CN201074591Y - Multilevel Roots dry vacuum pump for straight discharging atmosphere - Google Patents
Multilevel Roots dry vacuum pump for straight discharging atmosphere Download PDFInfo
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- CN201074591Y CN201074591Y CNU2007200144520U CN200720014452U CN201074591Y CN 201074591 Y CN201074591 Y CN 201074591Y CN U2007200144520 U CNU2007200144520 U CN U2007200144520U CN 200720014452 U CN200720014452 U CN 200720014452U CN 201074591 Y CN201074591 Y CN 201074591Y
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Abstract
The utility model relates to the technical field of vacuum pumps and in particular relates to a multi-level Roots vacuum pump which can be used to discharge atmospheric air directly. The pump comprises a drive shaft, a driven shaft, a drive rotor, a driven rotor, a drive gear and a driven gear, wherein the drive gear and the drive rotor are installed on the drive shaft, the driven gear and the driven rotor are installed on the driven shaft, a pump body adopts the multi-level mutual-connecting structure which has a plurality of comparatively independent pump cavities along different grades, and every two pump cavities are separated by an inter-stage baffle plate and connected through an inter-stage air current passage. The utility model solves the problems in an existing technique that once investment is large, processing difficulty is big, limit vacuum is low, consuming power is big, direct atmospheric air discharge is not available, and the existing technique can not used for the deficiency of IC equipment. The utility model can keep vacuum circumstance from being polluted and is applied to industries as semi-conductor, petrifaction, metallurgy, foodstuff, medicine, electronics, packing, printing and the like.
Description
Technical field
The utility model relates to the multi-stage roots vacuum pump in vacuum pump technology field, particularly a kind of discharging directly into atmosphere.
Background technique
IC equipment industry is the important industry of national development strategy.In IC equipment industry, 70% need of work is requiring to carry out for example chemical vapor deposition, ion injection, evaporation, sputter, epitaxial growth, etching, encapsulation, detection etc. under the harsh vacuum environment to cleanliness.In each bar IC production line, all to use a large amount of acquisitions and obtain equipment with the dry vacuum of keeping the clean vacuum environment.Middle-grade technology IC production line with 2.5 ten thousand 8 inches wafers of a monthly output is an example, needs usually with thousands of of various dry vacuum pumps, and investment accounts for about 20% of equipment investment.As one of key equipment of IC equipment, dry vacuum obtains equipment because industrial technology threshold height, production and sales are monopolized by major company of external a few family always, occupied the market share more than 95% in the world as weak former, general of the Germany of Japan, Britain Edward, German Lay treasured, French Alcatel etc., domestic production producer does not almost form the product of industrialization.
Roots pump is developed by Roots blower, the dry type Roots pump that comprises high vacuum multi-stage roots pump, middle vacuum Roots blower pump and discharging directly into atmosphere, being widely used in industries such as chemical industry, papermaking, metallurgy, film preparation, food, also is a kind of vacuum pump commonly used in the IC equipment industry.The research of domestic Roots pump and making early, but it is actually rare to be suitable for the dried pump of Roots that IC equipment industry is strict with, and causes the long-term dependence on import of this equipment.
The development of the dried pump of discharging directly into atmosphere Roots is as follows:
1854, American Israelis FRANCIS M.ROOTS and PHILAND H.ROOTS two brothers on the basis of rotary blower, invented Roots blower (P.H.ROOTS.ROTARYBLOWER[P] .US PATENT.No.30157.1860.9; F.M.ROOTS.ROTARY PUMP[P] .US PATENT.No.325276.1885.9), and applied for multinomial U. S. Patent successively, and molded lines is revised.In subsequently nearly 150 years, many scholars and machinist revise Roots's molded lines in succession and develop, to satisfy the demand of different occasions.
1900, American RALPH C.ENYART did improvement to Roots's molded lines, has invented the Roots type transmission pump.1954, Roots pump appearred; After Roots pump is used 20 years, Germans such as CLAUSWINKELSTRATER are used for this structure the design of Roots pump, but thereby invented dry type Roots pump with ventilation type structure discharging directly into atmosphere (CLAUS WINKELSTRATER, etal.ROTARY-PISTONMACHINE[P] .US PATENT.No.3817667.1974.6).German scholar J Henning write articles (J Henning, H lang.Roots pumps for high difference pressures withcooling by gas circulation[J] .Vacuum 1976:26 (7): 273-276; J.Henning, H.Lang.WGK C pumps:Gas-cooled roots pumps-chemical series.Journal of Vacuum Scienceand Technology[J] .1978, Vol.15No.2, pp.784.) introduced the air cooling principle of the dried pump of this Roots, ultimate pressure, pumping performance, energy consumption and heating temperature control etc., point out that this pump adopts two roots rotor axles in the fixing cantilever beam type structure of gear end, the lubricant oil that guarantees gear does not enter into vacuum pump chamber, be particularly suitable for extracting and contain a large amount of condensable gas and chemical emission in the semi-conductor industry, obtain the vacuum environment that cleaning does not have oil.(L.C.Valdes, Renaud Theis, et al.Calculating transient flowsthrough ducts ofnonconstant rectangular shape.Vacuum 1997:48 (839-843) such as France scholar L.C.Valdes; L.C.Valdes, Benoit Barthod, et al.Accurate prediction of internal leaks in stationary dry rootsvacuum pumps.Vacuum 1999:52 (451-459)), derived by the conductance calculating of transition flow under the non-constant rectangular cross-section, and studied under the non-operating condition static leakage theory by the dried pump of ventilation type Roots gap in conjunction with the Knudsen-Dong rule, and verify by test, but once pointed out: the Knudsen-Dong rule is not suitable for the running simulation of the dried pump of Roots.
