EP0313889B1 - Vacuum furnace for the heat treatment of metallic work-pieces - Google Patents
Vacuum furnace for the heat treatment of metallic work-pieces Download PDFInfo
- Publication number
- EP0313889B1 EP0313889B1 EP88116478A EP88116478A EP0313889B1 EP 0313889 B1 EP0313889 B1 EP 0313889B1 EP 88116478 A EP88116478 A EP 88116478A EP 88116478 A EP88116478 A EP 88116478A EP 0313889 B1 EP0313889 B1 EP 0313889B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- batch
- vacuum furnace
- cooling gas
- gas
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/767—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material with forced gas circulation; Reheating thereof
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
- C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/04—Circulating atmospheres by mechanical means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B2005/062—Cooling elements
- F27B2005/064—Cooling elements disposed in the furnace, around the chamber, e.g. coils
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
- F27B2005/143—Heating rods disposed in the chamber
- F27B2005/146—Heating rods disposed in the chamber the heating rods being in the tubes which conduct the heating gases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
- F27B2005/161—Gas inflow or outflow
- F27B2005/164—Air supply through a set of tubes with openings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
- F27B2005/166—Means to circulate the atmosphere
- F27B2005/167—Means to circulate the atmosphere the atmosphere being recirculated through the treatment chamber by a turbine
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Thermal Sciences (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Furnace Details (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
- Thermally Insulated Containers For Foods (AREA)
- Meat, Egg Or Seafood Products (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Plural Heterocyclic Compounds (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
Description
Die Erfindung betrifft einen Vakuumofen zur Wärmebehandlung metallischer Werkstücke mit einem zylindrischen Druckgehäuse, in dem ein von axial ausgerichteten Heizleitern umgebener, mit einer thermischen Isolierung versehener Chargenraum und eine Gaskühleinrichtung angeordnet sind, mit der ein Kühlgas über Düsen durch den Chargenraum und über einen Wärmetauscher geleitet werden kann. Solche Vakuumöfen werden insbesondere für das Härten von Werkzeugen und Bauteilen aller Art aus vielerlei Stahlsorten benutzt. Zum Teil sind sie auch für andere Wärmebehandlungen einsetzbar, z.B. Glühen und Löten.The invention relates to a vacuum furnace for the heat treatment of metallic workpieces with a cylindrical pressure housing, in which a batch space surrounded by axially aligned heat conductors and provided with thermal insulation and a gas cooling device are arranged, with which a cooling gas is passed through nozzles through the batch space and via a heat exchanger can. Such vacuum furnaces are used in particular for the hardening of tools and components of all kinds made of various types of steel. Some of them can also be used for other heat treatments, e.g. Annealing and soldering.
In den DE-PSen 28 39 807 und 28 44 843 werden gattungsgemäße Vakuumöfen beschrieben. Sie bestehen im wesentlichen aus einem zylindrischen Druckgehäuse, in dem sich eine von thermischen Isolationswänden begrenzte, mit Heizelementen beheizte Chargenkammer und eine Gaskühleinrichtung befinden. Die Werkzeuge und Bauteile werden in der Chargenkammer unter Vakuum auf die Austenitisierungstemperatur aufgeheizt und zum Abschrecken wird ein gekühltes Inertgas unter Druck im Ofen umgewälzt. Das Kühlgas strömt dabei mit hoher Geschwindigkeit auf die heiße Charge, entzieht dieser Wärmeenergie und wird über einen Wärmetauscher geleitet, wo es abgekühlt und wieder der Chargenkammer zugeführt wird. Die Einleitung des Kühlgases in die Chargenkammer erfolgt gemäß DE-PS 28 39 807 über Düsen, die auf gesonderten, axial ausgerichteten Gaseinleitrohren angebracht sind. Nachteil dieser Konstuktion ist der hohe Material- und Fertigungsaufwand für die Gaseinleitrohre im Ofen. Rohre und Düsen müssen aus hochtemperaturbeständigem Material bestehen. Die in der DE-PS 28 44 843 verwendeten Ventilatoren besitzen den Nachteil, daß das Kühlgas im beträchtlichen Umfang nur an der heißen Chargeoberfläche entlangströmt und nicht ins Chargeninnere eindringt.DE-PSs 28 39 807 and 28 44 843 describe generic vacuum ovens. They essentially consist of a cylindrical pressure housing in which there is a batch chamber, which is delimited by thermal insulation walls and heated by heating elements, and a gas cooling device. The tools and components are heated in the batch chamber under vacuum to the austenitizing temperature and a cooled inert gas is circulated under pressure in the furnace for quenching. The cooling gas flows at high speed onto the hot batch, removes this thermal energy and is passed through a heat exchanger, where it is cooled and returned to the batch chamber. The cooling gas is introduced into the batch chamber according to DE-PS 28 39 807 via nozzles which are attached to separate, axially aligned gas inlet pipes. The disadvantage of this design is the high cost of materials and manufacturing for the gas inlet pipes in the furnace. Pipes and nozzles must be made of high temperature resistant material. The fans used in DE-PS 28 44 843 have the disadvantage that the cooling gas flows to a considerable extent only along the hot batch surface and does not penetrate into the interior of the batch.
