EP0830549B1 - Vorrichtung zum schutz gegen kontamination - Google Patents

Vorrichtung zum schutz gegen kontamination Download PDF

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Publication number
EP0830549B1
EP0830549B1 EP96913582A EP96913582A EP0830549B1 EP 0830549 B1 EP0830549 B1 EP 0830549B1 EP 96913582 A EP96913582 A EP 96913582A EP 96913582 A EP96913582 A EP 96913582A EP 0830549 B1 EP0830549 B1 EP 0830549B1
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Prior art keywords
work surface
gas
products
decontaminated
stream
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EP96913582A
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English (en)
French (fr)
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EP0830549A1 (de
Inventor
Philippe Chevalier
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UNIR Ultra Propre Nutrition Industrie Recherche
Unir
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UNIR Ultra Propre Nutrition Industrie Recherche
Unir
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed

Definitions

  • the present invention relates generally to the protection close to a work station located in a contaminated atmosphere, and more particularly a process and a device for close protection of products sensitive to contamination by contaminating agents conveyed by the atmosphere, said products being positioned on a work surface.
  • workstations are located in so-called "white" rooms in which the air is filtered and treated so that the level of dust is below a threshold. admissible controlled and subject to strict regulations.
  • the air circulating in these clean rooms is often regulated at a low temperature.
  • Document FR-A-2 485 700 teaches a process (and associated device) for close protection of the workstation against contamination carried by the atmosphere, according to which we create a single vertical flow descending towards products, this flow on the one hand having dimensions equal to or greater than those the workstation to be protected so as to completely cover it with sterile air, and on the other hand evacuating the work plan on a single rear side thereof.
  • the invention proposes a new protection method close-up of products sensitive to air contamination by contaminating agents conveyed by the atmosphere, in accordance with the characteristics of claim 1.
  • the invention also provides a method according to claim 2.
  • the products positioned on the worktop are isolated from the environment contaminated by a flow of decontaminated gas which covers them, and which either flows vertically down towards the worktop and then transversely to the edges of said plane, ie from the edges of said work plane transversely to said products, then vertically upwards from said workplan.
  • Contamination brought by personnel working on products sensitive positioned on the work surface is then automatically driven by the flow of decontaminated gas along either path, towards the outside of said path work plan without this contamination reaching said products.
  • One embodiment of the method conforms to the characteristics of the claim 3.
  • each gas stream is sucked above said products or conversely, each gas stream is sucked on either side of said products.
  • the products being aligned on a conveyor belt which runs according to direction X we direct from the longitudinal edges of said mat, two veins of decontaminated gas towards the middle of said conveyor belt and said veins are aspirated gas in the plane of symmetry of said mat, or vice versa we direct in the plane symmetry of the conveyor belt, a stream of decontaminated gas towards the belt and sucks towards the longitudinal edges of said conveyor belt the gas streams decontaminated.
  • the method according to the invention can be improved to adapt it to the work or conveyor belt which are not tightly connected to the frame.
  • the process according to the invention consists in blocking induction by deflecting part of each vein of decontaminated gas substantially parallel to the work plan, previously described, toward the edges of said mat.
  • the invention also provides a close protection device according to claim 8 and a device according to claim 9.
  • the insufflation means comprise at least one inlet for gas and at least two decontaminated gas outlets facing each other, each gas outlet in the form of a slot positioned on one side of the plane and extending longitudinally to the direction X of positioning of the products.
  • suction means comprise a mouth suction placed above the work surface next to said products, in a middle region located between the two decontaminated gas outlets of the appliance insufflation.
  • the insufflation means comprise a gas inlet, and a decontaminated gas outlet positioned opposite the products above the plane of work in a middle region of said work plan.
  • suction means comprise two suction ports arranged opposite one another, each suction port in the form of a slot positioned on one side of said work surface and extending longitudinally to said direction X.
  • the protection device can be improved to adapt it to unsealed work.
  • the device comprises means additional insufflation including at least one gas inlet which can be that of the main insufflation means and at least two gas outlets decontaminated opposite each other, each gas outlet being under the form of a slot positioned at the edge and under the worktop and extending longitudinally to the product positioning direction X.
  • the gas veins evacuating according to the plane of symmetry perpendicular to the work plane.
