) * 2015-10-27 2016-03-30 易先杰 Claw shape dry -type pump
CN208734539U (en) * 2018-08-28 2019-04-12 中北大学 Spiral jaw rotor and vacuum pump with spiral jaw rotor
CN110440127A (en) * 2019-09-18 2019-11-12 湖南机油泵股份有限公司 A kind of blade pump rotor and the vane pump that noise can be reduced
CN215566616U (en) * 2021-06-04 2022-01-18 天津锐昇兴业科技有限公司 Variable-pitch screw rotor and vacuum pump
CN116066365A (en) * 2023-03-23 2023-05-05 北京通嘉宏瑞科技有限公司 Vacuum pump assembly capable of improving process object accommodating capacity and dry vacuum pump
CN116538089A (en) * 2023-06-08 2023-08-04 北京通嘉宏瑞科技有限公司 Rotor structure and vacuum pump

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