Aus der DE-OS 19 19 493 ist es bekannt, im Temperaturbereich zwischen Raumtemperatur und etwa 750°C das Aufheizen der Charge zu beschleunigen, indem man im Ofen ein Inertgas mittels eines Ventilators umwälzt und so neben der Strahlung eine Konvektion erzeugt. Aber auch hierbei ist der Wärmeübergang zwischen Heizleiter und Charge nicht optimal.From DE-OS 19 19 493 it is known to accelerate the heating of the batch in the temperature range between room temperature and about 750 ° C. by circulating an inert gas in the furnace by means of a fan and thus producing a convection in addition to the radiation. But even here the heat transfer between the heating conductor and the batch is not optimal.
Es war daher Aufgabe der vorliegenden Erfindung, einen Vakuumofen zur Wärmebehandlung metallischer Werkstücke mit einem zylindrischen Druckgehäuse zu konstruieren, in dem ein von axial ausgerichteten Heizleitern umgebener, mit einer thermischen Isolierung versehender Chargenraum und eine Gaskühleinrichtung angeordnet sind, mit der ein Kühlgas über Düsen durch den Chargenraum und über einen Wärmetauscher geleitet werden kann. Dieser Vakuumofen sollte eine möglichst schnelle und gleichmäßige Abkühlung der aufgeheizten Chargen gewährleisten, eine möglichst einfache Konstruktion besitzen und möglichst rasch aufheizbar sein.It was therefore an object of the present invention to construct a vacuum furnace for the heat treatment of metallic workpieces with a cylindrical pressure housing in which a batch space surrounded by axially aligned heating conductors, provided with thermal insulation, and a gas cooling device are arranged, with which a cooling gas is passed through nozzles through the Batch room and can be passed through a heat exchanger. This vacuum oven should ensure the fastest possible, even cooling of the heated batches, be as simple as possible and be able to be heated as quickly as possible.
Diese Aufgabe wird erfindungsgemäß dadurch gelöst, daß die Heizleiter als Rohre ausgebildet, zum Chargenraum hin mit Bohrungen versehen und über elektrische Isolierstücke mit einer Kühlgasverteilungsvorrichtung verbunden sind.This object is achieved in that the heat conductors are designed as tubes, are provided with bores towards the batch space and are connected to a cooling gas distribution device via electrical insulating pieces.
Vorzugsweise ist die Kühlgasverteilungsvorrichtung mit einem Ventilator versehen, der das Kühlgas durch die Heizrohre drückt und aus dem Chargenraum wieder ansaugt.The cooling gas distribution device is preferably provided with a fan which pushes the cooling gas through the heating pipes and sucks it in again from the batch space.
Weiterhin ist es von Vorteil, wenn die Wand der thermischen Isolierung im Bereich der Kühlgasverteilungsvorrichtung mit einer verschließbaren Öffnung versehen ist. Damit kann während der Aufheizperiode der Chargen eine Heizgasströmung unter Umgehung des Wärmetauschers im Ofeninnenraum aufrechterhalten werden.It is also advantageous if the wall of the thermal insulation in the area of the cooling gas distribution device is provided with a closable opening. This means that a heating gas flow can be maintained in the furnace interior bypassing the heat exchanger during the heating period of the batches.
Bei teuren Kühlgasen ist es ebenfalls vorteilhaft, den Ofen mit einer Rückgewinnungsanlage für das Kühlgas zu versehen.In the case of expensive cooling gases, it is also advantageous to provide the furnace with a recovery system for the cooling gas.
