EP0277521B1 - Source de radiation synchrotron avec fixation de ses bobines courbées - Google Patents
Source de radiation synchrotron avec fixation de ses bobines courbées Download PDFInfo
- Publication number
- EP0277521B1 EP0277521B1 EP88100522A EP88100522A EP0277521B1 EP 0277521 B1 EP0277521 B1 EP 0277521B1 EP 88100522 A EP88100522 A EP 88100522A EP 88100522 A EP88100522 A EP 88100522A EP 0277521 B1 EP0277521 B1 EP 0277521B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- synchrotron radiation
- radiation source
- source according
- synchrotron
- coil windings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
Definitions
- Such a synchrotron radiation source is known from DE-OS 35 30 446.
- synchrotron In a synchrotron, as is known, electrically charged particles such as electrons or protons can be accelerated to high energy by circulating them on a curved path and repeatedly passing them through a high-frequency acceleration cavity of an acceleration path.
- the electrons In the case of an electron synchrotron, the electrons are introduced into the acceleration path at almost the speed of light; it only changes their energy at a fixed frequency.
- Synchrotron radiation ie the relative radiation emission of the electrons, which circulate almost at the speed of light and are held on a circular path by deflection in a magnetic field of a magnetic device, provides X-rays with parallel radiation characteristics and great intensity.
- This synchrotron radiation can advantageously be used for an X-ray lithography, which is suitable in the manufacture of integrated circuits for producing structures that are smaller than 0.5 ⁇ m.
- an embodiment of an electron synchrotron of the so-called racetrack type which has a particle track with alternating straight and curved track sections.
- the radius of curvature is determined by the equilibrium between centrifugal force and Lorentz force in the magnetic field of dipole magnetic devices, which each contain curved superconducting coil windings on both sides of the particle path.
- the individual dipole coil windings are arranged together with a gradient coil in a cryostat, which also keeps the evacuated beam guiding chamber, in which the electrons circulate, at low temperature in the curved path section.
- the straight sections of the acceleration path are assigned an electron injector, with which the electrons are introduced into the acceleration path, and devices for electron acceleration.
- the beam guiding chamber is curved in each Each section of the particle track is provided with a slit-shaped exit opening for the synchrotron radiation.
- the Lorentz forces of the opposing superconducting coil windings which try to compress the slot-shaped outlet opening, must therefore be absorbed by the legs of a mechanical, C-shaped or U-shaped support structure. Since a change in the position of these superconducting coil windings under the action of the Lorentz forces with a corresponding field distortion must be practically ruled out, a correspondingly complex mechanical fixation of these windings is essential. However, this is extremely difficult in the slot area. For example, according to DE-PS 35 11 282, the forces compressing the slot are compensated for by particularly prestressed clamp and tensioning elements.
- the invention is therefore based on the object of improving the synchrotron radiation source of the type mentioned in such a way that a relatively simple fixation of the superconducting dipole coil windings of their magnetic devices is to be ensured in the exit region of the synchrotron radiation.
- the figure shows a cross section through the synchrotron radiation source according to the invention in the region of its particle path 2 curved by 180 ° with a corresponding magnet device 3.
- the radius of curvature is designated R.
- This magnetic device contains on both sides of the equatorial plane spanned by the particle path 2 and lying in the xy direction of a right-angled xyz coordinate system, a curved superconducting dipole coil winding 4 or 5 and possibly additional superconducting coil windings such as correction coil windings 4a and 5a.
- the superconducting windings are advantageously held in structurally identical upper and lower frame structures 7 and 8, which are joined together in the equatorial plane and thereby accommodate a beam guiding chamber 10 surrounding the particle path 2.
- the particle web 2 extends through an approximately rectangular aperture area 11, in which a dipole field B of sufficient quality is formed.
- the chamber 10 merges radially or tangentially outward into an equatorial outlet chamber 12 which is open on one side and has an outlet opening or opening 13 for the synchrotron radiation indicated by an arrow 14.
- the exit chamber with a vertical, i.e. Extension a pointing in the z direction can in particular be slit-shaped, the corresponding slit being able to make up the entire 180 ° arc of the curved particle path section. According to the illustrated embodiment, such an exit chamber is assumed.
- the individual superconducting dipole coil windings 4 and 5 are located in azimuth-rotating coil bodies 16, which are fitted into an upper or lower frame piece 17 or 18 of the respective frame structure 7 or 8 and in the z direction perpendicular to the equatorial xy plane with screws 19 being held.
- the winding structure can advantageously take place from the respective slot base of the coil body in the direction of the equatorial plane as well as in the opposite direction.
