CN208734539U - Spiral jaw rotor and vacuum pump with spiral jaw rotor - Google Patents
Spiral jaw rotor and vacuum pump with spiral jaw rotor Download PDFInfo
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- CN208734539U CN208734539U CN201821389186.4U CN201821389186U CN208734539U CN 208734539 U CN208734539 U CN 208734539U CN 201821389186 U CN201821389186 U CN 201821389186U CN 208734539 U CN208734539 U CN 208734539U
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Abstract
The utility model provides a kind of spiral jaw rotor and the vacuum pump with spiral jaw rotor, belongs to the technical field of claw vacuum pump.Spiral jaw rotor includes intermeshing rotor A and rotor B；Rotor A and rotor B are non-centrosymmetric structure, all have the upper and lower surfaces of same shape, upper surface is provided with dynamic balancing hole, and the upper and lower surfaces of same rotor are around rotor axis at helical angle, and the hand of spiral of rotor A and rotor B are opposite and helical angle absolute value is equal；Helical angle is greater than 0 degree, is less than or equal to 60 degree；The claw of rotor A and rotor B all have radial span surface, and radial span surface in a sealing manner, cooperates with the pawl inside circumference face of the periphery of vacuum pump cylinder pump chamber and pairs of rotor；Rotor A or the upper and lower surfaces of rotor B difference in a sealing manner, cooperate with the end face of vacuum pump cylinder pump chamber, have the advantages that good energy consumption low noise, vacuum evacuation performance, good mechanical performance, vacuum degree is high, vacuum revolving speed is high.
Description
Technical field
The utility model relates to the technical fields of claw vacuum pump, more particularly to spiral jaw rotor and have spiral shell
Revolve the vacuum pump of shape claw rotor.
Background technique
In industrial semiconductor manufacturing process, because some manufacturing steps must execute in a vacuum, usually need
Vacuum is generated and kept in equipment.In these manufacturing processes, needs for pumping device to be connected in equipment, be filled by pumping
The internal pressure for reducing equipment is set until reaching vacuum degree appropriate.
Applied to vacuum pump or the detenting of compressor, generally include: two axis, a driving shaft pass through a pair of same
It walks gear and drives the rotation of driven shaft synchronous backward, one or more groups of intermeshing rotors are housed on two axis, pass through two rotors
Intermeshing rotation is to provide the inlet and outlet compression movement of periodic cycle, to complete vacuumizing and compress to gas.
Currently, by the pump housing, axis and the claw-type rotor structure being located on axis on dry vacuum pump system body in vacuum equipment
At the straight pawl rotor design method of seven segmentations as disclosed in patent 201110290789.5 and 201110308963.4 disclosure of patent
A kind of claw-type rotor profile, the rotor although these rotors are compared before obtains more obvious progress in terms of processability, but
In practical, performance is still to be optimized for vacuum evacuation, final vacuum needs to be broken through, mechanical property is to be improved, non-central
Symmetrical structure is less steady when also leading to its operating, there is vibration noise generation.
Utility model content
The purpose of this utility model is to provide a kind of spiral jaw rotor and with the true of spiral jaw rotor
Sky pump has the advantages that good energy consumption low noise, vacuum evacuation performance, good mechanical performance, vacuum degree is high, vacuum revolving speed is high.
To achieve the above object, the utility model provides a kind of spiral jaw rotor, including intermeshing rotor A and
Rotor B；Rotor A and rotor B are non-centrosymmetric structure, all have the upper and lower surfaces of same shape, upper surface setting
There is dynamic balancing hole, the upper and lower surfaces of same rotor are around rotor axis at helical angle, the hand of spiral of rotor A and rotor B
Opposite and helical angle absolute value is equal；Helical angle is greater than 0 degree, is less than or equal to 60 degree；The claw of rotor A and rotor B all have
Radial span surface；The radial span surface of rotor A or rotor B in a sealing manner, the circumference with vacuum pump cylinder pump chamber
Face and the cooperation of the pawl inside circumference face of pairs of rotor；Rotor A or the upper and lower surfaces of rotor B are respectively with the side of sealing
Formula cooperates with the end face of vacuum pump cylinder pump chamber.
Further, the ratio between rotor A and the overall height and diameter of rotor B is less than 1.
The utility model also provides a kind of vacuum pump with spiral jaw rotor, rotation setting in cylindrical pump chamber
There is above-mentioned spiral jaw rotor.