Die Abbildungen 1 und 2 zeigen schematisch Längsschnitte durch ein Ausführungsbeispiel eines erfindungsgemäßen Vakuumofens, wobei Abbildung 1 den Ofen in der Aufheizphase bis etwa 750°C und Abbildung 2 in der Abkühlphase widergibt.Figures 1 and 2 schematically show longitudinal sections through an embodiment of a vacuum oven according to the invention, Figure 1 showing the oven in the heating phase up to about 750 ° C and Figure 2 in the cooling phase.
Der Ofen besteht aus einem zylindrischen Druckgehäuse (1), dessen eine Stirnfläche als Tür (2) ausgebildet ist, über die der Ofen be- und entladen werden kann. Der Chargenraum (3) wird nach außen von einer thermischen Isolierung (4) in Form eines zylindrischen Rohres begrenzt, das aus einem thermischen Isoliermaterial besteht und an den Stirnflächen mit entsprechenden Wänden versehen ist, von denen wenigstens eine Wand (5) bewegbar ist. Diese thermische Isolierung (4) schirmt die Strahlung im Chargenraum (3) nach außen ab, so daß nur geringe Energieverluste entstehen. Innerhalb der thermischen Isolierung (4) sind im Chargenraum (3) ringsum die elektrischen Heizleiter (6) axial angeordnet, die als Heizrohre ausgebildet und zum Chargenraum (3) hin mit Bohrungen (7) versehen sind. Diese Heizrohre (6) haben beispielsweise eine Wandstärke von 1 bis 3 mm und eine lichten Weite von 40 bis 150 mm. Der Durchmesser der Bohrungen (7) wird so bemessen, daß die Summe der Flächen der Bohrungen eines Heizrohres der Fläche der lichten Weite entspricht. Die Heizrohre (6) sind über elektrische Isolierstücke (8) an der Kühlgasverteilungsvorrichtung (9) befestigt, die mit dem Antriebsmotor (10) und dem Ventilator (11) an der der Tür (2) gegenüberliegenden Seite im Druckgehäuse untergebracht ist. Die der Kühlgasverteilungsvorrichtung (9) benachbarte Wand der thermischen Isolierung (4) ist mit einer Öffnung (12) versehen, die mit einem Schieber (13) verschlossen und geöffnet werden kann. Zwischen dem Druckgehäuse (1) und der thermischen Isolierung (4) sind die wassergekühlten Wärmeaustauscherrohre (14) untergebracht.The furnace consists of a cylindrical pressure housing (1), one end face of which is designed as a door (2) through which the furnace can be loaded and unloaded. The batch space (3) is delimited on the outside by thermal insulation (4) in the form of a cylindrical tube, which consists of a thermal insulation material and is provided on the end faces with corresponding walls, at least one wall (5) of which is movable. This thermal insulation (4) shields the radiation in the batch space (3) from the outside, so that only slight energy losses occur. Within the thermal insulation (4), the electrical heating conductors (6) are arranged axially in the batch space (3), which are designed as heating pipes and are provided with holes (7) towards the batch space (3). These heating tubes (6) have, for example, a wall thickness of 1 to 3 mm and a clear width of 40 to 150 mm. The diameter of the bores (7) is dimensioned such that the sum of the areas of the bores of a heating tube corresponds to the area of the clear width. The heating pipes (6) are attached to the cooling gas distribution device (9) via electrical insulating pieces (8), which are connected to the drive motor (10) and the fan (11) on the side opposite the door (2) is accommodated in the pressure housing. The wall of the thermal insulation (4) adjacent to the cooling gas distribution device (9) is provided with an opening (12) which can be closed and opened with a slide (13). The water-cooled heat exchanger tubes (14) are accommodated between the pressure housing (1) and the thermal insulation (4).
