EP0374429B1 - Procédé de reproduction d'un corps plat structuré - Google Patents

Procédé de reproduction d'un corps plat structuré Download PDF

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Publication number
EP0374429B1
EP0374429B1 EP89119817A EP89119817A EP0374429B1 EP 0374429 B1 EP0374429 B1 EP 0374429B1 EP 89119817 A EP89119817 A EP 89119817A EP 89119817 A EP89119817 A EP 89119817A EP 0374429 B1 EP0374429 B1 EP 0374429B1
Authority
EP
European Patent Office
Prior art keywords
layer
electrically conductive
electrically insulating
structured body
structured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89119817A
Other languages
German (de)
English (en)
Other versions
EP0374429A1 (fr
Inventor
Asim Dr. Maner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forschungszentrum Karlsruhe GmbH
Original Assignee
Kernforschungszentrum Karlsruhe GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kernforschungszentrum Karlsruhe GmbH filed Critical Kernforschungszentrum Karlsruhe GmbH
Priority to AT89119817T priority Critical patent/ATE78524T1/de
Publication of EP0374429A1 publication Critical patent/EP0374429A1/fr
Application granted granted Critical
Publication of EP0374429B1 publication Critical patent/EP0374429B1/fr
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms

Definitions

  • the invention relates to a method for reproducing a structured, plate-shaped body, in particular a microstructured body, according to the preamble of the main claim.
  • DE-PS 35 37 483 discloses a method for producing a multiplicity of plate-shaped microstructure bodies made of metal, in which negative molds of the microstructures are produced by repeated molding of a tool having the microstructures with an electrically insulating impression material and are galvanically filled with a metal, after which the negative forms are removed.
  • the electrically insulating impression compound is connected to a further layer of electrically conductive impression compound, the thickness of the electrically insulating impression compound corresponding to the height of the microstructures in such a way that the electrically conductive impression compound contacts the end faces of the microstructures of the tool during the molding process.
  • the tool is pressed into the layer of electrically insulating impression material until the end face of the microstructures of the tool touch the layer of electrically conductive impression material.
  • FIG. 13 shows that the microstructures are pressed into the composite layer at 110 ° C. and the tool is only removed after the microstructures or the tool have cooled.
  • the described method is particularly uneconomical for mass production, since the temperature cycle for pressing in the microstructures means additional process engineering and time expenditure.
  • the layer height of the impression material must be exactly matched to the height of the microstructures of the tool.
  • the pressing-in can only take place in the liquid or viscous state of the electrically insulating layer with a relatively large force development, since otherwise the risk of damage to the microstructures of the tool increases. Demoulding after the polymer solidifies requires a similarly high level of force. Therefore, release agents are usually added to the polymer. Since the polymer is in the solidified state during removal from the mold, an extremely precise movement of the tool is necessary in order to enable removal from the mold without damaging the tool and the negative mold and to reduce the removal forces.
  • the object of the invention is to avoid the disadvantages mentioned.
  • the pressing process of the tool into the impression material and the retraction of the tool should be simplified in such a way that the expenditure of force is significantly reduced and that heating and cooling steps can be dispensed with.
  • the condition that the layer thickness of the electrically insulating impression material corresponds to the height of the structures to be molded should be eliminated.
  • the object is achieved by the measures described in the characterizing part of the main claim.
  • the composite layer is expediently produced in such a way that an electrically conductive layer is applied to a metal plate and is covered by a layer of an electrically insulating thermoplastic.
  • the electrically conductive layer can consist of an electrically conductive particles such as. B. graphite-offset thermoplastics or consist of an electrically conductive thermoplastic or of a low-melting metal or a low-melting metal alloy.
  • the materials polymethyl methacrylate, polycarbonate, polystyrene, PVC, ABS, polyacetal or polyamide can be used as the thermoplastic.
  • thermoplastics can be used in the solidified state. A heating and cooling step is not necessary. The force required to press in and demold the structured body is significantly reduced. This reduces the risk of damage to the structured body and the body can be used for a higher number of reproductive processes. The precision effort for inserting the structured body right up to the interface between the electrically insulating and electrically conductive layer is eliminated; rather, the body is inserted into the composite layer until the end faces of the structure protrude into the electrically conductive layer.
  • release agents can be dispensed with in many cases.
  • the method according to the invention can thus be carried out considerably faster, less complex and thus more cost-effectively.
  • honeycomb network 4 made of nickel, the z. B. was produced by the LIGA process (X-ray depths li thographie micro ga lvanoformung), reproduced many times.
  • the honeycomb network has a honeycomb-like structure, the height of the honeycomb being 400 ⁇ m, the wall thickness 10 ⁇ m and the honeycomb width 100 ⁇ m.
  • the honeycomb network forms a structured body with the outer dimensions 10 cm x 10 cm.
  • the honeycomb network is connected to a stable metal plate 3 made of nickel. This can be done by overgrowing the structure during electroplating of the honeycomb network and covering it with a stable nickel layer.
  • the stable metal plate is machined flat on the free side facing away from the honeycomb network.
  • the plane-machined side of the stable metal plate is glued or soldered onto the sonotrode 1 of an ultrasonic welding machine that is usually used for welding thermoplastics.
  • the solder or adhesive connection 2 of the metal plate and sonotrode is indicated in FIG. 1.
  • a composite body is produced.
  • This electrically conductive layer is covered with an electrically insulating layer 5 made of non-cross-linked PMMA. The last two layers 5 and 6 form the composite layer.
  • PMMA thermoplastic polymethyl methacrylate
  • the composite body is placed with its aluminum layer 7 on the anvil 8 of the ultrasonic welding machine.
  • the anvil is provided with vacuum suction openings 9.
  • the honeycomb network 4 is introduced with ultrasound support through the sonotrode 1 into the composite layers 5 and 6 and then also pulled out of the composite layer again with ultrasound support.
  • FIG. 2 shows the impression 10 of the honeycomb network in the composite layer.
  • the honeycomb network has penetrated the electrically insulating layer 5 and has penetrated into the electrically conductive layer 6.
  • the imprint 10 of the honeycomb network is then galvanically filled with nickel, the composite body with the imprint 10 being connected as the cathode.
  • the composite layer is then removed. This can be done, for example, with dichloromethane as the solvent, the graphite particles embedded in the electrically conductive layer 6 being rinsed away.
  • the composite layer can also be removed by melting.
  • the aluminum layer 7 comes off.
  • the method can be modified.
  • the composite body is also connected as a cathode.
  • copper is first electroplated and only then is nickel.
  • the reproduced honeycomb network thus obtained is treated with a means for the selective dissolution of copper, such as. B. a CuCl2 solution treated, the copper is selectively removed with embedded graphite particles.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Switches (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Claims (4)

