EP0482230B1 - Hochleistungsstrahler - Google Patents

Hochleistungsstrahler Download PDF

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Publication number
EP0482230B1
EP0482230B1 EP90120261A EP90120261A EP0482230B1 EP 0482230 B1 EP0482230 B1 EP 0482230B1 EP 90120261 A EP90120261 A EP 90120261A EP 90120261 A EP90120261 A EP 90120261A EP 0482230 B1 EP0482230 B1 EP 0482230B1
Authority
EP
European Patent Office
Prior art keywords
tube
high power
tubes
power emitter
emitter according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP90120261A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0482230A1 (de
Inventor
Christoph Von Arx
Stefan Stutz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH filed Critical Heraeus Noblelight GmbH
Priority to DE59009300T priority Critical patent/DE59009300D1/de
Priority to EP90120261A priority patent/EP0482230B1/de
Priority to US07/770,408 priority patent/US5283498A/en
Priority to JP3273631A priority patent/JPH04264349A/ja
Publication of EP0482230A1 publication Critical patent/EP0482230A1/de
Application granted granted Critical
Publication of EP0482230B1 publication Critical patent/EP0482230B1/de
Priority to JP1996004374U priority patent/JP2580266Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel

Definitions

  • the invention relates to a high-power radiator, in particular for ultraviolet light, with a discharge space filled with filling gas emitting radiation under discharge conditions, with electrodes which are connected in pairs to one or more high-voltage sources, dielectric material lying between two electrodes at different potential adjoins the discharge space.
  • the invention relates to a state of the art, such as that derived from EP-A-0 363 832 or EP-A-0 385 205.
  • UV sources The industrial use of photochemical processes depends heavily on the availability of suitable UV sources.
  • the classic UV lamps deliver low to medium UV intensities at some discrete wavelengths, such as the mercury low-pressure lamps at 185 nm and especially at 254 nm.
  • Really high UV powers can only be obtained from high-pressure lamps (Xe, Hg), which then but distribute their radiation over a larger wavelength range.
  • the new excimer lasers have provided some new wavelengths for basic photochemical experiments. These are currently for cost reasons for an industrial process probably only suitable in exceptional cases.
  • the object of the invention is to create a high-performance radiator, in particular for UV or VUV light, which, owing to its modular structure, can be produced economically and also enables the construction of very large area radiators.
  • the discharge space is bounded on the outside by a tube which is transparent to the radiation generated and in which tube spaced apart from one another and from the transparent tube are arranged with dielectric electrodes with internal electrodes.
  • the manufacture of the high-power radiator according to the invention is simplified and less expensive than in the known radiators.
  • the limiting glass / quartz material there are no very high demands, since the limiting walls only have to be transparent to the useful radiation and are not stressed by the discharge. This leads to a longer lamp life.
  • the gap width and its tolerances are also far less critical.
  • very large area radiators can now be realized, which can be made very thin. Because practically the entire length of the discharge space contributes to emission, the UV yield is very high. There are no transmission losses from an electrode grid or a partially permeable layer.
  • the dielectrics can be optimized for the UV radiation to be generated because they do not have to be transparent to the UV light, which means that particularly high efficiencies can be expected for special applications.
  • Such applications with growing economic importance include e.g. use as a strong UV lamp for pre-ionization purposes of other discharges, e.g. Lasers, treatment of surfaces with UV exposure, chemical processes such as the preparation of new chemicals or surfaces and coating processes such as UV-assisted CVD or plasma CVD (Chemical Vapor Deposition), Photo-CVD, in which a substrate to be treated with a suitable filling gas is as dense as possible is brought to a UV light source.