Nach dem Beladen des Chargenraums (3) mit beispielsweise Werkzeugen wird dieser mit einem Inertgas geflutet und aufgeheizt. Der Schieber (13) gibt die Öffnung (12) in der thermischen Isolierung frei (Abbildung 1), so daß das Inertgas durch den Ventilator (11) in die Heizrohre (6) gedrückt werden kann, von wo es über die Bohrungen (7), die über die Länge der Heizrohre verteilt sind, in den Chargenraum (3) eindringt und durch die Öffnung (12) in der thermischen Isolierung wieder zum Ventilator (11) zurückgeführt wird. Da das Inertgas über die Heizrohre (6) zugeleitet wird, nimmt es sehr rasch deren Temperatur an, was ein schnelles und homogenes Aufheizen der Charge durch das heiße Gas im Dunkelstrahlungsbereich zur Folge hat. Durch das direkte Anströmen der Charge mit dem heißen Gas wird die Charge gleichmäßig auch im Innern aufgeheizt. Dieser Aufheizungsvorgang unter Schutzgas wird bis etwa 750°C genutzt. Bei Härtebehandlungen, bei denen bis etwa 1300°C erhitzt werden muß, wird dann das Inertgas aus dem Ofen entfernt und die weitere Erwärmung nur durch Wärmestrahlung vorgenommen, die in diesem Temperaturbereich sehr wirksam ist.After loading the batch space (3) with tools, for example, it is flooded with an inert gas and heated. The slide (13) opens the opening (12) in the thermal insulation (Figure 1) so that the inert gas can be pressed by the fan (11) into the heating pipes (6), from where it passes through the holes (7) , which are distributed over the length of the heating pipes, penetrates into the batch space (3) and is returned to the fan (11) through the opening (12) in the thermal insulation. Since the inert gas is fed in via the heating pipes (6), it quickly takes on their temperature, which results in the batch being heated quickly and homogeneously by the hot gas in the dark radiation region. Due to the hot gas flowing directly onto the batch, the batch is evenly heated internally. This heating process under protective gas is used up to about 750 ° C. In the case of hardening treatments in which heating has to be carried out up to approximately 1300 ° C., the inert gas is then removed from the furnace and the further heating is carried out only by heat radiation, which is very effective in this temperature range.
Zum Abschrecken der erhitzten Charge wird bei geschlossener Öffnung (12) der Ofen mit kaltem Inertgas mit Überdruck geflutet. Dabei wird die Wand (5) der thermischen Isolierung (4) von dem zylindrischen Rohr abgehoben, so daß ein Spalt entsteht und der Chargenraum (3) mit dem Raum zwischen Druckgehäuse (1) und thermischer Isolierung (4) in Verbindung steht (Abbildung 2). Das Kühlgas wird vom Ventilator (11) über die erkalteten Heizrohre (6) mit großer Geschwindigkeit in den Chargenraum (3) gedrückt, von wo aus es über die Wärmetauscherrohre (14) in die Kühlgasverteilungsvorrichtung (9) zurückfließt und erneut umgewälzt wird. Bei Verwendung entsprechender Inertgase, verbunden mit hohen Gasdrücken und Gasgeschwindigkeiten, erreicht man mit den erfindungsgemäßen Vakuumöfen Abschreckintensitäten, die mit den in Ölabschreckbädern erreichbaren vergleichbar sind. Dadurch können auch andere Stahltypen als bisher mit einer Gaskühlung abgeschreckt und gehärtet werden.To quench the heated batch, the furnace is flooded with cold inert gas with excess pressure when the opening (12) is closed. The wall (5) of the thermal insulation (4) is lifted off the cylindrical tube, so that a gap is created and the batch space (3) with the space between Pressure housing (1) and thermal insulation (4) is connected (Figure 2). The cooling gas is pressed by the fan (11) over the cooled heating pipes (6) at high speed into the batch space (3), from where it flows back through the heat exchanger pipes (14) into the cooling gas distribution device (9) and is circulated again. If appropriate inert gases are used, combined with high gas pressures and gas velocities, quenching intensities are achieved with the vacuum furnaces according to the invention which are comparable to those achievable in oil quenching baths. As a result, other types of steel than previously can be quenched and hardened with gas cooling.
Die Heizrohre (6), die gleichzeitig als Gaszuleitungsrohre dienen, bestehen bevorzugt aus carbonfaserverstärktem Kohlenstoff. Der elektrisch leitende Querschnitt der Heizrohre, der für die Wärmeerzeugung maßgebend ist, und die für den Gasvolumenstrom maßgeblische innere Weite der Heizrohre müssen dabei aufeinander abgestimmt sein. Die Kombination von Heizelement und Gaszuleitungsrohr bringt eine wesentliche fertigungstechnische Vereinfachung bei der Herstellung dieser Öfen mit sich.The heating tubes (6), which also serve as gas supply tubes, preferably consist of carbon fiber-reinforced carbon. The electrically conductive cross-section of the heating pipes, which is decisive for the generation of heat, and the internal width of the heating pipes, which is decisive for the gas volume flow, must be coordinated. The combination of the heating element and the gas supply pipe results in a significant simplification of the manufacturing process in the manufacture of these furnaces.
