EP0502303B1 - Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien - Google Patents

Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien Download PDF

Info

Publication number
EP0502303B1
EP0502303B1 EP92101160A EP92101160A EP0502303B1 EP 0502303 B1 EP0502303 B1 EP 0502303B1 EP 92101160 A EP92101160 A EP 92101160A EP 92101160 A EP92101160 A EP 92101160A EP 0502303 B1 EP0502303 B1 EP 0502303B1
Authority
EP
European Patent Office
Prior art keywords
storage container
gas
fluorine
reaction chamber
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP92101160A
Other languages
German (de)
English (en)
Other versions
EP0502303A1 (fr
Inventor
Bernd Möller
Arthur Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ahlbrandt System GmbH
Original Assignee
Ahlbrandt System GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ahlbrandt System GmbH filed Critical Ahlbrandt System GmbH
Publication of EP0502303A1 publication Critical patent/EP0502303A1/fr
Application granted granted Critical
Publication of EP0502303B1 publication Critical patent/EP0502303B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/10—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed before the application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
    • B05D3/0433—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases the gas being a reactive gas
    • B05D3/044—Pretreatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases

Definitions

  • the invention relates to a device for treating objects in a gas-tight reaction chamber designed for working under reduced pressure with a fluorine-containing gas, in which a storage container to be kept under negative pressure is provided for setting the required fluorine concentration in the gas.
  • a device of the above kind is the subject of US-A-3,998,180.
  • the known device has a reaction chamber into which reaction gas can be passed from a storage container.
  • the performance of the known system is limited in that after each fluorine treatment, the treatment gas must first be pumped out of the reaction chamber back into the storage container and then the reaction chamber must be ventilated before the treated parts can be removed from it and new parts can be filled in.
  • the disposal of the fluorine gas is also complex in the known device, since many valves have to be switched for this purpose.
  • US-A-4,994,308 also already shows a device with a reaction chamber which is divided into two areas by a wall, but which are connected to one another in terms of pressure via a passage in the wall.
  • this document does not show a storage container for preparing and holding the reaction gas.
  • it does not allow a higher output than the device mentioned at the beginning, since parts can only be treated simultaneously in the two areas of the reaction chamber.
  • the invention is based on the problem of designing a fluorine treatment plant in such a way that it is as small as possible It is possible to rule out the occurrence of fluorine and which has the highest possible performance.
  • a second reaction chamber is provided, the reaction chambers are connected to one another on the inlet side and the outlet side by a line having shut-off devices, that the storage container is arranged between the reaction chambers on the lines and the line on the outlet side has a disposal system connection and that in each case a pressure sensor is arranged on the reaction chambers and the storage container for activating the disposal system.
  • Such a device offers very high security against the escape of fluorine with little effort. Leakages lead to the inflow of ambient air into the device and therefore to a very easily detectable reduction in the vacuum.
  • the device according to the invention therefore does not require a double-walled reaction chamber.
  • the performance of the device is particularly high because two reaction chambers are provided parallel to the storage container. This makes it possible to unload and load or maintain one reaction chamber while pretreatment with fluorine takes place in the other reaction chamber.
  • the invention permits numerous embodiments. To further clarify its basic principle, a device designed according to the invention is shown as a circuit diagram in the drawing and is described below.
  • two reaction chambers 2, 3 are arranged on both sides of a storage container 1.
  • the inputs of the reaction chambers 2, 3 and the input of the storage container 1 are connected to a line 4, via which 5 fluorine or a source 6 can supply inert gas from a fluorine storage container.
  • the outlets of the reaction chambers 2, 3 and the outlet of the storage container 1 are also connected to a common line 7.
  • the storage container 1 is evacuated to, for example, 0.1 bar using a vacuum pump 8.
  • fluorine is allowed to flow into the storage container 1 until a fluorine sensor 9 on the storage container 1 indicates the required fluorine concentration and the fluorine supply is then shut off.
  • the pressure in the storage container 1 then rose to 0.2 bar, for example, due to the fluorine supply.
  • the objects to be treated are, for example, placed in the reaction chamber 2 and the reaction chamber 2 is then closed in a gastight manner. Subsequently, the reaction chamber 2 is evacuated with the vacuum pump 8 and the gas is pumped from the storage container 1 with the vacuum pump 8 via lines 10, 11 into the reaction chamber 2, so that the fluorine pretreatment can begin in it.
  • reaction chamber 3 can already be filled with objects to be treated and evacuated by means of a vacuum pump 12.
  • the gas is pumped back into the storage container 1 with the vacuum pump 8. This is followed by a flushing process with inert gas from the source 6.
  • the flushing gas with fluorine residues is fed from the vacuum pump 8 to a disposal system 13 which has a catalyst 14 and a gas scrubber 15.
  • a further vacuum pump 16 is connected behind the disposal system 13, which ensures that there is negative pressure in the entire system even during disposal.
  • the flushed and therefore fluorine-free reaction chamber 2 can be vented and opened after being disconnected from the source 6 and the vacuum pump 8.
  • the fluorine concentration reduced by reactions with the objects to be treated and residual air in the reaction chambers 2, 3 can be raised again to the required value and the gas can then be closed and evacuated by means of the vacuum pump Pump 12 into the reaction chamber 3.
  • the required supply of fluorine in the storage container 1 necessarily reduces the negative pressure in the storage container 1.
  • Pressure sensors 17, 18, 19 in the reaction chambers 2, 3 and the storage container 1 respond as soon as the negative pressure reaches a value of, for example, 0.9 bar has decreased.
  • all the fluorine-containing gas is disposed of from the plant via the disposal plant 13 and mixed again in the storage container 1 fluorine-containing gas with the correct fluorine concentration and a vacuum of 0.2 bar.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Processing Of Solid Wastes (AREA)