Domesticly start late for specializing in then of discharging directly into atmosphere Roots pump.(Cao Yu such as Cao Yu, Luo Gensong, the heat Balance Calculation of ventilation type discharging directly into atmosphere Roots pump and unit [J]. vacuum, 2002, (2) .) carried out the heat Balance Calculation of ventilation type discharging directly into atmosphere Roots pump and unit, point out that it has characteristics such as big, the allowable pressure reduction height of pumping speed, pollution-free, low power consumption.Duan Yongli (Duan Yongli.Multistage three leaf dry type Roots pump Study on Several Problems [M], Shenyang: Northeastern University's Master's thesis, 2004) analyzed the cooling effect of ventilation type three leaf roots rotors.Wang Xiaohu, Zhang Baofu etc. (Wang Xiaohu, Yu Linghua, Zhang Baofu, Luo Gensong. be applicable to a kind of molded lines of rotor [J] of ventilation type discharging directly into atmosphere Roots pump. vacuum, 2005, (5)) studied the composition of an Arc Cycloid molded breadth two lobe rotor molded lines.Li Decai etc. have studied the Magneticfluid Seal Technique that Roots's sense is collapsed.
The dried pump of ventilation type Roots satisfied IC equipment industry the operating temperature height, long-term operation is stable, noise is low, maintenances is simple, clean the numerous requirements of no wet goods, is very promising a kind of dry type Roughing pump.At present, have high input etc. the restraining factors except that processing and matching requirements precision height, difficulty of processing are big, disposable, design theory is in urgent need to be improved, especially comprises the determining of reduction, gap of improvement, the processing cost of Roots's molded lines, the calculating of leakage rate, the thermodynamic analysis in the pump etc.
The model utility content
The purpose of this utility model is to provide a kind of multi-stage roots dry vacuum pump of discharging directly into atmosphere, disposablely in the prior art have high input in order to solve, difficulty of processing is big, limiting vacuum is low, consumed power is big, can not discharging directly into atmosphere, can not be used for the deficiency of IC equipment, be applicable to the dried pump of Roots of the novel discharging directly into atmosphere of IC equipment.
To achieve these goals, the technical solution of the utility model is:
A kind of multi-stage roots dry vacuum pump of discharging directly into atmosphere, have main driven shaft, the moving rotor of principal and subordinate, main driven gear, driving gear, power rotor are installed on the driving shaft, driven gear, driven rotor are installed on the driven shaft, the pump housing adopts multistage connected structure, the different branch a plurality of relatively independent pump chambers are arranged with rotor progression, have interstage diaphragm separately between per two pump chambers, and link to each other by the inter-stage air-flow path.
Described vacuum pump, pump chamber quantity are 3-6.
Described vacuum pump, pump chamber length shorten step by step from the high vacuum level.
Described vacuum pump, when the pump housing adopted the Pyatyi connected structure, from the high vacuum level, Pyatyi pump chamber length ratio was (11-13): (7-9): (7-9): (2-4): (2-4).
Described vacuum pump, power rotor, the whole outer contour of driven rotor end face are circular arc line.
Described vacuum pump is installed in the rotor on driving shaft, the driven shaft and the gap c of pump chamber, 0＜c≤0.1mm.
Described vacuum pump, the interstage diaphragm of close driving gear, driven gear one side is provided with the water-cooled interlayer.
Described vacuum pump, the inter-stage between pump chamber is sealed into clearance seal.
Described vacuum pump, the drive mechanism of vacuum pump are transmission of coupling direct connection or shielding rotor shaft drive.
Described vacuum pump, the pump housing are horizontal type structure.
The utlity model has following advantage:
Through compression step by step, increasing compression ratio improved ultimate vacuum, energy saving when 1, the utility model vacuum pump was worked, under the identical situation of pumping speed, reduce the volume of pump, reduced the gas impact simultaneously, reduced noise, and the realization discharging directly into atmosphere does not need to connect fore pump and gets final product work.
