EP0099285B1 - Ecran scintillateur convertisseur de rayonnement et procédé de fabrication d'un tel écran - Google Patents

Ecran scintillateur convertisseur de rayonnement et procédé de fabrication d'un tel écran Download PDF

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Publication number
EP0099285B1
EP0099285B1 EP83401370A EP83401370A EP0099285B1 EP 0099285 B1 EP0099285 B1 EP 0099285B1 EP 83401370 A EP83401370 A EP 83401370A EP 83401370 A EP83401370 A EP 83401370A EP 0099285 B1 EP0099285 B1 EP 0099285B1
Authority
EP
European Patent Office
Prior art keywords
layer
screen
scintillation
photocathode
ensuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP83401370A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0099285A1 (fr
Inventor
Dominique Delattre
Henri Rougeot
Catherine Tassin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of EP0099285A1 publication Critical patent/EP0099285A1/fr
Application granted granted Critical
Publication of EP0099285B1 publication Critical patent/EP0099285B1/fr
Expired legal-status Critical Current

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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36—Photoelectric screens; Charge-storage screens
    • H01J29/38—Photoelectric screens; Charge-storage screens not using charge storage, e.g. photo-emissive screen, extended cathode
    • H01J29/385—Photocathodes comprising a layer which modified the wave length of impinging radiation

