CN103104491A - Roots and claw-type rotor combined multi-stage dry vacuum pump - Google Patents
Roots and claw-type rotor combined multi-stage dry vacuum pump Download PDFInfo
- Publication number
- CN103104491A CN103104491A CN2011103580768A CN201110358076A CN103104491A CN 103104491 A CN103104491 A CN 103104491A CN 2011103580768 A CN2011103580768 A CN 2011103580768A CN 201110358076 A CN201110358076 A CN 201110358076A CN 103104491 A CN103104491 A CN 103104491A
- Authority
- CN
- China
- Prior art keywords
- cavity
- rotor
- pump
- driven
- level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention relates to the technical field of vacuum pumps, and in particular relates to a roots and claw-type rotor combined multi-stage dry vacuum pump. The pump is composed of a variable frequency motor, driving and driven shafts, primary roots driving and driven rotors, quarternary claw-type driving and driven rotors, five pump cavities, an exhaust cavity, a bearing cavity, an oil tank, a gear box and driving and driven gears, wherein water cooling is formed in the motor; and water circulation cooling pipes are fixed at the bottoms outside the pump cavities, and the five stages of cavities are internally communicated with one other through certain gas flow channels. The vacuum pump is high in rotating speed, small in size and light in weight. The primary roots rotors and the quarternary claw-type rotors combine with each other, wherein the roots rotors are at a high vacuum gas intake stage, and the claw-type rotors are at a compression exhaust stage, so that at a low inlet pressure, a high pumping rate can be obtained, the compression ratio increases, the ultimate vacuum is enhanced, and energy is saved; and under the condition that the pumping speed is the same, the size and weight of the pump are reduced, the gas pulsation impact is reduced, noises are reduced, direct discharge to the atmosphere is realized, and the pump can work without connecting a backing pump.
Description
Technical field
The present invention relates to the vacuum pump technology field, the multi-stage dry vacuum pump of a kind of Roots and claw rotor combination specifically.
Background technique
The height of IC (intergrated circuit) equipment manufacture level is the important symbol of weighing a countries and regions industrialization degree.And the IC equipment manufacture has become the strategic high ground of developed country's contention high-tech industry as the guiding and strategic industry that strengthens national comprehensive strength and international competitiveness.China gives priority to industry to IC equipment industry as Eleventh Five-Year Plan, and in IC equipment industry, the technique of various manufacturing equipments such as chemical vapor deposition, plasma chemical vapor deposition (PECVD), Implantation, evaporation, sputter, epitaxial growth, etching, encapsulation, detection etc. all need to require to carry out under harsh vacuum environment to cleanliness, just the demand to dry vacuum pump is very high for this, comes from just the continuous growth that develops the external dried pump of drive market rapidly of semicon industry, chemical industry, film industry.In Japan, semicon industry all replaces the oil seal type mechanical pump with dry vacuum pump, and American-European semicon industry has replaced the oil seal type mechanical pump with dry vacuum pump more than 45%, thereby has greatly improved the Performance and quality of product.In order to satisfy the requirement of different application field and different operating modes, multi-stage roots vacuum pump, multistage pawl formula vacuum pump, screw-type vacuum pump, DRY SCROLL VACUUM PUMP, reciprocating piston vacuum pump and turbo type oil-free vacuum pump etc. are arranged abroad.According to statistics, the application of domestic dried pump at present is less than 1% also, and almost all from external import, its price is very expensive for the dried pump of domestic semiconductor industry.So China should research and develop dried pump energetically, make dried pump become China's vacuum industry new growth engines.Claw shape dry type vacuum pump is a pump kind that early occurs.The dried pump of First pawl type, and was widely used in Japan and developed at that time semi-conductor industry rapidly in Japan listing in 1985 in the world.
Existing dried pump technology exists that difficulty of processing is large, limiting vacuum is low, consumed power is large, volume is large, can not discharging directly into atmosphere, can not be used for the deficiency that IC equips.
Summary of the invention
In existing dried pump technology, difficulty of processing is large, limiting vacuum is low, consumed power is large, volume is large in order to overcome, can not discharging directly into atmosphere, can not be used for the deficiency that IC equips, the object of the present invention is to provide a kind of Roots and claw rotor combination multi-stage dry vacuum pump, be applicable to the dried pump of the novel discharging directly into atmosphere of IC equipment.