Further, the above-mentioned vacuum pump with spiral jaw rotor, further includes motor, is provided with air inlet and outlet
The pump housing of mouth stretches out the driven shaft of the driving shaft being connected to motor and driving shaft by gear mechanism transmission out of the pump housing；The pump housing
It is interior that concatenated n grades of pump chamber is separated by partition, it is first order pump chamber close to pump housing air inlet, successively analogizing backward is the
Two, three ... n grades of pump chamber, n is the integer more than or equal to 2；Air flue is offered on partition, the both ends of air flue are air entry and exhaust
Mouthful；Driving shaft and driven shaft are parallel across pump chambers at different levels；It is equipped with the spiral jaw rotor in each pump chamber, rotor A and turns
Sub- B intermeshing, is respectively arranged on driving shaft and driven shaft.
Further, the first end of the pump housing is equipped with bottom block, and second end is equipped with top cover；Gas outlet is provided on bottom block,
The external oil gas separation equipment in gas outlet is integrated with exhaust valve in gas outlet；Air inlet and inlet channel are provided on top cover；Air inlet
Channel is connected to air inlet and first order pump chamber.
Further, driving shaft and driven shaft are rotatably installed on bottom block by angular contact ball bearing, are held by apical axis
It is rotatably installed on top cover with top bearing block.
Further, gear mechanism includes gear-box and is installed on the driving gear being meshed in gear-box and driven tooth
Wheel；The open end of gear-box and bottom block are cooperatively connected, and offer pouring orifice on gear-box；Driving gear is mounted on driving shaft
On, driven gear is mounted on driven shaft.
Further, the cooling-water duct being mutually communicated is provided on gear-box, bottom block, pump chamber, partition and top cover；
The water outlet and water inlet of cooling-water duct are separately positioned on gear-box.
Further, the above-mentioned vacuum pump with spiral jaw rotor, further includes the connection of tooth connection roller box and motor
Frame；Driving shaft passes through the output axis connection of shaft coupling and motor.
The beneficial effects of the utility model are:
1, the spiral jaw rotor meshing performance is good, and engagement is more steady, and impact noise is small, is suitable for high speed, big function
Rate transmission；
2, the spiral jaw rotor registration is big, and under equal conditions, the engagement process of helical rotors is than common pawl
Formula rotor is long, i.e., registration is larger, reduces the load of rotor, to improve the bearing capacity of rotor, extends rotor
Service life improves transmission stability；
3, the helical rotors have certain guiding performance to fluid, so that exhaust is more smooth；
4, the spiral jaw rotor oscillation is smaller, and the noise of generation is lower, has better mechanical property.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the spiral jaw rotor that the utility model embodiment 1 provides；
Fig. 2 is the structural schematic diagram of rotor A or rotor B in spiral jaw rotor shown in Fig. 1；
Fig. 3 is the schematic diagram of rotor A shown in Fig. 2 or rotor B other direction；
Fig. 4 is the structural schematic diagram for the vacuum pump with spiral jaw rotor that the utility model embodiment 2 provides；
Fig. 5 is the cross-sectional view in the direction vacuum pump A-A shown in Fig. 4；
Fig. 6 is the structural schematic diagram of top cover in vacuum pump A-A shown in Fig. 4.
In figure: 1- spiral jaw rotor；1a- rotor A；1b- rotor B；1.1- upper surface；1.2- lower surface；1.3- dynamic
Balance hole；1.4- claw；1.5- radial span surface；1.6- pawl inside circumference face；2- pump chamber；3- air inlet；The gas outlet 4-；5-
Driving shaft；6- driven shaft；7- partition；8- bottom block；9- top cover；10- inlet channel；11- angular contact ball bearing；12- apical axis is held
Seat；13- gear-box；14- driving gear；15- cooling-water duct；16- water outlet；17- water inlet；18- hitch；19- shaft coupling
Device.
Specific embodiment
Embodiment 1
As shown in Figure 1 to Figure 3, the present embodiment provides a kind of spiral jaw rotor, including intermeshing rotor A 1a and
Rotor B1b；Rotor A 1a and rotor B1b is non-centrosymmetric structure, all has the upper surface 1.1 and lower surface of same shape
1.2, upper surface 1.1 is provided with dynamic balancing hole 1.3, and the upper surface 1.1 and lower surface 1.2 of same rotor are around rotor axis at spiral
The hand of spiral of angle, rotor A 1a and rotor B1b are opposite and helical angle absolute value is equal；It is found in modeling process, works as helical angle
When greater than 60 degree, dynamic balancing hole 1.3 is easy to run through rotor, therefore limits the range of helical angle to be less than or equal to 60 greater than 0 degree
Degree；The claw 1.4 of rotor A 1a and rotor B1b all has radial span surface 1.5；The radial span of rotor A 1a or rotor B1b
It in a sealing manner, is assisted with the periphery of vacuum pump cylinder pump chamber and the pawl inside circumference face 1.6 of pairs of rotor on surface 1.5
Make；The upper surface 1.1 of rotor A 1a or rotor B1b and lower surface 1.2 are distinguished in a sealing manner, with vacuum pump cylinder pump chamber
End face cooperation.Wherein, dynamic balancing hole 1.3 for reducing during pump operation noise and vibration, form have very much, diagram
Only common one kind.
