EP0612377B1 - Linearantrieb - Google Patents

Linearantrieb Download PDF

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Publication number
EP0612377B1
EP0612377B1 EP92917889A EP92917889A EP0612377B1 EP 0612377 B1 EP0612377 B1 EP 0612377B1 EP 92917889 A EP92917889 A EP 92917889A EP 92917889 A EP92917889 A EP 92917889A EP 0612377 B1 EP0612377 B1 EP 0612377B1
Authority
EP
European Patent Office
Prior art keywords
housing
linear drive
drive according
guide
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92917889A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0612377A1 (de
Inventor
Kurt Stoll
Dieter Waldmann
Thomas Feyrer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP0612377A1 publication Critical patent/EP0612377A1/de
Application granted granted Critical
Publication of EP0612377B1 publication Critical patent/EP0612377B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/22Other details, e.g. assembly with regulating devices for accelerating or decelerating the stroke
    • F15B15/228Other details, e.g. assembly with regulating devices for accelerating or decelerating the stroke having shock absorbers mounted outside the actuator housing
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/08Characterised by the construction of the motor unit
    • F15B15/082Characterised by the construction of the motor unit the motor being of the slotted cylinder type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/22Other details, e.g. assembly with regulating devices for accelerating or decelerating the stroke
    • F15B15/226Other details, e.g. assembly with regulating devices for accelerating or decelerating the stroke having elastic elements, e.g. springs, rubber pads

