EP0494921A1 - Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz. - Google Patents

Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz.

Info

Publication number
EP0494921A1
EP0494921A1 EP90914739A EP90914739A EP0494921A1 EP 0494921 A1 EP0494921 A1 EP 0494921A1 EP 90914739 A EP90914739 A EP 90914739A EP 90914739 A EP90914739 A EP 90914739A EP 0494921 A1 EP0494921 A1 EP 0494921A1
Authority
EP
European Patent Office
Prior art keywords
opening
jet
gas
enclosure
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90914739A
Other languages
English (en)
French (fr)
Other versions
EP0494921B1 (de
Inventor
Francois Meline
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Generale pour les Techniques Nouvelles SA SGN
Original Assignee
Societe Generale pour les Techniques Nouvelles SA SGN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Generale pour les Techniques Nouvelles SA SGN filed Critical Societe Generale pour les Techniques Nouvelles SA SGN
Publication of EP0494921A1 publication Critical patent/EP0494921A1/de
Application granted granted Critical
Publication of EP0494921B1 publication Critical patent/EP0494921B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F24F2009/007—Use of air currents for screening, e.g. air curtains using more than one jet or band in the air curtain

Definitions

  • the invention relates to a method and a device for maintaining a clean atmosphere at a controlled temperature on a work station, accessible from a contaminated room.
  • the applicant sought to isolate the workstations from the air in the room in which the operators are; the air in this room no longer has to undergo the "clean room” treatment.
  • a contaminated room is isolated from the outside (clean area) by placing two air injection nozzles on the opening at the location to create two air jets:
  • this 05 jet located on the side of the contaminated room; this 05 jet comprises a potential flow zone (dart) whose range is at least equal to one of the dimensions of the opening; The jet also extending over the entire other dimension to 1 * cover the opening; this imposing a large width that the injection nozzle; (this first jet constitutes the confinement barrier);
  • slow jet the first jet
  • fast jet the second jet
  • sting the potential flow area
  • 20 Width The dimension (of the opening or the jets) parallel to the direction of flow or curtain
  • length The dimension (of the opening or oes je ⁇ s) perpendicular to the direction of flow of the stream.
  • the present invention provides a method and a device perfecting the object of patent application 30 FR 82/12382 (published under No. 2,530,163 ) for maintaining a clean atmosphere on a workstation (indoor). , although there is an obstacle through the air curtain (the operator, for example, located outside).
  • the invention is not limited to the atmospheres of air in which men work; it can be applied to any gaseous atmosphere,
  • the work can be carried out by robot, remote manipulator, etc.
  • the subject of the invention is a method for maintaining a clean atmosphere at a controlled temperature at a work station, said work station being accessible from an area contaminated by at least one opening, method in which a curtain of gas is generated at the level of said opening in the form of a slow jet and a rapid jet, the slow jet comprising a dart with a range at least equal to the width of the opening, the rapid jet having a flow induced by its internal face in contact with the slow jet equal to the injection rate of the slow jet, and the two jets covering the entire length of the opening, process in which, typically:
  • the rapid jet is located at the opening on the workstation side (in the clean area),
  • said jets are oriented substantially parallel to the opening so that at least the external face of the rapid jet arrives at the limit of said opening,
  • the workstation is generally isolated from the contaminated area by one or more walls and a gas curtain at each opening on said contaminated area.
  • the volume thus delimited in which the workstation is located constitutes the volume to be kept clean.
  • an enclosure provided with walls is generally arranged; it communicates with the outside, to allow the operator to access the workstation, through at least one opening.
  • the enclosure can be of varied shape, as will be illustrated below in the figures (parallelepiped, bell—).
  • the volume to be kept clean (the atmosphere of the enclosure) is isolated from
  • the exterior (contaminated area) is kept clean and at a controlled temperature by means of:
  • the gases can be injected to form the curtain from any side of the opening. Preferably they are injected from the top to the bottom.
  • the jets are emitted so that at least the external face of the fast jet (that which is not in contact with the slow jet) arrives at the limit of the plane of the opening.
