EP0512254B1 - Procédé pour le traitement thermochimique uniforme de pièces en acier ayant des surfaces d'accès difficle - Google Patents

Procédé pour le traitement thermochimique uniforme de pièces en acier ayant des surfaces d'accès difficle Download PDF

Info

Publication number
EP0512254B1
EP0512254B1 EP92105758A EP92105758A EP0512254B1 EP 0512254 B1 EP0512254 B1 EP 0512254B1 EP 92105758 A EP92105758 A EP 92105758A EP 92105758 A EP92105758 A EP 92105758A EP 0512254 B1 EP0512254 B1 EP 0512254B1
Authority
EP
European Patent Office
Prior art keywords
treatment
gas
mpa
thermochemical treatment
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92105758A
Other languages
German (de)
English (en)
Other versions
EP0512254A3 (en
EP0512254B2 (fr
EP0512254A2 (fr
Inventor
Friedrich Dr. Dipl.-Phys. Preisser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
Degussa GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=6431301&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0512254(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Degussa GmbH filed Critical Degussa GmbH
Publication of EP0512254A2 publication Critical patent/EP0512254A2/fr
Publication of EP0512254A3 publication Critical patent/EP0512254A3/de
Publication of EP0512254B1 publication Critical patent/EP0512254B1/fr
Application granted granted Critical
Publication of EP0512254B2 publication Critical patent/EP0512254B2/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20—Carburising
    • C23C8/22—Carburising of ferrous surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/24—Nitriding
    • C23C8/26—Nitriding of ferrous surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
    • F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
    • F02M61/166—Selection of particular materials

Definitions

  • the invention relates to a method for the uniform thermochemical treatment of hollow bodies and bores or components made of steel which are difficult to access from the outside with carbon-emitting gases at temperatures above 450 ° C.
  • thermochemical treatment of metallic components for the production of wear and corrosion-resistant surface layers is widespread in machine and gear construction.
  • Carburizing for steels is used as a thermochemical process.
  • Preferred process media are carbon-donating gas mixtures which release the diffusible or compound-forming substances to the workpiece surface at the selected treatment temperatures.
  • the treatment results also depend on the shape of the components and the type of charging within the heat treatment system and the flow of the carbon-donating gas through the batch.
  • a number of known processes relate to gas nitriding of steel components under pressure.
  • JP-A-52-145 343 describes the nitriding of cassette recorder housings with ammonia under pressure.
  • the nitriding process according to DE-A-0 485 686 for steel workpieces also works under pressure.
  • US-A-2 779 697 describes a process in which steels are nitrided in gaseous ammonia under pressure in a pressure vessel.
  • GB-A-749 992 also discloses a nitriding process for steel surfaces using ammonia under pressure.
  • thermochemical treatment of hollow bodies and bores or components made of steel with carbon-emitting gases at temperatures above 450.degree supplies surfaces that are difficult to access from the outside.
  • This object is achieved in that the treatment takes place at pressures above 0.2 MPa.
  • methane or methane mixtures are preferably used at 870 to 1000 ° C.
  • the pressures are generally between 0.2 and 10 MPa, the upper pressure limit depending on the furnace available.
  • An injection nozzle made of a material 16MnCr5 is carburized in a pressure-resistant furnace with methane at 0.8 MPa for 2 hours at 930 ° C.
  • the injection nozzles are placed as bulk goods in the batch room without any special arrangement or alignment.
  • the thickness of the carburizing layer is measured on the outside of the nozzle and in the inner bore. There are uniform carburizing depths inside and outside.
  • outlet bores of the nozzle at the nozzle tip with an initial diameter of 0.2 mm and a length of 1.5 mm in the inner surfaces are carburized.
  • the layer thickness is equal to the layer thickness in the entire inner bore of the nozzle.
  • the high concentration of reactive elements in the treatment gas enables the batch individual parts to be packed tightly. So far, certain, empirically determined distances between the individual parts have to be observed in order to treat the individual parts equally. These distances can be reduced at pressures> 0.2 MPa without affecting the uniformity of the layers.
  • carburizing gases such as methane, endogases, nitrogen-methanol or natural gas-air mixtures, can be used for carburizing.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Heat Treatment Of Articles (AREA)
  • Treatment Of Steel In Its Molten State (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
  • Treatment Of Sludge (AREA)
  • Housings And Mounting Of Transformers (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Fire-Extinguishing Compositions (AREA)