2, the utility model adopts Teflon class axle envelope, has increased wear resistance, has reduced friction factor, has prolonged the service cycle of pump.
3, the utility model adopts rotor and pump shaft one, and the structure of motor stator outside the grease chamber solved motor motive sealing and motor vibration problems.
4, the utility model adopts the closed loop control system of water highly, temperature, gas, the various semiconductor technology requirements of adaptation of intelligence.
5, the novel oil structure that expands is adopted in the assembling of the utility model gear, and is convenient for assembly and reduced the degree of unbalancedness of motion portion.
6, it is not contaminated that the utility model can keep vacuum environment in pumping process, is applicable to industries such as semiconductor, petrochemical industry, metallurgy, food, medicine, electronics, packing, printing.
Description of drawings
Fig. 1 is the multi-stage roots dry vacuum pump constitutional diagram.
Fig. 2 is multi-stage roots dry vacuum pump inner shaft and rotor constitutional diagram.
Among Fig. 1: 1, bearing (ball) cover; 2, left end shrouding; 3, one-level cavity; 4, suction port; 5, one-level dividing plate; 6, inter-stage air-flow path; 7, secondary cavity; 8, secondary dividing plate; 9, three grades of cavitys; 10, three grades of dividing plates; 11, level Four cavity; 12, level Four dividing plate; 13, Pyatyi cavity; 14, Pyatyi dividing plate; 15, right-hand member shrouding; 16, gear-box; 17, driving gear; 18, driven gear; 19, motor;
Among Fig. 2: 20, driving shaft; 21, power rotor; 22, driven rotor; 23 driven shafts.
Embodiment
Shown in Fig. 1-2, the utility model embodiment is a Pyatyi roots dry oil-free vacuum pump, this pump is by master and slave moving axis, driving and driven rotor, two end-plates, cavity, interstage diaphragm, driving and driven gear, gear-box constitute, its concrete structure is as follows: driving gear 17, power rotor 21 are installed on the driving shaft 20, driven gear 18, driven rotor 22 are installed on the driven shaft 23, the gap c of power rotor 21, driven rotor 22 and pump chamber, 0＜c≤0.1mm.Bearing (ball) cover is equipped with at master and slave moving axis two ends respectively, and bearing (ball) cover 1 inboard of left end is a pump housing left end shrouding 2, and the bearing (ball) cover inboard of right-hand member is a pump housing right-hand member shrouding 15, gear-box 16 by bolt in pump housing right-hand member shrouding 15.Cavitys at different levels and dividing plate pass through Bolt Connection, the pump housing has a plurality of relatively independent pump chambers with rotor progression different the branch, present embodiment forms five airtight pump chambers: one-level cavity 3, secondary cavity 7, three grades of cavitys 9, level Four cavity 11, Pyatyi cavity 13, interstage diaphragm is arranged between the two-stage pump chamber: one-level dividing plate 5, secondary dividing plate 8, three grades of dividing plates 10, level Four dividing plate 12, Pyatyi dividing plate 14 separately and link to each other by inter-stage air-flow path 6; Inter-stage between pump chamber is sealed into clearance seal, near the Pyatyi dividing plate 14 employing water-cooled interlayers of gear one side.
As shown in Figure 2, the whole outer contour of driven rotor 22 end faces that the utility model is installed in power rotor 21 on the driving shaft 20, be installed on the driven shaft 23 is all formed (adopt two leaf) by circular arc, this shape line increases the volumetric efficiency of pump, under the identical situation of pumping speed, reduced the volume of pump, and processing is simple, reaches requirement easily; The kind of drive of the utility model pump housing can be passed through the transmission of coupling direct connection, also can pass through shielding rotor formula electric-motor-driving; The pump housing adopts horizontal type structure.
The utility model pump chamber length shortens step by step from high vacuum level (the vacuum limit of present embodiment high vacuum level is about 3Pa), and the length ratio of pump chambers at different levels is 12: 8: 8: 3: 3, the length of pump chamber internal rotor was determined according to pump chamber length.During vacuum pump work, gas is at first entered the pump housing, is compressed through the high vacuum level by suction port 4, discharges the back and enters next stage by inter-stage air-flow path 6, reduces volume, pressurized gas in the second level and the fourth stage respectively, discharge by the rough vacuum level at last, can realize discharging directly into atmosphere.
Through compression step by step, increasing compression ratio improves ultimate vacuum, energy saving during the utility model work, under the identical situation of pumping speed, reduce the volume of pump, reduced the gas impact simultaneously, reduced noise, and the realization discharging directly into atmosphere does not need to connect fore pump and gets final product work.