  • the device comprises a lower duct allowing a vein of gas to circulate along the underside as well as the along the edges of the work surface or conveyor belt.
  • the insufflation means comprise at least one gas inlet and at minus two decontaminated gas outlets opposite each other, each outlet gas in the form of a slot positioned on one side of the worktop and extending longitudinally to the product positioning direction X and are provided with an aerodynamic means ensuring the deflection of part of the vein of decontaminated gas along the edges of said conveyor belt in a direction perpendicular to the plane thereof.
  • a work station comprising a frame 30 supporting a work plan P on which are arranged in file in a direction horizontal X of products 10 sensitive to air contamination, for example foodstuffs.
  • the work plan P is formed by a mat conveyor capable of scrolling said products 10 in the direction X.
  • This device includes an insufflation apparatus 200 for a decontaminated gas comprising on each longitudinal side (only one of which is visible here) of said plane of work P, here two inputs 201 of a decontaminated gas, for example sterile air.
  • a decontaminated gas for example sterile air.
  • These inputs 201 are positioned remotely from each other on each longitudinal side of said work plan P and open out in an enclosure provided with a sterile air outlet 202 in the form a slot extending longitudinally to said direction X over the entire length of the side of the worktop P.
  • the two outlet slots 202 of the insufflation device are located at the level of the work plan P on which the products 10 and are arranged opposite each other.
  • the device shown in Figure 1 includes an apparatus suction 100 of the blown decontaminated gas, comprising a suction mouth 101 in the form of a slot, extending longitudinally at the product positioning direction X, and positioned above the plane of work P, opposite said products in a middle region of the work plan located between the two outlet slots 202 of the insufflation apparatus 200.
  • the suction device 100 here has two air outlets 102 located above from the suction mouth 101 so that they allow evacuation towards the high the gas flow 102 aspirated. These two gas outlets 102 are positioned at distance from each other near the end edges of said mouth suction 101. Of course, according to a variant not shown, one can provide more gas outlets.
  • the suction device 100 is mounted integral with the insufflation device 200 using support arms 110 so that it hangs above the plane of work P.
  • support arms 110 there are four support arms 110 arranged in pairs, each pair support arm 110 is positioned on either side of the suction mouth 101 and is fixed on the one hand to the suction device 100 and on the other hand, to an enclosure insufflation device 200.
  • Such a device operates in the following manner.
  • a sterile air flow enters the blowing device 200 through the inlets 201 and is distributed on the products through the outlet slots 202 of said device insufflation so that the sterile air leaving said slots 202 follows a path A directed essentially parallel to said plane P, transversely to said direction X.
  • the sterile air coming from these slots 202 then licks the products 10 located on the plane of work P.
  • the suction device 100 sucks in through its mouth suction 101 sterile air from the outlet slots 202 of the insufflation apparatus.
  • the air from the outlet slots 202 of the suction device is therefore sucked into a middle region of the work plane P so that the path A of the sterile air flow is deflected upward perpendicular to said work plane P on which are positioned products 10.
  • Two main veins of sterile air 1, 2 come out said outlet slots 202. These two veins 1, 2 are directed towards each other and meet in a middle region of the work plane to form a vein upwardly directed flow perpendicular to said work plane P in direction of the suction mouth 101.
  • the sterile air jets from the exit slots meet face to face, in the middle region of the plane of work, which has the effect of naturally creating a central vein which evacuates in a vertical direction perpendicular to said direction X upwards from said plan by entraining contaminated particles.
  • the insufflation device 200 of decontaminated gas is mounted above the worktop P, and the suction device is positioned on the frame 30, along the longitudinal sides of said work plane P, longitudinally at the product positioning direction X 10.
  • the insufflation device 200 is mounted integral with the suction device 100 via the same support arm system 110 already described above.
  • the insufflation device 200 has a gas inlet 201 and a decontaminated gas outlet 202.
  • This sterile gas outlet 202 is in the form a slit extending longitudinally in the direction X above the plane P in look of said products 10.
  • the suction device 100 has two mouths suction 101 in the form of two slots 101 extending on the sides longitudinal of said work plan P. These suction outlets 101 are connected to air outlets 102.
  • the insufflation device 200 produces, through its outlet 202, a gas stream decontaminated 3 towards products 10 located on plane P.