Claims (3)

  1. Procédé de traitement thermochimique uniforme de pièces constitutives en acier avec des surfaces internes difficilement accessibles de l'extérieur, comme des pièces à contre-dépouilles, des trous borgnes ou des corps de buses, avec des gaz cédant du carbone à des températures supérieures à 450°C, caractérisé en ce que le traitement a lieu à des pressions supérieures à 0,2 mPa.
  2. Procédé selon la revendication 1, caractérisé en ce qu'on utilise du méthane à des températures de 870 à 1000°C.
  3. Procédé selon la revendication 1 ou 2 caractérisé en ce que le traitement a lieu sous pression constante.
EP92105758A 1991-05-08 1992-04-03 Procédé pour le traitement thermochimique uniforme de pièces en acier ayant des surfaces d'accès difficle Expired - Lifetime EP0512254B2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4115135 1991-05-08
DE4115135A DE4115135C1 (fr) 1991-05-08 1991-05-08

Publications (4)

Publication Number Publication Date
EP0512254A2 EP0512254A2 (fr) 1992-11-11
EP0512254A3 EP0512254A3 (en) 1993-03-24
EP0512254B1 true EP0512254B1 (fr) 1996-06-19
EP0512254B2 EP0512254B2 (fr) 2000-01-19

Family

ID=6431301

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92105758A Expired - Lifetime EP0512254B2 (fr) 1991-05-08 1992-04-03 Procédé pour le traitement thermochimique uniforme de pièces en acier ayant des surfaces d'accès difficle

Country Status (10)

Country Link
EP (1) EP0512254B2 (fr)
JP (1) JP3258071B2 (fr)
AT (1) ATE139579T1 (fr)
CZ (1) CZ288263B6 (fr)
DE (2) DE4115135C1 (fr)
ES (1) ES2088515T5 (fr)
HU (1) HU209457B (fr)
PL (1) PL291528A1 (fr)
RU (1) RU2052535C1 (fr)
TW (1) TW223128B (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4445154A1 (de) * 1994-12-17 1996-06-20 Fischer Artur Werke Gmbh Verfahren zur Herstellung eines aus korrosionsbeständigem Stahl bestehenden Spreizankers
DE10062862C2 (de) * 2000-12-16 2003-03-27 Ald Vacuum Techn Ag Vorrichtung zur gleichmässigen thermochemischen Behandlung von metallischen Werkstücken mit einem Reaktivgas
DE10109565B4 (de) 2001-02-28 2005-10-20 Vacuheat Gmbh Verfahren und Vorrichtung zur partiellen thermochemischen Vakuumbehandlung von metallischen Werkstücken
DE10139620A1 (de) 2001-08-11 2003-02-27 Bosch Gmbh Robert Kraftstoffeinspritzventil für Brennkraftmaschinen und ein Verfahren zur Härtung desselben
DE102004058838B4 (de) * 2004-12-06 2007-11-29 Schramm, Armin Düseneinsatz aus Stahl
DE102005061781A1 (de) * 2005-12-23 2007-06-28 Schaeffler Kg Injektor eines Kraftstoff-Einspritzsystems
DE102013006589A1 (de) * 2013-04-17 2014-10-23 Ald Vacuum Technologies Gmbh Verfahren und Vorrichtung für das thermochemische Härten von Werkstücken
RU2651841C2 (ru) * 2015-12-23 2018-04-24 Олег Владимирович Ольшанский Способ обработки металлических деталей в условиях акустического резонансного воздействия потоком смеси сжатого воздуха и газообразных химических реагентов и устройство для его осуществления

