JPS52120891A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS52120891A
JPS52120891A JP3715576A JP3715576A JPS52120891A JP S52120891 A JPS52120891 A JP S52120891A JP 3715576 A JP3715576 A JP 3715576A JP 3715576 A JP3715576 A JP 3715576A JP S52120891 A JPS52120891 A JP S52120891A
Authority
JP
Japan
Prior art keywords
ion
fan
electric field
shaped electric
wien filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3715576A
Other languages
Japanese (ja)
Inventor
Toshimichi Taya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3715576A priority Critical patent/JPS52120891A/en
Publication of JPS52120891A publication Critical patent/JPS52120891A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To provide an ion microanalyzer, which is made compact and simplified by providing irradiated ion mass separation system having ion source, uni-potential lens, obliquely incident Wien filter and fan-shaped electric field, and spatter ion mass analyzer having fan-shaped electric field and obliquely emergent Wien filter.
JP3715576A 1976-04-05 1976-04-05 Ion microanalyzer Pending JPS52120891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3715576A JPS52120891A (en) 1976-04-05 1976-04-05 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3715576A JPS52120891A (en) 1976-04-05 1976-04-05 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS52120891A true JPS52120891A (en) 1977-10-11

Family

ID=12489702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3715576A Pending JPS52120891A (en) 1976-04-05 1976-04-05 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS52120891A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04242063A (en) * 1990-04-05 1992-08-28 Ionentechnik Gmbh Analyzer for mixed gas

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04242063A (en) * 1990-04-05 1992-08-28 Ionentechnik Gmbh Analyzer for mixed gas

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