To achieve these goals, the present invention by the following technical solutions.
A kind of Roots and claw rotor combination multi-stage dry vacuum pump comprises motor, cavity, pump housing tail gear case, wherein is provided with driving shaft and driven shaft in cavity, and this driving shaft and driven shaft rear and front end are equipped with for the bearing and the bearings ring that support; Described driving shaft front end is connected with motor, the rear end is placed in pump housing tail gear case and is provided with driving gear, described driven shaft tail end is placed in pump housing tail gear case and is provided with the driven gear that is in transmission connection with driving gear, and the driven shaft front end passes cavity and fixes by nut; Described cavity comprises one-level cavity, accommodating claw rotor cavity, exhaust cavity and bearing cavity successively from pump housing tail end, wherein be equipped with on the end face of one-level cavity, accommodating claw rotor cavity and make suction port and the relief opening that interconnects between cavity, the exhaust cavity is provided with the exhaust cavity that is connected with accommodating claw rotor cavity; Bearing and the bearings ring of described driving shaft and driven shaft rear end are placed in the one-level cavity, also be provided with in described one-level cavity one-level Roots's power rotor of being solidly set on driving shaft and corresponding with it, admittedly be placed in one-level Roots's driven rotor on driven shaft; Be provided with in accommodating claw rotor cavity the pawl formula power rotor that is solidly set on driving shaft and corresponding with it, be solidly set on the pawl formula driven rotor on driven shaft; The bearing of described driving shaft and driven shaft front end and bearings ring are placed in the bearing cavity.
Be provided with the motor fuel tank between described motor and cavity, be provided with in this motor fuel tank and be set on driving shaft and driven shaft the motor side bearing gland that is used for rigid bearing, be fixed in be used on described driving shaft with driving shaft be fixed in motor one side driving axle housing, be fixed in the active disc on this driving axle housing and be fixed in the driven disc of motor side of driven shaft end.
Described accommodating claw rotor cavity comprises secondary cavity, three grades of cavitys, level Four cavity and Pyatyi cavitys, cavitys at different levels are equipped with suction port and relief opening, and the relief opening of upper level is corresponding with the suction port of next stage, and the relief opening of described Pyatyi cavity is corresponding with described exhaust cavity; Be provided with successively a positive and a negative in described cavity at different levels and be solidly set on secondary pawl formula power rotor and secondary pawl formula driven rotor, three grades of pawl formula power rotors and three grades of pawl formula driven rotor, level Four pawl formula power rotor and level Four pawl formula driven rotor, Pyatyi pawl formula power rotor and Pyatyi pawl formula driven rotors on driving shaft and driven shaft.
The gap of described rotor at different levels and pump chamber is 0.1～0.2mm.
Described cavity at different levels is by Bolt Connection, and pump housing tail gear case is fixed in the one-level cavity by bolt.
Adopt the sealing of O RunddichtringO between described cavity at different levels.
Gas in described pump chamber at different levels is compressed to rough vacuum step by step by high vacuum, and compression ratio is 9: 8: 6: 3: 2.
Described cavity outside is provided with water cooling plant.
Described motor comprises shell, motor stator, rotor and output shaft, and wherein output shaft is coaxial with described driving shaft, and rotor is fixed on output shaft, adopts seam to locate and adopt the sealing of O RunddichtringO between motor stator and the pump housing.
The gap of described driving shaft, driven shaft and each cavity axis hole is 0.08～0.15mm.
The present invention has the following advantages:
Obtain the large speed of exhaust under low inlet pressure during this pump work, compare with Roots pump and have high compression ratio, the characteristics of low power consumption improve ultimate vacuum, energy saving, in the situation that the identical volume that reduces pump of pumping speed, reduced simultaneously the gas impact, reduced noise, normal pressure starts, but discharging directly into atmosphere works alone, and also can form the oil-less pump unit with Roots pump and molecular pump; Frequency control of motor speed, the flexible startup, complete machine impacts little, long service life.And the complete machine overload protection has fault and automatically protects, and destructive the damage can not occur; Can take out for a long time atmosphere under certain rotating speed, change the maximum inlet pressure restriction of dried pump; Adopt novel special Teflon class lips shaft seal, increased wear resistance, reduced friction factor, extended the service cycle of pump; And adopting the hydrocarbon filter structure, balance charge of oil chamber and dried pump cavity pressure solve the leakage problem to vacuum chamber; Adopt rotor and pump shaft one, the structure of motor stator outside the grease chamber solved motor sealing and motor vibration problems; Adopt closed loop control system that water, temperature, gas are controlled, satisfy various semiconductor technology requirements; The heat expansion assembly structure is adopted in the assembling of gear and rotor, has reduced degree of unbalancedness and the vibration of motion section; Can keep vacuum environment not contaminated in pumping process, be applicable to the industries such as semiconductor, petrochemical industry, metallurgy, food, medicine, electronics, packing, printing.
