EP0453808A1 - Appareil pour l'analyse des mélanges de gaz par spectrométrie de masse - Google Patents

Appareil pour l'analyse des mélanges de gaz par spectrométrie de masse Download PDF

Info

Publication number
EP0453808A1
EP0453808A1 EP91104957A EP91104957A EP0453808A1 EP 0453808 A1 EP0453808 A1 EP 0453808A1 EP 91104957 A EP91104957 A EP 91104957A EP 91104957 A EP91104957 A EP 91104957A EP 0453808 A1 EP0453808 A1 EP 0453808A1
Authority
EP
European Patent Office
Prior art keywords
ion source
ion
ions
reaction space
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91104957A
Other languages
German (de)
English (en)
Inventor
Werner Dr. Lindinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ionentechnik GmbH
Original Assignee
Ionentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ionentechnik GmbH filed Critical Ionentechnik GmbH
Publication of EP0453808A1 publication Critical patent/EP0453808A1/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers
    • H01J49/284—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer
    • H01J49/286—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter
    • H01J49/288—Static spectrometers using electrostatic and magnetic sectors with simple focusing, e.g. with parallel fields such as Aston spectrometer with energy analysis, e.g. Castaing filter using crossed electric and magnetic fields perpendicular to the beam, e.g. Wien filter

Definitions

  • the invention relates to a device for analyzing gas mixtures, with an ion source for generating different types of ions, the free path length of which is greater than the device dimensions of the ion source, with a reaction space in which the ions react with components of the mixture to be examined, and with a Mass spectrometer for the investigation of the resulting reaction products.
  • ions e.g. Kr+, He+
  • the interaction between ions and molecules can consist of simple charge exchange. However, there can also be a chemical change in the molecule hit, e.g. through dissociation.
  • the mass and charge of the reaction products can be analyzed in a mass spectrometer. This is done primarily for the purpose of determining the cross sections of the different ion-molecule reactions at different energies.
  • a known device for performing this method uses Kr+ and alternating as primary ions Xe+ ions. He+ can also be used for various investigations - but not for the investigation of the by-products of burns. Especially for the investigation of air pollutants, it has proven to be expedient to first investigate one and the same gas, for example with Kr+ ions, then with Xe+ ions. When changing from one type of ion to another, it is necessary to completely remove the first type of ion from the system before the next type of ion is introduced. Since the free path length of the gas in the area of the ion source should be greater than the device dimensions, i.e.
  • the known procedure has two disadvantages: first, a certain residual proportion of the type of ion originally used difficult to eliminate completely, and the transition between the ion types also takes considerable time if you accept a certain amount of contamination and thus falsify the result.
  • the invention no longer attempts, as has hitherto done, to shorten the time for the removal of the primary ions initially used, for example by increasing the pump power. Rather, the basic idea of the invention is to keep all the ion types optionally used available in the ion source, but to select them between the ion source and the reaction space.
  • the invention is based on the fact that, in the case of an ion source in which there is a very low pressure, the exiting ions have the same kinetic energy and thus different speeds depending on their mass. This makes it possible to select them even if, as in the device according to US Pat. No. 3,668,383, a buffer gas for selection according to different drift speeds is not available or cannot be used.
  • the dimensions and field strengths of the device are of course to be coordinated with one another in such a way that the types of ions for which the relationship is not fulfilled are deflected to such an extent that they no longer get into the input aperture of the reaction space.
  • the invention achieves the object in that, in a manner known per se, a filter device between the ion source and the reaction space is provided, which either one of the ion types generated simultaneously in the ion source can pass through to the reaction space and blocks the passage for the other ion types, and that the filter device is a Wien filter, the electric or magnetic field strength of which can be set to different values.
  • the essential known components of the device shown are an ion source 1, a reaction chamber 2 and a mass spectrometer arrangement 3.
  • the low-energy primary ions can be generated with an ion source 1, which is based on the principle of electron impact.
  • ion sources are sold, for example, by Balzers under order number BG 528 370 T.
  • An octopole system connected to the ion source 1 generates a high-frequency field, which prevents the ion beam from diverging.
  • the ions then enter the reaction chamber 2, into which the gas to be examined is introduced.
  • a quadrupole mass spectrometer 3 is used to examine the beam coming from the reaction chamber, which only allows ions of a certain mass to pass through to a known evaluation electronics.
  • the density of the gas to be examined in the reaction area is typically in the order of 10 ⁇ 2 Torr, whereas in the area of the ion source and the mass spectrometer the free path length of the gas should be greater than the device dimensions, i.e. a vacuum of 10 ⁇ 5 Torr, for example, is maintained .
  • New and inventive is the proposal to continuously generate in the ion source 1 all types of ions which are required for investigations by means of the device shown, but only allow one type of ion to get into the reaction chamber 2 through a filter device 4.
  • the simplest embodiment of such a filter 4 is the well-known Wien filter, which consists of a capacitor 5, which generates an electric field E, and a magnet, the field B of which is normal to the plane of the drawing is indicated by dots.
  • Typical for a Wien filter that can be used are a length of 3 - 4 cm, a magnetic field of 100 - 300 Gauss and a voltage of 10 - 100 volts. This voltage should be switchable between preselected values which, for the ion types in question, for example He+, Xe+, Kr+, optionally lead to undeflected passage through the aperture 6.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
EP91104957A 1990-04-05 1991-03-28 Appareil pour l'analyse des mélanges de gaz par spectrométrie de masse Withdrawn EP0453808A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT80990 1990-04-05
AT809/90 1990-04-05