- a graduated bracket part 21 or 22 secures the exact distances between the respective winding edges to the equatorial plane on the one hand and on the other hand increases the rigidity of the entire construction with regard to the radially directed Lorentz forces by means of a positive connection with the coil formers 16 and the frame pieces 17 and 18.
- the clamp parts 21 and 22 can also compress the individual windings with the aid of screws 23 and 24 and thus conductor movements during the operation of the magnet device 3, which lead to a premature, undesirable transition of the superconducting material into the normal conducting state, ie to a so-called quenching of the windings can prevent.
- pressure strips 37 on the respective slot base also serve, which are to be pressed against the respective winding parts by means of screws 38.
- the frame pieces 17 and 18 of the frame structures 7 and 8 are fixed with the aid of dowel pins 25 and screws 26 on a respective upper or lower plate element 28 or 29 in grooves milled there. This ensures a very precise positioning of the individual superconducting coil windings 4, 5 and optionally 4a, 5a relative to the particle path 2.
- the non-positive assembly of the upper and lower frame structures 7 and 8 takes place in the area of direct mutual vertical force support with the aid of screws 31 and threaded rods 32.
- the upper and lower plate elements 28 and 29 of the frame structures 7 and 8 are clamped against ring-like, force-transmitting distributor pieces 34 and 35 with screws 36.
- the slot-like outlet chamber 12 extends with its outlet opening 13 to the outside between the mutually facing parts of these distributor pieces 34 and 35.
- the mutual distance and a force support between the distributor pieces 34 and 35 and thus also between the coil windings is ensured via at least one, in particular columnar, support element 40.
- this support element is to be located radially further outside in the insulating vacuum of a cryostat, not shown in the figure, than the mouth of the outlet opening 13. Since the distributor pieces 34 and 35 in the cryostat represent parts of a cold helium housing 42 for receiving liquid helium cooling the superconducting coil windings, the support element 40 running between them is also at this temperature.
- the force-transmitting distributor pieces 34 and 35 and the at least one Support element 40 designed mechanical fixing device is consequently to ensure a relatively simple and secure support and support of the superconducting coil windings lying on both sides of the equatorial plane.
- Vertical Lorentz forces of the windings can be introduced into the respective upper and lower plate elements 28 and 29 of the corresponding frame structures 7 and 8 via threaded rods 44. That is to say, in the configuration of the mechanical fixing device according to the invention, the vertical forces are absorbed in short ways via the at least one cold support element 40 located on the outside.
- a noticeable hindrance of the synchrotron radiation 14 emerging from the outlet opening 13 does not have to be accepted, since there is only a relatively small space requirement for sufficient support via the one support element 40 or a small number of such support elements.
- the power part of the synchrotron radiation to be dissipated in this way is therefore only a fraction of the total radiation.
- the portion of the synchrotron radiation 14 striking the at least one support element 40 is advantageously intercepted by a radiation absorber 46, which is expediently cooled.
- the preferred cryogenic refrigerant is liquid nitrogen, which is passed through a corresponding cooling channel 47 of the absorber.
- the absorber can surround the support element 40 in a ring shape.
- a radiation-absorbing shield wall 48 On its side facing the synchrotron radiation, it has a radiation-absorbing shield wall 48, which advantageously consists of a good heat-conducting material such as e.g. Copper is executed.
- the configuration of the mechanical fixing device according to the invention ensures a relatively small radial span w on the two plate elements 28 and 29 of the frame structures 7 and 8. This has the consequence that only correspondingly small plate thicknesses of these parts are required and thus the overall height of the magnet device 3 is limited.
- the mass of the magnetic device to be cooled is advantageously also to be kept correspondingly small.
- Another advantage of this construction is the possibility of attaching the suspension and positioning elements of the magnetic device (not shown in the figure) directly to the distribution pieces 34 and 35 within a vacuum housing (also not shown) and thus in close proximity to the superconducting coil windings. This brings a correspondingly high positioning accuracy of the windings to the particle path and allows the use of thin housing walls in the top and bottom area of the helium housing 42.
