EP0258296A1 - Dispositif de generation d'ions dans des courants de gaz. - Google Patents

Dispositif de generation d'ions dans des courants de gaz.

Info

Publication number
EP0258296A1
EP0258296A1 EP87901026A EP87901026A EP0258296A1 EP 0258296 A1 EP0258296 A1 EP 0258296A1 EP 87901026 A EP87901026 A EP 87901026A EP 87901026 A EP87901026 A EP 87901026A EP 0258296 A1 EP0258296 A1 EP 0258296A1
Authority
EP
European Patent Office
Prior art keywords
voltage
electrode
electrodes
tip
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP87901026A
Other languages
German (de)
English (en)
Other versions
EP0258296B1 (fr
Inventor
Hans-Henrich Stiehl
Thomas Sebald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SORBIOS VERFAHRTECH GmbH
Original Assignee
SORBIOS VERFAHRTECH GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SORBIOS VERFAHRTECH GmbH filed Critical SORBIOS VERFAHRTECH GmbH
Publication of EP0258296A1 publication Critical patent/EP0258296A1/fr
Application granted granted Critical
Publication of EP0258296B1 publication Critical patent/EP0258296B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere

Definitions

  • the invention relates to a device for generating ions in gas streams for reducing electrostatic charges which are present on sensitive products, such as e.g. Microchips, foils, magnetic disks, laser storage disks and printed circuit boards lead to destruction in the event of uncontrolled discharge or result in increased particle deposition.
  • sensitive products such as e.g. Microchips, foils, magnetic disks, laser storage disks and printed circuit boards lead to destruction in the event of uncontrolled discharge or result in increased particle deposition.
  • Microstructures also include sensitive plastic films or surfaces in general, in which the deposition of microparticles leads to a loss of quality leads, understood.
  • the damage is caused by electrostatic charges.
  • Such productions take place, for example, in clean rooms, the air of which is highly pre-filtered and flows through the clean room in a low-turbulence, piston-like displacement flow.
  • the supply air of such clean rooms can be filtered to such an extent that almost no particles can get into the clean room via the air flow.
  • Particle pollution during production essentially arises from the production process itself or from the operating personnel.
  • the device according to the invention can also be operated at limited workplaces with a specially generated air flow.
  • the charges are generated by friction, influence or capacitive processes and are unavoidable when moving the product, especially on insulating surfaces. Charge densities can arise which lead to voltages of several thousand volts. On the one hand, these charged surfaces increasingly attract aerosols, especially charged aerosols, by means of electrostatic forces.
  • a voltage of 6 - 7 kV is necessary to ignite a gas discharge on strongly curved surfaces.
  • the speed decreases of the ions within half a meter to one meter to a value of less than one meter per second.
  • the usual air flow speed at workplaces is around 0.5 m per second.
  • Conventional ionizers work with voltages between 10 and 20 kV.
  • the course of the voltage over time is either uniform (FIG. 1c), a sinusoidal voltage (FIG. 1 a) of 50 to 60 Hz or a rectangular voltage curve.
  • the rectangular voltage curve and the sinusoidal AC voltage have the disadvantage that the switching of the peak polarity takes place in periods that are short compared to the flow velocity of the air. In this case ions that have already been metered into the air are transported back to the tip by rapidly changing the polarity and are ineffective for ionizing the air. In addition, the efficiency of ion dosing deteriorates. Efficiency is understood here to mean the ratio of the number of ions entering the air flow to the total number of ions generated at the tip.
  • the increased current load due to return transport is also not avoided in known systems by supplying two peak groups separately with direct voltage.
  • the potential difference between the peaks is approximately 20 kV, and the distance between the peaks should be chosen to be approximately 30 cm.
  • the average ion velocity remains so high that only a small proportion of ions from the marginal zones of the electric field are absorbed by the air flow. For this reason, the same disadvantages are to be expected as in the case of AC ionizers.
  • the formation of areal Ionizers such as can be installed, for example, over a large area under the ceiling of clean rooms, lead to locally discontinuous ion generation.
  • the object of the invention is to create a device for generating ions in gas streams with an electrode arrangement exposed to the gas streams and a pulsed high-voltage supply, which supplies an alternating sequence of negative and positive pulses with steep flanks, which also extends over a longer period Period constant operating conditions with uniform ion distribution over the flow cross section with good efficiency guaranteed.
