EP0642676A1 - Objectif de balayage - Google Patents

Objectif de balayage

Info

Publication number
EP0642676A1
EP0642676A1 EP92922848A EP92922848A EP0642676A1 EP 0642676 A1 EP0642676 A1 EP 0642676A1 EP 92922848 A EP92922848 A EP 92922848A EP 92922848 A EP92922848 A EP 92922848A EP 0642676 A1 EP0642676 A1 EP 0642676A1
Authority
EP
European Patent Office
Prior art keywords
lens
scan
lens group
scanning
numerical aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP92922848A
Other languages
German (de)
English (en)
Inventor
Anton Schick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0642676A1 publication Critical patent/EP0642676A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders

Definitions

  • the invention relates to a scan lens for line-by-line or point-by-point three-dimensional scanning of object surfaces with high resolution and high test speed.
  • the increasing packing density on an electronic assembly requires a correspondingly adapted test.
  • This check is usually carried out by means of a high-resolution optical inspection system.
  • the triangulation principle can be used in conjunction with a system for quickly scanning a surface.
  • the confocal principle is generally more suitable.
  • a point-shaped light source which is usually defined by a pinhole, is imaged on the object surface and the backscattered light is imaged on an almost point-shaped detector.
  • the depth of field of a confocal optical configuration is a measure of the height resolution of the system.
  • the depth of field is inversely proportional to the square of the numerical aperture.
  • the essential variable in the design of a diffraction-limited scan lens which reflects the theoretically achievable imaging performance, is the Lagrangian variant L. It is formed by the product of half the beam diameter D at the location of a beam deflection unit and the scan angle or deflection angle kel ⁇ . This is equivalent to the product of the numerical aperture NA and half the scan length S of the scan lens.
  • L is proportional to the number of scanned points per scan line.
  • a high scanning rate is thus achieved by a high scanning speed and the largest possible Lagrangeinversion L of the scanning system.
  • the result is that for rotating polygon mirrors in relation to other beam deflectors, the feasible angular velocity with a large beam diameter and thus the pixel data rate is very high.
  • Other beam deflectors are understood to mean, for example, acousto-optical deflectors, resonance scanners or galvanometer mirrors.
  • the data rate is limited upwards by the increasing rotational inertia with increasing beam cross-section or increasing mirror facet diameter of the mirror. Depending on the material used and the mechanical design of the polygon mirror, this results in an optimal poly gon mirror dimensioning.
  • the scan length is reduced with unchanged Lagrangein variants.
  • the beam diameter increases with a reduction in the scanning angle.
  • increasing the beam diameter with a small scanning angle increases the number and size of the facets of the polygon mirror, which in turn reduces the rotational speed that can be achieved.
  • the objective focal length is reduced. This means that, in the case of conventional scanning objectives, the front and rear focal planes come very close to the lens mount, since otherwise the correction of the aberrations will be made considerably more difficult. This in turn limits the space required for positioning polygon mirrors.
  • Scanning lenses currently available on the market have numerical apertures of approximately 0.1 and have a scanning angle of approximately 13 ° to 25 ° with focal lengths of at least 20 mm. These lenses can be adapted very well to polygon mirrors rotating at high speed.
  • the Lagrangein variant is about 1 mm. However, lenses of this type are not suitable for high resolution confocal scanners.
  • Confocal laser scanning microscopes also exist. These are mostly constructed on the basis of ordinary light microscopes or light microscope objectives and can therefore also have a high numerical aperture. With a Lagrangein variant of approx. 0.15 mm, however, the overall imaging performance is relatively low due to the small image field or the short scan length. Acoustic-optical beam deflectors are frequently used here, as a result of which the imaging power is reduced due to the small deflection angle and the small aperture which is not circular. In addition, the beam deflection is not aberration-free (astigmatism).
  • the aim of the invention is the construction of a scan lens, by means of which a large image field is scanned at a high resolution, corresponding to a high numerical aperture, with a simultaneously high scanning rate.
  • the invention is based on the knowledge that the required quality features can be achieved by means of a scan lens consisting of three lens groups with an appropriate design.