Description of drawings
Fig. 1 is structural representation of the present invention;
Fig. 2 is primary rotor and cavity cross-section figure;
Fig. 3 is secondary rotor and cavity cross-section figure;
Fig. 4 is three grades of rotors and cavity cross-section figure;
Fig. 5 is level Four rotor and cavity cross-section figure;
Fig. 6 is Pyatyi rotor and cavity cross-section figure;
wherein: 1 is driving gear, 2 is gear-box, 3 is bearing gland, 4 is the one-level cavity, 5 is the secondary cavity, 6 is three grades of cavitys, 7 is the level Four cavity, 8 is the Pyatyi cavity, 9 is exhaust cavity, 10 is shaft seal, 11 is the bearing cavity, 12 is the motor fuel tank, 13 is the active disc, 14 is driving axle housing, 15 is motor stator, 16 is rotor, 17 is set screw nut, 18 is the motor side bearing gland, 19 is the driven disc of motor side, 20 is bearing, 21 is Pyatyi pawl formula driven rotor, 22 is Pyatyi pawl formula power rotor, 23 is level Four pawl formula driven rotor, 24 is level Four pawl formula power rotor, 25 is three grades of driven rotors of pawl formula, 26 is three grades of pawl formula power rotors, 27 is secondary pawl formula driven rotor, 28 is secondary pawl formula power rotor, 29 is one-level Roots driven rotor, 30 is one-level Roots power rotor, 31 is the driven disc of gear side, 32 is driven gear, 33 is the bearings ring, 34 is driven shaft, 35 is driving shaft, 36 is exhaust duct, 37 is the one-level suction port, 38 is the one-level relief opening, 39 is the secondary suction port, 40 is the secondary relief opening, 41 is three grades of suction ports, 42 is three grades of exhaust cavitys, 43 is the level Four suction port, 44 is the level Four relief opening, 45 is the Pyatyi suction port, 46 is the Pyatyi relief opening.
Embodiment
As shown in Figure 1, the present invention includes motor, cavity, pump housing tail gear case 2, wherein be provided with driving shaft 35 and driven shaft 34 in cavity, this driving shaft 35 and driven shaft 34 rear and front ends are equipped with passive bearing 20 and bearings ring 33; Described driving shaft 35 front ends are connected with motor, the rear end is placed in pump housing tail gear case 12 and is provided with driving gear 1, described driven shaft 34 tail ends are placed in pump housing tail gear case 2 and are provided with the driven gear 32 that is in transmission connection with driving gear 1, and driven shaft 34 front ends pass cavity, also fixing by nut 17; Described cavity comprises one-level cavity 4, accommodating claw rotor cavity, exhaust cavity and bearing cavity 11 successively from pump housing tail end, wherein be equipped with on the end face of one-level cavity 4, accommodating claw rotor cavity and make suction port and the relief opening that interconnects between cavity, the exhaust cavity is provided with the exhaust cavity 9 that is connected with accommodating claw rotor cavity; Bearing 20 and the bearings ring 33 of described driving shaft 35 and driven shaft 34 rear ends are placed in one-level cavity 4, also be provided with in described one-level cavity 4 one-level Roots's power rotor 30 of being solidly set on driving shaft 35 and corresponding with it, admittedly be placed in one-level Roots's driven rotor 29 on driven shaft 34; Be provided with in accommodating claw rotor cavity the pawl formula power rotor that is solidly set on driving shaft 35 and corresponding with it, be solidly set on the pawl formula driven rotor on driven shaft 34; Bearing (20) and the bearings ring 33 of described driving shaft 35 and driven shaft 34 front ends are placed in bearing cavity 11.
