EP0642676A1 - Abtastobjektiv - Google Patents

Abtastobjektiv

Info

Publication number
EP0642676A1
EP0642676A1 EP92922848A EP92922848A EP0642676A1 EP 0642676 A1 EP0642676 A1 EP 0642676A1 EP 92922848 A EP92922848 A EP 92922848A EP 92922848 A EP92922848 A EP 92922848A EP 0642676 A1 EP0642676 A1 EP 0642676A1
Authority
EP
European Patent Office
Prior art keywords
lens
scan
lens group
scanning
numerical aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP92922848A
Other languages
German (de)
English (en)
French (fr)
Inventor
Anton Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0642676A1 publication Critical patent/EP0642676A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
EP92922848A 1992-05-25 1992-11-03 Abtastobjektiv Withdrawn EP0642676A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4217298 1992-05-25
DE4217298 1992-05-25
PCT/EP1992/002521 WO1993024854A1 (de) 1992-05-25 1992-11-03 Scanobjektiv

Publications (1)

Publication Number Publication Date
EP0642676A1 true EP0642676A1 (de) 1995-03-15

Family

ID=6459700

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92922848A Withdrawn EP0642676A1 (de) 1992-05-25 1992-11-03 Abtastobjektiv

Country Status (6)

Country Link
US (1) US5608564A (ko)
EP (1) EP0642676A1 (ko)
JP (1) JPH07117647B2 (ko)
KR (1) KR0177848B1 (ko)
SG (1) SG44693A1 (ko)
WO (1) WO1993024854A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1003530C2 (nl) * 1996-07-06 1998-01-12 Philips Electronics Nv Groothoek aftast-objectiefstelsel en aftastapparaat met een dergelijk objectiefstelsel.
JPH11258501A (ja) * 1998-01-09 1999-09-24 Fuji Photo Optical Co Ltd コリメータレンズおよびこれを用いた光走査装置
US20050009022A1 (en) * 2001-07-06 2005-01-13 Weiner Michael P. Method for isolation of independent, parallel chemical micro-reactions using a porous filter
US6917421B1 (en) 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
US7589891B2 (en) * 2003-11-26 2009-09-15 Olympus Corporation Laser scanning type fluorescent microscope
US20060019264A1 (en) * 2003-12-01 2006-01-26 Said Attiya Method for isolation of independent, parallel chemical micro-reactions using a porous filter
JP5536995B2 (ja) 2007-07-17 2014-07-02 オリンパス株式会社 顕微鏡対物レンズおよびレーザー走査型顕微鏡システム
TW201343296A (zh) * 2012-03-16 2013-11-01 Ipg Microsystems Llc 使一工件中具有延伸深度虛飾之雷射切割系統及方法
WO2023106222A1 (ja) * 2021-12-08 2023-06-15 株式会社ニコン 走査型顕微鏡

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422143A1 (de) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille Geraet zur wafer-inspektion
US4734578A (en) * 1985-03-27 1988-03-29 Olympus Optical Co., Ltd. Two-dimensional scanning photo-electric microscope
JPS63306413A (ja) * 1987-06-09 1988-12-14 Olympus Optical Co Ltd 走査型光学顕微鏡
US4953927A (en) * 1987-12-23 1990-09-04 Agfa-Gevaert Ag Lens assembly for long-life laser imaging system
JP2945097B2 (ja) * 1990-08-10 1999-09-06 リコー光学株式会社 テレセントリックなｆθレンズ
US7615299B2 (en) * 2005-01-28 2009-11-10 Delphi Technologies, Inc. Method and apparatus for thermal, mechanical, and electrical optimization of a solid-oxide fuel cell stack

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9324854A1 *

Also Published As

Publication number Publication date
WO1993024854A1 (de) 1993-12-09
KR0177848B1 (ko) 1999-05-15
JPH07117647B2 (ja) 1995-12-18
JPH063587A (ja) 1994-01-14
SG44693A1 (en) 1997-12-19
KR950701741A (ko) 1995-04-28
US5608564A (en) 1997-03-04

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19941118

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB IT NL

17Q First examination report despatched

Effective date: 19960613

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19980521