Claims (1)

  1. Dispositif pour le traitement d'objets au moyen d'un gaz contenant du fluor, dans une chambre de réaction (2) hermétique aux gaz et conçue pour travailler en pression négative, avec présence d'un réservoir (1) à maintenir sous pression négative, destiné à réguler la concentration requise du fluor dans le gaz, caractérisé en ce qu'en complément à la chambre de réaction (2) est prévue une deuxième chambre de réaction (3), en ce que lesdites chambres de réaction (2, 3) sont reliées mutuellement, tant du côté entrée que du côté sortie, par, respectivement, une conduite (7, 4) munie d'organes d'arrêt, en ce que, entre les chambres de réaction (2, 3), le réservoir (1) est disposé sur les conduites (7, 4) et la conduite côté sortie (7) est en liaison avec une installation d'évacuation (13), et que, pour activer cette installation d'évacuation (13), sur chaque chambre de réaction (2, 3) et sur le réservoir (1), est disposé respectivement un capteur mano-sensible (17, 18, 19).
EP92101160A 1991-02-20 1992-01-24 Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien Expired - Lifetime EP0502303B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4105179A DE4105179A1 (de) 1991-02-20 1991-02-20 Verfahren zur behandlung von gegenstaenden mit einem fluor enthaltenden gas sowie vorrichtung zu seiner durchfuehrung
DE4105179 1991-02-20

Publications (2)

Publication Number Publication Date
EP0502303A1 EP0502303A1 (fr) 1992-09-09
EP0502303B1 true EP0502303B1 (fr) 1995-05-31

Family

ID=6425421

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92101160A Expired - Lifetime EP0502303B1 (fr) 1991-02-20 1992-01-24 Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien

Country Status (3)

Country Link
EP (1) EP0502303B1 (fr)
DE (2) DE4105179A1 (fr)
ES (1) ES2073194T3 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4304792A1 (de) * 1993-02-17 1994-08-18 Moeller Bernd Verfahren zur Behandlung der Oberfläche von Gegenständen
DE4320388A1 (de) * 1993-06-19 1994-12-22 Ahlbrandt System Gmbh Verfahren zur Vorbehandlung von zu lackierenden Oberflächen von Kunststoffteilen
EP0629654B1 (fr) * 1993-06-19 1998-05-13 Fluor Technik System GmbH Procédé pour le prétraitement de surfaces de pièces en matière plastique avant peinture
GB2309663B (en) * 1993-09-20 1998-02-18 Avondale Property Extrusion of laminate pipes
GB9319408D0 (en) * 1993-09-20 1993-11-03 Avondale Property Holdings Ltd Extrusion of laminate pipes
DE19527883A1 (de) * 1995-07-29 1997-01-30 Fluor Tech Sys Gmbh Verfahren zum Beschichten von elektrisch nicht leitenden Kunststoffteilen
DE19731771A1 (de) * 1997-07-24 1999-01-28 Bultykhanova Natalia Abdichtungsverfahren
US6462142B1 (en) * 1999-11-03 2002-10-08 Air Products And Chemicals, Inc. Processes for improved surface properties incorporating compressive heating of reactive gases