  • This gas stream decontaminated 3 follows a path A directed perpendicular to said plane P.
  • this vein of decontaminated gas 3 comes into contact with said plane P, it separates in two flow veins 1, 2 which follow paths A essentially oriented parallel to said plane P and transversely to the positioning direction X of said products 10, in opposite directions so that the veins of sterile air flow lick the products 10 positioned on the plane P.
  • These decontaminated gas flow streams 1, 2 are drawn in through the vents 101 of the suction device 100 so that the gas is evacuated on the sides of worktop P.
  • FIG 2 there is shown in vertical section, a detailed view of inside an embodiment of part of an insufflation apparatus making part of an anti-microbial protection device according to the invention.
  • This mode of embodiment of the insufflation device is a variant of that shown on the figure 1
  • the insufflation apparatus comprises on each side of work plan P a gas inlet 201 positioned on the sides of plan P below of said plane P so that the gas entering said apparatus is transported in a vertical upward path toward a slit exit 202 located at the level of said plane P.
  • This insufflation apparatus 200 comprises in a housing which extends vertically on the side of the frame 30, between the inlet 201 and the outlet 202, a grease filter 211 which extends horizontally over the entire width of the box, relative to the vertical direction F of entry of the gas flow into said insufflation device, then successively a pre-filter 212 which also extends over the entire width of the housing, a fan 213 which allows the gas to be transported filtered towards the upper part of the insufflation device 200.
  • This fan 213 is positioned in a baffle path 214 formed by deflectors 214a of the flow of gas so that at the end of this baffled path the flow of filtered gas flows according to the vertical direction F directed upwards from the blower 200.
  • baffle path 214 Above of the baffle path 214 is arranged in parallel a pair of absolute filters 215 of which the efficiency is advantageously equal to or greater than that of a very high filter efficiency (standardized filter). These filters 215 extend in said vertical direction F. Above the absolute filters 215 is positioned in a horizontal direction an anti-turbulence grid so as to reduce the turbulence rate of the flow sterile air which opens into an enclosure 217 having an angled path, and converge in order to further reduce the turbulence rate, bringing the flow of decontaminated gas to the slit-shaped outlet 202 directed in one direction substantially transverse to direction X.
  • an anti-turbulence grid so as to reduce the turbulence rate of the flow sterile air which opens into an enclosure 217 having an angled path, and converge in order to further reduce the turbulence rate, bringing the flow of decontaminated gas to the slit-shaped outlet 202 directed in one direction substantially transverse to direction X.
  • This turbulent diffusion speed is strongly linked to the rate of turbulence, and the size of the vortices present in the flow, reducing the diffusion speed involves reducing the turbulence rate.
  • a workstation P is schematically represented on which are arranged in a file in a horizontal direction X of the products 10 susceptible to air contamination.
  • the worktop is not tightly connected to the rest of frame 30. As a result, there may be an induction of air contaminated by the space left free between the worktop and the frame.
  • Two additional sterile air outlets 203 are provided, presenting in the form of a slot extending longitudinally to said direction X over any the length at the edges and under the worktop P.
  • An air outlet 202 identical to that described in FIG. 1 and in FIG. 2 is also provided.
  • the gas stream 204 is distributed on either side of the work plan according to a path bypassing the edges of said plane then sweeping the underside of said plane to the longitudinal center line of said plane where the gas veins meet are directed in a direction perpendicular to said plane.
  • FIG. 5 which includes the same work station P not connected to the frame 30 as in Figure 4, a U-profile 205 fixed under the frame forms a conduit bringing a slight overpressure sterile air stream under workstation P preventing any induction of contaminated air by the spaces left free due to the lack of sealing between the frame and the worktop.
  • the device comprises a conveyor belt P, the traction chain (not shown) creates a lack of tightness with the frame 30.
