EP0041247A2 - Dispositif asservi pour réglage de débit indépendant de la charge - Google Patents

Dispositif asservi pour réglage de débit indépendant de la charge Download PDF

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Publication number
EP0041247A2
EP0041247A2 EP81104114A EP81104114A EP0041247A2 EP 0041247 A2 EP0041247 A2 EP 0041247A2 EP 81104114 A EP81104114 A EP 81104114A EP 81104114 A EP81104114 A EP 81104114A EP 0041247 A2 EP0041247 A2 EP 0041247A2
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EP
European Patent Office
Prior art keywords
control
actuator
pilot
piston
volume flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP81104114A
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German (de)
English (en)
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EP0041247A3 (en
EP0041247B1 (fr
Inventor
Yung-Hsiang Lu
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Individual
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Individual
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Filing date
Publication date
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Publication of EP0041247A2 publication Critical patent/EP0041247A2/fr
Publication of EP0041247A3 publication Critical patent/EP0041247A3/de
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Publication of EP0041247B1 publication Critical patent/EP0041247B1/fr
Expired legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
    • F15B13/0435—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B9/00—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member
    • F15B9/02—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type
    • F15B9/03—Servomotors with follow-up action, e.g. obtained by feed-back control, i.e. in which the position of the actuated member conforms with that of the controlling member with servomotors of the reciprocatable or oscillatable type with electrical control means