Claims (10)
- Source de rayonnement synchrotron avec au moins une section courbe de sa trajectoire des particules, dans laquelle sont prévus- un dispositif magnétique à enroulements des bobines supraconducteurs qui se situent de part et d'autre de la trajectoire des particules qui est entourée par une chambre de guidage des rayons et qui sont disposés dans au moins un cryostat à carter sous vide,- au moins une ouverture dirigée radialement ou tangentiellement vers l'extérieur et ménagée dans la chambre de guidage des rayons pour le rayonnement synchrotron,et- un dispositif pour fixer mécaniquement les enroulements des bobines supraconducteurs,caractérisée par le fait qu'au bord périphérique extérieur du dispositif magnétique (3), le dispositif de fixation comporte au moins un élément d'appui (40) qui est situé radialement plus à l'extérieur que l'ouverture de sortie (13) pour le rayonnement synchrotron, qui agit essentiellement suivant une direction perpendiculaire à la direction du rayonnement (14), et qui est recouvert, pour ce qui concerne le rayonnement synchrotron (14), par un absorbeur de rayonnement (46).
- Source de rayonnement synchrotron selon la revendication 1, caractérisée par le fait que ledit au moins un élément d'appui (40) est disposé à l'intérieur du carter sous vide du cryostat.
- Source de rayonnement synchrotron selon la revendication 1 ou 2, caractérisée par le fait que ledit au moins un élément d'appui (40) est couplé à un carter (42) servant à recevoir le milieu cryogène qui refroidit les enroulements des bobines supraconducteurs (4, 5, 4a, 5a).
- Source de rayonnement synchrotron selon l'une des revendications 1 à 3, caractérisée par le fait que ledit au moins un élément d'appui (40) est réalisé sous la forme d'une colonne.
- Source de rayonnement synchrotron selon l'une des revendications 1 à 4, caractérisée par le fait que le dispositif mécanique de fixation comporte au moins deux structures en forme de cadres (7, 8), de construction au moins très largement identiques, et assemblées selon un plan de rayonnement, c'est-à-dire selon un plan équatorial, déterminé par le rayonnement synchrotron (14).
- Source de rayonnement synchrotron selon la revendication 5, caractérisé par le fait que les structures en forme de cadres (7, 8) contiennent des pièces de cadres (17, 18) qui comportent des corps de bobines (16) qui reçoivent les enroulements des bobines supraconducteurs (4, 5) ainsi que des éléments de brides (21, 22) qui y fixent mécaniquement les enroulements des bobines.
- Source de rayonnement synchrotron, selon l'une des revendications 1 à 6, caractérisée par le fait que les structures en forme de cadres (7, 8) sont chacune reliées à un élément de plaque (28, 29), ces éléments de plaque (28, 29) prenant appui, du point de vue des forces et au niveau de leur bord périphérique extérieur, par l'intermédiaire dudit au moins un élément d'appui (40).
- Source de rayonnement synchrotron selon l'une des revendications 1 à 7, caractérisée par le fait que l'absorbeur de rayonnement (46) est constitué, au moins dans la zone d'incidence du rayonnement synchrotron (14), avec un matériau, thermiquement bon conducteur, d'une paroi-écran (48).
- Source de rayonnement synchrotron selon la revendication 8, caractérisée par le fait que l'absorbeur de rayonnement (46) est, de plus, refroidi.
- Source de rayonnement synchrotron selon la revendication 9, caractérisé par le fait que l'absorbeur de rayonnement (46) est réalisé sous la forme d'un canal de refroidissement (47), de forme tubulaire, pour un milieu cryogène tel que l'azote liquide.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3702388 | 1987-01-28 | ||
DE3702388 | 1987-01-28 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0277521A2 EP0277521A2 (fr) | 1988-08-10 |
EP0277521A3 EP0277521A3 (en) | 1989-04-26 |
EP0277521B1 true EP0277521B1 (fr) | 1991-11-06 |
Family
ID=6319640
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP88100522A Expired - Lifetime EP0277521B1 (fr) | 1987-01-28 | 1988-01-15 | Source de radiation synchrotron avec fixation de ses bobines courbées |
Country Status (4)