Be provided with motor fuel tank 12 between described motor and cavity, be provided with in this motor fuel tank 12 and be set on driving shaft 35 and driven shaft 34 the motor side bearing gland 18 that is used for rigid bearing 20, be fixed in be used on described driving shaft 35 with driving shaft 35 be fixed in motor one side driving axle housing 14, be fixed in the active disc 13 on this driving axle housing 14 and be fixed in the driven disc 19 of motor side of driven shaft 34 ends.Motor fuel tank 12 is fixed by screws on bearing cavity 11.
Described accommodating claw rotor cavity comprises secondary cavity 5, three grades of cavitys 6, level Four cavity 7 and Pyatyi cavitys 8, cavitys at different levels are equipped with suction port and relief opening, and the relief opening of upper level is connected with the suction port of next stage, the relief opening of described Pyatyi cavity 8 is connected with described exhaust cavity 9, and exhaust duct 36 is connected with exhaust cavity 9.Be provided with successively a positive and a negative in described cavity at different levels and be solidly set on secondary pawl formula power rotor 28 and secondary pawl formula driven rotor 27 on driving shaft 35 and driven shaft 34, three grades of pawl formula power rotors 26 and three grades of pawl formula driven rotors 25, level Four pawl formula power rotor 24 and level Four pawl formula driven rotor 23, Pyatyi pawl formula power rotor 22 and Pyatyi pawl formula driven rotors 21.Described cavity at different levels passes through Bolt Connection, adopt the sealing of O RunddichtringO, form five airtight pump chambers, suction port and relief opening are by two rotor end-face period of rotation switches, the angle in the corresponding driven shaft of the length of exhaust port axle center is 80 °-180 °, and driving shaft axle center angle is-120 °-100 °, and the exhaust port angle has been done certain prolongation, just be discharged to the next stage pump chamber when making the gas of compression also not reach very High Voltage, reduced every grade of heat of compression that pump chamber produces.
Driving shaft 35, driven shaft 34 are 0.08～0.15mm with the gap of each cavity axis hole; Pump housing tail gear case 2 is fixed in one-level cavity 4 by bolt, and the fixedly bearing gland 3 of rear bearing is housed respectively on the interior master and slave moving axis of pump housing tail gear case 2; Described cavity outside is provided with water cooling plant, and namely cooled plate is cooling, makes the present invention that the heat locking phenomenon that rises can not occur under anticyclonic operating conditions continuously yet.
Described motor comprises shell, motor stator 15, rotor 16 and output shaft, wherein output shaft is coaxial with described driving shaft 35, rotor 16 is fixed on output shaft, adopts Precise Flangers to locate and adopt the sealing of fluororubber O-type seal ring between motor stator 35 and the pump housing.Infusion epoxy resin between described motor housing and motor stator 15; Described motor adds frequency-variable controller, adopts horizontal.
As shown in Fig. 3～6, with rotor progression difference, a plurality of relatively independent pump chambers are arranged respectively, and the relief opening by each cavity is to the next stage exhaust, be that one-level relief opening 38 is connected with secondary suction port 39, secondary relief opening 40 is connected with three grades of suction ports 41, three grades of relief openings 42 are connected with level Four suction port 43, and level Four relief opening 44 is connected with Pyatyi suction port 45, and 5 grades is exhaust stage; 2 grades to 5 grades claw rotors a positive and a negative successively are arranged on axle, and primary rotor is roots rotor, and all the other level Four compression exhaust levels are claw rotor.
According to the needs of vacuum performance, the pump chamber actual volume begins to compress step by step from the high vacuum vacant level, and is connected by the inter-stage air-flow path; One-level roots rotor molded line is comprised of circular arc and cycloid, the level Four claw-type rotor profile is that symmetric form is comprised of cycloid and circular arc, structural configuration can obtain the large speed of exhaust under low inlet pressure like this, its ultimate pressure can reach below 1Pa, gas is compressed to the rough vacuum level step by step by high vacuum in pump chamber, and preferred compression is 9: 8: 6: 3: 2; In the situation that pumping speed is identical, reduced the volume of pump, reduced power consumption, and processing is simple, easily reaches requirement.
For obtaining better technique effect, describedly be arranged on rotor on axle and the gap of pump chamber is 0.1-0.2mm; What described rotor at different levels and axle adopted is that interference fit is installed; Described pump chamber bottom is fixed with water cooling tube the pump housing is carried out outside water-cooled; Described rotor and axle need detect through dynamic balancing, and amount of unbalance is less than 1gmm.