  • a first lens group viewed in the direction of the scanning beam, with a positive refractive power and a relatively low numerical aperture can be regarded as an ideal coupling element to the beam deflection unit with high imaging power.
  • the structure of this optic corresponds to a typical scan lens from the prior art with a relatively large numerical aperture. It can be manufactured with less than 6 individual lenses with limited diffraction. A real intermediate image is generated by this lens group. The sufficient vertex distance between the entrance pupil and the surface of the first lens is of great advantage.
  • a third lens group which is arranged on the object side, receives a high numerical aperture with a large one
  • the imaging performance of a scanning system or a scanning lens is high on the object side numerical aperture possible.
  • a second lens group with positive refractive power which images the real intermediate image of the first lens group to infinity, must be constructed so that the exit pupil, formed by the first and second lens groups, coincides with the entrance pupil of the third lens group.
  • the angle of view of the second lens group must coincide with the deflection angle of the third lens group.
  • This second lens group can be an inverted scan lens, for example. This means that a previously known scanning lens is used in the opposite direction. Attention must be paid to the appropriate adjustment of the scan length (image height of the intermediate image) and the numerical aperture in relation to the first lens group. Furthermore, the scan angle (image angle) and the diameter of the entrance pupil of the third lens group must be adjusted.
  • the ratio of the focal lengths of the first lens group to the second lens group corresponds here to the ratio between the scanning angle (image angle) of the first lens group and the third lens group. All three lens groups are diffraction limited.
  • a particularly advantageous embodiment of the invention includes the design of the scan lens as an F- ⁇ lens.
  • the necessary condition for an F- ⁇ lens is the proportionality between the scan or deflection angle and the current deflection or the current image height. This reduces the control expenditure in the case of automatic test systems.
  • the coupling between the scan lens and the beam deflection unit can be carried out in a simple manner.
  • the numerical aperture of the first lens group is at least 0.15 (the numerical aperture of the entire scanning objective can be, for example, 0.6), this is advantageous insofar as the design of the downstream lens groups offers greater freedom of design with regard to an overall high level numerical aperture can be achieved.
  • the scanning angle is approximately 16 ° and the entrance pupil has a diameter of approximately 7.5 mm.
  • the definition of these two parameters of the scan objective to the numerical values mentioned gives particular advantages with regard to the design of a polygon mirror rotating at high speed (e.g. number of facets 12, mirror diameter approx. 70 mm, facet length approx. 19 mm). If the numerical aperture of the third lens group is at least 0.25 in combination with a scan angle of approx. 2.5 ° and a scan length of approx. 8 mm, a working distance between the lens and the object of approx. 30 mm can already be set.
  • Figure 1 shows a schematic diagram of a typical scan lens with a numerical aperture of 0.1.
  • FIG. 2 shows the beam path of a scan lens when the numerical aperture is enlarged compared to the illustration in FIG. 1.
  • FIG. 3 shows the detailed structure of a scan lens with a high numerical aperture.
  • FIG. 4 shows the basic illustration of the scan lens corresponding to FIG. 3.
  • FIG. 1 the beam path of an objective 11 shown only by a line is sketched.
  • the objective 11 is positioned with respect to an optical axis 10.
  • the focal length f is indicated on both sides of the objective 11.
  • the main beam 7 and edge beams 8 run in accordance with the scanning angle ⁇ .
  • the object plane 9 is indicated in the right part of the image.
  • the scan length S corresponds to the image size.
  • FIG. 1 Known scan lenses as shown in FIG. 1 are commercially sold by several manufacturers.
  • the numerical aperture determines the size of the pixel and the imaging performance is based on the number of resolved pixels, it should always be dimensioned such that the desired aperture is present. If one assumes that the Lagrangian variant remains constant as a measure of the imaging power and that the focal length of the entire system does not change, then when the numerical aperture is enlarged, a beam path corresponds to that shown in FIG. 2.
  • the entrance pupil 61 and the object plane are also located here 9 each in focus.