Definitions

  • the invention relates to a pilot-controlled device for load-independent volume flow control, proportional to an input signal, with a valve housing, an inlet and an outlet, and at least one volume flow sensor, which is located in a control circuit with an actuator.
  • flow control valves Devices for load-independent volume flow controls are already known, which in practice are referred to as flow control valves. With the aid of an orifice, the control cross-section of which is usually infinitely adjustable, these devices convert the volume flow signal into a pressure difference. This pressure difference is fed to a pressure control circuit which has the task of keeping the pressure difference at the measuring orifice constant.
  • This control loop consists of the elements measuring element, which compares the pressure difference with the target value, and actuator, which compares the deviation between the target and actual value.
  • Such a control loop is constructively implemented with the aid of a spring-loaded piston slide.
  • the pressure difference at the orifice plate directed onto the piston surface deflects the piston against a spring and at the same time adjusts a control cross section formed between the piston and the sleeve.
  • pilot-controlled flow control valves which are used in particular for medium and large volume flow controls.
  • the pressure difference generated at the orifice plate is directed to the piston surfaces of a spring-loaded pilot piston, the deflection of which is via a control cross arranged between the piston and the sleeve cut the control pressure changed.
  • This control pressure then acts on the control element used as an actuator in the power branch, which is usually designed as a 2-way cartridge valve, and regulates the constant pressure difference at the orifice plate.
  • the object of the present invention is now to avoid the disadvantages of the previously known generic devices and, in particular, to achieve increased stability, better direct current behavior and faster response of the valve to changes in load pressure.
  • volume flow sensor is designed as a seat piston or slide design of a built-in valve and is supported via a spring on the housing and via a further spring on a pilot piston on which a control device with a Input signal proportional force acts that the actuator is spring-loaded in the direction of its rest position and that the control side of the actuator is coupled to a connecting line in which at least one control cross section of the pilot piston lies.
  • the volume flow signal is converted into a displacement signal via a spring-loaded volume flow sensor.
  • the Bernoullian law is applied, according to which the volume flow is proportional to the control cross-section with a constant pressure difference across a hydraulic resistance.
  • the deviation between the setpoint and actual value of the volume flow is transferred to the pilot valve as a change in stroke of the volume flow sensor via a spring.
  • the resulting control pressure leads to the control of the error signal with the help of a control element in the power branch.
  • the return of the displacement signal proves to be advantageous compared to the previously used return of the differential pressure signal in both the static and the dynamic behavior of the device.
  • the stability of the valve is increased by the force feedback. This enables a higher amplification of the control deviation, which leads to better direct current behavior and leads to a low minimum pressure difference. Furthermore, a very quick response of the valve to changes in load pressure is made possible.
  • the actuator can be a control slide with at least one control edge.
  • This structure of the device can be easily expanded in that the control slide can be provided with several control edges without a fundamental change to the rest of the construction. This results in a significantly smaller construction volume for small nominal sizes compared to the use of a corresponding number of cartridge valves.
  • the device can be designed so that the control slide has two control sides, that two pilot controls are provided, each with a volume flow sensor, and that the pilot pistons each control a control cross section of a line that connects a control side to the outlet of the associated sensor .
  • the two volume flow sensors can be combined to form a piston. Above all, this results in a further reduction in the construction volume.
  • the device can be designed such that the control slide has two control sides and that two pilot controls work together with a common volume flow sensor, the spring force of the return spring of both pilot controls acting in the closing direction of the sensor.
  • One pilot control can exert a compressive force on one end of the sensor and the other pilot control can exert a pulling force on the other end of the sensor.
  • both pilot controls it is also possible for both pilot controls to exert pressure forces on the same EnJe of the volume flow sensor.
  • the device can be designed so that the actuator is designed as a piston of a cartridge valve.
  • the volume flow sensor can be arranged in series behind the actuator.
  • the invention further provides that the control side of the actuator is connected to the inlet via a fixed throttle point. This leads to a particularly simple construction of the entire device.
  • the invention further proposes that the connecting line communicating with the control side of the actuator is connected in a controlled manner to the rear side of the volume flow sensor and to the outlet via a control edge of the pilot piston.
  • the invention provides that a check valve is provided between the control cross section of the pilot valve and the back of the volume flow sensor on the one hand and the outlet on the other hand, and that the piston of the sensor has a fixed throttle point. In this way, the device can also act as a check valve.
  • the invention provides that the connecting line of the control side of the actuator controlled by the control edge of the pilot piston is coupled to the space between the actuator and sensor and that the rear of the sensor communicates with the process via a throttle.
