EP0494921B1 - Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz - Google Patents

Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz Download PDF

Info

Publication number
EP0494921B1
EP0494921B1 EP90914739A EP90914739A EP0494921B1 EP 0494921 B1 EP0494921 B1 EP 0494921B1 EP 90914739 A EP90914739 A EP 90914739A EP 90914739 A EP90914739 A EP 90914739A EP 0494921 B1 EP0494921 B1 EP 0494921B1
Authority
EP
European Patent Office
Prior art keywords
opening
jet
stream
gas
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90914739A
Other languages
English (en)
French (fr)
Other versions
EP0494921A1 (de
Inventor
François Meline
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Generale pour les Techniques Nouvelles SA SGN
Original Assignee
Societe Generale pour les Techniques Nouvelles SA SGN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Generale pour les Techniques Nouvelles SA SGN filed Critical Societe Generale pour les Techniques Nouvelles SA SGN
Publication of EP0494921A1 publication Critical patent/EP0494921A1/de
Application granted granted Critical
Publication of EP0494921B1 publication Critical patent/EP0494921B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • F24F2009/007—Use of air currents for screening, e.g. air curtains using more than one jet or band in the air curtain

Definitions

  • the invention relates to a method and a device for maintaining a clean atmosphere at a controlled temperature on a work station, accessible from a contaminated room.
  • the applicant sought to isolate the workstations from the air in the room in which the operators are; the air in this room no longer has to undergo the "clean room” treatment.
  • slow jet the first jet
  • fast jet the second jet
  • sting the potential flow area
  • width the dimension (of the opening or jets) parallel to the direction of flow of the curtain
  • length the dimension (of the opening or the jets) perpendicular to the direction of flow of the curtain.
  • This technique makes it possible to isolate a clean room from the pollution contained in a contaminated room and avoids heat transfers but must be adapted to allow access by the operator to a clean work station located in a contaminated room (inversion).
  • the present invention provides a method and a device improving the subject of patent FR-A-1 257 262 for maintaining a clean atmosphere on a workstation (indoor), although the air curtain is crossed by an obstacle (the operator for example, located outside).
  • the invention is not limited to the atmospheres of air in which men work; it can be applied to any gaseous atmosphere, the work can be carried out by robot, remote manipulator, etc.
  • the workstation is generally isolated from the contaminated area by one or more walls and a gas curtain at each opening on said contaminated area.
  • the volume thus delimited in which the workstation is located constitutes the volume to be kept clean.
  • an enclosure provided with walls is generally arranged; it communicates with the outside, to allow the operator to access the workstation, through at least one opening.
  • the gases can be injected to form the curtain from either side of the opening. Preferably they are injected from the top to the bottom.
  • the jets are emitted so that at least the external face of the fast jet (that which is not in contact with the slow jet) arrives at the limit of the plane of the opening.
  • Said external face can advantageously arrive just at the limit of said opening.
  • the gas curtain encounters no obstacle and perfectly obstructs said opening.
  • Said external face can arrive inside the volume - enclosure - to keep clean.
  • the fast jet, and possibly the slow jet meets (nt), opposite their injection zone, a surface.
  • the work station can constitute said surface. It can also be the floor of the enclosure. It is then advisable to provide, at the level of said surface, a suction so that said jets are not disturbed.
  • the two walls of the opening which are perpendicular to the flow of the jets are extended beyond the plane of the opening on a distance at least equal to the thickness of the curtain at its effective range (that is to say at its end).
  • the gas curtain has a continuous shape, for example a circular shape, it obviously does not need to be delimited.
  • the speed of the slow jet is chosen so as to limit turbulence in the presence of an obstacle. It is generally of the order of 0.4 to 0.6 m / s, and more generally ⁇ 0.6 m / s.
  • the flow rate of the clean gas stream is at least equal to the flow rate induced by the external face of the rapid jet.
  • the stream of clean gas is directed perpendicular to the plane of the opening; therefore, in the case where the work station is inside an enclosure, from the wall of the enclosure opposite the opening protected by the gas curtain. Said current is also directed from the area to be kept clean to the contaminated area (exterior).
  • a laminar flow is then created in the volume to be protected which promotes the non-diffusion of the contaminants.
  • the stream of clean gas is emitted in the same direction as the gas curtain and substantially parallel thereto.
  • the temperature of the clean gas stream is chosen by the manufacturer according to his needs.
  • the clean gas stream participates in combination with the gas curtain in the insulation of the volume to be protected (from the enclosure) against thermal changes and against pollution.
  • the dart of the slow jet constitutes a barrier against contaminants because the velocity vectors are parallel and equal.
  • there is a slight backscatter of polluted gas due to the disturbance of the jet by the walls which limit its length.
  • the obstacle then constitutes a local source of back-diffusion of the contaminants.