  • dielectric tubes 6 with internal electrodes 7 are arranged in a quartz tube 1 with the broad sides 2, 3 and the narrow sides 4, 5.
  • the dielectric tubes 6 are from each other and also from the Walls of the quartz tube 1 spaced.
  • the dielectric tubes 6 are, for example, quartz tubes, the inner end 8 of which is melted, ie closed (see FIG. 2).
  • the inner electrode 7 is a metal rod which is inserted into the quartz tube. Instead, a metal rod or metal wire covered with dielectric material can also be used.
  • the two narrow sides 4, 5 and one of the broad sides 3 of the quartz tube 1 are each provided with an aluminum layer 9 on the outside. The three coatings can - but need not - be electrically insulated from one another.
  • the aluminum layer 9 is preferably vapor-deposited, flame-sprayed, plasma-sprayed or sputtered and serves as a reflector.
  • the quartz tube 1 is closed on both ends by plates 10, 11 made of insulating material. These plates are glued to the end faces, for example, or, in the case of quartz or glass plates, are fused to said end walls.
  • the plates 10, 11 are provided with openings 12, in which the dielectric tubes 6 are alternately inserted from both sides of the quartz tube 1 and fastened and sealed therein.
  • the dielectric tubes are melted or glued at the ends opposite the installation points.
  • the dielectric tubes 6 are held at the free end 8 in tubular support elements 13 into which these ends 8 are immersed.
  • additional supports 14 can also be provided in the center of the tube (see FIG. 6).
  • the interior of the quartz tube 1 can be evacuated via a filler neck 15 and then filled with a filler gas.
  • the radiator is electrically supplied from an alternating current source 16 in such a way that adjacent inner electrodes 7 are connected to the alternating current source 16 in alternation. As later (based on 9) is explained in more detail, several AC sources can also be used.
  • the discharges 17 then form in the space between two adjacent dielectric tubes 6.
  • the AC power source 16 basically corresponds to those used for feeding ozone generators. Typically, it delivers an adjustable AC voltage in the order of magnitude of several 100 volts to 20,000 volts at frequencies in the range of technical alternating current up to a few MHz - depending on the electrode geometry, pressure in the discharge space and composition of the filling gas.
  • the inside of the quartz tube 1 is filled with a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • a filling gas which emits radiation under discharge conditions, e.g. Mercury, noble gas, noble gas-metal vapor mixture, noble gas-halogen mixture, optionally using an additional further noble gas, preferably Ar, He, Ne, as a buffer gas.
  • the electron energy distribution can be optimally adjusted by the wall thickness of the dielectric tubes 6 and their dielectric properties, distance between the dielectric tubes 6, pressure and / or temperature of the filling gas.
  • the metallic reflector layers 9 can be on the narrow sides of the quartz tube 1 can also be used as external electrodes.
  • the electrical contact can be made using stranded strips 18 or resilient contact strips.
  • discharges 17a also form between the outermost dielectric tubes 6 and the narrow sides 4, 5 of the quartz tube 1.
  • FIG. 4 shows the feeding of a radiator according to FIG. 3 with a power supply device with a balanced output.
  • the full output voltage of the alternating current source 16 lies between adjacent inner electrodes 7, while half the output voltage lies between the inner electrodes 7 of the outer dielectric tubes 6 and the outer electrodes 9. Accordingly, the distance between the dielectric tubes 6 is also larger than the distance between the two outer dielectric tubes 6 from the narrow sides 4, 5 of the quartz tube 1.
  • the quartz tube 1 can be converted into a correspondingly dimensioned metal profile 19 with a U-shaped cross section, for example made of aluminum or copper, with, e.g. Coolant bores 20 extending in the longitudinal direction of the profile are inserted.