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB114446A (en) * 1917-01-27 1918-03-27 British Carbonizing Company Lt Improvements in or relating to the Carburization and Case-hardening of Iron and Steel Articles.
GB749992A (en) * 1951-09-21 1956-06-06 United States Steel Corp Methods for nitriding metallic surfaces
US2779697A (en) * 1955-09-26 1957-01-29 United States Steel Corp Method of nitriding metallic surfaces
GB1309257A (en) * 1970-02-18 1973-03-07 Millingford Eng Co Ltd Method of nitriding hollow bodies
JPS52145343A (en) * 1976-05-29 1977-12-03 Kiyoichi Ogawa Pressurized nitriding
US4160680A (en) * 1976-11-05 1979-07-10 Sola Basic Industries, Inc. Vacuum carburizing
DE2851983B2 (de) * 1978-12-01 1980-11-06 Deutsche Gold- Und Silber-Scheideanstalt Vormals Roessler, 6000 Frankfurt Verfahren zum Aufkohlen von Hohlkörpern, insbesondere von Düsen
DE4036381C1 (fr) * 1990-11-15 1991-08-14 Degussa Ag, 6000 Frankfurt, De

Also Published As

Publication number Publication date
EP0512254A3 (en) 1993-03-24
DE4115135C1 (fr) 1992-02-27
RU2052535C1 (ru) 1996-01-20
JP3258071B2 (ja) 2002-02-18
HUT61056A (en) 1992-11-30
PL291528A1 (en) 1992-11-16
CZ288263B6 (en) 2001-05-16
ES2088515T3 (es) 1996-08-16
TW223128B (fr) 1994-05-01
ES2088515T5 (es) 2000-05-01
DE59206595D1 (de) 1996-07-25
ATE139579T1 (de) 1996-07-15
EP0512254B2 (fr) 2000-01-19
HU209457B (en) 1994-06-28
EP0512254A2 (fr) 1992-11-11
HU913870D0 (en) 1992-02-28
CS137592A3 (en) 1992-12-16
JPH05132753A (ja) 1993-05-28

Similar Documents

Publication Publication Date Title
DE3486037T2 (de) Korrosionsgeschuetzte werkstuecke aus stahl und verfahren zu ihrer herstellung.
EP2203575B1 (fr) Procédé de carburation de pièces, et son utilisation
EP0512254B1 (fr) Procédé pour le traitement thermochimique uniforme de pièces en acier ayant des surfaces d'accès difficle
DE2417179B2 (de) Verfahren zum karburieren hochlegierter staehle
DE2657644A1 (de) Gasmischung zum einfuehren in einen eisenmetallbehandlungsofen
DE102006025008B4 (de) Verfahren zum Härten von Laufflächen von Wälzlagerkomponenten
EP0627019B1 (fr) Procede de traitement thermochimique-thermique d'aciers de cementation
EP0544987A1 (fr) Procédé de traitement d'acier alliés et de métaux réfractaires
EP1019561B1 (fr) Procede et dispositif d'oxydation et de traitement thermique de groupes de pieces
EP0882811B1 (fr) Procédé de cémentation de pièces métalliques dans un four sous vide
DE4327440C2 (de) Verfahren zur thermochemisch-thermischen Behandlung von Einsatzstählen, Vergütungsstählen und Wälzlagerstählen
DE69619725T2 (de) Verfahren zum Nitrieren von Stahl
CH632013A5 (de) Verfahren zur gasaufkohlung von werkstuecken aus stahl.
EP3538676B1 (fr) Procédé de traitement thermique d'une pièce à usiner constituée d'un acier fortement allié
DE19909694A1 (de) Verfahren zum Varbonitrieren bei Unterdruckverfahren ohne Plasmaunterstützung
DE60315693T2 (de) Kohlenwasserstoffgasmischung zur druckaufkohlung von stahl
EP0464265B1 (fr) Procédé de nitruration de titane
EP0545069B1 (fr) Procédé de traitement d'aciers et de métaux réfractaires
DE3922983A1 (de) Verfahren zur chemisch-thermischen bearbeitung von werkstuecken, nach diesem verfahren hergestellte diffusionsueberzuege und anlage zu seiner durchfuehrung
DE2109997A1 (de) Verfahren zum metallischen Zemen tieren
EP0076488B1 (fr) Procédé de production de couches de Fe2B sur des objets en alliages ferreux
DE2527026C3 (de) Verfahren zum Herstellen eines Bauteils hoher Lebensdauer
DE10118029C1 (de) Verfahren zur thermochemischen Vorbehandlung von metallischen Werkstücken und Anwendung des Verfahrens
DE4005710C1 (en) Two=stage nitro:carburising for iron - comprises heating in furnace with catalyst in presence of methanol, ammonia and nitrogen
EP1391525A1 (fr) Procédé et dispositif pour noircir des composants