  • the scan length S is sketched correspondingly symmetrically to the optical axis 10 and the beam diameter D at the entrance pupil 61, which is considerably larger than in FIG. 1, is entered. It is clearly evident that the scan angle ⁇ has decreased significantly in relation to the scan angle ⁇ of FIG. 1. The same applies to the scan length S. Main ray 7 and marginal rays 8 are also shown. However, a construction according to FIG. 2 is not practical for solving the task, since it is generally difficult to accommodate a beam deflection unit. The design itself corresponds approximately to collimator optics, which usually only represent one point. In this way, a high numerical aperture can be achieved in a simple manner, since the image angle may be small.
  • the Lagrangin variant and the scan angle ⁇ are kept constant and the numerical aperture is enlarged, the focal length f becomes smaller. This also gives rise to difficulties with regard to the accommodation of a Beam deflection unit in front of the scan lens.
  • FIG. 3 shows a scan objective with an upstream beam deflection unit 4.
  • the scan lens which is constructed from the lens groups 1 to 3 described, has a numerical aperture of 0.6.
  • the first lens group 1 and the second lens group 2 each consist of 5 individual lenses.
  • the first lens group has a numerical aperture of 0.15 and a focal length of 25 mm.
  • the second lens group collimates the rays emanating from the real intermediate image 5 at a focal length of 160 mm. In this case, the beam is expanded and the angle is reduced.
  • the third lens group 3 which consists of a double element (doublet), three directly adjoining positive refractive single lenses and a lens triplet, has a focal length of 40 mm and a numerical aperture of 0.6.
  • the total length of the objective is approximately 650 mm.
  • a scan objective according to FIG. 3 has a high numerical aperture (0.6 and a large scan length S).
  • the first lens group 1 having a still low nume ⁇ step aperture of 0.15 has a large scan angle of about +/- 16 0th
  • the first lens group 1 ′′ represents the coupling element to the beam deflection unit 4.
  • the high numerical aperture of 0.6 of the third lens group 3 with positive refractive power is achieved by a small image angle of 2.5 °. for the third lens group 3, a pupil diameter of 48 mm, a focal length f of 40 mm and an image field of 3.5 mm. In terms of its construction, this group of lenses is similar to a microscope objective that has been enlarged to scale and magnified 50 times.
  • the first two lens groups 1, 2 thus cause a scan angle reduction and a pupil enlargement (seen from left to right in the figure).
  • the entrance pupil 61 of the first lens group 1 is imaged into the entrance pupil 63 of the third lens group 3, or the exit pupil 62 of the first and second lens groups 1, 2 coincides with the entrance pupil 63 of the third lens group 3.
  • the observation of pupils of individual lens groups is only used for the construction of a scanning objective. Such a scanning objective has only one entrance pupil and one exit pupil.
  • An additional, rather telecentric, construction of the scan lens simplifies the measurement data evaluation of an automatic 3D inspection system.
  • the intermediate image 5 is generated by the lens group 1.
  • the course of the main ray 7 and the marginal rays 8 with respect to the lens groups 1-3 and with respect to the optical axis 10 is indicated.
  • the second lens group 2 images the intermediate image 5 to infinity.
  • the pupils are imaged by the first and second lens groups 1, 2, the entrance pupil 61 of the first Lens group 1 is imaged in the entrance pupil 63 of the third lens group 3. This can also be called a scan angle transformation.
  • the entrance pupil 63 of the third lens group 3 lies between the second and the third lens group 2, 3. Parallel rays are guided through the pupil at maximum diameter.
  • the first lens group 1 taken on its own can be viewed as a scan lens with low resolution. The same applies to the second lens group 2, but this has a larger focal length f.
  • a described scan lens for example, it can be resolved in the range of 0.5 ⁇ m.
  • FIG. 4 shows a basic illustration of a scan lens with a high numerical aperture.
  • Focal length f 6.25 mm beam diameter D, at the entrance: 7.5 mm
  • Beam diameter and scan angle are constant Numerical aperture: 0.28 scan length S: 7.5 mm
  • the basic structure of a scan lens according to the invention includes, in accordance with the schematic illustration in FIG. 4, a first, second and third lens group 1; 2; 3.
  • the surface of the object to be checked or the object plane 9 is sketched on the right edge of the picture.
  • the entrance pupil 61 of the entire scanning objective is shown on the left edge of the image.
  • the entire arrangement has an optical axis 10.
  • the characteristic course of the main beam 7 and the edge beams 8 is outlined accordingly.
  • the entrance pupil 61 shown as a diaphragm in FIG. 4 can be replaced by a rotating polygon mirror.
  • the exit pupil 62 of the first and second lens groups 1, 2 coincides with the entrance pupil 63 of the third lens group 3, the second lens group 2 depicting the intermediate image 5 generated by the first lens group 1 to infinity.