  • the invention further proposes that the actuator be arranged parallel to the volume flow sensor and installed in a tank connection.
  • the entire device acts as a 3-way flow control valve. Throttling does not take place in front of the sensor.
  • the oil flow that is not required is directed to the tank via the actuator.
  • the invention further proposes that the inlet is connected to the tank connection via a throttle point in the piston of the actuator and the connecting line controlled by the pilot piston, while the rear side is connected to the outlet.
  • a positive influence on the control behavior can be achieved according to the invention in that the connecting line connected to the control side of the actuator and controlled by the pilot piston starts from the inlet and in that a second control edge of the pilot piston controls a connection to the tank connection.
  • the volume flow sensor is arranged in series in front of the actuator. This structural variant is also possible, since the supply pressure for the pilot stage can be tapped before or after the sensor due to the low pressure drop at the sensor.
  • the invention also provides that the space between the sensor and the actuator is connected to the rear of the sensor and that the discharge is via the connecting line controlled by the pilot piston communicates with the control side of the actuator, which in turn has a throttle connection to the space in front of the actuator.
  • the embodiment of the invention according to FIG. 1 has a housing 1 which is composed of two parts 2, 3 which are connected to one another in a sealing manner.
  • the housing 1 has an inlet 4 and an outlet 5.
  • inlet 4 and outlet 5 are formed by bores running parallel to one another.
  • the bore for the inlet 4 has an enlarged section 6 in the housing 1, in which a built-in valve piston 7, which is also referred to as an actuator, is slidably guided.
  • This built-in valve piston 7 is provided at its end facing the inlet 4 with a conical surface 8, which forms a control cross section with a valve seat 9 of the housing 1.
  • the expanded section 6 of the inlet bore is closed by a cover 10 at the end opposite the inlet 4.
  • a helical spring 11 is supported at one end on the cover 10 and at the other end on the built-in valve piston 7, which has a central cylindrical recess 12 which is open to the cover 10.
  • This cylindrical recess 12 forms with the space between the built-in valve piston 7 and the cover 10 the control side 13 of the built-in valve piston 7, which represents the actuator of the device.
  • the built-in valve piston 7 has an end face 14 facing the inlet 4, in which a fixed throttle point 15 is provided, which represents a connection between the inlet 4 and the control side 13 of the built-in valve piston 7.
  • a bore 16 is provided in the housing 1, which connects the inlet 4 to the outlet 5.
  • This bore 16 has an upper, enlarged section 17 in which a built-in valve piston 18 is slidably guided, which forms a conical surface 20 on its end face 19, which cooperates with a valve seat 21 of the housing 1.
  • the built-in valve piston 18 is designed like a pot, similar to the built-in valve piston 7 of the actuator.
  • a helical spring 23 is provided on its rear side 22, one end of which is supported on the built-in valve piston 18 and the other end of which is supported on the housing 1.
  • Another coil spring 24 also engages with one end on the rear side of the built-in valve piston 18, while its other end abuts a pilot piston 25.
  • the built-in valve piston 18 acts as a volume flow sensor of the device and is also referred to as such.
  • the pilot piston 25 is guided in a cylinder chamber 26. It has a control edge 27.
  • the control side 13 of the built-in valve piston 7, which acts as an actuator, is connected to the cylinder chamber 26 via a connecting line 28, in which there is a fixed throttle point 29. Furthermore, a line 30 opens into the cylinder space 26, which is connected to the outlet 5 via a line 31.
  • the control edge 27 of the pilot piston 25 controls the cross section of the connecting line 28 and, if appropriate, establishes a connection via the lines 30 and 31 to the outlet 5 via an annular space 32.
  • a control device 35 is placed on the housing 1, which receives a pressure-resistant proportional magnet 36.
  • a plunger 37 of this proportional magnet 36 acts on the pilot piston 25, the force transmitted by the plunger 37 being proportional to the current flowing through a winding of the proportional magnet 36.
  • An adjusting spring 38 acts on the rear side of the proportional magnet 36, the spring tension of which can be adjusted by means of a spindle 39 in order to be able to carry out a zero point adjustment of the pilot stage, that is to say the pilot piston 25.
  • the control pressure on the control side 13 of the actuator 7 drops and the built-in valve piston of the actuator 7 is deflected by the pressure in the inlet 4 against the spring 11 and the control pressure on the control side 13.
  • the control cross section on the actuator 7 is thus enlarged.
  • the volume flow over the control cross section of the actuator 7 increases and deflects the built-in valve piston 18 of the volume flow sensor against the springs 23, 24.
  • the change in the spring force of the spring 24 leads on the pilot piston 25 to the force balance between the spring force and the control force of the tappet 37 as soon as the actual volume flow through the device corresponds to the desired value.
  • the opening stroke of the volume flow sensor 18 is kept constant by the position control. At the same time, however, the pressure difference across the opening cross section is constant for each volume flow set. This is determined by the spring forces of the springs 23, 24 and the effective flow forces. Since both the opening cross section at the volume flow sensor and the pressure difference at this cross section are constant, the volume flow flowing through must also be constant.
  • FIG. 2 corresponds very largely to that according to FIG. 1. Only the deviations are to be described below.
  • a check valve 45 is installed in the line 31 communicating with the outlet 5.