  • tip-shaped discharge electrodes and associated counter-electrodes are provided in a fixed and defined relationship to one another provides a defined electrical field and the time profile of the high voltage applied to the tip-shaped discharge electrodes is related to the gas velocity and the ion flight time between discharge electrodes and Counterelectrodes can be correlated so that the efficiency is increased. Due to the geometrical arrangement of tip-shaped discharge electrodes and counter electrodes, a uniform ion distribution is produced over the flow cross section and the disruptive influence of other potentials in the room on the ion generation and distribution is prevented. The alternation of positive and negative high voltage at the same tip-shaped discharge electrode avoids constant DC fields perpendicular to the direction of flow of the gas lead to segregation of the positive and negative ions.
  • a low-erosion electrode material is selected as the material for the tip-shaped discharge electrodes with niobium improves the removal behavior and reduces the tendency to sputter.
  • the device according to the invention can be used both in high-quality cleanrooms and outside of cleanrooms.
  • contamination of the tip-shaped discharge electrodes can occur due to the accumulation of particulate air contaminants, which lead to impairment of ion generation.
  • the electrode carriers can therefore be removed from their spring-locked plug seat with a rotation lock and reinserted.
  • the positive and negative high-voltage generators can be galvanically separated and the tip-shaped discharge electrodes can be supplied with positive and negative high-voltage via a single, single-core, shielded high-voltage cable.
  • the lifetime of the high-voltage relays is increased considerably by the load-free switching.
  • the high-voltage module By providing a high voltage supply which is a separate low voltage control unit and has a high-voltage module, the high-voltage module can be arranged in the vicinity of the electrode arrangement outside the gas flow, as a result of which no undesirable turbulence occurs in the gas flow.
  • the low-voltage control unit which controls the high-voltage module to regulate the positive and negative ion quantities, can be located in the immediate vicinity of the workplace. While the connection between the electrode arrangement and the high-voltage module is made via a shielded cooking voltage cable, the high-voltage module is controlled by the low-voltage control unit with direct current, so that even long cable lengths can be used in the production area without the risk of disturbing sensitive electronic control and measuring devices by radiated electromagnetic radiation can.
  • Another advantage of the invention is that additional particle generation is significantly reduced. Measurements have shown that, with a resolution of approximately 100 particles per m, no additional particle generation could be recorded by the device according to the invention.
  • the tip electrodes are directed towards the processing of sensitive products in order to achieve short discharge times.
  • voltages above the sensitivity threshold of the products can be influenced.
  • FIG. 3 shows a section through a first exemplary embodiment of the device according to the invention
  • Fig. 5a is a perspective schematic
  • 5b and 5c are schematic sectional representations of further electrode arrangements
  • Fig. 6 shows a partial section through a
  • FIG. 7b shows a pulse diagram for the high-voltage module according to FIG. 7a.
  • 4 shows the device according to the invention, which has a low-voltage control unit 30, a high-voltage module 31 and the electrode arrangement 32.
  • the electrode arrangement is arranged in the area of the air flow, for example in clean rooms in the ceiling area below the air outlets or the air filters.
  • 5a schematically shows a grid-shaped electrode arrangement which is suitable for mounting under a clean room filter ceiling.
  • the electrode arrangement 31 has crossbeams 1, 8 made of metal semicircular profiles which form a fixed frame with tubular metal counter electrodes 4 lying on the ground. Electrode carriers 5, which carry needle-shaped or tip-shaped discharge electrodes 6, are fastened to the crossbeams 1, 8 via plug connections 3.
  • the counter electrodes 4 and the electrode carriers 5 are arranged parallel to one another in one plane, the tip-shaped discharge electrodes likewise preferably lying in a plane perpendicular to the counter electrodes 4. 5a, only three tip-shaped discharge electrodes 6 are provided per electrode carrier 5. Of course, more discharge electrodes can also be provided.
  • the counter electrodes 4 and electrode carriers 5 have a diameter of approximately 3 to 15 mm and the distance is between 5 and 50 cm.
  • the tip-shaped discharge electrodes 6 are arranged at regular intervals of approximately 5 to 30 cm.
  • the high voltage is supplied to the discharge electrodes 6 via protective resistors in the crossbar 1 and the plug connectors 3, the electrode carriers 5 being electrically connected in parallel. In or on the crossbeam 1 there is also a clamping connection (not shown) for the electrical connection of the grounded shielding of the single-core high-voltage cable 9.