To ensure that rotor has good, higher revolving speed, while the main body of rotor and pump is reduced, is sent out between rotor and rotor
The risk of raw contact, may be selected relatively thin rotor block, it is preferable that the ratio between rotor A 1a and the overall height and diameter of rotor B1b
Value is less than 1.
The present embodiment does not limit the molded line and pawl number of claw rotor, does not limit the pump chamber series of applicable vacuum pump yet.
Embodiment 2
The present embodiment provides a kind of vacuum pump with spiral jaw rotor, rotation is provided in cylindrical pump chamber 2
Above-mentioned spiral jaw rotor 1.
Further, as shown in Figures 4 to 6, the above-mentioned vacuum pump with spiral jaw rotor, further includes motor, sets
It is equipped with the pump housing of air inlet 3 and gas outlet 4, the driving shaft 5 being connected to motor is stretched out out of the pump housing, passes through gear with driving shaft 5
The driven shaft 6 of mechanism driving；Concatenated n grades of pump chamber is separated by partition 7 in the pump housing, is level-one close to pump housing air inlet 3
Pump chamber, successively analogizing backward is two, three ... n grades of pump chamber, and n is the integer more than or equal to 2；Air flue is offered on partition 7, for
Gas compressed is circulated to junior's pump chamber in higher level's pump chamber adjacent with partition 7, and the both ends of air flue are air entry and exhaust outlet；
Driving shaft 5 and driven shaft 6 are parallel across pump chambers 2 at different levels；It is equipped with spiral jaw rotor 1 in each pump chamber 2, rotor A 1a and turns
Sub- B1b intermeshing, is respectively arranged on driving shaft 5 and driven shaft 6.
The present embodiment is defined the direction of rotation of rotor: the upper surface 1.1 of rotor is just being shown in, if the lower surface of rotor
1.2 close to the same level pump chamber exhaust outlet then require counterclockwise rotate, if lower surface 1.2 close to the same level pump chamber air entry require it is suitable
Hour hands rotation.The exhaust outlet of previous stage pump chamber is the air entry of rear stage pump chamber.
Rotor logarithm is arranged, and level of vacuum size increases and decreases on demand, in common multistage pawl pump, in the position of level-one exhaust outlet
It sets, needs to design a long channel, in order to which the gas that level-one pump chamber discharges can enter the air inlet of second level pump chamber, together
When in order to guarantee that second-stage pump body starts air-breathing when level-one is vented, so on same axis, secondary rotor compares primary rotor and falls behind
Certain phase difference, same n grades of rotor comparison (n-1) grade rotor fall behind certain phase difference, and existing document shows phase
Potential difference is all reasonable, the various aspects such as helical angle of spiral jaw rotor in consideration the present embodiment between 30 degree to 120 degree
Factor, phase difference is between 30 degree to 90 degree.Vacuum pump described in the present embodiment can be to be vertical, and rotor is horizontally disposed, along its vertical pivot
Operating；Can also be horizontal, rotors normal setting is operated along its flat axis.
Further, as shown in Figure 4 and Figure 6, the first end of the pump housing is equipped with bottom block 8, and second end is equipped with top cover 9；Bottom plate
Gas outlet 4 is provided on seat 8, and the external oil gas separation equipment in gas outlet 4 is integrated with silencer and exhaust valve in gas outlet 4；Top cover
Air inlet 3 and inlet channel 10 are provided on 9；Inlet channel 10 is connected to air inlet 3 and level-one pump chamber.Wherein, Oil-gas Separation is set
Standby, silencer and exhaust valve are set as prior art means, and details are not described herein.
Further, as shown in figure 4, driving shaft 5 and driven shaft 6 are rotatably installed in bottom block by angular contact ball bearing 11
On 8, bearing block 12 being held and being pushed up by apical axis and be rotatably installed on top cover 9, specific mounting means is prior art means, herein not
It repeats again.