Definitions

  • the present invention relates to a method for manufacturing a scintillator radiation converter screen. It also relates to such a screen.
  • Radiation converting scintillator screens are well known in the prior art. These screens receive X or y rays and convert them into light photons to which a photocathode is sensitive which covers the concave face of these screens.
  • the screen When the screen receives X-radiation, it is used in radiological image intensifier tubes or I.I.R. and when the screen receives ⁇ radiation, it is used in scintigraphy tubes.
  • scintillating radiation converting screens are generally obtained by evaporating cesium iodide doped with sodium or thallium on the concave face of a metal support, for example of aluminum, which is transparent to radiation. .
  • the growth of cesium iodide occurs spontaneously in the form of juxtaposed needles which is a structure conducive to guiding the light created in cesium iodide by the incident radiation.
  • the concave face of the scintillator screen thus obtained receives a photocathode sublayer which is intended to isolate the scintillator screen from the photocathode and / or to improve the surface condition of the concave face of the screen. A photocathode is then deposited on this sublayer.
  • Document FR-A-2 145 566 discloses a method of manufacturing a layer of scintillator material for a scintillator screen which converts radiation, by evaporation on a support, which may be the concave part of the entry window 12. , glass or metallic, of an intensifying tube of radioscopic images.
  • Cesium iodide may for example be evaporated on a support made of a material having a coefficient of thermal expansion different from that of the scintillator material.
  • the present invention relates to a scintillator radiation converter screen which does not have the drawbacks stated above.
  • the present invention relates to a method of manufacturing a layer of scintillator material for a scintillator radiation converter screen, which receives x or y rays and converts them into light photons, this layer of material being obtained by evaporation on a support made of a material having a coefficient of thermal expansion different from that of the scintillator material, characterized in that the evaporation is carried out on the perfectly smooth convex face of the support and in that after evaporation, the layer of scintillator material is separated from the support by simple heating.
  • the present invention also relates to a scintillator radiation converter screen, which receives x-rays and -y, comprising a layer of scintillator material sensitive to x-rays or y and converts them into light photons to which a photocathode is sensitive ( 4) which covers one of the faces of this screen, this layer of scintillator material (2) having a needle structure, having a convex face which receives the radiation and a concave face, on which the photocathode rests, characterized in that the concave face of this layer of scintillator material is as smooth as the convex surface of a support on which it is formed according to the method of one of claims 1 to 3 and comprises grains whose diameter varies from 0.1 to 50 ⁇ .Lm.
  • the concave face of the scintillator screen according to the present invention is perfectly smooth because it is this face which is in contact with the convex face of the support during the evaporation of the scintillator material.
  • the photocathode which is deposited on this face therefore has perfectly smooth surfaces. You can vary the thickness. screen size from a few tens of microns to several millimeters while retaining a perfectly smooth concave face.
  • the scintillator screen when it is finished no longer comprises the support which was used to its manufacture.
  • FIG. 1 represents the diagram seen in section, of a scintillator screen according to the prior art.
  • This screen is obtained by evaporating cesium iodide on the concave face of a thin metal support 1, made of aluminum for example, which is transparent to X-ray or y to be analyzed.
  • the growth of cesium iodide takes place in the form of needles 2 terminated by tetrahedral crystals which are represented in a box which shows in more detail the structure of the screen.
  • the concave face of the scintillator screen thus obtained is very irregular.
  • a photocathode 3 sublayer is deposited to chemically isolate the scintillator screen 2 from the photocathode and / or to improve the surface condition of the concave face of the screen.
  • a photocathode 4 is then deposited on the sublayer 3.
  • FIG. 2 represents the diagram, seen in section, of an embodiment of a screen according to the invention.
  • this screen consists of a scintillator material 2 having a structure in needles.
  • the box on the right shows that the concave face of this screen is perfectly smooth. It is on this face that the photocathode 4 is deposited, with, possibly, between this concave face and the photocathode, a sublayer 3 of photocathode, made of phosphovanadates for example.
  • This support can have any thickness. It can be made of any material, glass or metal, which has a coefficient of thermal expansion different from that of the scintillator material used.
  • the scintillator screen is obtained by evaporation of the scintillator material on the convex face of the support. After evaporation, the screen is separated from the support by simple heating thanks to the smooth surface of the convex face of the support and thanks to the difference between the coefficients of thermal expansion of the support and of the scintillator material.
  • a scintillator screen such as that shown in FIG. 2 is thus obtained, the concave face of which is perfectly smooth because it is this face which was in contact with the convex face of the support during the evaporation of the scintillator material.
  • the concave face of the screen has an optical polish.
  • the diameter of the grains on this face varies from 0.1 to 50 micrometers approximately.
  • the conduction is ensured by the photocathode which is deposited on the concave face quite smooth. There is therefore no risk of seeing, as in the prior art, craters of micro-structures interrupt the continuity of the layer in contact with the photocathode and therefore the conduction.
  • the thickness of the screen can vary, depending on the use, between a few tens of microns and a few millimeters while retaining a perfectly smooth concave face.
  • the scintillator screen has a structure of finely divided needles. It can then be used in high definition radiological image intensifier tubes.
  • the evaporation support is heated during evaporation, at temperatures ranging from 100 to 600 ° C. for example, a structure in agglomerated needles is obtained which is more monolithic which allows this screen to be used in scintigraphy.
  • the evaporation support can be made of aluminum for example.
  • the scintillator material used can be an alkali halide, such as cesium iodide doped with sodium or thallium, or such as potassium iodide doped with thallium. It is also possible to use as scintillating material tungstates, sulphides or metallic sulphates for example.
  • a layer 5 can be placed on the convex face of the screen ensuring its rigidity.
  • This layer ensuring the rigidity of the screen can consist, for example, of a glass or of an enamel with a low melting point, or of any organic substance which withstands the oven temperatures. tube such as for example epoxy resin. parylene, polyimides, or cryolite, for example.
  • the convex face of the screen can also be provided with a layer reflecting the light produced in the screen by the incident radiation.
  • This layer refers to the entire photocathode the light arriving on the convex face of the screen.
  • This layer can consist, for example, of any evaporated metal such as aluminum or nichrome.
  • This layer consists of a high density material with a high atomic number, deposited in a thin layer, such as barium oxide, lead or tungsten. This type of material promotes photoelectric emission and the stopping power with respect to ionizing radiation.
  • a layer of indium or tin can serve both to reflect the light produced in the screen by the incident radiation and also to ensure the rigidity of the screen.
  • a layer can be obtained by sputtering, by evaporation, by projection or by any other known method.
  • the photocathodes which are deposited there have a minimum surface electrical resistance which no longer depends so much on the scintillator screen but especially on the photocathode which is deposited there.
  • a photocathode 4 is deposited, consisting for example of cesium and antimony.
  • a support grid 7 having the same concavity as the screen, as shown in Figure 3.
  • This grid must be transparent to the flow of incident radiation. It can be nickel or iron, for example.
  • the screen shown comprises a layer 6 increasing the efficiency of quantum detection of the screen, a layer 2 of needle scintillator material whose concave face is perfectly polished, a photocathode sublayer 3 and a photocathode 4.
  • a metal ring 8 is evaporated on the concave face of the screen at the periphery of this face.
  • Pressure tabs 9 are applied to this ring and serve as connections with the photocathode.
  • the screen according to the invention when it is sufficiently thick can also be mounted in a tube without the use of a support grid.
  • Various embodiments of the screen according to the invention are obtained by providing one or both sides, or both sides of this screen, with one or more of the various layers mentioned above which can be superimposed in an indifferent order.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Conversion Of X-Rays Into Visible Images (AREA)
  • Measurement Of Radiation (AREA)
EP83401370A 1982-07-13 1983-07-04 Ecran scintillateur convertisseur de rayonnement et procédé de fabrication d'un tel écran Expired EP0099285B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8212285 1982-07-13
FR8212285A FR2530367A1 (fr) 1982-07-13 1982-07-13 Ecran scintillateur convertisseur de rayonnement et procede de fabrication d'un tel ecran