  • the outlets 202 are provided in the lower zone with an elbow 206 creating a conduit 207 diverting part of the sterile air flow towards the edges of the conveyor belt thereby preventing any induction of contaminated air.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Prevention Of Fouling (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
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Claims (26)

  1. Verfahren zum Nahschutz von Produkten (10), die empfindlich auf die Kontamination durch von der Umgebung mitgeführte kontaminierende Substanzen sind, bei dem diese Produkte (10) auf einer Arbeitsfläche (P) angeordnet sind und man beiderseits der Produkte (10) wenigstens zwei Ströme aus dekontaminiertem Gas (1,2) auf die Produkte (10) lenkt, dadurch gekennzeichnet, daß man die Ströme ausgehend von zwei einander gegenüberliegenden Rändern der Arbeitsfläche im wesentlichen parallel zur Arbeitsfläche (P) führt, und daß jeder Gasstrom (3) ausgehend von einer zwischen den Rändern der Arbeitsfläche (P) liegenden mittleren Region in eine Richtung im wesentlichen senkrecht zur Arbeitsfläche (P) nach oben abzieht.
  2. Verfahren zum Nahschutz von Produkten (10), die empfindlich auf die Kontamination durch von der Umgebung mitgeführte kontaminierende Substanzen sind, bei dem diese Produkte (10) auf einer Arbeitsfläche (P) angeordnet sind und man wenigstens einen Gasstrom (3) oberhalb der Arbeitsfläche (P) in einer zwischen den Rändern der Arbeitsfläche (P) gelegenen mittleren Region derselben in eine Richtung im wesentlichen senkrecht zur Arbeitsfläche (P) auf die Produkte (10) lenkt, wobei der oder jeder Gasstrom (1,2) von der Arbeitsfläche (P) in eine Richtung im wesentlichen parallel zur Arbeitsfläche (P) abzieht, dadurch gekennzeichnet, daß man den oder jeden Strom so lenkt, daß er beiderseits der Produkte (10) in Richtung der Ränder der Arbeitsfläche abzieht.
  3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Produkte entlang einer horizontalen Richtung X angeordnet sind, wobei man beiderseits der Richtung X in eine im wesentlichen quer zur Richtung X verlaufende Richtung Y zwei Ströme aus dekontaminiertem Gas (1,2) auf die Produkte (10) lenkt und diese Gasströme (3) nach oben in eine vertikale Richtung Z im wesentlichen senkrecht zur Richtung X abziehen, oder man umgekehrt oberhalb der Arbeitsfläche (P) einen Strom aus dekontaminiertem Gas (3) in Richtung der Produkte (10) entlang der vertikalen im wesentlichen senkrecht zur Richtung X verlaufenden Richtung Z lenkt, wobei der Gasstrom (1,2) in der im wesentlichen quer zur Richtung X verlaufenden Richtung Y beiderseits der Richtung X in Richtung der Ränder der Arbeitsfläche abzieht.
  4. Verfahren nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß man jeden Gasstrom (3) oberhalb der Produkte (10) absaugt, oder umgekehrt jeden Gasstrom (1,2) beiderseits der Produkte (10) absaugt.
  5. Verfahren nach einem der Ansprüche 3 oder 4, dadurch gekennzeichnet, daß die Produkte (10) auf einem Förderband (P) aufgereiht sind, das sich in der Richtung X bewegt, und daß man ausgehend von den Längsrändern des Bandes zwei Ströme aus dekontaminiertem Gas (1,2) zur Mitte des Förderbandes (P) lenkt und einen Gasstrom (3) in der Symmetrieebene des Bandes (P) absaugt, oder daß man umgekehrt in der Symmetrieebene des Förderbandes (P) einen Strom aus dekontaminiertem Gas (3) auf das Förderband (P) lenkt und man an den Längsrändern des Förderbandes (P) die Gasströme (1,2) absaugt.
  6. Verfahren nach Anspruch 5, dadurch gekennzeichnet, daß wenn die Arbeitsfläche (P) oder das Förderband nicht auf dichte Weise mit einem Gestell (30) der Arbeitsfläche verbunden ist, ein zusätzlicher Strom aus dekontaminiertem Gas (204) auf die Seiten und unter die Arbeitsfläche gelenkt wird, so daß die Arbeitsfläche durch die über der Arbeitsfläche liegenden Gasströme (1,2) und den zusätzlichen Gasstrom (204) umhüllt wird.