  • the external face or rapid jet must not in fact be too far from the opening, because an unprotected space would be freed between the work station and said jet, by which contamination could be introduced.
  • Said external face can advantageously arrive just at the limit of said opening.
  • the gas curtain does not meet any obstacle and perfectly obstructs said opening.
  • Said external face can arrive - inside the enclosure - volume - to keep clean.
  • the fast jet, and possibly the slow jet meet (s), opposite their injection zone, a surface.
  • the work station can constitute said surface. It can also be the floor of the enclosure. It is then advisable to provide, at said surface, a suction so that said jets are not disturbed.
  • the two walls of the opening which are perpendicular to the flow of the jets are extended beyond the plane of the opening on a distance at least equal to The thickness of the curtain at its effective range (that is to say at its end).
  • the gas curtain has a continuous shape, for example a circular shape, it obviously does not need to be delimited.
  • the speed of the slow jet is chosen so as to limit turbulence in the presence of an obstacle. It is generally of the order of 0.4 to 0.6 m / s, and more generally ⁇ 0.6 m / s.
  • the flow rate of the clean gas stream is at least equal to the flow rate induced by the external face of the rapid jet.
  • the stream of clean gas is directed perpendicular to the plane of the opening; therefore, in the case where the work station is inside an enclosure, from the wall of the enclosure opposite the opening protected by the gas curtain. Said current is also directed from the area to be kept clean to the contaminated area (exterior).
  • a laminar flow is then created in the volume to be protected which promotes the non-diffusion of the contaminants.
  • the stream of clean gas is emitted in the same direction as the gas curtain and substantially parallel thereto.
  • the temperature of the clean gas stream is chosen by the manufacturer according to his needs.
  • the stream of clean gas participates in combination with the gas curtain to insulate the volume to be protected (from the enclosure) against thermal changes and against pollut on.
  • the dart of the slow jet constitutes a barrier against contaminants because the velocity vectors are parallel and equal.
  • there is a slight backscatter of polluted gas due to the disturbance of the jet by the walls which limit its length.
  • the obstacle then constitutes a local source of back-diffusion of the contaminants.
  • This diffusion is mainly taken up by: - the rapid jet which immediately removes a large part of the contaminants;
  • the invention also relates to a device for implementing the above method. Said device comprises:
  • nozzles arranged side by side, on one side of said opening for injecting gas in the form of jets;
  • the length of the nozzles being equal to that of the opening, the size of the slot of each nozzle being determined as a function of the speed and of the range of the jet to be obtained, and the orientation of the nozzles being determined so that at least the external face or rapid jet arrives at the limit of said opening;
  • At least one means for injecting the stream of clean gas said means being chosen and arranged so that the ga ⁇ is uniformly distributed in the volume of the enclosure (to be protected) and so that the stream of clean gas arrives approximately in a direction perpendicular or parallel to the plane of said opening;
  • a device for sucking in gas blown in the form of jets and current inside said enclosure Generally, the work station constitutes the floor of said enclosure.
  • said enclosure is para llèl whocherdique. It has at least two side walls to limit the length of the gas curtain and avoid turbulence of the jets. Said side walls, perpendicular to the flow of said jets, are extended beyond the opening by a distance at least equal to the thickness of the jets at the level of their effective range.
  • the means for injecting the stream of clean gas is advantageously constituted by said wall, perforated (thus playing the role of diffusing wall) and supplied with said clean gas (by example, by a box, which covers the entire surface of the wall, into which the said gas is slightly suppressed).
  • the stream of clean gas arrives approximately in a direction perpendicular to the jets from the nozzles.
  • the means 05 for injecting the stream of clean gas consists of the wall on which the nozzles are fixed, said wall being perforated and supplied with gas to act as a diffusing wall.
  • the stream of clean gas is practically parallel to the jets from the nozzles.
  • said enclosure does not have a side wall but an opening around its entire periphery.
  • said means for injecting the stream of clean gas is here advantageously constituted by several nozzles situated at the top of the ceiling (of the bell) and oriented so as to distribute the gas along the walls of the ceiling and in the enclosure.