  • the invention also relates to a device for implementing the above method.
  • the work station constitutes the floor of said enclosure.
  • said enclosure is parallelepiped. It has at least two side walls to limit the length of the gas curtain and avoid the turbulence of the jets. Said side walls, perpendicular to the flow of said jets, are extended beyond the opening by a distance at least equal to the thickness of the jets at their effective range.
  • the means for injecting the stream of clean gas is advantageously constituted by said wall, perforated (thus playing the role of diffusing wall) and supplied with said clean gas (by example, by a box, which covers the entire surface of the wall, into which the said gas arrives slightly).
  • the stream of clean gas arrives approximately in a direction perpendicular to the jets, coming from the nozzles.
  • the means for injecting the stream of clean gas consists of the wall on which the nozzles are fixed, said wall being perforated and supplied with gas to act as a diffusing wall.
  • the stream of clean gas is practically parallel to the jets from the nozzles.
  • said enclosure does not have a side wall but an opening around its entire periphery.
  • said enclosure has a bell shape.
  • the means for injecting the stream of clean gas here advantageously consists of several nozzles located at the top of the ceiling (of the bell) and oriented so as to distribute the gas along the walls of the ceiling and in the enclosure.
  • the nozzles are obviously associated with distribution boxes provided with any device allowing equal distribution of the flow over the entire section of the nozzles.
  • the nozzles are oriented so that the external face of the rapid jet arrives just at the limit of the opening.
  • the gases are oriented outside the enclosure and it is not necessary to provide therein a suction device.
  • the work station 1 is a horizontal work plan, around which a rectangular enclosure has been built having a ceiling 2 and three side walls (only two are shown, marked 3 and 4), the wall 4 being opposite at opening 5, the wall 3 being extended beyond the nozzles 7 and 8 by a distance at least equal to the thickness of the gas curtain at the work station.
  • This wall is transparent in FIG. 1.
  • This enclosure rests on the ground via the support 6.
  • nozzles 7 and 8 for injecting gas (here air) supplied by pipes (not shown).
  • the nozzle 7 diffuses the slow jet, the nozzle 8, the fast jet.
  • the flow rates and speeds are adjusted so as to obtain a so-called slow jet on the outside side and a so-called fast jet on the enclosure side.
  • the nozzles 7 and 8 can be inclined if necessary so that the jets arrive advantageously at the limit of the work plane 1, without being in contact with this plane and without being too far from it (to prevent contamination from the outside from reaching the enclosure from below the worktop).
  • the wall 4 opposite the opening 5 is provided over its entire surface with perforations, preferably uniformly distributed. Behind this wall is a means allowing a uniform distribution of the gas on the surface of the wall, such as for example a box 9 covering the entire surface of the wall, and into which the gas is brought which then crosses the wall through the perforations and diffuses in the enclosure.
  • a gas suction mouth 10 is arranged at the bottom of the support 6 (in the contaminated area) to create a controlled circulation of air.
  • Such an enclosure provided with the means of the invention is particularly suitable for the treatment of products to be packaged which are brought by the operator or circulate at slow speed on a conveyor.
  • Figures 2A and 2B show a work station 11 consisting of a horizontal plane which is, in this particular case, a turntable around a central shaft. This type of station is found in bottling workshops where the bottles are brought automatically to the tray, are filled at a station and are directed out of the tray to other stations.
  • an enclosure 12 in the form of a bell is placed, supported on the ground by uprights 13.
  • this enclosure can be raised or lowered at will.
  • two adjacent nozzles 14 and 15 are mounted to create the gas curtain (here air).
  • the speeds and flow rates being adjusted to form said curtain, the so-called slow jet being emitted by the nozzle 14, the so-called fast jet by the nozzle 15.
  • a suction mouth 19 is placed on the ground below the nozzles 14, 15.
  • Figure 3 shows a conveyor line 20 protected from the outside, line on which circulate bottles to keep clean.
  • the enclosure is formed by a floor 20 - the conveyor (work station) - and a ceiling 21 formed here by the boxes supplied with gas and containing the injection nozzles.
  • the side walls of the enclosure are transferred to the ends of the conveyor and not shown.
  • symmetrical quick jets are emitted over at least the entire length of the conveyor line and over at least its entire opening width, the distance between the boxes and the conveyor constituting the opening of the pregnant.
  • the external face of the rapid jets arrives at the limit of the conveyor line 20 constituting the work station and arrives as close as possible to the bottles.
  • slow jets are emitted over at least the entire length of the conveying line and over at least its entire width, the sting of each of the jets being adjusted so that its range is equal to the width of the 'opening.
  • the stream of clean gas at slow speed is emitted from the central box 24. It covers the entire volume of the enclosure and is emitted parallel to the two gas curtains.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cleaning In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Air Conditioning Control Device (AREA)
  • Control Of Heat Treatment Processes (AREA)