Definitions

  • the invention relates to a linear drive, with a housing which has a longitudinal slot, with a drive part arranged longitudinally movable in the housing, with a longitudinal guide arranged outside the housing, on which a guide part is arranged so as to be movable in the longitudinal direction, to which a load to be moved can be fixed is, with a driver connecting the drive part with the guide part to form a movement unit, extending through the longitudinal slot, and with a buffer device which works in the direction of movement of the movement unit and cooperates with the guide part.
  • a linear drive of this type is described in EP-A-0 140 138. It is designed there as a so-called slot cylinder, the drive being effected by means of a pressure medium acting on the drive part.
  • the slide-like guide part is guided on a longitudinal guide formed by the cylinder housing and is moved synchronously because of the coupling that takes place via the driver when the drive part is moved.
  • the guide part forms a force transmission element, on which loads of any kind to be moved can be attached. As a result of the external guidance, unfavorable loads on the drive part are largely prevented.
  • the guide part is flanked axially on both sides by a rotor and connected to them via shock absorbers. Each runner includes a braking device that is selectively operated to position the motion unit, with the shock absorbers gradually decelerating the motion unit.
  • the runners with the shock absorbers form practically adjustable stroke limit stops for the guide part, the effect is in principle comparable to that of the stationary arrangement from DE-A-39 25 219.
  • the guide part is coupled with a relatively heavy load, the Reaching the end positions of the drive part continue to have high inertial forces which strain the driver and can even lead to breakage of the same. Any reinforcement of the driver is not possible because its possible dimensions are limited by the width of the longitudinal slot.
  • the invention therefore has for its object to provide a linear drive of the type mentioned, in which the loads on the driver during the braking process are reduced without complex adjustment of stroke limit stops.
  • the buffer device is interposed in the connection between the drive part and the guide part directly adjoining the driver.
  • the buffer device permits an axial relative movement between the guide part and the drive part, the instantaneous loads, in particular of the driver, being reduced to a level that excludes damage. No external is required for this Stroke limit stops, which is why the user of the linear drive does not have to carry out any adjustment and adjustment work corresponding to the respective application. Errors that can occur during such work are thus reliably excluded.
  • a particular advantage of the arrangement is that the buffer effect is available in full regardless of the start of the braking process of the drive part. Even if the movement unit is braked at any point on the stroke, which is the case, for example, using a Braking device of the type described in DE 85 11 577 U1 can take place, the load-reducing effect is fully retained at all times.
  • Linear drives are known from EP 0 157 892 B1 and EP 0 113 790 B1, in which the drive part and the guide part can be moved relative to one another to a limited extent.
  • the buffer device preferably contains or is formed by an elastic device.
  • the elastic device can be designed, for example, as a rubber buffer or as a spring arrangement. It is also advantageous if the buffer device contains or is formed by a shock absorbing device, as a result of which the rebound after the end position has been reached is advantageously reduced. A combination of an elastic device and a shock-absorbing device would also be advantageous since it enables a particularly sensitive adaptation to the particular circumstances. In this context, it is expedient if the buffering intensity is adjustable.
  • a buffering characteristic is particularly advantageous, in which the buffering effect of the buffer device only begins at a certain limit load.
  • the movement unit is normally an overall rigid unit that allows exact positioning, the buffering effect only begins when a critical load is reached.
  • the movement unit apart from the purely axial compliance guaranteed by the buffer device, is designed as a rigid structural unit in which neither rotary nor transverse movements of any kind can take place between the guide part and the drive part.
  • adjustment means are expediently provided, which are used only during assembly in order to be able to carry out the relative position between the drive part and the guide part with reference to the circumstances on the housing and on the guide side.
  • the longitudinal slot and the longitudinal guide are located on successively circumferential housing sides of the housing, so that the section of the movement unit outside the housing is designed as an essentially L-shaped body which encompasses the housing circumference to a certain extent.
  • the guide part is at the top in this case, which enables particularly convenient power take-off.
  • the linear drive according to the invention is, in particular, a so-called slot cylinder, the drive part being a fluidically driven piston and the longitudinal slot being closed by a sealing tape which prevents pressure medium from escaping.
  • the linear drive of the exemplary embodiment is a pneumatically operated slot cylinder, although the measures relating to the buffer device can also be implemented with other types of linear drives.
  • the linear drive has an elongated housing 1, which in the present case is designed as a cylinder housing. It has a housing space 2, which can be seen in FIG. 4 and in which a drive part 3 is arranged such that it can be moved back and forth in the longitudinal direction 4 of the housing.