  • FIGS. 2A - 2B This variant of the device of the invention is illustrated in FIGS. 2A - 2B below.
  • the nozzles are obviously associated with distribution boxes provided with any device allowing equal distribution of the flow over the entire section of the nozzles.
  • the nozzles are oriented so that the external face of the rapid jet arrives just at the limit of the opening.
  • the gases are oriented outside the enclosure and it is not necessary to provide therein a suction device.
  • FIG. 1 to 3 show three embodiments of the invention:
  • the work station 1 is a horizontal work plan, around which a rectangular enclosure having a ceiling 2 and three lateral ' walls' has been built (only two are shown, marked 3 and 4), the wall 4 being opposite the opening 5, the wall 3 being extended beyond the nozzles 7 and 8 by a distance at least equal to the thickness of the gas curtain at the work station.
  • This wall is transparent in FIG. 1.
  • This enclosure rests on the ground via the support 6.
  • nozzles 7 and 8 On the ceiling side of the opening, two nozzles 7 and 8 were arranged for injecting gas ( here air) supplied by pipes (not shown).
  • the nozzle 7 diffuses the slow jet, The nozzle 8, the fast jet.
  • the flow rates and the speeds are adjusted so as to obtain a so-called slow jet on the outside side and a so-called fast jet on the enclosure side.
  • the nozzles 7 and 8 can be inclined if necessary so that the jets arrive advantageously at the limit of the work plane 1, without being in contact with this plane and without being too far from it (to prevent contamination of the exterior). reaches the enclosure from below the worktop).
  • the wall 4 opposite the opening 5 is provided over its entire surface with perforations, preferably uniformly distributed. Behind this wall is a means allowing a uniform distribution of the gas on the surface of the wall, such as for example a box 9 covering the entire surface of the wall, and into which the gas is brought which then crosses the wall through the perforations. and broadcasts in the enclosure.
  • a gas suction mouth 10 is arranged at the bottom of the support 6 (in the contaminated zone) to create a controlled circulation of air.
  • Such an enclosure provided with the means of the invention is particularly suitable for the treatment of products to be packaged which are brought by the operator or circulate at slow speed on a conveyor.
  • Figures 2A and 2B show a work station 11 consisting of a horizontal plane which is, in this particular case, a turntable around a central shaft. This type oe position is found in bottling workshops where the bottles are automatically fed onto the p 'iateau are filled to a position and are run off the board to other positions.
  • an enclosure 12 in the shape of a bell is placed, supported on the ground by uprights 13.
  • this enclosure can be raised or lowered at will.
  • two adjacent nozzles 14 and 15 are mounted to create the gas curtain (here air). The speeds and flow rates being adjusted to form said curtain, the so-called slow jet being emitted by the nozzle 14, the so-called fast jet by the nozzle 15.
  • FIG. 3 shows a conveying line 20 protected from the outside, a line on which the bottles circulate to be kept clean.
  • the enclosure is formed by a floor 20 -the conveyor
  • symmetrical quick jets are emitted over at least the entire length of the conveyor line and over at least its entire opening width, the distance between the boxes and the conveyor constituting the opening of the pregnant.
  • the external face of the rapid jets arrives at the limit of the conveyor line 20 constituting the work station and arrives as close as possible to the bottles.
  • slow jets are emitted over at least the entire length of the conveying line and over at least its entire width, the sting of each of the jets being adjusted so that its range is equal to the width of L 'opening.
  • the stream of clean gas at slow speed is emitted from the central box 24. It covers the entire volume of the enclosure and is emitted parallel to the two gas curtains.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Air Conditioning Control Device (AREA)
  • Control Of Heat Treatment Processes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
EP90914739A 1989-10-02 1990-10-01 Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz Expired - Lifetime EP0494921B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR8912861 1989-10-02
FR8912861A FR2652520B1 (fr) 1989-10-02 1989-10-02 Procede et dispositif pour maintenir une atmosphere propre a temperature regulee sur un poste de travail.
PCT/FR1990/000700 WO1991005210A1 (fr) 1989-10-02 1990-10-01 Procede et dispositif pour maintenir une atmosphere propre a temperature regulee sur un poste de travail