  • the connector 3 has an acrylic tube 33 with a shoulder, inside of which the high-voltage line 10 is guided. The approach is inserted into the electrode carrier 5, a socket 11 connected to the high-voltage line and a pin 12 provided in the electrode carrier 5 forming the electrical connection.
  • the acrylic tube 33 provides a creepage distance between the high-voltage electrode carrier and the cross-beam 1 at ground potential.
  • the connector 7 also has an insulating acrylic rod 34, the end of which is inserted into the electrode carrier and is fixed by means of a dowel pin 14. A compression spring 13 is supported on the end of the acrylic rod 34.
  • the dowel pin 14 forms an anti-rotation device, so that the tip-shaped discharge electrodes cannot change their position with respect to the counter electrodes 4.
  • the plug connectors 3 and 7 together form a spring-locked plug seat, so that the electrode carriers can be removed and cleaned without major difficulties.
  • the tip-shaped discharge electrodes are driven with a high voltage according to FIG. 2 alternately with positive and negative pulses with steep edges.
  • the high voltage is first applied over a period of time t 1, which is selected such that the space between the electrodes 4, 6 is filled with positive ions.
  • t 1 which is selected such that the space between the electrodes 4, 6 is filled with positive ions.
  • Fig. 5a metered flowing air flow.
  • the switch-on times are, for example, between a few and a few 10 ms, in particular between 5 and 60 ms.
  • the switch-off times per second, ie the interval between the pulses are between 100 and 1000 ms Duty cycles from 1: 5 to 1:20.
  • a low-erosion electrode material is used for the discharge electrodes, stainless steel and tungsten being used in the prior art. Tungsten showed a low abrasion behavior. Investigations of further materials showed that with niobium and its alloys as the electrode material, significantly better results can be achieved, so that this material is used in the discharge electrodes 6. Table 1 shows the results of a test carried out over 1000 hours with 20 times, non-tactile current loading of the tip-shaped discharge electrodes. Column 2 shows a volume removed which is 6 times lower than that of tungsten. Tantalum also showed better results than tungsten.
  • the high-voltage module 31 which is preferably arranged in the vicinity of the electrode arrangement in order to reduce the length of the high-voltage cable 9 but outside the air flow, is shown in more detail in FIG. 7a.
  • Two high-frequency oscillators 18 control the primary winding of two high-voltage transformers 19 via drivers (not shown) with low voltage. depending on the passage in the co-encapsulated high-voltage diodes, one transformer generates positive high voltage and the other negative high voltage.
  • Two high-voltage relays 20 switch the respective high voltage to the shielded high-voltage cable 9, which supplies the discharge electrodes 6. So that the high-voltage relays 20 switch load-free, the oscillators 18 and the relays 20 are driven in accordance with the pulse diagram according to FIG. 7b. It can be seen from this that the high-voltage relays 20 are switched on or off when the oscillators 18, which are driven in pulsed fashion, are not switched on.
  • the low-voltage control unit 30 can be located in the immediate vicinity of the workplace or can be accommodated in a central control cabinet. It outputs two direct currents with independently adjustable DC voltage values to the high-voltage module, whereby the positive and negative high-voltage values can be determined independently of one another. To regulate the DC voltage values generated by the low-voltage control unit 30 and thus to regulate the balance of the ion polarity, the currents used to generate the positive and negative ions are measured separately in the high-voltage module 31 in a control circuit (not shown) and supplied to the low-voltage control unit 30 as a control variable. Special counter electrodes 4 are provided in the electrode arrangement according to FIG. 5a. 5b and 5c, the counter electrodes are formed by plant components surrounding the discharge electrodes 6.
  • a frame system 16 which is electrically connected to ground, is designed as a counter electrode.
  • a perforated plate 17 is provided as the counter electrode, which lies on ground and which can serve as a screen or the like.
  • FIG. 3 Another embodiment is shown in FIG. 3.
  • ions are not metered into a gas or air flow present in the room, but rather a closed device is provided which has a device for generating a rectified flow over a large cross section.
  • This device has a blower 22 which supplies a pressure chamber 21 which is delimited on the outflow side by a uniformly air-permeable layer 23 designed as a guide plate.
  • the baffle forms the counter electrode to the tip-shaped discharge electrodes 6, which are arranged below the baffle 23 and are attached to electrode carriers 5 according to FIG. 5a.
  • the rectified flow is stabilized in the surrounding space by a circumferential flow apron 24.