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

On exige des objectifs destinés au balayage tridimensionnel point par point ou ligne par ligne de surfaces d'objets, à la fois une haute résolution et une grande vitesse de contrôle. Afin de pouvoir former une image à haute résolution du plus grand nombre possible de points d'image, l'objectif de balayage doit comporter une grande ouverture numérique en conséquence et simultanément un vaste champ d'image. A cet effet, il se compose de trois groupes de lentilles (1; 2; 3). Le premier et le deuxième groupe de lentilles (1; 2) permettent à la fois de réduire l'angle de balayage et d'augmenter les pupilles. La pupille d'entrée (61) est représentée dans la pupille d'entrée (63) du troisième groupe de lentilles (3). Le troisième groupe de lentilles (3) a une grande ouverture numérique de 0,6 par exemple. De plus, l'image intermédiaire (5) réelle est représentée à l'infini par le deuxième groupe de lentilles (2) avec une force réfractive positive et une plus grande distance focale (f) que le premier groupe de lentilles (1). Un diamètre de faisceau (D) à l'entrée de l'objectif de balayage de 7,5 mm, un angle de balayage (Υ) de ±16° et une longueur de balayage (5) de 3,5 mm permettent par exemple d'atteindre une distance de travail de 5 mm.
EP92922848A 1992-05-25 1992-11-03 Objectif de balayage Withdrawn EP0642676A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4217298 1992-05-25
DE4217298 1992-05-25
PCT/EP1992/002521 WO1993024854A1 (fr) 1992-05-25 1992-11-03 Objectif de balayage

Publications (1)

Publication Number Publication Date
EP0642676A1 true EP0642676A1 (fr) 1995-03-15

Family

ID=6459700

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92922848A Withdrawn EP0642676A1 (fr) 1992-05-25 1992-11-03 Objectif de balayage

Country Status (6)

Country Link
US (1) US5608564A (fr)
EP (1) EP0642676A1 (fr)
JP (1) JPH07117647B2 (fr)
KR (1) KR0177848B1 (fr)
SG (1) SG44693A1 (fr)
WO (1) WO1993024854A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1003530C2 (nl) * 1996-07-06 1998-01-12 Philips Electronics Nv Groothoek aftast-objectiefstelsel en aftastapparaat met een dergelijk objectiefstelsel.
JPH11258501A (ja) * 1998-01-09 1999-09-24 Fuji Photo Optical Co Ltd コリメータレンズおよびこれを用いた光走査装置
US20030096268A1 (en) * 2001-07-06 2003-05-22 Michael Weiner Method for isolation of independent, parallel chemical micro-reactions using a porous filter
US6917421B1 (en) 2001-10-12 2005-07-12 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional inspection and/or metrology of a specimen
JP4939806B2 (ja) * 2003-11-26 2012-05-30 オリンパス株式会社 レーザ走査型蛍光顕微鏡
WO2005054431A2 (fr) * 2003-12-01 2005-06-16 454 Corporation Procede permettant d'isoler des micro-reactions chimiques paralleles independantes au moyen d'un filtre poreux
JP5536995B2 (ja) 2007-07-17 2014-07-02 オリンパス株式会社 顕微鏡対物レンズおよびレーザー走査型顕微鏡システム
TW201343296A (zh) * 2012-03-16 2013-11-01 Ipg Microsystems Llc 使一工件中具有延伸深度虛飾之雷射切割系統及方法
JPWO2023106222A1 (fr) * 2021-12-08 2023-06-15