Publications (2)

Publication Number Publication Date
EP0494921A1 true EP0494921A1 (de) 1992-07-22
EP0494921B1 EP0494921B1 (de) 1995-02-08

Family

ID=9386010

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90914739A Expired - Lifetime EP0494921B1 (de) 1989-10-02 1990-10-01 Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz

Country Status (9)

Country Link
US (1) US5312294A (de)
EP (1) EP0494921B1 (de)
JP (1) JPH0833223B2 (de)
AT (1) ATE118268T1 (de)
DE (1) DE69016793T2 (de)
DK (1) DK0494921T3 (de)
ES (1) ES2071116T3 (de)
FR (1) FR2652520B1 (de)
WO (1) WO1991005210A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3848646A4 (de) * 2018-09-06 2021-11-10 Nihon Spindle Manufacturing Co., Ltd. Kabine und auswurfvorrichtung

Families Citing this family (21)

* Cited by examiner, † Cited by third party
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FI88541C (fi) * 1991-04-23 1993-05-25 Ilmateollisuus Oy Foerfarande och anordning foer att aostadkomma en luftvaexling foer ett behandlingsrum
JPH04327736A (ja) * 1991-04-30 1992-11-17 Mitsubishi Heavy Ind Ltd 流体吸引ノズル及び流体処理装置
FR2730297B1 (fr) * 1995-02-02 1997-05-09 Soc Generale Pour Les Techniques Nouvelles Sgn Procede et dispositif de confinement, notamment d'une atmosphere particuliere dans un espace de traitement en continu de produits traversants
FR2740205B1 (fr) * 1995-10-23 1998-01-09 Unir Ultra Propre Nutrition In Dispositif de protection contre l'aerocontamination
FR2750199B1 (fr) * 1996-06-21 1998-09-11 Cemagref Centre National Du Ma Procede et dispositif de protection rapprochee d'un plan de travail au moyen d'un flux d'air propre
FR2756910B1 (fr) 1996-12-10 1999-01-08 Commissariat Energie Atomique Procede de separation dynamique de deux zones par un rideau d'air propre
FR2757933B1 (fr) 1996-12-27 1999-01-22 Commissariat Energie Atomique Dispositif de separation dynamique de deux zones par au moins une zone tampon et deux rideaux d'air propre
FR2760199B1 (fr) 1997-03-03 1999-05-21 Unir Ultra Propre Nutrition In Dispositif de separation de deux zones a ambiances differentes
KR100709495B1 (ko) * 1998-09-15 2007-04-20 지멘스 악시파 게엠베하 운트 콤파니 카게 공기중 입자로부터 작업자 및/또는 제품을 보호하는 방법 및 장치
US6626971B1 (en) 1998-09-15 2003-09-30 Siemens Axiva Gmbh & Co. Kg Method and device for protecting persons and/or products from air-borne particles
DE29912192U1 (de) 1999-07-13 1999-11-11 M+W Zander Umwelt GmbH, 91080 Spardorf Schutzkabine für Lösemitteldampf - beaufschlagte Arbeitsplätze
DE10046200C1 (de) * 2000-09-19 2002-05-23 Alfred Schneider Kanal für Reinstluftbedingungen
FR2824626B1 (fr) 2001-05-14 2004-04-16 Pierre Bridenne Procede et dispositif pour diffuser un flux de protection a l'egard d'une ambiance environnante
CN100435269C (zh) * 2001-07-15 2008-11-19 应用材料有限公司 处理系统
DE10226710B4 (de) * 2002-06-14 2004-05-13 Pöpplau, Jens H., Dr.-Ing. Vorrichtung zum Beseitigen von Fremdluft aus einem Reinraum
ITBO20030375A1 (it) * 2003-06-19 2004-12-20 Ima Spa Struttura per la copertura e l'isolamento dall'ambiente
AU2004203649B2 (en) 2003-08-12 2006-01-12 F. Hoffmann-La Roche Ag Thermostable Taq polymerase fragment
US20080311837A1 (en) * 2007-06-12 2008-12-18 United Microelectronics Corp. Preventive maintenance hood
JP5850059B2 (ja) * 2011-10-04 2016-02-03 株式会社ニコン Ｘ線を用いた形状測定装置、形状計測方法、及び構造物の製造方法
FR3032391B1 (fr) * 2015-02-06 2018-09-21 Alstom Transport Technologies Dispositif de generation de rideau d'air, notamment destine a equiper un vehicule ferroviaire
FR3093454B1 (fr) * 2019-03-07 2022-01-28 Hydro Fill Element de manipulation comprenant un gant

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FR1257562A (fr) * 1960-05-25 1961-03-31 Carrier Soc Procédé et dispositif pour maintenir une atmosphère ayant des caractéristiques déterminées dans une chambre ouverte d'un côté
US3771323A (en) * 1972-05-17 1973-11-13 Dualjet Corp Refrigerated reach-in display compartment
FR2461205A1 (fr) * 1979-07-09 1981-01-30 Sofrair Poste de travail a double flux laminaire
FR2530163B1 (fr) * 1982-07-15 1986-08-29 Commissariat Energie Atomique Procede de confinement de la pollution d'un local a l'aide d'une veine gazeuse
FR2659782B1 (fr) * 1990-03-14 1992-06-12 Sgn Soc Gen Tech Nouvelle Procede et dispositif de separation dynamique de deux zones.

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3848646A4 (de) * 2018-09-06 2021-11-10 Nihon Spindle Manufacturing Co., Ltd. Kabine und auswurfvorrichtung

Also Published As

Publication number Publication date
WO1991005210A1 (fr) 1991-04-18
ES2071116T3 (es) 1995-06-16
EP0494921B1 (de) 1995-02-08
DK0494921T3 (da) 1995-04-10
ATE118268T1 (de) 1995-02-15
US5312294A (en) 1994-05-17
DE69016793T2 (de) 1995-06-22
JPH0833223B2 (ja) 1996-03-29
FR2652520A1 (fr) 1991-04-05
JPH05500849A (ja) 1993-02-18
FR2652520B1 (fr) 1992-02-07
DE69016793D1 (de) 1995-03-23

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