During vacuum pump work, at first gas entered first-stage pump body, compressed through the high vacuum level by suction port, enter next stage by air-flow path after discharging, respectively in the second level, the 3rd, the fourth stage reduces volume, pressurized gas, discharge atmosphere after being discharged to exhaust cavity by Pyatyi rough vacuum level at last, can realize discharging directly into atmosphere.
Claims (10)
1. a Roots and claw rotor combination multi-stage dry vacuum pump, it is characterized in that: comprise motor, cavity, pump housing tail gear case (2), wherein be provided with driving shaft (35) and driven shaft (34) in cavity, this driving shaft (35) and driven shaft (34) rear and front end are equipped with passive bearing (20) and bearings ring (33); Described driving shaft (35) front end is connected with motor, the rear end is placed in pump housing tail gear case (12) and is provided with driving gear (1), described driven shaft (34) tail end is placed in pump housing tail gear case (2) and is provided with the driven gear (32) that is in transmission connection with driving gear (1), and driven shaft (34) front end passes cavity, also fixing by nut (17); Described cavity comprises one-level cavity (4), accommodating claw rotor cavity, exhaust cavity and bearing cavity (11) successively from pump housing tail end, wherein be equipped with on the end face of one-level cavity (4), accommodating claw rotor cavity and make suction port and the relief opening that interconnects between cavity, exhaust cavity be provided with the exhaust cavity (9) that is connected with accommodating claw rotor cavity; Bearing (20) and the bearings ring (33) of described driving shaft (35) and driven shaft (34) rear end are placed in one-level cavity (4), also be provided with in described one-level cavity (4) one-level Roots's power rotor (30) of being solidly set on driving shaft (35) and corresponding with it, admittedly be placed in one-level Roots's driven rotor (29) on driven shaft (34); Be provided with in accommodating claw rotor cavity the pawl formula power rotor that is solidly set on driving shaft (35) and corresponding with it, be solidly set on the pawl formula driven rotor on driven shaft (34); Bearing (20) and the bearings ring (33) of described driving shaft (35) and driven shaft (34) front end are placed in bearing cavity (11).
2. by multi-stage dry vacuum pump claimed in claim 1, it is characterized in that: be provided with motor fuel tank (12) between described motor and cavity, be provided with in this motor fuel tank (12) and be set in driving shaft (35) and the upper motor side bearing gland (18) that is used for rigid bearing (20) of driven shaft (34), be fixed in the upper driving axle housing (14) that is used for driving shaft (35) is fixed in motor one side of described driving shaft (35), be fixed in the active disc (13) on this driving axle housing (14) and be fixed in the driven disc of motor side (19) of driven shaft (34) end.
3. by multi-stage dry vacuum pump claimed in claim 1, it is characterized in that: described accommodating claw rotor cavity comprises secondary cavity (5), three grades of cavitys (6), level Four cavity (7) and Pyatyi cavity (8), cavitys at different levels are equipped with suction port and relief opening, and the relief opening of upper level is connected with the suction port of next stage, and the relief opening of described Pyatyi cavity (8) is connected with described exhaust cavity (9); Be provided with successively a positive and a negative in described cavity at different levels and be solidly set on secondary pawl formula power rotor (28) and secondary pawl formula driven rotor (27), three grades of pawl formula power rotors (26) and three grades of pawl formula driven rotors (25), level Four pawl formula power rotor (24) and level Four pawl formula driven rotor (23), Pyatyi pawl formula power rotor (22) and Pyatyi pawl formula driven rotor (21) on driving shaft (35) and driven shaft (34).
4. by multi-stage dry vacuum pump claimed in claim 3, it is characterized in that: the gap of described rotors at different levels and pump chamber is 0.1～0.2mm.
5. by multi-stage dry vacuum pump claimed in claim 3, it is characterized in that: described cavitys at different levels are by Bolt Connection, and pump housing tail gear case (2) is fixed in one-level cavity (4) by bolt.
6. by multi-stage dry vacuum pump claimed in claim 3, it is characterized in that: adopt the sealing of O RunddichtringO between described cavitys at different levels.
7. by multi-stage dry vacuum pump claimed in claim 3, it is characterized in that: the gas in described pump chambers at different levels is compressed to rough vacuum step by step by high vacuum, and compression ratio is 9: 8: 6: 3: 2.