Further, as shown in figure 4, gear mechanism includes gear-box 13 and is installed on the active being meshed in gear-box 13
Gear 14 and driven gear；The open end of gear-box 13 and bottom block 8 are cooperatively connected, and offer pouring orifice on gear-box 13；It is main
Moving gear 14 is mounted on driving shaft 5, and driven gear is installed on the driven shaft 6.
Further, as shown in Figure 4 and Figure 6, it is provided on gear-box 13, bottom block 8, pump chamber 2, partition 7 and top cover 9
The cooling-water duct 15 being mutually communicated；The water outlet 16 and water inlet 17 of cooling-water duct 15 are separately positioned on gear-box 13.
Further, as shown in figure 4, the above-mentioned vacuum pump with spiral jaw rotor, further includes tooth connection roller box 13
With the hitch 18 of motor；Driving shaft 5 passes through the output axis connection of shaft coupling 19 and motor.
Further, it is the leakproofness for guaranteeing the above-mentioned vacuum pump with spiral jaw rotor, is provided in vacuum pump
The sealing elements such as sealing ring, the mounting means of sealing element are prior art means.
As shown in Figures 4 to 6, the present embodiment is installed on driving shaft 5 with rotor A 1a, and rotor B1b is installed on driven shaft 6,
For rotor logarithm is 4, the working principle of vacuum pump is described in detail in conjunction with attached drawing.
Motor drives driving shaft 5 to rotate, and driving shaft 5 drives driven shaft 6 to rotate by driving gear 14 and driven gear, if
The spiral jaw rotor 1 for setting four pairs of engagements on driving shaft 5 and driven shaft 6 carries out continuous suction and discharge acting, pumped gas
It is intracavitary into primary pump by air inlet 3 and inlet channel 10, under the compression of primary rotor pair, the intracavitary gas of primary pump
By level-one exhaust outlet, into second level pump chamber, two, three, the intracavitary gas of four-stage pump by same compression, through level Four exhaust outlet
Into silencer and exhaust valve, outside final discharge pump, to play the role of vacuumizing and gas-liquid separation.Cooling water is from water inlet
Mouth 17 enters, and flows through gear-box 13, bottom block 8, level Four pump chamber, three-level partition, three-level pump chamber, second level partition, second level pump chamber, one
Grade partition, level-one pump chamber, top cover 9, level-one pump chamber, level-one partition, second level pump chamber, second level partition, three-level pump chamber, three-level partition,
Level Four pump chamber, bottom block 8, gear-box 13, flow out through water outlet 16.
The above is only the embodiments of the present invention, and therefore it does not limit the scope of the patent of the utility model, all utilizations
Equivalent structure or equivalent flow shift made by the utility model description is applied directly or indirectly in other relevant
Technical field is also included in the patent protection scope of the utility model.
Claims (9)
1. a kind of spiral jaw rotor, which is characterized in that including intermeshing rotor A and rotor B；
The rotor A and rotor B are non-centrosymmetric structure, all have the upper and lower surfaces of same shape, upper surface is set
It is equipped with dynamic balancing hole, the upper and lower surfaces of same rotor are around rotor axis at helical angle, the spiral side of rotor A and rotor B
It is equal to opposite and helical angle absolute value；
The helical angle is greater than 0 degree, is less than or equal to 60 degree；
The claw of the rotor A and rotor B all have radial span surface；
The radial span surface of the rotor A or rotor B in a sealing manner, with the periphery of vacuum pump cylinder pump chamber and
The pawl inside circumference face cooperation of pairs of rotor；
The rotor A or the upper and lower surfaces of rotor B are distinguished in a sealing manner, the end face with vacuum pump cylinder pump chamber
Cooperation.
2. spiral jaw rotor according to claim 1, which is characterized in that the overall height of the rotor A and rotor B and straight
Ratio between diameter is less than 1.
3. a kind of vacuum pump with spiral jaw rotor, which is characterized in that rotation setting is had the right in cylindrical pump chamber
It is required that spiral jaw rotor described in 1 or 2.
4. the vacuum pump according to claim 3 with spiral jaw rotor, which is characterized in that further include motor, set
It is equipped with the pump housing of air inlet and air outlet, the driving shaft being connected to motor is stretched out out of the pump housing, passes through gear mechanism with driving shaft
The driven shaft of transmission；
Concatenated n grades of pump chamber is separated by partition in the pump housing, is first order pump chamber close to pump housing air inlet, it is successively past
After to analogize be second, three ... n grades of pump chamber, n is the integer more than or equal to 2；
Air flue is offered on the partition, the both ends of air flue are air entry and exhaust outlet；
The driving shaft and driven shaft are parallel across pump chambers at different levels；
The spiral jaw rotor, rotor A and rotor B intermeshing are equipped in each pump chamber, be respectively arranged in driving shaft and
On driven shaft.