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3422143A1 (de) * 1984-06-14 1985-12-19 Josef Prof. Dr. Bille Geraet zur wafer-inspektion
US4734578A (en) * 1985-03-27 1988-03-29 Olympus Optical Co., Ltd. Two-dimensional scanning photo-electric microscope
JPS63306413A (ja) * 1987-06-09 1988-12-14 Olympus Optical Co Ltd 走査型光学顕微鏡
US4953927A (en) * 1987-12-23 1990-09-04 Agfa-Gevaert Ag Lens assembly for long-life laser imaging system
JP2945097B2 (ja) * 1990-08-10 1999-09-06 リコー光学株式会社 テレセントリックなｆθレンズ
US7615299B2 (en) * 2005-01-28 2009-11-10 Delphi Technologies, Inc. Method and apparatus for thermal, mechanical, and electrical optimization of a solid-oxide fuel cell stack

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9324854A1 *

Also Published As

Publication number Publication date
JPH063587A (ja) 1994-01-14
KR950701741A (ko) 1995-04-28
WO1993024854A1 (fr) 1993-12-09
US5608564A (en) 1997-03-04
JPH07117647B2 (ja) 1995-12-18
SG44693A1 (en) 1997-12-19
KR0177848B1 (ko) 1999-05-15

Similar Documents

Publication Publication Date Title
EP2359178B1 (fr) Procédé et dispositif de stockage dynamique d'un rayon lumineux par rapport à une optique focalisant le rayon lumineux
DE69309338T2 (de) Refraktives, afokales Infrarotteleskop mit drei Gesichtsfeldern
EP0894247B1 (fr) Dispositif de mesure sans contact de la temperature
DE102004002221B3 (de) Vorrichtung zur optischen Strahltransformation einer linearen Anordnung mehrerer Lichtquellen
EP3507641B1 (fr) Microscope pour examiner différents plans inclinés éclairés avec un réseau de microlentilles
WO2015158861A1 (fr) Microscope à balayage lumineux avec optique simplifiée, en particulier avec position de pupille modifiable
DE10038622A1 (de) Scan-Mikroskop,optische Anordnung und Verfahren zur Bildaufnahme in der Scan-Mikroskopie
WO2016075195A1 (fr) Microscope à faible distorsion
DE69729747T2 (de) Hochauflösendes konfokales mikroskop
EP0642676A1 (fr) Objectif de balayage
DE3878021T2 (de) Synchrone optische abtastvorrichtung.
EP1031866A2 (fr) Relais optique pour système de déviation et système de déviation
DE10029680B4 (de) Mikroskop-Aufbau
DE3837553A1 (de) Optisches abtastsystem fuer die verwendung in einem laserstrahldrucker
DE102004034967A1 (de) Beleuchtungsvorrichtung für ein Lichtrastermikroskop mit punktförmiger Lichtquellenverteilung
DE4103298A1 (de) Vorrichtung zur abbildung eines objektes
DE102013114083A1 (de) Vorrichtung zur Formung von Laserstrahlung
DE69304278T2 (de) Abtaster für kleine Winkel
EP1617272A1 (fr) Dispositif d'éclairage pour un microscope à balayage avec dispositif pour transformer la distribution d'intensité
DE2631831A1 (de) Abtasteinrichtung fuer strahlung
WO1995023349A1 (fr) Systeme optique a degre de symetrie eleve
DE102004034966A1 (de) Beleuchtungsvorrichtung für ein Lichtrastermikroskop mit linienförmiger Abtastung und Verwendung
DE102020204615A1 (de) Schiefeebenemikroskop mit verbesserter Sammeleffizienz
DE4208622A1 (de) Licht-schnitt-mikroskop
DE102013108066A1 (de) Vorrichtung zur Ablenkung eines Lichtstrahls

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19941118

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB IT NL

17Q First examination report despatched

Effective date: 19960613

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19980521