8. by multi-stage dry vacuum pump claimed in claim 1, it is characterized in that: described cavity outside is provided with water cooling plant.
9. by multi-stage dry vacuum pump claimed in claim 1, it is characterized in that: described motor comprises shell, motor stator (15), rotor (16) and output shaft, wherein output shaft is coaxial with described driving shaft (35), rotor (16) is fixed on output shaft, adopts seam to locate and adopt the sealing of O RunddichtringO between motor stator (35) and the pump housing.
10. by multi-stage dry vacuum pump claimed in claim 1, it is characterized in that: described driving shaft (35), driven shaft (34) are 0.08～0.15mm with the gap of each cavity axis hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103580768A CN103104491A (en) | 2011-11-11 | 2011-11-11 | Roots and claw-type rotor combined multi-stage dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011103580768A CN103104491A (en) | 2011-11-11 | 2011-11-11 | Roots and claw-type rotor combined multi-stage dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103104491A true CN103104491A (en) | 2013-05-15 |
Family
ID=48312611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011103580768A Pending CN103104491A (en) | 2011-11-11 | 2011-11-11 | Roots and claw-type rotor combined multi-stage dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103104491A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105179252A (en) * | 2015-10-27 | 2015-12-23 | 易先杰 | Claw type dry pump |
| CN106762650A (en) * | 2015-11-25 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of energy-saving control system and method for pumping equipment |
| CN108119352A (en) * | 2017-12-22 | 2018-06-05 | 东北大学 | A kind of rotor performance test dry vacuum pump external member and test method |
| CN109026707A (en) * | 2018-08-22 | 2018-12-18 | 中北大学 | The combination pump that claw pumps are combined with slide valve pump |
| CN110214231A (en) * | 2017-01-20 | 2019-09-06 | 爱德华兹有限公司 | Multi-stage vacuum booster pump connector |
| CN110701045A (en) * | 2019-11-22 | 2020-01-17 | 海门市晶盛真空设备有限公司 | Double-screw vacuum pump |
| CN111720328A (en) * | 2019-03-20 | 2020-09-29 | 上海伊莱茨真空技术有限公司 | Multi-stage vacuum pump sharing drive shaft |
| CN113417852A (en) * | 2021-08-11 | 2021-09-21 | 四川莱斯特真空科技有限公司 | Dry vacuum pump |
| CN114412788A (en) * | 2022-03-02 | 2022-04-29 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
| CN114607597A (en) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | Rotor shaft assembly in vacuum pump |
| CN116517826A (en) * | 2023-04-25 | 2023-08-01 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
| CN116591954A (en) * | 2023-04-14 | 2023-08-15 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2111126A (en) * | 1981-12-09 | 1983-06-29 | British Oxygen Co Ltd | Rotary positive-displacement fluid-machines |
| CN2111126U (en) * | 1991-12-10 | 1992-07-29 | 沈阳市康乐门球器材厂 | Door ball apparatus |
| CN101074670A (en) * | 2007-06-18 | 2007-11-21 | 陈全玉 | Oilless roots vacuum pump with mechanical seal |
| CN101985939A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Dry vacuum pump with shaft end dynamic seal structure |
| CN202326246U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Roots and claw-type rotor combined multi-stage dry vacuum pump |
-
2011
- 2011-11-11 CN CN2011103580768A patent/CN103104491A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2111126A (en) * | 1981-12-09 | 1983-06-29 | British Oxygen Co Ltd | Rotary positive-displacement fluid-machines |
| CN2111126U (en) * | 1991-12-10 | 1992-07-29 | 沈阳市康乐门球器材厂 | Door ball apparatus |
| CN101074670A (en) * | 2007-06-18 | 2007-11-21 | 陈全玉 | Oilless roots vacuum pump with mechanical seal |
| CN101985939A (en) * | 2010-11-30 | 2011-03-16 | 东北大学 | Dry vacuum pump with shaft end dynamic seal structure |