  • the drive part 3 of the exemplary embodiment is a piston 5, which is sealed by means of a circumferential seal 6 to the inner wall of the housing space 2.
  • the housing space 2 is divided into two working chambers, not shown, which can be filled or ventilated with pressure medium via housing-side connection openings 7. Both connection openings 7 of the exemplary embodiment are located on a common axial housing end face 11, so that the connection to the remote working chamber preferably takes place via a housing channel 12 shown in FIG.
  • the housing 1 is provided with a longitudinal slot 13 running in the longitudinal direction 4. It connects the housing room 2 with the environment.
  • a driver 14 projects through it, which in the exemplary embodiment is rigidly and rigidly connected to the drive part 3. He immediately makes the movement of the drive part 3, which can thus be tapped from the outside.
  • the longitudinal slot 13 is covered or closed by a sealing tape 15 from the housing space 2.
  • This sealing tape 15 is expediently flexible and can be moved in the area of the driver 14 through an opening connected to the drive part 2 (not shown). In this way, the working chambers are sealed at every position of the drive part 3 without affecting the function of the driver 14.
  • a cover band 10, also indicated in FIG. 1, can correspondingly lie from the outside over the longitudinal slot 13 in order to prevent the ingress of contaminants.
  • Linear drives of this type and their mode of operation are known to the person skilled in the art, for example from DE 31 24 915 C2 or from EP 0 157 892 B1, so that further explanations are unnecessary at this point and reference is made to these publications.
  • the linear drive of the exemplary embodiment has a longitudinal guide 16 which extends in the longitudinal direction 4 and which is arranged on the outside of the housing 1. It is preferably formed by a guide rail 17 which is attached to the housing 1.
  • a slide-like guide part 18 is arranged on the longitudinal guide 16 so as to be longitudinally movable and is guided by the latter in its movement.
  • the guide part 18 has guide elements 19, 19 'which rest on guide tracks 20, 20' of the guide rail 17 from opposite sides, so that a transverse direction to the direction of movement 24 coinciding with the longitudinal direction 4 is essentially one backlash-free support is provided.
  • the desired guide play can expediently be adjusted as required by adjusting the guide elements 19, 19 '.
  • the type of guide can be a sliding guide or a roller guide. In all cases, however, it is advantageous if the guide rail 17 is gripped like a claw by the guide part 18 or its guide elements 19.
  • the guide rail 17 itself is fixed to the housing 1 by means of a plurality of fastening elements 25, the fastening elements 25 being anchored in a longitudinal groove 26 on the housing side. In this way, a selective storage takes place over the length of the guide rail 17 at various points.
  • fasteners 25 come e.g. Fixing screws in question, which have a foot that can be anchored in the longitudinal groove 26.
  • the guide rail 17 can be aligned exactly and fixed in the desired position by tightening the fastening elements 25.
  • the transverse bores 27 receiving the fasteners 25 of the guide rail 17 are closed by cover caps 28.
  • the guide part 18 is connected to the driver 14 in such a way that a movement unit 29 results together with the drive part 3. So if the drive part 3 is moved in the longitudinal direction 4, this movement is transmitted directly to the guide part 18 via the driver 14, so that there is a uniform synchronous movement.
  • the guide member 18 is used for power take-off. Any objects or components, in short: loads, can be attached to it in particular detachably.
  • the exemplary guide part 18 has a plurality of fastening grooves 33. These cannot be shown in more detail by actuating the drive part 3 Transport loads linearly and position them at certain points if necessary. So that these processes run as precisely as possible, the drive part 3, the driver 14 and the guide part 18 in the exemplary embodiment, apart from the buffer device to be explained, are rigidly connected to one another.
  • any transverse, tilting or rotating movements of the guide part 18 are practically excluded and at least reduced to a degree that the seals 6 of the drive part 3 can easily compensate for, so that there are no wear problems.
  • the buffer device explained below can of course also be used in embodiments in which couplings which allow any compensatory movements are installed in the movement unit 29.
  • the maximum stroke of the movement unit 29 is determined in the exemplary embodiment by reaching the end positions of the drive part 3 or the piston 5.
  • the stroke movement ends quite abruptly when the end positions are reached.
  • the drive part 3 impinges on a counter-stop, not shown in more detail, which can be arranged in the housing space 2 and connected to two end-side housing covers 34.
  • a buffer device 30 which is effective in the direction of movement 24 is interposed in the connection between the guide part 18 and the drive part 3. Above all, this prevents the driver 14 from breaking on its narrow, web-like section which is guided through the longitudinal slot 13.
  • the buffer device successfully prevents the occurrence of peak loads, so that even under high transport loads, continuous operation is possible without the risk of destruction or wear.
  • the buffer device 30 implemented in the exemplary embodiment acts exclusively in the longitudinal direction 4 and allows the parts of the movement unit 29 on the drive part and guide part side that are connected to one another to have a limited axial movement with a certain load.