  • a resilient metallic contact strip 21 is inserted between the legs of the U-profile and the narrow sides 4, 5 of the quartz tube 1 and extends over the entire length of the tube.
  • the layer 9 also for fixing the quartz tube 1 in the space between the legs of the metal profile 19.
  • an intermediate layer of thermally conductive paste 30 can be provided between the profile base and the quartz tube 1 in order to improve the heat transfer.
  • the electrical feed takes place analogously to FIG. 4, ie the metal profile 19 is at earth potential. Of course, the electrical feed can also take place as illustrated in FIG. 2 or 3.
  • quartz tubes 1 instead of an odd number of quartz tubes 1, even numbered variants can also be provided for configurations according to FIGS. 2, 3 and 4.
  • two or more layers can be provided, as is illustrated in FIG.
  • the dielectric tubes 6 of one layer are offset from the dielectric tubes of the adjacent layer by half a tube spacing.
  • the dielectric tubes 6 of each layer are connected in parallel and connected to the two poles of the AC power source 16.
  • the discharge channels run obliquely through the discharge space from one position to the next.
  • the invention offers the possibility of embedding several individual radiators, for example according to FIG. 1 or FIG. 3, in a common cooling element, as is illustrated in FIG. 9.
  • an aluminum or copper profile 19a is provided with, in the example case 3, channels with a U-shaped cross section running in the longitudinal direction of the profile. 5, quartz tubes 1 are inserted into these channels, the structure of which was described in detail in connection with FIGS. 1, 3 or 5.
  • the electrical feed can take place analogously to the previous exemplary embodiments. Deviating from this, it is illustrated in FIG. 9 that the individual radiators are connected to separate AC sources 16a, 16b, 16c a are connected. This measure will be necessary if a single source is not sufficient to supply a plurality of radiators.
  • the previous embodiments of the invention all relate to quartz tubes with a rectangular cross section. It is within the scope of the invention to arrange the dielectric tubes 6 in the intermediate space 22 between two quartz tubes 23, 24 arranged coaxially one inside the other.
  • the internal electrodes 7 are alternately connected to the two connections of the alternating current source 16 analogously to FIG. 2 or 3, analogously to FIG. 1 the internal electrodes 7 of the first group of internal electrodes 7 are connected to one another on one end face, the internal electrodes 7 of the other group to the other end face of the tubes 23, 24 are brought together. Analogously to FIG. 2, the interior 22 is closed on both end faces of the quartz tubes 23, 24 with an annular cover 25, which is also a holder for the dielectric tubes 6.
  • an aluminum layer 9 serving as a reflector must be provided on the inner surface of the inner quartz tube 23 or on the outer surface of the outer quartz tube 24.
  • an omnidirectional radiator for example by passing coolant through the interior 26 of the inner quartz tube 23, or by filling this interior 26 with a heat sink (not shown).
  • coolant can either be flushed around the outer jacket of the outer quartz tube 24, or an independent heat sink can be placed over the outer quartz tube 24.
  • the one to be irradiated Material 31 is guided over a drum 32.
  • the cooling element 19b made of a good heat-conducting metal, for example copper or aluminum, consists of a tube section adapted to the drum 32 with cooling bores 20 running in the longitudinal direction of the tube.
  • the inner wall of the tube section has open channels 33 with a rectangular cross section, into which quartz profiles according to FIG Fig.3 are inserted and fastened therein.
  • the electrical feed takes place analogously to the previous exemplary embodiments.
  • electrodes with almost any cross section can also be used in all embodiments.
  • the inner electrodes 7 are hollow electrodes.