Landscapes

  • Elimination Of Static Electricity (AREA)

Abstract

Un dispositif générateur d'ions dans des courants de gaz comprend un agencement d'électrodes exposées aux courants de gaz et une source de haute tension à formes d'ondes d'impulsion qui fournit une succession d'impulsions négatives et positives alternantes à flancs raides. L'agencement d'électrodes comprend au moins une électrode de décharge (6) par pointe et au moins une contre-électrode (4) agencées de manière fixe et définie l'une par rapport à l'autre. L'écoulement dans le temps du signal de haute tension est déterminé de sorte que la durée de chaque impulsion corresponde au temps de vol des ions entre les électrodes et que l'intervalle entre les impulsions soit adapté à la vitesse des courants de gaz.
EP87901026A 1986-02-06 1987-02-05 Dispositif de generation d'ions dans des courants de gaz Expired - Lifetime EP0258296B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3603947 1986-02-06
DE19863603947 DE3603947A1 (de) 1986-02-06 1986-02-06 System zur dosierung von luftgetragenen ionen mit hoher genauigkeit und verbessertem wirkungsgrad zur eliminierung elektrostatischer flaechenladungen

Publications (2)

Publication Number Publication Date
EP0258296A1 true EP0258296A1 (fr) 1988-03-09
EP0258296B1 EP0258296B1 (fr) 1990-05-02

Family

ID=6293678

Family Applications (1)

Application Number Title Priority Date Filing Date
EP87901026A Expired - Lifetime EP0258296B1 (fr) 1986-02-06 1987-02-05 Dispositif de generation d'ions dans des courants de gaz

Country Status (6)

Country Link
US (1) US4878149A (fr)
EP (1) EP0258296B1 (fr)
JP (1) JP2702951B2 (fr)
DE (2) DE3603947A1 (fr)
RU (1) RU1830198C (fr)
WO (1) WO1987004873A1 (fr)

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DE4400517C2 (de) * 1994-01-07 1996-11-07 Sorbios Verfahrenstech Vorrichtung zur Erzeugung von Ozon
AUPM893094A0 (en) * 1994-10-20 1994-11-10 Shaw, Joshua Improvements in or in relating to negative air ion generators
US6069314A (en) * 1997-05-16 2000-05-30 Varela; Manuel Domingo Emitter of ions for a lightning rod with a parabolic reflector
US7569790B2 (en) 1997-06-26 2009-08-04 Mks Instruments, Inc. Method and apparatus for processing metal bearing gases
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US8779322B2 (en) 1997-06-26 2014-07-15 Mks Instruments Inc. Method and apparatus for processing metal bearing gases
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Also Published As

Publication number Publication date
WO1987004873A1 (fr) 1987-08-13
DE3762563D1 (de) 1990-06-07
US4878149A (en) 1989-10-31
JPS63502466A (ja) 1988-09-14
JP2702951B2 (ja) 1998-01-26
RU1830198C (ru) 1993-07-23
DE3603947A1 (de) 1987-08-13
EP0258296B1 (fr) 1990-05-02

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