  • the energy to be used for this significantly reduces the peak loads.
  • the buffer device 30 of the exemplary embodiment is arranged outside the housing 1, which reduces the structural outlay. It has also proven to be particularly advantageous to arrange the buffer device as shown in the area between the guide part 18 and the driver 14.
  • the buffer device 30 of the exemplary embodiment comprises two buffer units 31, 31 'which are functionally independent of one another and are each responsible for buffering in one of the two possible directions of movement. Depending on the direction of movement, essentially only either one or only the other buffer unit acts when the drive part 3 is braked.
  • the guide part 18 has an approximately U-shaped edge section 32, in the recess 36 of which a projection 37 of the driver 14 is immersed.
  • the width of the projection 37 is slightly smaller than that of the recess 36, so that there is a slight axial play between the two components without buffer units 31, 31 '.
  • One of the buffer units 31, 31 ' now acts axially between the projection 37 and the flank portions 38 of the guide part 18 delimiting the recess 36, in that it is supported at one end on the projection 37 and at the other end on the associated flank 38.
  • buffer units 31, 31 'according to FIG. 2 are designed as direction-dependent elastic devices 39, the one which is subjected to pressure comes into effect in each case.
  • the elasticity of the elastic devices preferably ensure spring assemblies 40, which are, for example, disk spring assemblies.
  • spring assemblies 40 which are, for example, disk spring assemblies.
  • the respectively selected combination of the spring arrangement allows the desired buffering characteristic to be set, which is selected in the exemplary embodiment in such a way that the buffering effect only begins at a certain limit load. Below this limit load, the movement unit 29 behaves as a completely rigid unit in the axial direction. The advantage of this is that the highest precision is given during the transport of a load and the buffer device actually only works appropriately when the load occurs. It must of course be remembered here that the deformation paths guaranteed by the buffer device are generally in the tenths of a millimeter range.
  • each buffer unit 31, 31 'shown in FIG. 2 has the advantage that they can be brought to a desired pretension in the removed state, after which they are installed in the movement unit 29.
  • each buffer unit 31, 31 ' has two clamping elements 41, 42 which are adjustable relative to one another and between which the actually buffering part 43 is arranged.
  • the pretensioning of the buffering part 43 can be adjusted by adjusting the two tensioning elements 41, 42.
  • the one clamping element 41 is supported on the axial end face of the projection 37, and the clamping element 42 on the associated flank part 38 of the guide part 18.
  • the buffer units 31, 31 ' can also be designed as shock absorbing devices 44, as is indicated by way of example with reference to the buffer unit 45 shown in FIG. 3.
  • Their structure basically corresponds to that of the buffer units 31, 31 ', so that corresponding components with the number "100" increased reference numerals have been provided.
  • the difference lies in the actually buffering part 143, which is designed here as a damping ring element.
  • buffer devices in which the effects of elastic devices and shock absorbing devices are combined. This could be achieved, for example, by connecting elastically resilient and damping elements in parallel, or by using buffering parts that have both resilient and damping properties due to their material properties.
  • a damping effect is advantageous because it primarily reduces the intensity of the rebound and / or vibrations.
  • the buffer units 31, 31 ' also form adjusting means for facilitating the assembly of the movement unit 29 on the housing 1.
  • the guide part 18 is separated from the driver 14 and is attached to the longitudinal guide 16 independently thereof, the buffer units 31, 31 'are housed recessed in receptacle 49 of the flank portions 38.
  • the receptacles 49 are expediently designed as through-openings extending in the longitudinal direction 4, which have an internal thread section 50, with which the one clamping element 42, 142 engages via a complementary external thread 51.
  • the buffer units 31, 31 are screwed against the projection 37 by means of the threaded engagement 50, 51 until the second clamping element 41, 141 comes to rest with its end face 53 on the side face of the projection 37.
  • the axial fixation is now in place.
  • the screwing enables a tool engagement part 54, which is introduced into the second, outer clamping element 41 and permits the attachment of a screwing tool, for example an external polygon.
  • the end face 53 is provided with adhesive before it is pressed onto the projection 37, so that an inseparable adhesive connection is present in the pressed-on state.
  • the projection 37 has a centering recess 55, into which the clamping element 141 dips with a complementary centering section 56.
  • the former alternative is preferable.
  • the driver 14 has on the side facing the guide part 18 a groove-like depression 57 which extends in the longitudinal direction 4 and into which the guide part 18 engages with a complementary securing projection 58 arranged on it.
  • both the securing projection 58 and the depression 57 are subdivided into a plurality of longitudinal sections which are located on the flank portions 38 and the facing portions of the driver 14.
  • Corresponding indentation and projection sections can also be provided in the region of the end face of the projection 37 and the base of the recess 36.