  • the control side 53 is connected to the inlet 4 via a connecting line 54, which can be connected by a control edge 55 to a line 56 which opens into the inlet 4.
  • the pilot piston 25 has a second control edge 57, which can establish a connection between the control side 53 of the actuator 51 and the outlet 5.
  • the embodiment according to FIG. 4 has a two-part housing 60 with an inlet 61, an outlet 62 and a tank connection 63. This device thus works as a 3-way flow control valve.
  • an installation valve piston 64 as an actuator and an installation valve piston 65 as a volume flow sensor are arranged parallel to one another.
  • the built-in valve piston 64 of the actuator has on its end face 66 a conical surface 67 which cooperates with a valve seat 68 of the housing.
  • the control cross section between the valve seat 68 and the conical surface 67 connects the inlet 61 to the tank connection 63.
  • a fixed throttle point 69 is located in the end face 66 of the built-in valve piston 64.
  • the built-in valve piston 64 is pot-shaped and has a control side 70 which communicates with the inlet 61 via the throttle point 69.
  • the control side 70 is connected via a connecting line 71, in which there is expediently a further throttle point 72, to a cylinder 73 in which a pilot piston 74 is guided.
  • the pilot piston 74 has a control edge 75 which controls the cross section of the connecting line 71.
  • the pilot piston 74 forms an annular space 76 into which a line 77 opens which, depending on the position of the control edge 75, communicates with the connecting line 71 and is connected to the tank connection 63.
  • a further control cross section is formed between the inlet 61 and the outlet 62 by a conical surface 78 of a volume flow sensor 79 and a valve seat 80 of the housing 60.
  • the volume flow sensor 79 designed as a built-in valve piston is supported on the pilot piston 74 via springs, as already described in the previous embodiments.
  • This pilot piston is pressure balanced via lines 80, 81, 82.
  • the embodiment according to FIG. 5 differs from that according to FIG. 4 only in that the built-in valve piston 64 of the actuator has no throttle point in its end face 66, but that the control side 70 of the actuator is connected to the cylinder 73 of the pilot piston 74 via a connecting line 85 and communicates there controlled by a second control edge 86 of the pilot piston 74 with a line 87 which, depending on the position of the pilot piston 74, establishes a connection between the control side 70 and the inlet 4.
  • a second control edge 100 of the pilot piston 74 controls a connecting line 99 to the tank connection 63.
  • the control side 13 of the actuator is via a connecting line 90 in which a throttle point 91 is arranged, connected to a cylinder 92 of a pilot piston 93.
  • a control edge 94 of this pilot piston 93 establishes a connection between the connecting line 90 and a further line 95, which ends in the space between the actuator 7 and the volume flow sensor 18.
  • the back of the volume flow sensor is connected to outlet 5 via a line with throttle point 97.
  • Two-part housing 101 is provided, which has an inlet 102 and an outlet 103.
  • This embodiment has a built-in valve piston 104 as a volume flow sensor and a built-in valve piston 105 as an actuator.
  • the actuator is arranged in the flow direction behind the volume flow sensor, the built-in valve piston of which is closed on its end face 106.
  • the built-in valve piston 104 of the volume flow sensor is supported, as was described above for the other embodiments, by springs on the housing and on a pilot piston 109.
  • the built-in valve piston 105 of the actuator has an end face 110 with a conical surface 111, which cooperates with a valve seat 112 of the housing.
  • a fixed throttle point 108 is provided in the end face 110.
  • the built-in valve piston 105 of the actuator is pot-shaped and is supported on the housing via a spring 113.
  • the actuator 105 has a control side 114 which is connected to a cylinder 116 of the pilot piston 109 via a connecting line 115.
  • a further throttle point 117 is located in the connecting line 115.
  • the pilot piston 109 has a control edge 118 which, depending on the position of the pilot piston 109, establishes a connection between the connecting line 115 and a further line 119 which opens into the space between the volume flow sensor 104 and the actuator 105.
  • Lines 120, 121, 122 apply pressure to both sides of the pilot piston 109 at the inlet 102, so that the pilot piston 109 is relieved of pressure.
  • the control device 125 has a housing 126 with a bore 127 in which a pressure-balanced plunger 128 can be moved, which protrudes out of the housing 126 at one end.
  • the plunger 128 forms a piston with a lower surface 129 and an upper surface 130. These surfaces lie in a cylinder section 131 of the bore 127.
  • the plunger 128 is provided with a blind bore 132, in which a coil spring 133 is seated, one end of which bears against one another supports a pilot piston, as shown in FIGS. 1 to 7.
  • This control device thus enables the entire device to be actuated by a stroke and is suitable, for example, for actuation by control cams or the like.
  • FIG. 9 shows an embodiment of the control device 140 which corresponds very largely to that according to FIG. 8. The only difference is that the upper end of a plunger 141 in this embodiment lies in a cylinder space 142 to which an external control pressure can be applied.
  • control device 150 largely corresponds to that according to FIG. 8. The only difference is that a rotary spindle 152 works together with the upper end of a plunger 151, which rotates the position of the plunger and thus that of a coil spring 153 force exerted on the pilot piston.
  • the embodiment shown in FIG. 11 has an inlet 200 and a housing with a bore 201, in which an actuator designed as a control slide 202 is guided with a control edge 203.
  • the control slide 202 is acted upon at one end, which is referred to as the control side 204, by a spring 205, the other end of which is supported on the housing.
  • the inlet 200 opens into the bore 201 in the region of the other end of the control slide 202.