Claims (11)

  1. Verfahren zum Aufrechterhalten einer reinen Atmosphäre bei kontrollierter Temperatur an einem Arbeitsplatz (1), welcher Arbeitsplatz (1) von einer kontaminierten Zone her über mindestens eine Öffnung (5) zugänglich ist, bei welchem Verfahren einerseits in der Höhe der genannten Öffnung (5) ein Gasvorhang, der die gesamte Länge der genannten Öffnung (5) bedeckt, und anderseits an dem genannten Arbeitsplatz (1) ein Strom reinen Gases bei kontrollierter Temperatur erzeugt wird, der so geleitet wird, daß er dem Eintritt von Kontaminierungen entgegenwirkt und den genannten Arbeitsplatz (1) gleichmäßig bestreicht, dadurch gekennzeichnet, daß:
    - der genannte Gasvorhang aus einem langsamen und einem schnellen Strahl besteht; wobei der langsame Strahl einen Kernstrahl von gleicher Weite wie die genannte Öffnung (5) aufweist, der genannte schnelle Strahl eine durch seine innere Fläche in Kontakt mit dem langsamen Strahl bewirkte Durchsatzleistung gleich der Zuführungsleistung des genannten langsamen Strahls hat; der genannte schnelle Strahl in der Höhe der genannten Öffnung (5) auf der Seite des Arbeitsplatzes (1) vorliegt; wobei die genannten langsamen und schnellen Strahlen im wesentlichen parallel zur genannten Öffnung (5) ausgerichtet sind, so daß mindestens die äußere Fläche des genannten schnellen Strahls an der Begrenzung der genannten Öffnung (5) auftrifft;
    - der Durchsatz des genannten Stroms reinen Gases mindestens gleich der Versorgungsleistung der äußeren Fläche des genannten schnellen Strahls ist;
    - erforderlichenfalls in der Höhe der genannten Öffnung (5) und gegenüber der Einblaszone der Strahlen das eingeblasene Gas in der Strahlen- und Strom-Form angesaugt wird.
  2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß die Geschwindigkeit des langsamen Strahls ziwschen 0,4 und 0,6 m/s liegt.
  3. Verfahren nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß der Strom reinen Gases in einer senkrecht zur Ebene der Öffnung (5) liegenden Richtung und mit einem die Reinhaltung gewährleistenden Volumen gegen die kontaminierte Zone abgegeben wird.
  4. Verfahren nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß der Strom reinen Gases in einer zur Ebene der Öffnung (5) im wesentlichen parallelen Richtung und im selben Richtungssinn wie die Strahlen abgegeben wird.
  5. Vorrichtung zur Durchführung des Verfahrens nach einem der Ansprüche 1 bis 4, mit
    - einer Einfassung, in der sich der Arbeitsplatz (1) befindet, welcher Arbeitsplatz (1) von außen über mindestens eine Öffnung (5) in der Einfassung zugänglich ist, dadurch gekennzeichnet, daß sie weiters umfaßt:
