EP0264427A1 - Procede et appareil d'identification d'une matiere particulaire - Google Patents

Procede et appareil d'identification d'une matiere particulaire

Info

Publication number
EP0264427A1
EP0264427A1 EP87902951A EP87902951A EP0264427A1 EP 0264427 A1 EP0264427 A1 EP 0264427A1 EP 87902951 A EP87902951 A EP 87902951A EP 87902951 A EP87902951 A EP 87902951A EP 0264427 A1 EP0264427 A1 EP 0264427A1
Authority
EP
European Patent Office
Prior art keywords
focal plane
particulate matter
plane array
focussing
array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP87902951A
Other languages
German (de)
English (en)
Inventor
Robert J. Champetier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of EP0264427A1 publication Critical patent/EP0264427A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0612—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0227—Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging using imaging, e.g. a projected image of suspension; using holography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G01N2021/4721—Multiangle measurement using a PSD

Definitions

  • the present invention relates to a method and apparatus for identifying surface particulate contamination and, in particular, to contemporaneous witnessing and identification of such surface particulate contamination.
  • Cleanliness or the lack of contamination in opti ⁇ cal systems is proportional to the quality of sensing and detection obtained.
  • structural components and piece parts Prior to assembly, structural components and piece parts are normally washed in special spraying facilities equipped for the collection of the solvent run-off. The solvent is then filtered for collection and optically counting of the residue of particles.
  • witness plate for example, a one-square foot sheet of Kapton to accompany the piece.
  • the wash technique is subsequently applied to this witness sample.
  • Witness plate techniques using smaller optical mirrors or black glass, one inch or greater lend them ⁇ selves to direct optical counting of the dust, such as is obtained by a Saab photometer, which provides an integrated scatter roughly proportional to the commu- nitive area covered by dust.
  • Experimental apparatus utilized a high resolution photo of a witness plate taken with a dedicated camera, with special grazing incidence lighting.
  • the present invention overcomes and avoids these and other problems by providing a witness plate used to collect samples of contaminants within a chosen environment.
  • An optical imager focuses the illuminated contaminants onto a detector focal plane, such as a charge-coupled detector array.
  • the information detected is then processed by a computer, which is programmed to provide such identification as sizes and count of the contaminants.
  • an apparatus 10 for viewing particu- late contaminants is positioned to view a witness plate 12 onto which the contaminants are to be deposited.
  • Witness plate 12 is placed in and adja ⁇ cent to optical equipment where contamination is desired to be monitored.
  • a light source 14 is positioned to direct light 16 at a grazing angle with respect to the witness plate, so that the particles only are well illuminated.
  • Apparatus 10 includes a high resolution lens system 18 which is secured to a housing 20 by an adjustable connection 22, such as a bellows. Positioned at the far end of housing 20 is a charge-coupled device (CCD) array 24 of conventional construction which defines a focal plane 25. Bellows 22 is adjusted in order to sharply focus the images of the particulate contamination onto the focal plane of array 24.
  • CCD charge-coupled device
  • Such adjustment may be obtained by utilizing a flip mirror 26 which is pivotable about point 28 so that the contaminants may be focussed on a viewing screen 30.
  • focusing is conventional, similar to that of a single lens reflex camera. Once the focussing is sharply defined on screen 30, mirror 26 is pivoted so that the image will then be focussed on the focal plane at charge coupled device array 24.
  • the images sensed on array 24 are electrically conducted to a computer 32 of conventional design, e.g. , Hewlett Packard 9836.
  • the computer quickly calculates the sizes and the count of the particulate contaminants, which calculation and identification are then displayed or otherwise placed in graphic form.
  • the focal plane preferably is a CCD array, which may be either a stationary array or a commercially available line array which sweeps through the image from plate 12.
  • CCD array which may be either a stationary array or a commercially available line array which sweeps through the image from plate 12.
  • Such commercially available units currently provide about 1,600 image elements on a line, swept through 2,000 positions automatically.

Abstract

Une plaque témoin (12) récupère la poussière ou autre matière particulaire dans un environnement contrôlé. La plaque est éclairée par une source lumineuse (14) de sorte que seule la poussière brille, et provoque la focalisation de spots brillants sur un plan focal (25) défini par un réseau CCD (24). Le plan focal est lu sur un ordinateur (32) qui est programmé pour déterminer les dimensions et le nombre des particules de poussière.
EP87902951A 1986-05-05 1987-03-27 Procede et appareil d'identification d'une matiere particulaire Withdrawn EP0264427A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US85956486A 1986-05-05 1986-05-05
US859564 1986-05-05

Publications (1)

Publication Number Publication Date
EP0264427A1 true EP0264427A1 (fr) 1988-04-27

Family

ID=25331216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87902951A Withdrawn EP0264427A1 (fr) 1986-05-05 1987-03-27 Procede et appareil d'identification d'une matiere particulaire

Country Status (4)