  • the control slide 202 here has a section 206 and defines the zero position of the control slide.
  • the control edge 203 works together with an annular groove 207 provided in the housing, which is connected via a line 208 to a volume flow sensor 209 which interacts with a pilot control 210.
  • volume flow sensor and pilot control are e.g. described in connection with Fig. 1.
  • the inlet 200 is connected to the control side 204 of the control slide 202 via a fixed throttle point 211. Furthermore, there is a connection line to a control piston 212 of the pilot control 210 already described in connection with FIG. 1.
  • This embodiment has an outlet 213 following the volume flow sensor 209.
  • the embodiment according to FIG. 12 has a control slide 220 with four control edges 221, 222, 223, 224.
  • the control edges cooperate with the edges of two annular grooves 225, 226, which are provided in a bore 227 receiving the control slide 220.
  • the control slide 220 is acted upon at both ends by springs 228, 229 in the direction of its initial or rest position.
  • the spool 220 and the bore 227 are symmetrical one through the longitudinal center trained the level.
  • An inflow 230 opens into the bore 227 between the annular grooves 225, 226.
  • Two lines 231, 232 are also connected to the bore and open into the region of the bore 227 which lies between an annular groove 225, 226 and the associated end of the bore.
  • the lines 231, 232 are connected to a drain.
  • the inflow 230 is connected via a fixed throttle point 233, 234 to the two control sides of the control slide 220 and further to a pilot control 235, 236, which cooperates with a volume flow sensor 237, 238.
  • the two volume flow sensors 237, 238 are each connected between one of the ring grooves 225, 226 and a connection 239, 240. Pilot control 235, 236 and volume flow sensor 237, 238 work together and are constructed as described in connection with FIG. 2.
  • the embodiment according to FIG. 13 has a control slide 250 with four control edges 251, 252, 253, 254.
  • the control edges cooperate with the edges of two annular grooves 255, 256, which are provided in a bore 257 receiving the control slide 250.
  • the control slide 250 is acted upon at both ends by springs 258, 259 in the direction of its starting position.
  • the control slide 250 and the bore 257 are formed symmetrically with respect to a plane running through the longitudinal center.
  • the two ring grooves 255,256 are connected to connections 260,261 to the consumer.
  • An inflow 262 opens into the bore 257 between the annular grooves 255,256.
  • the inflow 262 is also connected via fixed resistors 263,264 to the two control sides of the control slide 250, in which the springs 258,259 are located.
  • two volume flow sensors are combined to form a piston 265, which is supported on both sides by a spring 266.267 on a pilot piston 268.269, which cooperates with an electromagnet 270.271.
  • the piston 265 is supported on the housing via springs 272, 273.
  • Lines 274, 275 connect the regions of the bore 257, each lying between an annular groove and the end of the bore, with one side of the piston 265.
  • the piston 265 has a central bore 276, in which an unlockable twin check valve 277 is arranged.
  • This check valve 277 connects to a radially extending bore 278, which opens into an annular groove 279.
  • the check valve 277 is arranged in such a way that it releases a flow passage from the side of the piston 265 to the annular groove 279, on which the lower pressure prevails in each case.
  • the annular groove 279 is connected to a drain via a line 280.
  • the embodiment according to FIG. 14 has a control piston 300, which is also designed and provided with connections, as was described with reference to FIG. 13. It sits in a cylinder bore 301 with two annular grooves 302,303. Between these two annular grooves on the one hand and the respectively assigned end of the bore 301, a line 304, 305 opens, which opens into one end of a bore 306, in which a piston-shaped volume flow sensor 307 is slidably guided. Two pilot controls 308, 309 are provided, each of which actuates a pilot piston 310, 311. A spring 312 is located between the pilot piston 311 and the volume flow sensor 307.
  • Another spring 313 is arranged concentrically with the spring 312 and is supported on the volume flow sensor on the one hand and on the housing on the other.
  • An annular stop 314 is arranged in the bore 306, against which the volume flow sensor comes to rest in the starting position.
  • the pilot control 308 is designed such that a current signal applied to its magnetic winding leads to the pilot piston 310 being moved to the left in FIG. 14. It exerts a tensile force on the volume flow sensor 307 via a spring 315.
  • the bore 306 is also provided with an annular groove 316, which cooperates with a control edge 317 of the volume flow sensor 307. Like the cylinders of the two pilot pistons 310, 311, the annular groove 316 is connected to a drain.
  • the embodiment according to FIG. 15 has a control slide 330 with four control edges. This control slide is arranged as described for the control slide according to FIGS. 13 and 14.
  • a volume flow sensor 332 slidably guided in a bore 331 is provided, the control edge 333 of which cooperates with an annular groove 334, which is connected on the one hand to the outlet and, moreover, to the cylinders of two control pistons 335,336.
  • the control pistons 335, 336 cooperate with pilot controls 337, 338, which have already been described for the above embodiments.
  • a line 339 corresponding to the lines 304, 305 according to FIG. 14 opens in one end of the bore 331.
  • Two springs engage on the other side of the volume flow sensor 332, one of which springs 340 on the housing and the other spring 341 on an intermediate plate 342 supports.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Fluid-Driven Valves (AREA)
EP81104114A 1980-06-03 1981-05-29 Dispositif asservi pour réglage de débit indépendant de la charge Expired EP0041247B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3020918 1980-06-03
DE19803020918 DE3020918A1 (de) 1980-06-03 1980-06-03 Vorgesteuerte vorrichtung zur lastunabhaengigen volumenstromregelung