    - zwei nebeneinander angeordnete Düsen (7, 8) auf einer Seite der genannten Öffnung (5) zum Einblasen des Gases in Form von Strahlen; wobei die Länge der Düsen (7, 8) gleich jener der Öffnung (5) ist, und die Abmessung des Schlitzes jeder Düse (7, 8) abhängig von der Geschwindigkeit und der Weite des Strahls bestimmt wird, wobei die genannten Düsen (7, 8) so ausgerichtet sind, daß mindestens die äußere Fläche des schnellen Strahls an der Begrenzung der genannten Öffnung (5) auftrifft;
    - wenigstens ein Mittel (9) zum Einblasen des Stroms reinen Gases, welches Mittel (9) derart gewählt und angeordnet ist, daß das Gas gleichmäßig in der genannten Einfassung verteilt wird und daß der Strom reinen Gases ungefähr in einer Richtung senkrecht oder parallel zur Ebene der Öffnung (5) auftrifft;
    - Rohre und Mittel zur Gasversorgung der genannten Düsen (7, 8) und des genannten Mittels (9) zum Einblasen des Stroms reinen Gases;
    - gegebenenfalls eine Ansaugvorrichtung für die Gase, die in Form eines Strahls (oder mehrerer Strahle) und eines Stroms in das Innere der genannten Einfassung eingeblasen werden.
  6. Vorrichtung nach Anspruch 5, dadurch gekannzeichnet, daß der Arbeitsplatz (1) den Boden der genannten Einfassung bildet.
  7. Vorrichtung nach einem der Ansprüche 5 oder 6, dadurch gekennzeichnet, daß die genannte Einfassung mindestens zwei Seitenwände umfaßt, die senkrecht zum Verlauf der Strahlen stehen und über die genannte Öffnung (5) hinaus um einen Abstand verlängert sind, der zumindest gleich der Dicke der genannten Strahlen im Bereich ihrer effektiven Weite ist.
  8. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, daß die genannte Einfassung eine Rückwand (4) aufweist, die der genannten Öffnung (5) gegenüberliegt, und daß die genannte perforierte Rückwand (4) eine für den Strom reinen Gases durchlässige Wand ist.
  9. Vorrichtung nach Anspruch 7, dadurch gekennzeichnet, daß die Wand (21), an der die Düsen befestigt sind, eine perforierte, für den Strom reinen Gases durchlässige Wand ist.
  10. Vorrichtung nach einem der Ansprüche 5 oder 6, dadurch gekennzeichnet, daß die genannte Einfassung (12) in Form einer Glocke auf ihrem obersten Teil Düsen (16) zum Einblasen des reinen Gases entlang den Wänden der Glocke und in deren Raum aufweist.
  11. Vorrichtung nach einem der Ansprüche 5 bis 10, dadurch gekennzeichnet, daß die äußere Fläche des schnellen Strahls an der Begrenzung der Öffnung (5) auftrifft, und daß sie einen in der kontaminierten Zone liegenden Gasansaugmund (10, 19) aufweist.
EP90914739A 1989-10-02 1990-10-01 Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz Expired - Lifetime EP0494921B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR8912861 1989-10-02
FR8912861A FR2652520B1 (fr) 1989-10-02 1989-10-02 Procede et dispositif pour maintenir une atmosphere propre a temperature regulee sur un poste de travail.
PCT/FR1990/000700 WO1991005210A1 (fr) 1989-10-02 1990-10-01 Procede et dispositif pour maintenir une atmosphere propre a temperature regulee sur un poste de travail