Wird zum Abschrecken ein teures Inertgas verwendet, so ist es vorteilhaft, dieses wieder zurückzugewinnen. Zu diesem Zweck wird das Kühlgas nach Beendigung des Abschreckvorganges mit einem Kompressor aus dem Ofeninnenraum abgepumpt und in einen Hochdruckspeicher gefördert, von wo aus es für weitere Anwendungen zur Verfügung steht.If an expensive inert gas is used for quenching, it is advantageous to recover it. For this purpose, the cooling gas is pumped out of the furnace interior with a compressor after the quenching process and conveyed into a high-pressure accumulator, from where it is available for further applications.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT88116478T ATE65800T1 (en) | 1987-10-28 | 1988-10-05 | VACUUM FURNACE FOR HEAT TREATMENT OF METALLIC WORKPIECES. |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3736502A DE3736502C1 (en) | 1987-10-28 | 1987-10-28 | Vacuum furnace for the heat treatment of metallic workpieces |
| DE3736502 | 1987-10-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0313889A1 EP0313889A1 (en) | 1989-05-03 |
| EP0313889B1 true EP0313889B1 (en) | 1991-07-31 |
Family
ID=6339264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP88116478A Expired - Lifetime EP0313889B1 (en) | 1987-10-28 | 1988-10-05 | Vacuum furnace for the heat treatment of metallic work-pieces |
Country Status (24)
| Country | Link |
|---|---|
| US (1) | US4869470A (en) |
| EP (1) | EP0313889B1 (en) |
| JP (1) | JPH01142018A (en) |
| CN (1) | CN1015474B (en) |
| AT (1) | ATE65800T1 (en) |
| AU (1) | AU601084B2 (en) |
| BG (1) | BG49829A3 (en) |
| BR (1) | BR8805558A (en) |
| CA (1) | CA1313043C (en) |
| CS (1) | CS276378B6 (en) |
| DD (1) | DD283455A5 (en) |
| DE (2) | DE3736502C1 (en) |
| DK (1) | DK164747C (en) |
| ES (1) | ES2023994B3 (en) |
| FI (1) | FI85386C (en) |
| HU (1) | HU199903B (en) |
| IL (1) | IL87761A (en) |
| IN (1) | IN170643B (en) |
| NO (1) | NO169783C (en) |
| PL (1) | PL156379B1 (en) |
| PT (1) | PT88895B (en) |
| SU (1) | SU1813194A3 (en) |
| YU (1) | YU46575B (en) |
| ZA (1) | ZA886832B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383112A (en) * | 2010-08-27 | 2012-03-21 | 东京毅力科创株式会社 | Thermal processing apparatus |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3735186C1 (en) * | 1987-10-17 | 1988-09-15 | Ulrich Wingens | Vacuum chamber furnace |
| DE3736501C1 (en) * | 1987-10-28 | 1988-06-09 | Degussa | Process for the heat treatment of metallic workpieces |
| DE3818471A1 (en) * | 1988-05-31 | 1989-12-21 | Ipsen Ind Int Gmbh | OVEN FOR HEAT TREATMENT OF IRON AND STEEL PARTS |
| DE3910234C1 (en) * | 1989-03-30 | 1990-04-12 | Degussa Ag, 6000 Frankfurt, De | |
| DE3933423C2 (en) * | 1989-10-06 | 1994-12-22 | Nokia Deutschland Gmbh | Device for heat treatment, in particular for LCD substrate plates |
| JP2656839B2 (en) * | 1989-12-15 | 1997-09-24 | 神鋼コベルコツール株式会社 | Vacuum heat treatment furnace |
| DE4034085C1 (en) * | 1990-10-26 | 1991-11-14 | Degussa Ag, 6000 Frankfurt, De | |
| JPH0569595U (en) * | 1992-02-27 | 1993-09-21 | 中外炉工業株式会社 | Vacuum heat treatment furnace with furnace cooling promotion function |
| PL170386B1 (en) * | 1993-01-14 | 1996-12-31 | Seco Warwick Sp Z Oo | Vacuum-type heat treatment furnace |
| DE19501873C2 (en) * | 1995-01-23 | 1997-07-03 | Ald Vacuum Techn Gmbh | Method and device for cooling workpieces, in particular for hardening |
| SE504320C2 (en) * | 1995-06-22 | 1997-01-13 | Aga Ab | Process and plant for treating components with a gas mixture |
| TW366409B (en) * | 1997-07-01 | 1999-08-11 | Exxon Production Research Co | Process for liquefying a natural gas stream containing at least one freezable component |
| KR100307996B1 (en) * | 1999-06-25 | 2001-09-24 | 이용익 | The vacuum furnace for quenching of the metallic tools |
| DE10117987A1 (en) * | 2001-04-10 | 2002-10-31 | Ald Vacuum Techn Ag | Charging frame used for heat treatment and cooling of metal parts, e.g. roller bearing parts, to be hardened is partially screened over the height of one side |