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19920403

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

17Q First examination report despatched

Effective date: 19950202

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960619

Ref country code: DK

Effective date: 19960619

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19960619

REF Corresponds to:

Ref document number: 139579

Country of ref document: AT

Date of ref document: 19960715

Kind code of ref document: T

ITF It: translation for a ep patent filed
ET Fr: translation filed
REG Reference to a national code

Ref country code: ES

Ref legal event code: BA2A

Ref document number: 2088515

Country of ref document: ES

Kind code of ref document: T3

REF Corresponds to:

Ref document number: 59206595

Country of ref document: DE

Date of ref document: 19960725

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2088515

Country of ref document: ES

Kind code of ref document: T3

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19960806

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: BOVARD AG PATENTANWAELTE

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19970324

Year of fee payment: 6

PLBQ Unpublished change to opponent data

Free format text: ORIGINAL CODE: EPIDOS OPPO

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

PLBF Reply of patent proprietor to notice(s) of opposition

Free format text: ORIGINAL CODE: EPIDOS OBSO

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Effective date: 19970430

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19970430

26 Opposition filed

Opponent name: IPSEN INTERNATIONAL GMBH

Effective date: 19970318

PLBF Reply of patent proprietor to notice(s) of opposition

Free format text: ORIGINAL CODE: EPIDOS OBSO

RAP2 Party data changed (patent owner data changed or rights of a patent transferred)

Owner name: ALD VACUUM TECHNOLOGIES GMBH

PLBF Reply of patent proprietor to notice(s) of opposition

Free format text: ORIGINAL CODE: EPIDOS OBSO

REG Reference to a national code

Ref country code: CH

Ref legal event code: PUE

Owner name: DEGUSSA AG TRANSFER- ALD VACUUM TECHNOLOGIES GMBH

PLBF Reply of patent proprietor to notice(s) of opposition

Free format text: ORIGINAL CODE: EPIDOS OBSO

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980403

PLAW Interlocutory decision in opposition

Free format text: ORIGINAL CODE: EPIDOS IDOP

PLAW Interlocutory decision in opposition

Free format text: ORIGINAL CODE: EPIDOS IDOP

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

PUAH Patent maintained in amended form

Free format text: ORIGINAL CODE: 0009272

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: PATENT MAINTAINED AS AMENDED

27A Patent maintained in amended form

Effective date: 20000119

AK Designated contracting states

Kind code of ref document: B2

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU NL SE

ITF It: translation for a ep patent filed
REG Reference to a national code

Ref country code: CH

Ref legal event code: AEN

Free format text: AUFRECHTERHALTUNG DES PATENTES IN GEAENDERTER FORM

GBTA Gb: translation of amended ep patent filed (gb section 77(6)(b)/1977)

Effective date: 20000223

ET3 Fr: translation filed ** decision concerning opposition
REG Reference to a national code

Ref country code: CH

Ref legal event code: PFA

Free format text: ALD VACUUM TECHNOLOGIES GMBH TRANSFER- ALD VACUUM TECHNOLOGIES AG

REG Reference to a national code

Ref country code: ES

Ref legal event code: DC2A

Kind code of ref document: T5

Effective date: 20000320

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20100331

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20100506

Year of fee payment: 19

Ref country code: ES

Payment date: 20100427

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20100426

Year of fee payment: 19

Ref country code: DE

Payment date: 20100423

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20100423

Year of fee payment: 19

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 20100415

Year of fee payment: 19

REG Reference to a national code

Ref country code: CH

Ref legal event code: PFA

Owner name: ALD VACUUM TECHNOLOGIES AG

Free format text: ALD VACUUM TECHNOLOGIES AG#WILHELM-ROHN-STR. 35#63450 HANAU (DE) -TRANSFER TO- ALD VACUUM TECHNOLOGIES AG#WILHELM-ROHN-STR. 35#63450 HANAU (DE)

REG Reference to a national code

Ref country code: SE

Ref legal event code: EUG

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20110403

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20111230

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110430

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20111101

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110430

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110502

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 59206595

Country of ref document: DE

Effective date: 20111101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110403

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110403

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20120604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110404

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20110404