| CN202326246U (en) * | 2011-11-11 | 2012-07-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Roots and claw-type rotor combined multi-stage dry vacuum pump |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105179252A (en) * | 2015-10-27 | 2015-12-23 | 易先杰 | Claw type dry pump |
| CN106762650A (en) * | 2015-11-25 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of energy-saving control system and method for pumping equipment |
| CN110214231B (en) * | 2017-01-20 | 2021-11-19 | 爱德华兹有限公司 | Multi-stage vacuum booster pump connector |
| CN110214231A (en) * | 2017-01-20 | 2019-09-06 | 爱德华兹有限公司 | Multi-stage vacuum booster pump connector |
| US11578722B2 (en) | 2017-01-20 | 2023-02-14 | Edwards Limited | Multi-stage vacuum booster pump coupling |
| CN108119352A (en) * | 2017-12-22 | 2018-06-05 | 东北大学 | A kind of rotor performance test dry vacuum pump external member and test method |
| CN109026707B (en) * | 2018-08-22 | 2024-05-14 | 中北大学 | Composite pump combining claw pump and slide valve pump |
| CN109026707A (en) * | 2018-08-22 | 2018-12-18 | 中北大学 | The combination pump that claw pumps are combined with slide valve pump |
| CN111720328A (en) * | 2019-03-20 | 2020-09-29 | 上海伊莱茨真空技术有限公司 | Multi-stage vacuum pump sharing drive shaft |
| CN110701045A (en) * | 2019-11-22 | 2020-01-17 | 海门市晶盛真空设备有限公司 | Double-screw vacuum pump |
| CN114607597A (en) * | 2020-12-04 | 2022-06-10 | 中国科学院沈阳科学仪器股份有限公司 | Rotor shaft assembly in vacuum pump |
| CN113417852A (en) * | 2021-08-11 | 2021-09-21 | 四川莱斯特真空科技有限公司 | Dry vacuum pump |
| CN114412788A (en) * | 2022-03-02 | 2022-04-29 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
| CN114412788B (en) * | 2022-03-02 | 2024-03-22 | 南通诺博特机器人制造有限公司 | Energy-saving Roots-screw integrated oil-free vacuum pump |
| CN116591954A (en) * | 2023-04-14 | 2023-08-15 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
| CN116591954B (en) * | 2023-04-14 | 2023-11-28 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
| CN116517826B (en) * | 2023-04-25 | 2024-03-22 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
| CN116517826A (en) * | 2023-04-25 | 2023-08-01 | 北京通嘉宏瑞科技有限公司 | Rotor assembly and pump body structure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103104491A (en) | Roots and claw-type rotor combined multi-stage dry vacuum pump | |
| CN202326246U (en) | Roots and claw-type rotor combined multi-stage dry vacuum pump | |
| CN201396281Y (en) | Multistage three-blade Roots vacuum pump | |
| WO2017031807A1 (en) | Non-coaxial vacuum pump with multiple driving chambers | |
| KR20130050488A (en) | Multistage dry vaccum pump | |
| US11339783B2 (en) | Pump housing structure of three-axis multi-stage Roots pump | |
| KR101385954B1 (en) | Multistage dry vacuum pump | |
| CN108194353B (en) | Multistage roots dry vacuum pump with independent paired rotor rotating shafts and capable of directly discharging air | |
| KR101613161B1 (en) | Two stages type's dry vacuum pump | |
| KR20070115569A (en) | Roots vacuum pump | |
| CN103104489A (en) | Roots vacuum pump | |
| CN106014995A (en) | Multi-stage dry Roots vacuum pump | |
| CN208734539U (en) | Spiral jaw rotor and vacuum pump with spiral jaw rotor | |
| CN2667203Y (en) | Multi-stage Roots oil-free vacuum pump | |
| CN108105121A (en) | A kind of multistage composite high vacuum dry pump | |
| US10465686B2 (en) | Vacuum pump system | |
| CN104005954B (en) | A kind of vertical roots dry vacuum pump | |
| CN101382137A (en) | Multi-stage roots dry vacuum pump discharging directly into atmosphere | |
| CN219366316U (en) | Multistage Roots vacuum pump | |
| CN201074591Y (en) | Multilevel Roots dry vacuum pump for straight discharging atmosphere | |
| CN202391738U (en) | Roots vacuum pump | |
| CN203892187U (en) | Vertical Roots dry vacuum pump | |
| CN114607600B (en) | Novel multistage roots vacuum pump | |
| CN102410221A (en) | Double-cylinder rotary compressor | |
| CN216922491U (en) | Water-cooled type screw vacuum pump |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130515 |