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Lasers (AREA)
EP90120261A 1990-10-22 1990-10-22 Hochleistungsstrahler Expired - Lifetime EP0482230B1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE59009300T DE59009300D1 (de) 1990-10-22 1990-10-22 Hochleistungsstrahler.
EP90120261A EP0482230B1 (de) 1990-10-22 1990-10-22 Hochleistungsstrahler
US07/770,408 US5283498A (en) 1990-10-22 1991-10-03 High-power radiator
JP3273631A JPH04264349A (ja) 1990-10-22 1991-10-22 高出力ビーム発生装置
JP1996004374U JP2580266Y2 (ja) 1990-10-22 1996-05-21 高出力ビーム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90120261A EP0482230B1 (de) 1990-10-22 1990-10-22 Hochleistungsstrahler

Publications (2)

Publication Number Publication Date
EP0482230A1 EP0482230A1 (de) 1992-04-29
EP0482230B1 true EP0482230B1 (de) 1995-06-21

Family

ID=8204642

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90120261A Expired - Lifetime EP0482230B1 (de) 1990-10-22 1990-10-22 Hochleistungsstrahler

Country Status (4)

Country Link
US (1) US5283498A (ja)
EP (1) EP0482230B1 (ja)
JP (2) JPH04264349A (ja)
DE (1) DE59009300D1 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4235743A1 (de) * 1992-10-23 1994-04-28 Heraeus Noblelight Gmbh Hochleistungsstrahler
JP3025414B2 (ja) * 1994-09-20 2000-03-27 ウシオ電機株式会社 誘電体バリア放電ランプ装置
CA2224699A1 (en) * 1997-12-12 1999-06-12 Resonance Ltd. Hollow electrode electrodeless lamp
JP3346291B2 (ja) * 1998-07-31 2002-11-18 ウシオ電機株式会社 誘電体バリア放電ランプ、および照射装置
JP3591393B2 (ja) * 1999-11-02 2004-11-17 ウシオ電機株式会社 誘電体バリア放電ランプ装置
DE10005156A1 (de) * 2000-02-07 2001-08-09 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Flache Gasentladungslampe mit Abstandselementen
US20020030437A1 (en) * 2000-09-13 2002-03-14 Nobuhiro Shimizu Light-emitting device and backlight for flat display
GB0025956D0 (en) * 2000-10-24 2000-12-13 Powell David J Improved method of measuring vacuum pressure in sealed vials
US7381976B2 (en) * 2001-03-13 2008-06-03 Triton Thalassic Technologies, Inc. Monochromatic fluid treatment systems
US6566817B2 (en) * 2001-09-24 2003-05-20 Osram Sylvania Inc. High intensity discharge lamp with only one electrode
JP4238643B2 (ja) * 2003-06-09 2009-03-18 株式会社Ｉｈｉ 薄膜形成装置の電極支持構造
US7446477B2 (en) * 2004-07-06 2008-11-04 General Electric Company Dielectric barrier discharge lamp with electrodes in hexagonal arrangement
US20060006804A1 (en) * 2004-07-06 2006-01-12 Lajos Reich Dielectric barrier discharge lamp
KR100775911B1 (ko) * 2005-03-24 2007-11-15 한국기계연구원 고온 플라즈마 발생장치
EP1866953A1 (en) * 2005-03-30 2007-12-19 Koninklijke Philips Electronics N.V. Discharge lamp and backlight unit for backlighting a display device comprising such a discharge lamp
KR20080002851A (ko) * 2005-04-22 2008-01-04 호야 칸데오 옵트로닉스 가부시키가이샤 엑시머 램프
KR20070010844A (ko) * 2005-07-20 2007-01-24 삼성전자주식회사 면광원 장치 및 이를 구비한 표시 장치
JP2011154906A (ja) * 2010-01-27 2011-08-11 Panasonic Electric Works Co Ltd 発光装置
JP6088247B2 (ja) * 2011-06-03 2017-03-01 株式会社和廣武 Ｃｖｄ装置、及び、ｃｖｄ膜の製造方法
DE102012017779A1 (de) * 2012-09-07 2014-03-13 Karlsruher Institut für Technologie Dielektrisch behinderte Entladungs-Lampe
CN217822656U (zh) * 2022-04-28 2022-11-15 朗升光电科技(广东)有限公司 一种紫外灯管

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599849A (ja) * 1982-07-09 1984-01-19 Okaya Denki Sangyo Kk 高周波放電ランプ
CH670171A5 (ja) * 1986-07-22 1989-05-12 Bbc Brown Boveri & Cie
CH675504A5 (ja) * 1988-01-15 1990-09-28 Asea Brown Boveri
CH676168A5 (ja) * 1988-10-10 1990-12-14 Asea Brown Boveri
CH677292A5 (ja) * 1989-02-27 1991-04-30 Asea Brown Boveri
CH677557A5 (ja) * 1989-03-29 1991-05-31 Asea Brown Boveri

Also Published As

Publication number Publication date
DE59009300D1 (de) 1995-07-27
EP0482230A1 (de) 1992-04-29
JP2580266Y2 (ja) 1998-09-03
US5283498A (en) 1994-02-01
JPH04264349A (ja) 1992-09-21
JPH081671U (ja) 1996-12-17

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