| KR100495267B1 (en) * | 2002-10-29 | 2005-06-16 | 주식회사제4기한국 | Automatic vacuum mold heat treatment apparatus |
| JP4280981B2 (en) * | 2003-06-27 | 2009-06-17 | 株式会社Ｉｈｉ | Cooling gas air path switching device for vacuum heat treatment furnace |
| PL202005B1 (en) * | 2004-11-19 | 2009-05-29 | Politechnika & Lstrok Odzka In | Hardening heater with closed hydrogen circuit |
| CN101804489B (en) * | 2010-04-23 | 2011-10-05 | 山东高唐杰盛半导体科技有限公司 | Direct heating type vacuum welding furnace |
| KR101439380B1 (en) * | 2012-10-31 | 2014-09-11 | 주식회사 사파이어테크놀로지 | Heat Treatment Method and Apparatus for Sapphier Single Crystal |
| CN104180668A (en) * | 2013-05-23 | 2014-12-03 | 上海颐柏热处理设备有限公司 | Device for rapidly cooling heating chamber of box-type heat treatment furnace |
| CN105296899B (en) * | 2015-10-26 | 2017-08-04 | 陈芬芬 | A kind of guiding device in Al alloy parts heat-treatment furnace |
| CN106148883A (en) * | 2016-08-31 | 2016-11-23 | 潍坊丰东热处理有限公司 | A kind of well formula nitriding furnace internal cooling system |
| BR112018067865A2 (en) * | 2016-11-29 | 2019-12-03 | Zhang Yue | oxygen free hot air brazing system |
| CN108213639A (en) * | 2016-12-12 | 2018-06-29 | 张跃 | A kind of soldering oven heat-insulating circulating system |
| CN107164627B (en) * | 2017-04-18 | 2018-10-16 | 燕山大学 | A kind of aluminium-alloy pipe cycle annealing processing equipment stove |
| DE102017128076A1 (en) | 2017-11-28 | 2019-05-29 | Gautschi Engineering Gmbh | Batch furnace for annealed material and method for heat treatment of a furnace material |
| RU2705186C1 (en) * | 2019-01-14 | 2019-11-05 | Общество с ограниченной ответственностью "Катод" | Method of workpiece cooling in vacuum heating chamber of vacuum furnace and vacuum furnace |
| DE102019204869A1 (en) * | 2019-04-05 | 2020-10-08 | Audi Ag | Quenching device for batch cooling of metal components |
| KR102014809B1 (en) * | 2019-04-26 | 2019-08-27 | 이준연 | Heat treatment furnace using inert gas |
| CN111153406B (en) * | 2019-12-24 | 2021-06-04 | 山东天岳先进科技股份有限公司 | Synthetic furnace and synthetic method for preparing silicon carbide powder |
| CN113847805B (en) * | 2021-09-28 | 2023-07-21 | 山东交通学院 | Superhigh temperature sintering furnace |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1617056A (en) * | 1926-04-10 | 1927-02-08 | Charles F Kenworthy Inc | Furnace |
| DE1259919B (en) * | 1964-06-12 | 1968-02-01 | Harold Norregard Ipsen | Furnace for the heat treatment of metal workpieces |
| DE1919493C3 (en) * | 1969-04-17 | 1980-05-08 | Ipsen Industries International Gmbh, 4190 Kleve | Atmospheric vacuum furnace |
| US4113977A (en) * | 1977-08-19 | 1978-09-12 | Brown Boveri Corporation | Preheating system with gas recirculation |
| DE2839807C2 (en) * | 1978-09-13 | 1986-04-17 | Degussa Ag, 6000 Frankfurt | Vacuum furnace with gas cooling device |
| DE2844843C2 (en) * | 1978-10-14 | 1985-09-12 | Ipsen Industries International Gmbh, 4190 Kleve | Industrial furnace for the heat treatment of metallic workpieces |
| US4235592A (en) * | 1979-08-29 | 1980-11-25 | Autoclave Engineers, Inc. | Autoclave furnace with mechanical circulation |
| DE3416902A1 (en) * | 1984-05-08 | 1985-11-14 | Schmetz Industrieofenbau und Vakuum-Hartlöttechnik KG, 5750 Menden | METHOD AND VACUUM OVEN FOR HEAT TREATING A BATCH |
-
1987
- 1987-10-28 DE DE3736502A patent/DE3736502C1/en not_active Expired
-
1988
- 1988-09-12 IN IN764/CAL/88A patent/IN170643B/en unknown
- 1988-09-13 ZA ZA886832A patent/ZA886832B/en unknown
- 1988-09-15 IL IL87761A patent/IL87761A/en unknown
- 1988-09-30 FI FI884514A patent/FI85386C/en not_active IP Right Cessation
- 1988-10-04 NO NO884390A patent/NO169783C/en unknown
- 1988-10-05 DE DE8888116478T patent/DE3864008D1/en not_active Expired - Lifetime
- 1988-10-05 EP EP88116478A patent/EP0313889B1/en not_active Expired - Lifetime