5. the vacuum pump according to claim 4 with spiral jaw rotor, which is characterized in that the first of the pump housing
End is equipped with bottom block, and second end is equipped with top cover；
It is provided with gas outlet on the bottom block, the external oil gas separation equipment in gas outlet is integrated with exhaust valve in gas outlet；
Air inlet and inlet channel are provided on the top cover；
The inlet channel connection air inlet and first order pump chamber.
6. the vacuum pump according to claim 5 with spiral jaw rotor, which is characterized in that the driving shaft and from
Moving axis is rotatably installed on bottom block by angular contact ball bearing, is held and is pushed up bearing block by apical axis and be rotatably installed on top cover.
7. the vacuum pump according to claim 5 with spiral jaw rotor, which is characterized in that the gear mechanism packet
It includes gear-box and is installed on the driving gear and driven gear being meshed in gear-box；
The open end of the gear-box and bottom block are cooperatively connected, and offer pouring orifice on gear-box；
The driving gear is mounted on driving shaft, and driven gear is mounted on driven shaft.
8. the vacuum pump according to claim 7 with spiral jaw rotor, which is characterized in that the gear-box, bottom
The cooling-water duct being mutually communicated is provided on panel seat, pump chamber, partition and top cover；
The water outlet and water inlet of the cooling-water duct are separately positioned on gear-box.
9. the vacuum pump according to claim 8 with spiral jaw rotor, which is characterized in that further include connection gear
The hitch of case and motor；
The driving shaft passes through the output axis connection of shaft coupling and motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821389186.4U CN208734539U (en) | 2018-08-28 | 2018-08-28 | Spiral jaw rotor and vacuum pump with spiral jaw rotor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821389186.4U CN208734539U (en) | 2018-08-28 | 2018-08-28 | Spiral jaw rotor and vacuum pump with spiral jaw rotor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208734539U true CN208734539U (en) | 2019-04-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821389186.4U Active CN208734539U (en) | 2018-08-28 | 2018-08-28 | Spiral jaw rotor and vacuum pump with spiral jaw rotor |
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| Country | Link |
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| CN (1) | CN208734539U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116538089A (en) * | 2023-06-08 | 2023-08-04 | 北京通嘉宏瑞科技有限公司 | Rotor structure and vacuum pump |
| CN116576107A (en) * | 2023-06-08 | 2023-08-11 | 北京通嘉宏瑞科技有限公司 | Rotor and vacuum pump |
| CN116988979A (en) * | 2023-06-27 | 2023-11-03 | 山东亿宁环保科技有限公司 | Claw type vacuum pump partition plate structure |
| CN117514806A (en) * | 2023-12-18 | 2024-02-06 | 坚固工业设备(杭州)有限公司 | Rotor structure of vertical claw type dry vacuum pump, vertical vacuum pump and use method |
-
2018
- 2018-08-28 CN CN201821389186.4U patent/CN208734539U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116538089A (en) * | 2023-06-08 | 2023-08-04 | 北京通嘉宏瑞科技有限公司 | Rotor structure and vacuum pump |
| CN116576107A (en) * | 2023-06-08 | 2023-08-11 | 北京通嘉宏瑞科技有限公司 | Rotor and vacuum pump |
| CN116576107B (en) * | 2023-06-08 | 2024-05-17 | 北京通嘉宏瑞科技有限公司 | Rotor and vacuum pump |
| CN116988979A (en) * | 2023-06-27 | 2023-11-03 | 山东亿宁环保科技有限公司 | Claw type vacuum pump partition plate structure |
| CN116988979B (en) * | 2023-06-27 | 2024-04-02 | 山东亿宁环保科技有限公司 | Claw type vacuum pump partition plate structure |
| CN117514806A (en) * | 2023-12-18 | 2024-02-06 | 坚固工业设备(杭州)有限公司 | Rotor structure of vertical claw type dry vacuum pump, vertical vacuum pump and use method |
| CN117514806B (en) * | 2023-12-18 | 2024-06-04 | 坚固工业设备(杭州)有限公司 | Rotor structure of vertical claw type dry vacuum pump, vertical vacuum pump and use method |
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