Publications (2)

Publication Number Publication Date
EP0494921A1 EP0494921A1 (de) 1992-07-22
EP0494921B1 true EP0494921B1 (de) 1995-02-08

Family

ID=9386010

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90914739A Expired - Lifetime EP0494921B1 (de) 1989-10-02 1990-10-01 Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz

Country Status (9)

Country Link
US (1) US5312294A (de)
EP (1) EP0494921B1 (de)
JP (1) JPH0833223B2 (de)
AT (1) ATE118268T1 (de)
DE (1) DE69016793T2 (de)
DK (1) DK0494921T3 (de)
ES (1) ES2071116T3 (de)
FR (1) FR2652520B1 (de)
WO (1) WO1991005210A1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI88541C (fi) * 1991-04-23 1993-05-25 Ilmateollisuus Oy Foerfarande och anordning foer att aostadkomma en luftvaexling foer ett behandlingsrum
JPH04327736A (ja) * 1991-04-30 1992-11-17 Mitsubishi Heavy Ind Ltd 流体吸引ノズル及び流体処理装置
FR2730297B1 (fr) * 1995-02-02 1997-05-09 Soc Generale Pour Les Techniques Nouvelles Sgn Procede et dispositif de confinement, notamment d'une atmosphere particuliere dans un espace de traitement en continu de produits traversants
FR2740205B1 (fr) * 1995-10-23 1998-01-09 Unir Ultra Propre Nutrition In Dispositif de protection contre l'aerocontamination
FR2750199B1 (fr) * 1996-06-21 1998-09-11 Cemagref Centre National Du Ma Procede et dispositif de protection rapprochee d'un plan de travail au moyen d'un flux d'air propre
FR2756910B1 (fr) 1996-12-10 1999-01-08 Commissariat Energie Atomique Procede de separation dynamique de deux zones par un rideau d'air propre
FR2757933B1 (fr) 1996-12-27 1999-01-22 Commissariat Energie Atomique Dispositif de separation dynamique de deux zones par au moins une zone tampon et deux rideaux d'air propre
FR2760199B1 (fr) 1997-03-03 1999-05-21 Unir Ultra Propre Nutrition In Dispositif de separation de deux zones a ambiances differentes
US6626971B1 (en) 1998-09-15 2003-09-30 Siemens Axiva Gmbh & Co. Kg Method and device for protecting persons and/or products from air-borne particles
CA2344066C (en) * 1998-09-15 2008-11-18 Siemens Axiva Gmbh & Co. Kg Method and device for protecting persons and/or products from air-borne particles
DE10046200C1 (de) * 2000-09-19 2002-05-23 Alfred Schneider Kanal für Reinstluftbedingungen
FR2824626B1 (fr) 2001-05-14 2004-04-16 Pierre Bridenne Procede et dispositif pour diffuser un flux de protection a l'egard d'une ambiance environnante
WO2003009346A2 (en) * 2001-07-15 2003-01-30 Applied Materials,Inc. Processing system
DE10226710B4 (de) * 2002-06-14 2004-05-13 Pöpplau, Jens H., Dr.-Ing. Vorrichtung zum Beseitigen von Fremdluft aus einem Reinraum
ITBO20030375A1 (it) * 2003-06-19 2004-12-20 Ima Spa Struttura per la copertura e l'isolamento dall'ambiente
AU2004203649B2 (en) 2003-08-12 2006-01-12 F. Hoffmann-La Roche Ag Thermostable Taq polymerase fragment
US20080311837A1 (en) * 2007-06-12 2008-12-18 United Microelectronics Corp. Preventive maintenance hood
WO2013051594A1 (ja) * 2011-10-04 2013-04-11 株式会社ニコン Ｘ線装置、ｘ線照射方法、及び構造物の製造方法
FR3032391B1 (fr) * 2015-02-06 2018-09-21 Alstom Transport Technologies Dispositif de generation de rideau d'air, notamment destine a equiper un vehicule ferroviaire
CN112639366B (zh) * 2018-09-06 2023-04-21 日本斯频德制造株式会社 隔间及喷出装置
FR3093454B1 (fr) * 2019-03-07 2022-01-28 Hydro Fill Element de manipulation comprenant un gant

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1257562A (fr) * 1960-05-25 1961-03-31 Carrier Soc Procédé et dispositif pour maintenir une atmosphère ayant des caractéristiques déterminées dans une chambre ouverte d'un côté
US3771323A (en) * 1972-05-17 1973-11-13 Dualjet Corp Refrigerated reach-in display compartment
FR2461205A1 (fr) * 1979-07-09 1981-01-30 Sofrair Poste de travail a double flux laminaire
FR2530163B1 (fr) * 1982-07-15 1986-08-29 Commissariat Energie Atomique Procede de confinement de la pollution d'un local a l'aide d'une veine gazeuse
FR2659782B1 (fr) * 1990-03-14 1992-06-12 Sgn Soc Gen Tech Nouvelle Procede et dispositif de separation dynamique de deux zones.