- 1988-10-05 AT AT88116478T patent/ATE65800T1/en not_active IP Right Cessation
- 1988-10-05 ES ES88116478T patent/ES2023994B3/en not_active Expired - Lifetime
- 1988-10-13 JP JP63256097A patent/JPH01142018A/en active Pending
- 1988-10-17 YU YU193888A patent/YU46575B/en unknown
- 1988-10-17 BG BG85723A patent/BG49829A3/en unknown
- 1988-10-21 US US07/260,771 patent/US4869470A/en not_active Expired - Fee Related
- 1988-10-25 PL PL1988275470A patent/PL156379B1/en unknown
- 1988-10-26 SU SU884356698A patent/SU1813194A3/en active
- 1988-10-26 CN CN88108739A patent/CN1015474B/en not_active Expired
- 1988-10-26 DD DD88321107A patent/DD283455A5/en not_active IP Right Cessation
- 1988-10-27 HU HU885615A patent/HU199903B/en not_active IP Right Cessation
- 1988-10-27 AU AU24405/88A patent/AU601084B2/en not_active Ceased
- 1988-10-27 DK DK596488A patent/DK164747C/en not_active IP Right Cessation
- 1988-10-27 BR BR8805558A patent/BR8805558A/en not_active IP Right Cessation
- 1988-10-27 CS CS887112A patent/CS276378B6/en unknown
- 1988-10-27 CA CA000581507A patent/CA1313043C/en not_active Expired - Fee Related
- 1988-10-28 PT PT88895A patent/PT88895B/en not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102383112A (en) * | 2010-08-27 | 2012-03-21 | 东京毅力科创株式会社 | Thermal processing apparatus |
| CN102383112B (en) * | 2010-08-27 | 2015-02-04 | 东京毅力科创株式会社 | Thermal processing apparatus |
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0313889B1 (en) | Vacuum furnace for the heat treatment of metallic work-pieces | |
| DE102008012594B4 (en) | Vacuum carburizing method and vacuum carburizing device | |
| EP0313888B1 (en) | Method for the heat treatment of metallic work pieces | |
| EP0735149A1 (en) | Device for the vacuum heat treatment of metallic articles | |
| DE2722065A1 (en) | OVEN FOR ISOSTATIC HOT PRESSING | |
| EP2330372B1 (en) | Electrically heated retort furnace for thermal treatment of metallic workpieces | |
| EP0163906B1 (en) | Method and vacuum furnace for heat treatment a charge | |
| EP0535319B1 (en) | Vacuum furnace for plasma carburization of metallic workpieces | |
| DE2812888A1 (en) | HIGH TEMPERATURE AUTOCLAVE | |
| DE102005045783A1 (en) | Single-chamber vacuum furnace with hydrogen quenching | |
| DE4007123C2 (en) | ||
| EP1294512B1 (en) | Method and device for sintering aluminium based sintered parts | |
| DE19628383A1 (en) | Furnace for heat treatment of batches of metal workpieces - with a heating chamber which can be isolated from the pressure and suction chambers of the cooling gas fan | |
| EP0829554B2 (en) | Low pressure carburising device with a plurality of sequentially arranged chambers | |
| DE3209245A1 (en) | TURNING OVENS | |
| DE3205501A1 (en) | Vacuum furnace for dewaxing and sintering hard metals | |
| DE10030514C1 (en) | Sintering aluminum-based sintered parts comprises removing binder from sintered parts, bringing to sintering temperature in inert gas atmosphere and holding at this temperature, and cooling in controlled manner | |
| DE102008052571A1 (en) | Diffusion oven useful in semiconductor manufacture and for doping solar cells, comprises reactor enclosed by reaction pipe, outer casing, heating elements, means for locking the pipe, means for locking the casing and vacuum producing means | |
| EP1627696B1 (en) | Device and method for heating extrusion dies before mounting them into an extrusion apparatus | |
| EP0189759A1 (en) | Method and apparatus for heat treating work pieces | |
| DE2158734C3 (en) | Oven for coating particles at high temperature | |
| DE19924696C2 (en) | Oven with high cooling rate | |
| DE1226930B (en) | Resistance heated furnace for annealing metallic workpieces and process for operating the same | |
| DE10021583A1 (en) | Assembly to carburize and harden steel workpiece charges has structured pressures in the transport tunnel and heating chambers and carburizing and quenching chambers to reduce energy costs | |