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE789562A (fr) * 1971-09-30 1973-01-15 Air Prod & Chem Perfectionnement apporte aux matieres en polyesters
CA1074509A (fr) * 1974-12-12 1980-04-01 Air Products And Chemicals Materiaux de renforcement des pneus en polyester fluore
US3998180A (en) * 1975-04-07 1976-12-21 Union Carbide Corporation Vapor deposition apparatus including fluid transfer means
US4237156A (en) * 1978-11-17 1980-12-02 Phillips Petroleum Company Fluorinated poly(arylene sulfides)
US4296151A (en) * 1978-12-12 1981-10-20 Phillips Petroleum Company Fluorinated polymeric surfaces
US4467075A (en) * 1983-08-05 1984-08-21 Union Carbide Corporation Surface treatment of a solid polymeric material with a reactive gas
US4576837A (en) * 1985-03-19 1986-03-18 Tarancon Corporation Method of treating surfaces
DE8703823U1 (de) * 1987-03-13 1987-04-23 Lohmann Gmbh & Co Kg, 5450 Neuwied Vorrichtung zur kontinuierlichen Oberflächenbehandlung von bahnförmigem Kunststoffmaterial mit gasförmigem Fluor
US4994308A (en) * 1988-05-31 1991-02-19 Tarancon Corporation Direct fluorination of polymeric materials by using dioxifluorine fluid (mixture of CO2 and F2)

Also Published As

Publication number Publication date
DE4105179A1 (de) 1992-08-27
EP0502303A1 (fr) 1992-09-09
ES2073194T3 (es) 1995-08-01
DE59202375D1 (de) 1995-07-06

Similar Documents

Publication Publication Date Title
DE69113929T2 (de) System für die Zufuhr reaktiver Gase von einer Gasquelle zu einer Vorrichtung.
DE3622527C1 (de) Ventil fuer Gasbehaelter
EP0354359B1 (fr) Bloc de rinçage
DE69205648T2 (de) Abgasvorrichtung für Epitaxie-Anlage.
DE2537126C2 (de) Einrichtung zur Umsetzung von Ozon oder einem ozonhaltigen Gas mit einer Flüssigkeit
EP0586620B1 (fr) Procede assurant un fonctionnement non polluant d'un dispositif pyrotechnique et dispositif pyrotechnique convenant pour l'execution de ce procede
EP0502303B1 (fr) Procédé pour le traitement d'objets avec un gaz contenant du fluor et appareil pour le mener à bien
DE3806998C2 (de) Steuereinheit für unter Druck stehende Gase
EP0301567A2 (fr) Appareil et procédé pour le traitement de la surface d'un matériau
EP0224692A2 (fr) Appareil pour le prélèvement d'échantillons sans émission de liquides facilement évaporables
DE2316831A1 (de) Verfahren und vorrichtung zur behandlung von abgasen, die radioaktive verunreinigungen, insbesondere krypton- und xenonnuklide enthalten
DE3876246T2 (de) Vorrichtung und verfahren zum unschaedlichmachen von gefaehrlichen abfallstoffen.
DE102017214687A1 (de) Behandlungsvorrichtung für Substrate und Verfahren zum Betrieb einer solchen Behandlungsvorrichtung
DE69207569T2 (de) Gaslieferungstafeln
DE3026019A1 (de) Verfahren zur gewinnung von gichtgas aus einem hochofen und vorrichtung zur durchfuehrung des verfahrens
DE3038537C2 (de) Verfahren zum Beschicken eines Hochdruckverflüssigungsreaktionskessels mit Materialschlamm
DE112005001539B4 (de) Vakuumbearbeitungsvorrichtung und Verfahren zum Austausch einer Vakuumbearbeitungskammer einer solchen Vorrichtung
DE3837656C2 (fr)
EP0087055A1 (fr) Procédé pour le traitement par solvant d'objets métalliques
DE69118751T2 (de) Halbgeschlossener Reaktor zum chemischen Dampfphasenabscheiden unter Ultrahochvakuum
DE19816739B4 (de) Vorrichtung zum Beladen und Entladen eines Prozeßreaktors mit Gegenständen, vorzugsweise Wafern
DE69010835T2 (de) Chemischer Dampfablagerungsapparat.
DE3428578C2 (fr)
CH672037A5 (fr)
DE2737615A1 (de) Durchlaufofen fuer schutzgasbetrieb

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE ES FR GB IT SE

17P Request for examination filed

Effective date: 19930217

17Q First examination report despatched

Effective date: 19940609

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: AHLBRANDT SYSTEM GMBH

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): DE ES FR GB IT SE

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19950605

REF Corresponds to:

Ref document number: 59202375

Country of ref document: DE

Date of ref document: 19950706

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2073194

Country of ref document: ES

Kind code of ref document: T3

ET Fr: translation filed
ITF It: translation for a ep patent filed

Owner name: STUDIO JAUMANN

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19960124

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Effective date: 19960125

Ref country code: ES

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19960125

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 19960124

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Effective date: 19960930

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19961001

EUG Se: european patent has lapsed

Ref document number: 92101160.7

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20020204

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20050124