Claims (10)
1. the multi-stage roots dry vacuum pump of a discharging directly into atmosphere, have main driven shaft, the moving rotor of principal and subordinate, main driven gear, driving gear, power rotor are installed on the driving shaft, driven gear, driven rotor are installed on the driven shaft, it is characterized in that: the pump housing adopts multistage connected structure, the different branch a plurality of relatively independent pump chambers are arranged with rotor progression, have interstage diaphragm separately between per two pump chambers, and link to each other by the inter-stage air-flow path.
2. by the described vacuum pump of claim 1, it is characterized in that: pump chamber quantity is 3-6.
3. by the described vacuum pump of claim 1, it is characterized in that: pump chamber length shortens step by step from the high vacuum level.
4. by the described vacuum pump of claim 1, it is characterized in that: when the pump housing adopted the Pyatyi connected structure, from the high vacuum level, Pyatyi pump chamber length ratio was (11-13): (7-9): (7-9): (2-4): (2-4).
5. by the described vacuum pump of claim 1, it is characterized in that: power rotor, the whole outer contour of driven rotor end face are circular arc line.
6. by the described vacuum pump of claim 1, it is characterized in that: be installed in the rotor on driving shaft, the driven shaft and the gap c of pump chamber, 0＜c≤0.1mm.
7. by the described vacuum pump of claim 1, it is characterized in that: the interstage diaphragm near driving gear, driven gear one side is provided with the water-cooled interlayer.
8. by the described vacuum pump of claim 1, it is characterized in that: the inter-stage between pump chamber is sealed into clearance seal.
9. by the described vacuum pump of claim 1, it is characterized in that: the drive mechanism of vacuum pump is transmission of coupling direct connection or shielding rotor shaft drive.
10. by the described vacuum pump of claim 1, it is characterized in that: the pump housing is a horizontal type structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200144520U CN201074591Y (en) | 2007-09-07 | 2007-09-07 | Multilevel Roots dry vacuum pump for straight discharging atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200144520U CN201074591Y (en) | 2007-09-07 | 2007-09-07 | Multilevel Roots dry vacuum pump for straight discharging atmosphere |
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| Publication Number | Publication Date |
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| CN201074591Y true CN201074591Y (en) | 2008-06-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200144520U Expired - Fee Related CN201074591Y (en) | 2007-09-07 | 2007-09-07 | Multilevel Roots dry vacuum pump for straight discharging atmosphere |
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| CN (1) | CN201074591Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105649953A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Gas path system used for multi-level dry vacuum pump |
| CN106014995A (en) * | 2016-07-08 | 2016-10-12 | 江阴华西节能技术有限公司 | Multi-stage dry Roots vacuum pump |
| CN106996404A (en) * | 2016-01-26 | 2017-08-01 | 迪尔公司 | Recessed installing type inserting hydraulic pump and the working truck transmission system with it |
| CN114320917A (en) * | 2021-12-06 | 2022-04-12 | 兰州空间技术物理研究所 | Straight-line roots pump |
-
2007
- 2007-09-07 CN CNU2007200144520U patent/CN201074591Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105649953A (en) * | 2014-11-11 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Gas path system used for multi-level dry vacuum pump |
| CN106996404A (en) * | 2016-01-26 | 2017-08-01 | 迪尔公司 | Recessed installing type inserting hydraulic pump and the working truck transmission system with it |
| CN106996404B (en) * | 2016-01-26 | 2020-06-23 | 迪尔公司 | Recessed installation formula cartridge hydraulic pump and have its work vehicle transmission system |
| US10919376B2 (en) | 2016-01-26 | 2021-02-16 | Deere & Company | Recess-mounted hydraulic pump cartridge and work vehicle drivetrain therewith |
| CN106014995A (en) * | 2016-07-08 | 2016-10-12 | 江阴华西节能技术有限公司 | Multi-stage dry Roots vacuum pump |
| CN114320917A (en) * | 2021-12-06 | 2022-04-12 | 兰州空间技术物理研究所 | Straight-line roots pump |
| CN114320917B (en) * | 2021-12-06 | 2024-06-04 | 兰州空间技术物理研究所 | In-line Roots pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: CAS SHENYANG SCIENTIFIC INSTRUMENTS CO., LTD. Free format text: FORMER NAME: SHENYANG SCIENTIFIC INSTRUMENT RESEARCH + MFG. CENTER CO., LTD., C.A.S |
|
| CP03 | Change of name, title or address |
Address after: Hunnan Shenyang 110197 Liaoning province Xinyuan street, No. 1 Patentee after: Shenyang Scientific Apparatus Co., Ltd. of Chinese Academy of Sciences Address before: Hunnan Shenyang 110168 Liaoning province Xinyuan street, No. 1 Patentee before: Shenyang Scientific Instrument Research & Mfg. Center Co., Ltd., C.A.S |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080618 Termination date: 20120907 |