Also Published As

Publication number Publication date
DE69016793T2 (de) 1995-06-22
JPH0833223B2 (ja) 1996-03-29
JPH05500849A (ja) 1993-02-18
DE69016793D1 (de) 1995-03-23
ES2071116T3 (es) 1995-06-16
FR2652520A1 (fr) 1991-04-05
US5312294A (en) 1994-05-17
EP0494921A1 (de) 1992-07-22
ATE118268T1 (de) 1995-02-15
FR2652520B1 (fr) 1992-02-07
WO1991005210A1 (fr) 1991-04-18
DK0494921T3 (da) 1995-04-10

Similar Documents

Publication Publication Date Title
EP0494921B1 (de) Verfahren und vorrichtung zum aufrechterhalten einer reinen und temperierten atmosphäre an einem arbeitsplatz
CA2275950C (fr) Dispositif de separation dynamique de deux zones
EP1387989B1 (de) Verfahren und vorrichtung zur diffusion einer schutzströmung unter inbetrachtziehung der umgebung
EP1708760B1 (de) Vorrichtung zum sterilisieren von gegenständen mit elektronenbombardierung
EP2342065B1 (de) Verbesserter ofen für die thermische konditionierung von aus einem thermoplastischen material hergestellten vorformlingen
JP2007180517A (ja) 密閉容器の蓋開閉システム
JP2007180516A (ja) 密閉容器の蓋開閉システム
EP0447314B1 (de) Verfahren und Vorrichtung zum dynamischen Trennen von zwei Zonen
EP0807228B1 (de) Verfahren und vorrichtung zum einschliessen eines gases, insbesondere in einem raum für die behandlung kontinuierlich durchlaufender produkte
EP0787950A1 (de) Raum mit geregelter Entstaubung
CA2218416C (fr) Dispositif de protection anti-contamination rapprochee
WO1998039604A1 (fr) Dispositif de separation de deux zones a ambiances differentes
FR2622960A1 (fr) Unite de production de flux laminaire sterile a circulation verticale
FR2677273A1 (fr) Installation de manipulations de produits hautement actifs.
FR2621887A1 (fr) Confinement dynamique et accostage sans contact
FR2790698A1 (fr) Dispositif pour le traitement thermique a haute temperature d'une matiere ligneuse
FR2788843A1 (fr) Dispositif de protection rapprochee de produits sensibles par diffusion d'air sterile, avec des extremites d'interface protegees
FR2608260A1 (fr) Paroi perforee servant a insuffler de l'air dans une enceinte
FR3101001A1 (fr) Station et procédé de nettoyage d’une enceinte de transport pour le convoyage et le stockage atmosphérique de substrats semi-conducteurs
FR2748508A1 (fr) Gaine textile pour la protection rapprochee du convoyage de produits sensibles et hotte a flux laminaire comportant une telle gaine
JPH08197265A (ja) 基板のレーザ洗浄装置およびこれを用いた基板洗浄装置
FR2740205A1 (fr) Dispositif de protection contre l'aerocontamination

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19920326

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB IT LI LU NL SE

17Q First examination report despatched

Effective date: 19921125

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB IT LI LU NL SE

REF Corresponds to:

Ref document number: 118268

Country of ref document: AT

Date of ref document: 19950215

Kind code of ref document: T

ITF It: translation for a ep patent filed

Owner name: JACOBACCI & PERANI S.P.A.

REF Corresponds to:

Ref document number: 69016793

Country of ref document: DE

Date of ref document: 19950323

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19950223

REG Reference to a national code

Ref country code: DK

Ref legal event code: T3

REG Reference to a national code

Ref country code: ES

Ref legal event code: FG2A

Ref document number: 2071116

Country of ref document: ES

Kind code of ref document: T3

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: AT

Payment date: 19970923

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: ES

Payment date: 19971017

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: LU

Payment date: 19971027

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DK

Payment date: 19980918

Year of fee payment: 9

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19981001

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19981001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF EXPIRATION OF PROTECTION

Effective date: 19981002

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19981020

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: SE

Payment date: 19981021

Year of fee payment: 9

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19990921

Year of fee payment: 10

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19991001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19991030

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19991031

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19991031

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

EUG Se: european patent has lapsed

Ref document number: 90914739.9

REG Reference to a national code

Ref country code: DK

Ref legal event code: EBP

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20001014

Year of fee payment: 11

REG Reference to a national code

Ref country code: ES

Ref legal event code: FD2A

Effective date: 20010201

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010501

NLV4 Nl: lapsed or anulled due to non-payment of the annual fee

Effective date: 20010501

REG Reference to a national code

Ref country code: GB

Ref legal event code: IF02

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20020702

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 20021118

Year of fee payment: 13

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20031031

BERE Be: lapsed

Owner name: SOC. GENERALE POUR LES TECHNIQUES NOUVELLES *SGN

Effective date: 20031031

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20041026

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20050923

Year of fee payment: 16

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 20051001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060630

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20060630

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20061001

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20061001