  7. Verfahren nach Anspruch 6, dadurch gekennzeichnet, daß, wenn zwischen dem Gestell und dem Förderband durch die Zugkette des Bandes ein Dichtigkeitsmangel erzeugt wird, die Induktion von kontaminierter Luft dadurch blockiert wird, daß ein Teil jedes Stroms aus dekontaminiertem Gas (1,2) zu den Rändern des Bandes abgelenkt wird.
  8. Vorrichtung zum Nahschutz von Produkten (10), die empfindlich auf die Kontamination durch von der Umgebung mitgeführte kontaminierende Substanzen sind, wobei die Produkte (10) auf einer Arbeitsfläche (P) angeordnet sind und die Vorrichtung Einblasmittel (200) umfaßt, die dazu ausgelegt sind, beiderseits der Produkte (10) wenigstens zwei Ströme aus dekontaminiertem Gas (1,2) in Richtung der Produkte (10) zu erzeugen, dadurch gekennzeichnet, daß jeder Strom aus dekontaminiertem Gas (1,2) einem Weg folgt, der zunächst im wesentlichen parallel zur Arbeitsfläche (P) ausgerichtet ist, so daß jeder Gasstrom (1,2) die Produkte (10) umstreicht, und daraufhin ausgehend von einer zwischen den Rändern der Arbeitsfläche (P) gelegenen mittleren Region derselben im wesentlichen senkrecht zur Arbeitsfläche (P) nach oben gerichtet ist.
  9. Vorrichtung zum Nahschutz von Produkten (10), die empfindlich auf die Kontamination durch von der Umgebung mitgeführte kontaminierende Substanzen sind, wobei die Produkte (10) auf einer Arbeitsfläche (P) angeordnet sind, wobei die Vorrichtung Einblasmittel (200) umfaßt, die dazu ausgelegt sind, beiderseits der Produkte (10) wenigstens einen Strom aus dekontaminiertem Gas (1,2) in Richtung der Produkte (10) zu erzeugen, wobei jeder Strom aus dekontaminiertem Gas (1,2) einem Weg folgt, der zunächst oberhalb der Arbeitsfläche im wesentlichen senkrecht zur Arbeitsfläche (P) in eine zwischen den Rändern derselben gelegene mittlere Region der Arbeitsfläche (P) auf die Produkte (10) gerichtet ist, dadurch gekennzeichnet, daß der Weg daraufhin im wesentlichen parallel zur Arbeitsfläche (P) und beiderseits der Produkte (10) in Richtung der Ränder derselben gerichtet ist.
  10. Schutzvorrichtung nach Anspruch 8 oder 9, dadurch gekennzeichnet, daß sie Absaugmittel (100) umfaßt.
  11. Schutzvorrichtung nach Anspruch 10, dadurch gekennzeichnet, daß die Einblasmittel (200) bzw. die Absaugmittel (100) fest mit den Luftabsaugmitteln (100) bzw. den Einblasmitteln (200) verbunden sind.
  12. Schutzvorrichtung nach einem der Ansprüche 8 bis 11, dadurch gekennzeichnet, daß die Produkte (10) entlang einer Richtung X angeordnet sind und die Einblasmittel (200) dazu ausgelegt sind, beiderseits der Produktpositionierungsrichtung X zwei Ströme aus dekontaminiertem Gas (1,2) einzublasen, die entlang einer Richtung Y quer zur Richtung X aufeinander zu gerichtet sind.
  13. Schutzvorrichtung nach Anspruch 12, dadurch gekennzeichnet, daß die Einblasmittel (200) wenigstens einen Gaseinlaß (201) und wenigstens zwei einander gegenüber liegende Auslässe für dekontaminiertes Gas (202) umfassen, wobei jeder Gasauslaß (202) die Form eines Schlitzes aufweist, der auf einer Seite der Arbeitsfläche (P) angeordnet ist und sich längs der Produktpositionierungsrichtung X erstreckt.
  14. Schutzvorrichtung nach einem der Ansprüche 12 bis 13, dadurch gekennzeichnet, daß sie Absaugmittel (100) umfaßt, die dazu ausgelegt sind, oberhalb der Arbeitsfläche (P) der Produktpositionierung (10) die beiden Gasströme (1,2) die sich zu einem in eine Richtung Z senkrecht zur Fläche (P) gerichteten gemeinsamen Strom (3) vereinigt haben, abzusaugen.