Publications (2)

Publication Number Publication Date
EP0099285A1 EP0099285A1 (fr) 1984-01-25
EP0099285B1 true EP0099285B1 (fr) 1987-01-21

Family

ID=9275953

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83401370A Expired EP0099285B1 (fr) 1982-07-13 1983-07-04 Ecran scintillateur convertisseur de rayonnement et procédé de fabrication d'un tel écran

Country Status (4)

Country Link
EP (1) EP0099285B1 (enrdf_load_stackoverflow)
JP (1) JPS5924300A (enrdf_load_stackoverflow)
DE (1) DE3369420D1 (enrdf_load_stackoverflow)
FR (1) FR2530367A1 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU195335B (en) * 1984-11-05 1988-04-28 Peter Teleki Method and modifying body for influencing effect on a target sensitive to radiation exerted by x-ray or gamma radiation
EP0185534B1 (en) * 1984-12-17 1990-06-20 Konica Corporation Radiation image storage panel
NL8500981A (nl) * 1985-04-03 1986-11-03 Philips Nv Roentgenbeeldversterkerbuis met een secundaire stralings absorberende luminescentielaag.
NL8502570A (nl) * 1985-09-20 1987-04-16 Philips Nv Roentgenbeeldversterkerbuis met geoeptimaliseerde microstructuur.
JPS63262600A (ja) * 1987-04-20 1988-10-28 富士写真フイルム株式会社 放射線像変換パネルおよびその製造法
JP2815881B2 (ja) * 1988-03-04 1998-10-27 株式会社東芝 Ｘ線イメージ管の製造方法
AU4168699A (en) 1998-06-18 2000-01-05 Hamamatsu Photonics K.K. Method of organic film deposition
JP4731791B2 (ja) * 2000-09-11 2011-07-27 浜松ホトニクス株式会社 放射線イメージセンサおよびその製造方法
JP4593806B2 (ja) * 2001-02-09 2010-12-08 キヤノン株式会社 放射線検出装置の製造方法、蛍光板の製造方法及び放射線検出装置の製造装置
JP4208687B2 (ja) * 2003-09-29 2009-01-14 株式会社東芝 イメージセンサ
JP2011247686A (ja) * 2010-05-25 2011-12-08 Fujifilm Corp 放射線画像撮影装置
JP2015200528A (ja) * 2014-04-04 2015-11-12 キヤノン株式会社 放射線撮像装置およびその製造方法、並びに放射線撮像システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2145566A1 (enrdf_load_stackoverflow) * 1971-07-10 1973-02-23 Philips Nv
FR2351494A1 (fr) * 1976-05-11 1977-12-09 Tokyo Shibaura Electric Co Ecran d'entree pour un intensificateur d'image
FR2384349A1 (fr) * 1977-03-14 1978-10-13 Tokyo Shibaura Electric Co Intensificateur d'image

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3030313A (en) * 1958-06-19 1962-04-17 Du Pont Process for making thallium activated potassium iodide phosphor
US3795531A (en) * 1970-02-03 1974-04-05 Varian Associates X-ray image intensifier tube and method of making same
US3852131A (en) * 1972-05-17 1974-12-03 Gen Electric Method of manufacturing x-ray image intensifier input phosphor screen
US4101781A (en) * 1977-06-27 1978-07-18 Hewlett-Packard Company Stable fiber optic scintillative x-ray screen and method of production
JPS5519029A (en) * 1978-07-25 1980-02-09 Ryosaku Kakimoto Production of natto (fermented soybean) frozen with liquid nitrogen in laminated carton vessel
DE3175963D1 (en) * 1980-06-16 1987-04-09 Toshiba Kk Radiation excited phosphor screen and method for manufacturing the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2145566A1 (enrdf_load_stackoverflow) * 1971-07-10 1973-02-23 Philips Nv
FR2351494A1 (fr) * 1976-05-11 1977-12-09 Tokyo Shibaura Electric Co Ecran d'entree pour un intensificateur d'image
FR2384349A1 (fr) * 1977-03-14 1978-10-13 Tokyo Shibaura Electric Co Intensificateur d'image

Also Published As

Publication number Publication date
JPS5924300A (ja) 1984-02-07
FR2530367B1 (enrdf_load_stackoverflow) 1985-02-22
EP0099285A1 (fr) 1984-01-25
JPH0458000B2 (enrdf_load_stackoverflow) 1992-09-16
DE3369420D1 (en) 1987-02-26
FR2530367A1 (fr) 1984-01-20

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