  • the depression 57 as well as the complementary securing projection 58 have parallel side surfaces, so that a more or less immersion depth is possible, which determines the width of the gap 52. This excludes installation-related stresses that are associated with other alternative forms, for example when using dovetail profiles.
  • the driver 14 can consist of several parts firmly connected.
  • a bar 60 which contains the depression 57, is screwed laterally to the driver section 59 located immediately outside the longitudinal slot 13.
  • a block-shaped part 64 which forms the projection 37, follows on from the center.
  • the multi-part embodiment allows a material selection as required. Parts that are not loaded can be made of aluminum, while the strip 60 should be made of high-strength material. It goes without saying that the arrangement of recess 57 and securing projection 58 with respect to driver 14 and guide part 18 can also be reversed.
  • the housing 1 of the linear motor according to the example has an essentially square cross-sectional contour on the outside.
  • the longitudinal slot 13 and the longitudinal guide 16 are provided on housing sides 65, 66 which follow one another in the circumferential direction.
  • the section of the movement unit 29 lying outside the housing 1 has an essentially L-shaped cross-sectional shape.
  • the outer section of the movement unit 29 surrounds the housing 1 to a certain extent, the guide part 18 coming to lie on the same side as the longitudinal guide 16.
  • the buffer device 30 is arranged in the transition area 67 between the parts of the movement unit 29 corresponding to the L-legs. The position is preferably such that the buffer device 30 comes to lie on or in the vicinity of the plane which contains the two guideways 20.
  • the separation point determining the gap 52 is preferably on the housing side 65 having the longitudinal slot 13.
  • the selected design of the movement unit 29 has the advantage that the linear drive can be arranged with the housing side 66 facing upwards during operation, so that the guide part 18 is optimally accessible for attaching loads. At the same time, the longitudinal slot 13 comes to lie laterally, which makes it more difficult for dirt to penetrate. Since the longitudinal guide 16 is concentrated on one side of the longitudinal slot 13, the guide play is not impaired by a possible pressure-related widening of the longitudinal slot 13.
  • the end face 53 is expediently designed as a flat surface and in the exemplary embodiment is formed on a pot-like element 68, which is a component of the multi-part second clamping element 41, 141 here .
  • Another component of this clamping element 41, 141 is a screw 69, the head of which is covered by the pot-like element 68.
  • the pot-like element 68 also lies on the plate 70 with its opening-side edge.
  • the other clamping element 42, 142 also expediently has a plate 71 mounted on the screw shaft, which is acted upon by a nut-like screw member 72 having the external thread 51 and the tool engagement part 54.
  • the buffering part 43 is preferably arranged coaxially with the screw shaft.
  • FIG. 5 shows a variant which prevents tilting movements between the guide part 18 and the driver 14 in a particularly simple manner.
  • the selected mode of representation corresponds to a section along line V-V from FIG. 2, although it is a construction that is modified compared to FIG. 2.
  • the driver section 59 and the guide part 18 arranged laterally next to it can be seen.
  • the groove-like depression 57 and the securing projection 58 have been dispensed with here.
  • an indirect anti-tipping device is implemented using the buffer units, one of which (31) is shown. It is provided that a securing part 74 of the respective buffer unit, formed in the exemplary embodiment by a modified pot-like element 68 ', is connected to both the driver 14 and the guide part 18 in a rotationally fixed connection with respect to the longitudinal axis of the respective buffer unit.
  • the rotationally fixed connection to the driver 14 can be made according to the embodiment shown in Figure 2 by gluing, or for example, by inserting the securing element 74 with a portion of non-circular outer contour approximately according to Figure 3 in a complementarily contoured centering recess 55 of the projection 37.
  • the non-rotatable connection to the driver 14 is designed so that the buffer effect is not hindered and an axial movement of the securing element 74 within the associated receptacle 49 is still possible.
  • the securing element 74 is therefore secured against rotation with a non-circular outer contour in the correspondingly contoured end section of the receptacle 49 and is axially displaceably received.
  • both the securing element 74 and the receptacle 49 have a polygonal contour in the interacting area, expediently a regular hexagonal contour. In this way, insurance against rotation and radial displacement is obtained with simple means, without impairing the axial displacement.
  • the elimination of the tongue and groove connection 57, 58 also greatly simplifies the construction of the linear drive. Between the driver 14 and the guide part 18 there is expediently a space shown in FIG. 5.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Transmission Devices (AREA)
  • Bearings For Parts Moving Linearly (AREA)
  • Vibration Dampers (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Linear Motors (AREA)
  • Toys (AREA)
  • Casings For Electric Apparatus (AREA)
  • Drawers Of Furniture (AREA)
  • Vehicle Body Suspensions (AREA)
  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Valve Device For Special Equipments (AREA)
EP92917889A 1991-11-16 1992-08-13 Linearantrieb Expired - Lifetime EP0612377B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4137789A DE4137789C2 (de) 1991-11-16 1991-11-16 Linearantrieb
DE4137789 1991-11-16
PCT/EP1992/001848 WO1993010360A1 (de) 1991-11-16 1992-08-13 Linearantrieb