1. Procédé de reproduction d'un corps plat structuré, notamment d'un corps à microstructure, dans lequel :
- on réalise un corps composite, en recouvrant une couche en masse de moulage électriquement isolante par une couche de masse de moulage électriquement conductrice,
- on fait pénétrer le corps structuré dans la couche de moulage électriquement isolante, jusqu'à ce que les faces frontales de la structure du corps structuré entrent en contact avec la couche de la masse de moulage électriquement conductrice,
- on remplit galvaniquement de métal le moule négatif ainsi réalisé dans le corps composite, puis,
- on enlève le corps composite,
procédé caractérisé en ce que :
- on fait pénétrer le corps structuré avec l'assistance des ultra-sons dans la couche de masse de moulage électriquement isolante, jusqu'à ce que les faces frontales de sa structure pénétrent dans la masse de moulage électriquement conductrice, puis,
- on retire le corps structuré du corps composite avec l'assistance des ultra-sons.
2. Procédé selon la revendication 1, caractérisé en ce qu'on réalise le corps composite en déposant sur une plaque métallique une couche électriquement conductrice qu'on recouvre d'une couche d'un thermoplastique électriquement isolant.
3. Procédé selon la revendication 2, caractérisé en ce qu'on utilise comme couche électriquement conductrice un thermoplastique contenant des particules électriquement conductrices ou un thermoplastique intrinsèquement électriquement conducteur ou un métal à bas point de fusion ou un alliage métallique à bas point de fusion.
4. Procédé selon la revendication 2, caractérisé en ce qu'on utilise comme thermoplastique électriquement isolant du polyméthylméthacrylate, du polycarbonate, du polystyrène, du PVC, de l'ABS, du polyacétal ou du polyamide
EP89119817A 1988-12-17 1989-10-25 Procédé de reproduction d'un corps plat structuré Expired - Lifetime EP0374429B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89119817T ATE78524T1 (de) 1988-12-17 1989-10-25 Verfahren zur reproduktion eines strukturierten, plattenfoermigen koerpers.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3842611A DE3842611C1 (fr) 1988-12-17 1988-12-17
DE3842611 1988-12-17

Publications (2)

Publication Number Publication Date
EP0374429A1 EP0374429A1 (fr) 1990-06-27
EP0374429B1 true EP0374429B1 (fr) 1992-07-22

Family

ID=6369460

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89119817A Expired - Lifetime EP0374429B1 (fr) 1988-12-17 1989-10-25 Procédé de reproduction d'un corps plat structuré

Country Status (5)

Country Link
US (1) US4981558A (fr)
EP (1) EP0374429B1 (fr)
JP (1) JPH02197592A (fr)
AT (1) ATE78524T1 (fr)
DE (1) DE3842611C1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19709137B4 (de) * 1997-03-06 2005-12-15 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Verfahren zur Herstellung und Magazinierung mindestens eines metallischen Mikrobauteils
FR2793432B1 (fr) * 1999-05-10 2001-07-06 Gemplus Card Int Procede de realisation d'un contact entre deux couches conductrices separees par une couche isolante
US6422528B1 (en) * 2001-01-17 2002-07-23 Sandia National Laboratories Sacrificial plastic mold with electroplatable base
US7090189B2 (en) * 2001-01-17 2006-08-15 Sandia National Laboratories Compliant cantilevered micromold
DE10106135B4 (de) * 2001-02-10 2005-03-10 Micromotion Gmbh Verfahren zur Herstellung von galvanisch abformbaren Negativformen mikrostukturierter Körper,insbesondere Zahnräder
JP5143045B2 (ja) * 2008-07-09 2013-02-13 富士フイルム株式会社 微細構造体およびその製造方法
DE102012206097A1 (de) 2012-04-13 2013-10-17 Robert Bosch Gmbh Verfahren zur Herstellung von Metallstrukturen durch Abformung und Galvanik

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3002910A1 (de) * 1980-01-28 1981-07-30 Basf Ag, 6700 Ludwigshafen Verfahren zur herstellung eines formkoerpers aus pulver- bis granulatfoermigem thermoplastischem kunststoff
DE3206820C2 (de) * 1982-02-26 1984-02-09 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen von Trenndüsenelementen
DE3537483C1 (de) * 1985-10-22 1986-12-04 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen einer Vielzahl plattenfoermiger Mikrostrukturkoerper aus Metall

Also Published As

Publication number Publication date
EP0374429A1 (fr) 1990-06-27
ATE78524T1 (de) 1992-08-15
DE3842611C1 (fr) 1990-02-22
US4981558A (en) 1991-01-01
JPH02197592A (ja) 1990-08-06

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