| DE4122386A1 (en) | Vacuum rotary hearth furnace - with combined entry and exit lock, used for rapid cooling |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19881005 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH DE ES FR GB IT LI LU NL SE |
|
| 17Q | First examination report despatched |
Effective date: 19900928 |
|
| GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
| AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AT BE CH DE ES FR GB IT LI LU NL SE |
|
| REF | Corresponds to: |
Ref document number: 65800 Country of ref document: AT Date of ref document: 19910815 Kind code of ref document: T |
|
| ITF | It: translation for a ep patent filed |
Owner name: JACOBACCI & PERANI S.P.A. |
|
| ET | Fr: translation filed | ||
| REF | Corresponds to: |
Ref document number: 3864008 Country of ref document: DE Date of ref document: 19910905 |
|
| GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) | ||
| REG | Reference to a national code |
Ref country code: ES Ref legal event code: FG2A Ref document number: 2023994 Country of ref document: ES Kind code of ref document: B3 |
|
| PLBI | Opposition filed |
Free format text: ORIGINAL CODE: 0009260 |
|
| 26 | Opposition filed |
Opponent name: IPSEN INDUSTRIES INTERNATIONAL GMBH Effective date: 19920227 |
|
| NLR1 | Nl: opposition has been filed with the epo |
Opponent name: IPSEN INDUSTRIES INTERNATIONAL GMBH. |
|
| EPTA | Lu: last paid annual fee | ||
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: LU Payment date: 19940901 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: BE Payment date: 19940922 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 19940927 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: AT Payment date: 19941011 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 19941013 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: ES Payment date: 19941014 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 19941028 Year of fee payment: 7 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 19941031 Year of fee payment: 7 |
|
| EAL | Se: european patent in force in sweden |
Ref document number: 88116478.4 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: SE Payment date: 19950929 Year of fee payment: 8 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19951005 Ref country code: GB Effective date: 19951005 Ref country code: AT Effective date: 19951005 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: ES Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 19951006 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Effective date: 19951031 Ref country code: CH Effective date: 19951031 Ref country code: BE Effective date: 19951031 |
|
| PLBN | Opposition rejected |
Free format text: ORIGINAL CODE: 0009273 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: OPPOSITION REJECTED |
|
| 27O | Opposition rejected |
Effective date: 19951005 |
|
| NLR2 | Nl: decision of opposition | ||
| BERE | Be: lapsed |
Owner name: DEGUSSA A.G. Effective date: 19951031 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Effective date: 19960501 |
|
| GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 19951005 |
|
| REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Effective date: 19960628 |
|
| NLV4 | Nl: lapsed or anulled due to non-payment of the annual fee |
Effective date: 19960501 |
|
| REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SE Effective date: 19961006 |
|
| EUG | Se: european patent has lapsed |
Ref document number: 88116478.4 |
|
| REG | Reference to a national code |
Ref country code: ES Ref legal event code: FD2A Effective date: 19990503 |
|
| PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20050425 Year of fee payment: 17 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED. Effective date: 20051005 |
|
| PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20060503 |