  15. Schutzvorrichtung nach Anspruch 14, dadurch gekennzeichnet, daß die Absaugmittel (100) eine Absaugöffnung (201) umfassen, die oberhalb der Fläche (P) gegenüber der Produkte (10) in einer mittleren Region zwischen den beiden Auslässen für dekontaminiertes Gas (202) der Einblasmittel (200) angeordnet ist.
  16. Schutzvorrichtung nach einem der Ansprüche 8 bis 11, dadurch gekennzeichnet, daß die Produkte (10) in einer Richtung X angeordnet sind und die Einblasmittel (200) dazu ausgelegt sind, oberhalb der Arbeitsfläche (P) der Produktpositionierung einen Strom aus dekontaminiertem Gas (3) in Richtung der Produkte (10) einzublasen.
  17. Schutzvorrichtung nach Anspruch 16, dadurch gekennzeichnet, daß die Einblasmittel (200) einen Einlaß (201) und einen Auslaß (202) für dekontaminiertes Gas umfassen, der gegenüber der Produkte (10) oberhalb der Arbeitsfläche (P) in einer mittleren Region der Arbeitsfläche (P) angeordnet ist.
  18. Schutzvorrichtung nach einem der Ansprüche 16 oder 17, dadurch gekennzeichnet, daß sie Absaugmittel (100) umfaßt, die dazu ausgelegt sind, beiderseits der Produktpositionierungsrichtung X den Gasstrom (3) abzusaugen, der sich in zwei quer zur Richtung X in entgegengesetzte Richtungen gerichtete Gasströme (1,2) aufgeteilt hat.
  19. Schutzvorrichtung nach Anspruch 18, dadurch gekennzeichnet, daß die Absaugmittel (100) zwei Absaugöffnungen (101) umfassen, die einander gegenüber liegen, wobei jede Absaugöffnung (101) die Form eines Schlitzes aufweist, der an einer Seite der Arbeitsfläche (P) angeordnet ist und sich längs in der Richtung X erstreckt.
  20. Schutzvorrichtung nach einem der Ansprüche 13 oder 17, dadurch gekennzeichnet, daß die Einblasmittel (200) nacheinander zwischen jedem Einlaß (201) und jedem Auslaß (202) für dekontaminiertes Gas wenigstens Mittel zum Filtern von Gas (211, 212, 215) und Mittel zum Transport (213) von Gas vom Einlaß (201) zum Auslaß (202) umfassen.
  21. Schutzvorrichtung nach Anspruch 20, dadurch gekennzeichnet, daß die Einblasmittel (200) außerdem Antiturbulenzmittel (216) umfassen, die in der Nähe des Auslasses für dekontaminiertes Gas (202) angeordnet sind.
  22. Schutzvorrichtung nach einem der Ansprüche 20 oder 21, dadurch gekennzeichnet, daß die Mittel zum Filtern von Luft wenigstens einen Filter (215) umfassen, dessen Wirksamkeit gleich oder höher ist als diejenige eines Filters von sehr hoher Wirksamkeit (filtre très haute efficacité), und daß die Mittel zum Transport einen Ventilator (213) umfassen.
  23. Schutzvorrichtung nach Anspruch 8 oder 9, dadurch gekennzeichnet, daß die Vorrichtung zusätzliche Einblasmittel umfaßt, die wenigstens einen Gaseinlaß umfassen, der derjenige der Haupteinblasmittel sein kann, und wenigstens zwei einander gegenüberliegende Auslässe für dekontaminiertes Gas (203), wobei jeder Gasauslaß die Form eines Schlitzes aufweist, der am Rand und unter der Arbeitsfläche angeordnet ist und sich längs in der Richtung X der Produktpositionierung erstreckt, wobei die Gasströme entlang der Symmetrieebene quer zur Arbeitsfläche abziehen.
  24. Schutzvorrichtung nach Anspruch 8 oder 9, dadurch gekennzeichnet, daß die Vorrichtung eine untere Leitung (205) umfaßt, die es erlaubt, einen Gasstrom entlang der Unterseite und entlang der Ränder der Arbeitsfläche zirkulieren zu lassen.