Country | Link |
---|---|
US (1) | US4843333A (fr) |
EP (1) | EP0277521B1 (fr) |
JP (1) | JPH0711998B2 (fr) |
DE (1) | DE3865977D1 (fr) |
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JP2022524103A (ja) | 2019-03-08 | 2022-04-27 | メビオン・メディカル・システムズ・インコーポレーテッド | カラム別の放射線の照射およびそのための治療計画の生成 |
CN115397087B (zh) * | 2022-10-27 | 2023-03-14 | 合肥中科离子医学技术装备有限公司 | 线圈调节装置及回旋加速器 |
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CA966893A (en) * | 1973-06-19 | 1975-04-29 | Her Majesty In Right Of Canada As Represented By Atomic Energy Of Canada Limited | Superconducting cyclotron |
DE3148100A1 (de) * | 1981-12-04 | 1983-06-09 | Uwe Hanno Dr. 8050 Freising Trinks | "synchrotron-roentgenstrahlungsquelle" |
US4641104A (en) * | 1984-04-26 | 1987-02-03 | Board Of Trustees Operating Michigan State University | Superconducting medical cyclotron |
GB2165988B (en) * | 1984-08-29 | 1988-08-24 | Oxford Instr Ltd | Improvements in devices for accelerating electrons |
DE3511282C1 (de) * | 1985-03-28 | 1986-08-21 | Brown, Boveri & Cie Ag, 6800 Mannheim | Supraleitendes Magnetsystem fuer Teilchenbeschleuniger einer Synchrotron-Strahlungsquelle |
DE3661672D1 (en) * | 1985-06-24 | 1989-02-09 | Siemens Ag | Magnetic-field device for an apparatus for accelerating and/or storing electrically charged particles |
DE3704442A1 (de) * | 1986-02-12 | 1987-08-13 | Mitsubishi Electric Corp | Ladungstraegerstrahlvorrichtung |
DE3703938A1 (de) * | 1986-02-12 | 1987-09-10 | Mitsubishi Electric Corp | Teilchenbeschleuniger |
US4808941A (en) * | 1986-10-29 | 1989-02-28 | Siemens Aktiengesellschaft | Synchrotron with radiation absorber |
-
1988
- 1988-01-15 DE DE8888100522T patent/DE3865977D1/de not_active Expired - Fee Related
- 1988-01-15 EP EP88100522A patent/EP0277521B1/fr not_active Expired - Lifetime
- 1988-01-19 US US07/145,229 patent/US4843333A/en not_active Expired - Fee Related
- 1988-01-25 JP JP63015720A patent/JPH0711998B2/ja not_active Expired - Lifetime
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US8344340B2 (en) | 2005-11-18 | 2013-01-01 | Mevion Medical Systems, Inc. | Inner gantry |
US9452301B2 (en) | 2005-11-18 | 2016-09-27 | Mevion Medical Systems, Inc. | Inner gantry |
US8907311B2 (en) | 2005-11-18 | 2014-12-09 | Mevion Medical Systems, Inc. | Charged particle radiation therapy |
US8916843B2 (en) | 2005-11-18 | 2014-12-23 | Mevion Medical Systems, Inc. | Inner gantry |
US7728311B2 (en) | 2005-11-18 | 2010-06-01 | Still River Systems Incorporated | Charged particle radiation therapy |
US8003964B2 (en) | 2007-10-11 | 2011-08-23 | Still River Systems Incorporated | Applying a particle beam to a patient |
US8941083B2 (en) | 2007-10-11 | 2015-01-27 | Mevion Medical Systems, Inc. | Applying a particle beam to a patient |
US8970137B2 (en) | 2007-11-30 | 2015-03-03 | Mevion Medical Systems, Inc. | Interrupted particle source |
US8581523B2 (en) | 2007-11-30 | 2013-11-12 | Mevion Medical Systems, Inc. | Interrupted particle source |
US8933650B2 (en) | 2007-11-30 | 2015-01-13 | Mevion Medical Systems, Inc. | Matching a resonant frequency of a resonant cavity to a frequency of an input voltage |
US9155186B2 (en) | 2012-09-28 | 2015-10-06 | Mevion Medical Systems, Inc. | Focusing a particle beam using magnetic field flutter |
US8927950B2 (en) | 2012-09-28 | 2015-01-06 | Mevion Medical Systems, Inc. | Focusing a particle beam |
US9185789B2 (en) | 2012-09-28 | 2015-11-10 | Mevion Medical Systems, Inc. | Magnetic shims to alter magnetic fields |
US9301384B2 (en) | 2012-09-28 | 2016-03-29 | Mevion Medical Systems, Inc. | Adjusting energy of a particle beam |
US9545528B2 (en) | 2012-09-28 | 2017-01-17 | Mevion Medical Systems, Inc. | Controlling particle therapy |
US8791656B1 (en) | 2013-05-31 | 2014-07-29 | Mevion Medical Systems, Inc. | Active return system |
Also Published As
Publication number | Publication date |
---|---|
JPH0711998B2 (ja) | 1995-02-08 |
DE3865977D1 (de) | 1991-12-12 |
JPS63200500A (ja) | 1988-08-18 |
EP0277521A2 (fr) | 1988-08-10 |
EP0277521A3 (en) | 1989-04-26 |
US4843333A (en) | 1989-06-27 |
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