Publications (1)

Publication Number Publication Date
EP0453808A1 true EP0453808A1 (fr) 1991-10-30

Family

ID=3500216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91104957A Withdrawn EP0453808A1 (fr) 1990-04-05 1991-03-28 Appareil pour l'analyse des mélanges de gaz par spectrométrie de masse

Country Status (2)

Country Link
EP (1) EP0453808A1 (fr)
JP (1) JPH04242063A (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2391383A (en) * 2002-05-01 2004-02-04 * Micromass Limited Mass spectrometer
US6992281B2 (en) 2002-05-01 2006-01-31 Micromass Uk Limited Mass spectrometer
US8263933B2 (en) 2008-09-04 2012-09-11 Carl Zeiss Nts Gmbh Device and method for analyzing an organic sample

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3639757A (en) * 1969-08-04 1972-02-01 Franklin Gno Corp Apparatus and methods employing ion-molecule reactions in batch analysis of volatile materials
US3668383A (en) * 1969-01-09 1972-06-06 Franklin Gno Corp Apparatus and methods for separating, detecting, and measuring trace gases
US4866267A (en) * 1987-04-15 1989-09-12 Jeol Ltd. Double-focusing mass spectrometer having Wien filter and MS/MS instrument using such spectrometer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120891A (en) * 1976-04-05 1977-10-11 Hitachi Ltd Ion microanalyzer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3668383A (en) * 1969-01-09 1972-06-06 Franklin Gno Corp Apparatus and methods for separating, detecting, and measuring trace gases
US3639757A (en) * 1969-08-04 1972-02-01 Franklin Gno Corp Apparatus and methods employing ion-molecule reactions in batch analysis of volatile materials
US4866267A (en) * 1987-04-15 1989-09-12 Jeol Ltd. Double-focusing mass spectrometer having Wien filter and MS/MS instrument using such spectrometer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2391383A (en) * 2002-05-01 2004-02-04 * Micromass Limited Mass spectrometer
GB2391383B (en) * 2002-05-01 2004-07-14 * Micromass Limited Mass spectrometer
US6992281B2 (en) 2002-05-01 2006-01-31 Micromass Uk Limited Mass spectrometer
US8263933B2 (en) 2008-09-04 2012-09-11 Carl Zeiss Nts Gmbh Device and method for analyzing an organic sample
DE102008041813B4 (de) * 2008-09-04 2013-06-20 Carl Zeiss Microscopy Gmbh Verfahren zur Tiefenanalyse einer organischen Probe

Also Published As

Publication number Publication date
JPH04242063A (ja) 1992-08-28

Similar Documents

Publication Publication Date Title
DE3750928T2 (de) Laufzeit-Massenspektrometrie.
DE4134905A1 (de) Tandem-massenspektrometer basierend auf flugzeitanalyse
DE69629920T2 (de) Massenspektrometer
DE112007000146B4 (de) Konzentrierender Ionenleiter eines Massenspektrometers, Spektrometer und Verfahren
DE813228T1 (de) Plasma-Massenspektrometer
DE69825789T2 (de) Vorrichtung und verfahren zur stoss-induzierten dissoziation von ionen in einem quadrupol-ionenleiter
DE4341699A1 (de) Verfahren und Vorrichtung zur Flugzeitspektrometrie
DE102011004725A1 (de) Verfahren und Vorrichtung zur Erhöhung des Durchsatzes bei Flugzeitmassenspektrometern
DE3920566A1 (de) Ms-ms-flugzeit-massenspektrometer
DE112016003713B4 (de) Ein axiales Feld aufweisende Kollisionszelle
DE1937482A1 (de) Mikrostrahlsonde
DE102012008249B4 (de) Verbesserte Auflösung für Ionenmobilitätsspektrometer
DE112016005070B4 (de) Massenspektrometer
EP0290712B1 (fr) Spectromètre de masse
EP0290711B2 (fr) Méthode pour la mesure de la concentration dans un mélange gazeux
DE102007013693A1 (de) Ionennachweissystem mit Unterdrückung neutralen Rauschens
DE69121463T2 (de) Ionenbündelvorrichtung
EP0221339B1 (fr) Spectromètre de masse à résonance de cyclotron ionique
DE19629545B4 (de) Massenselektives Kerbfilter mit Quadrupol-Exzisionsfeldern
AT403214B (de) Verfahren zur analyse von gasgemischen
EP0453808A1 (fr) Appareil pour l'analyse des mélanges de gaz par spectrométrie de masse
DE102016103292B4 (de) Massenspektrometer
DE4322101C2 (de) Ionenquelle für Flugzeit-Massenspektrometer
EP0271543B1 (fr) Procede pour mesurer l'energie d'un faisceau d'ions
DE2542362C3 (de) Ionenstreuspektroskopisches Verfahren und Vorrichtung zur Durchführung desselben

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT CH DE FR GB IT LI

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19920501