  25. Schutzvorrichtung nach Anspruch 8 oder 9, dadurch gekennzeichnet, daß, wenn die Kette des Förderbandes einen Dichtigkeitsmangel erzeugt, der die Induktion kontaminierter Luft erlaubt, die Einblasmittel wenigstens einen Gaseinlaß (201) und wenigstens zwei einander gegenüberliegende Auslässe für dekontaminiertes Gas (202) umfassen, wobei jeder Gasauslaß (202) die Form eines Schlitzes aufweist, der auf einer Seite der Arbeitsfläche angeordnet ist und sich längs in der Richtung X der Produktpositionierung erstreckt, und mit einem aerodynamischen Mittel (206) ausgestattet sind, welches die Ablenkung eines Teils des Stroms aus dekontaminiertem Gas entlang der Ränder des Förderbandes in eine Richtung senkrecht zur Fläche desselben erlaubt.
  26. Schutzvorrichtung nach Anspruch 25, dadurch gekennzeichnet, daß das aerodynamische Mittel ein Krümmer (206) ist, der in der Zone unter den Gasauslässen (202) angeordnet ist und einen Teil des Flusses aus steriler Luft zu den Rändern des Förderbandes lenkt.
EP96913582A 1995-04-14 1996-04-12 Vorrichtung zum schutz gegen kontamination Expired - Lifetime EP0830549B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9504526 1995-04-14
FR9504526A FR2733036B1 (fr) 1995-04-14 1995-04-14 Dispositif de protection anti-contamination rapprochee
PCT/FR1996/000563 WO1996032613A1 (fr) 1995-04-14 1996-04-12 Dispositif de protection anti-contamination rapprochee

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EP0830549A1 EP0830549A1 (de) 1998-03-25
EP0830549B1 true EP0830549B1 (de) 2002-06-26

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EP (1) EP0830549B1 (de)
JP (1) JP4113256B2 (de)
AT (1) ATE219831T1 (de)
CA (1) CA2218416C (de)
DE (1) DE69622037T2 (de)
ES (1) ES2176454T3 (de)
FR (1) FR2733036B1 (de)
WO (1) WO1996032613A1 (de)

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DE19712975A1 (de) * 1997-03-27 1998-10-01 Gwe Ges Fuer Wasseraufbereitun Verfahren zur Optimierung der Luftführung in einer Reinluft-Kabine
US6096135A (en) * 1998-07-21 2000-08-01 Applied Materials, Inc. Method and apparatus for reducing contamination of a substrate in a substrate processing system
FR2785040B1 (fr) 1998-10-22 2001-01-19 U N I R Ultra Propre Nutrition Dispositif et procede pour la protection rapprochee de produits ou objets sensibles a des agents contaminants vehicules par l'air ambiant
US20040251175A1 (en) * 1998-10-30 2004-12-16 Adams Thomas C. Apparatuses and methods for making glued screen assemblies
US7350315B2 (en) 2003-12-22 2008-04-01 Lam Research Corporation Edge wheel dry manifold
US7089687B2 (en) * 2004-09-30 2006-08-15 Lam Research Corporation Wafer edge wheel with drying function
FR2973100B1 (fr) * 2011-03-22 2018-02-09 Institut National De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture (Irstea) Installation de diffusion de flux d'air

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US4021928A (en) * 1973-12-18 1977-05-10 Research Corporation Cross-flow modular tobacco curing system
FR2485700B1 (fr) * 1980-06-24 1986-02-28 Aurore Sa Procede pour etablir un ecoulement laminaire determine et poste de travail en comportant application
US4750276A (en) * 1984-05-10 1988-06-14 Donald Paul Smith Impingement thermal treatment apparatus with collector plate
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JP2644912B2 (ja) * 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
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CA2218416A1 (fr) 1996-10-17
JP4113256B2 (ja) 2008-07-09
US6035549A (en) 2000-03-14
WO1996032613A1 (fr) 1996-10-17
JPH11503815A (ja) 1999-03-30
FR2733036B1 (fr) 1997-07-04
ATE219831T1 (de) 2002-07-15
FR2733036A1 (fr) 1996-10-18
CA2218416C (fr) 2008-07-08
DE69622037T2 (de) 2002-11-21
EP0830549A1 (de) 1998-03-25
ES2176454T3 (es) 2002-12-01
DE69622037D1 (de) 2002-08-01

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