Publications (2)

Publication Number Publication Date
EP0612377A1 EP0612377A1 (de) 1994-08-31
EP0612377B1 true EP0612377B1 (de) 1996-10-09

Family

ID=6444980

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92917889A Expired - Lifetime EP0612377B1 (de) 1991-11-16 1992-08-13 Linearantrieb

Country Status (10)

Country Link
US (1) US5469775A (ja)
EP (1) EP0612377B1 (ja)
JP (1) JP2607833B2 (ja)
KR (1) KR0174572B1 (ja)
AT (1) ATE144028T1 (ja)
DE (2) DE4137789C2 (ja)
ES (1) ES2092694T3 (ja)
GR (1) GR3021685T3 (ja)
UA (1) UA27000C2 (ja)
WO (1) WO1993010360A1 (ja)

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EP1182359A1 (de) 2000-08-23 2002-02-27 FESTO AG & Co Kolbenstangenloser Linearantrieb sowie zugehöriges Gehäuse

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US6257123B1 (en) 1997-10-24 2001-07-10 Phd, Inc. Rodless slides
DE19854142C1 (de) 1998-11-24 2000-03-23 Festo Ag & Co Mehrzahl von Linearantrieben
DE19853942C1 (de) 1998-11-24 2000-07-13 Festo Ag & Co Elektrischer Linearantrieb
JP3543065B2 (ja) * 1999-04-16 2004-07-14 Smc株式会社 直線作動装置
US6591757B1 (en) * 2001-12-26 2003-07-15 Anorad Corporation Motor driven high stability brake for linear motion systems
DE50200957D1 (de) 2002-04-05 2004-10-14 Festo Ag & Co Fluidbetätigte Antriebsvorrichtung
DE10258147B4 (de) * 2002-12-03 2007-10-04 Festo Ag & Co. Kolbenstangenloser Linearantrieb
DE10258139B4 (de) * 2002-12-03 2006-09-28 Festo Ag & Co. Kolbenstangenloser Linearantrieb
JP4538803B2 (ja) * 2005-04-19 2010-09-08 Smc株式会社 シリンダ装置の変位差吸収機構

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1182359A1 (de) 2000-08-23 2002-02-27 FESTO AG & Co Kolbenstangenloser Linearantrieb sowie zugehöriges Gehäuse
US6505542B2 (en) 2000-08-23 2003-01-14 Festo Ag & Co. Piston rod-less linear drive and a housing therefor

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KR0174572B1 (ko) 1999-04-15
DE59207347D1 (de) 1996-11-14
EP0612377A1 (de) 1994-08-31
DE4137789A1 (de) 1993-05-19
JPH07500405A (ja) 1995-01-12
GR3021685T3 (en) 1997-02-28
WO1993010360A1 (de) 1993-05-27
ES2092694T3 (es) 1996-12-01
US5469775A (en) 1995-11-28
JP2607833B2 (ja) 1997-05-07
DE4137789C2 (de) 1994-01-20
UA27000C2 (uk) 2000-02-28
ATE144028T1 (de) 1996-10-15

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