Publications (3)

Publication Number Publication Date
EP0041247A2 true EP0041247A2 (fr) 1981-12-09
EP0041247A3 EP0041247A3 (en) 1982-05-26
EP0041247B1 EP0041247B1 (fr) 1985-11-13

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EP81104114A Expired EP0041247B1 (fr) 1980-06-03 1981-05-29 Dispositif asservi pour réglage de débit indépendant de la charge

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EP (1) EP0041247B1 (fr)
DE (2) DE3020918A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0074581A1 (fr) * 1981-09-10 1983-03-23 Wolfgang Prof. Dr.-Ing. Backé Dispositif pour le réglage d'une course ou d'un déplacement angulaire, indépendant de la charge et proportionnel à un signal d'entrée
EP0150308A2 (fr) * 1984-01-30 1985-08-07 Trw Inc. Appareil pour contrôler un courant de fluide
US4585206A (en) * 1984-10-29 1986-04-29 Kawasaki Jukogyo Kabushiki Kaisha Proportional flow control valve
DE3532591A1 (de) * 1985-09-12 1987-03-19 Rexroth Mannesmann Gmbh Hydraulische vorrichtung, insbesondere 2-wege-proportionaldrosselventil
AT393301B (de) * 1989-08-30 1991-09-25 Woutschuk Alfred Steuervorrichtung fuer ein hydraulisches druckventil
EP0893607A1 (fr) 1997-07-25 1999-01-27 HEILMEIER & WEINLEIN Fabrik für Oel-Hydraulik GmbH & Co. KG Electrovanne de décharge
US9476517B2 (en) 2014-02-28 2016-10-25 Mks Instruments, Inc. Pilot valve structures and mass flow controllers

Families Citing this family (3)

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Publication number Priority date Publication date Assignee Title
DE3040521A1 (de) * 1980-10-28 1982-05-27 Robert Bosch Gmbh, 7000 Stuttgart Vorgesteuerte vorrichtung zur lastunabbhaengigen regelung wenigstens eines volumenstromes proportional zu einem eingangssignal
DE3305093A1 (de) * 1983-02-14 1984-08-16 Herion-Werke Kg, 7012 Fellbach Mengenventil
DE3733642A1 (de) * 1987-10-05 1989-04-20 Daimler Benz Ag Mengenregelventil

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EP0002446A1 (fr) * 1977-12-09 1979-06-27 Mannesmann Rexroth GmbH Distributeur à quatre voies fonctionnant indépendamment de la charge commandé électriquement
EP0023416A2 (fr) * 1979-07-26 1981-02-04 Vickers Incorporated Soupape hydraulique

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Publication number Priority date Publication date Assignee Title
EP0074581A1 (fr) * 1981-09-10 1983-03-23 Wolfgang Prof. Dr.-Ing. Backé Dispositif pour le réglage d'une course ou d'un déplacement angulaire, indépendant de la charge et proportionnel à un signal d'entrée
EP0150308A2 (fr) * 1984-01-30 1985-08-07 Trw Inc. Appareil pour contrôler un courant de fluide
EP0150308A3 (fr) * 1984-01-30 1986-10-01 Trw Inc. Appareil pour contrôler un courant de fluide
US4585206A (en) * 1984-10-29 1986-04-29 Kawasaki Jukogyo Kabushiki Kaisha Proportional flow control valve
DE3532591A1 (de) * 1985-09-12 1987-03-19 Rexroth Mannesmann Gmbh Hydraulische vorrichtung, insbesondere 2-wege-proportionaldrosselventil
AT393301B (de) * 1989-08-30 1991-09-25 Woutschuk Alfred Steuervorrichtung fuer ein hydraulisches druckventil
EP0893607A1 (fr) 1997-07-25 1999-01-27 HEILMEIER & WEINLEIN Fabrik für Oel-Hydraulik GmbH & Co. KG Electrovanne de décharge
US9476517B2 (en) 2014-02-28 2016-10-25 Mks Instruments, Inc. Pilot valve structures and mass flow controllers

Also Published As

Publication number Publication date
EP0041247A3 (en) 1982-05-26
DE3020918A1 (de) 1981-12-10
DE3172883D1 (en) 1985-12-19
EP0041247B1 (fr) 1985-11-13

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