Country Link
EP (1) EP0264427A1 (fr)
JP (1) JPS63503243A (fr)
IL (1) IL82107A0 (fr)
WO (1) WO1987007024A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK163538C (da) * 1990-03-22 1992-08-03 Abk Bygge & Miljoeteknik Fremgangsmaade og maaleapparat til rengoeringskontrol
GB2249829A (en) * 1990-11-13 1992-05-20 Powergen Public Limited Compan Measurement of carbon in ash
FR2753531B1 (fr) * 1996-09-19 1998-10-16 Snecma Procede de reglage du niveau d'eclairement d'un echantillon dans un systeme de granulometrie par analyse d'images
GB9717658D0 (en) * 1997-08-21 1997-10-22 Tioxide Group Services Ltd Particle dispersion determination
FR2770296B1 (fr) * 1997-10-29 2000-01-07 Lorraine Laminage Procede d'analyse de particules atmospheriques et appareil d'analyse de particules atmospheriques pour la mise en oeuvre d'un tel procede
FR2795516B1 (fr) * 1999-06-28 2003-08-08 Univ Henri Poincare Nancy I Dispositif d'analyse et de comptage automatique d'objets et procede de traitement des donnees
DE10016832C2 (de) * 2000-04-03 2002-06-20 Winfried Labuda Substrat zur Sichtbarmachung von daran angelagerten Partikeln und/oder Materialschichten
WO2002044693A1 (fr) * 2000-11-28 2002-06-06 Imeco Automazioni S.R.L. Appareil d'analyse de produits moulus
JP2007304065A (ja) * 2006-05-15 2007-11-22 Omron Corp 異物検出装置、異物検出方法、異物検出プログラム、および該プログラムが記録された記録媒体
GB2449312B (en) * 2007-05-18 2012-03-14 Malvern Instr Ltd Method and apparatus for dispersing a sample of particulate material
FR2922019B1 (fr) * 2007-10-09 2009-11-27 Novacyt Procede d'ajustement automatise de la densite cellulaire pour la realisation d'une plaque d'analyse
US10739241B2 (en) 2014-12-17 2020-08-11 Schlumberger Technology Corporation Test apparatus for estimating liquid droplet fallout
CN109932292A (zh) * 2019-03-29 2019-06-25 苏州精濑光电有限公司 一种落尘检测方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1384115A (fr) * 1963-11-22 1965-01-04 Commissariat Energie Atomique Détecteur de particules liquides entraînées par un gaz en circulation
SE315760B (fr) * 1966-04-27 1969-10-06 Saab Ab
JPS4890590A (fr) * 1972-03-03 1973-11-26
JPS5610580B2 (fr) * 1974-03-14 1981-03-09
US4075462A (en) * 1975-01-08 1978-02-21 William Guy Rowe Particle analyzer apparatus employing light-sensitive electronic detector array
JPS5293380A (en) * 1976-02-02 1977-08-05 Teijin Ltd Image discriminator
JPS52156694A (en) * 1976-06-22 1977-12-27 Tetsuo Yoshida Apparatus for grain size measurements
JPS6023293B2 (ja) * 1979-04-12 1985-06-06 株式会社島津製作所 粒度分布自動測定方法
JPS56162037A (en) * 1980-05-19 1981-12-12 Nec Corp Detection for foreign matter on surface
JPS5876740A (ja) * 1981-10-15 1983-05-09 インタ−ナシヨナル・リモ−ト・イメ−ジング・システムズ 希薄液体試料の粒子分析法
JPS5912342A (ja) * 1982-07-13 1984-01-23 Hitachi Ltd 異物検出装置
JPS5915807A (ja) * 1982-07-20 1984-01-26 Furukawa Electric Co Ltd:The 物体の表面計測方法
JPS59184840A (ja) * 1983-04-06 1984-10-20 Mitsubishi Chem Ind Ltd 液体中のダスト測定法及びその装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO8707024A1 *

Also Published As

Publication number Publication date
IL82107A0 (en) 1987-10-30
WO1987007024A1 (fr) 1987-11-19
JPS63503243A (ja) 1988-11-24

Similar Documents

Publication Publication Date Title
US5805278A (en) Particle detection method and apparatus
CA1304612C (fr) Microscope a semiconducteurs
US5659390A (en) Method and apparatus for detecting particles on a surface of a semiconductor wafer having repetitive patterns
US4895446A (en) Particle detection method and apparatus
US4247203A (en) Automatic photomask inspection system and apparatus
US4223346A (en) Automatic defect detecting inspection apparatus
US5241369A (en) Two-dimensional optical scatterometer apparatus and process
JP4616472B2 (ja) 表面の異常および／または特徴を検出するためのシステム
EP0264427A1 (fr) Procede et appareil d'identification d'une matiere particulaire
EP0265229A2 (fr) Méthode et appareil pour la détection de particules
US6091834A (en) Method of illuminating a digital representation of an image
JPS6182147A (ja) 表面検査方法及び装置
JPS6345543A (ja) 透明材料要素の表面の不整及び吸蔵の試験装置
US20050248761A1 (en) Apparatus for determining the shape and/or size of little particles
GB2243681A (en) Particle size analyser
EP0877225A3 (fr) Appareil et dispositifs optiques pour la mesure de surfaces
EP0163394B1 (fr) Dispositif de focalisation automatique
EP0079439B1 (fr) Système optique pour l'examen oblique
US3970845A (en) Pulse discriminator circuit
JPH07128032A (ja) 板状材の表面うねり検査方法及び装置
US6122053A (en) Apparatus for measuring particle fallout on a surface using a telltale plate
US4384770A (en) Focus detecting device
JPS63173940A (ja) 光学式欠陥検出装置
JP2906745B2 (ja) 表面うねり検査装置
JP2801916B2 (ja) 欠陥検査装置

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19871203

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB IT

17Q First examination report despatched

Effective date: 19881011

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19890222

RIN1 Information on inventor provided before grant (corrected)

Inventor name: CHAMPETIER, ROBERT, J.