EP0012054A1 - Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken - Google Patents

Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken Download PDF

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Publication number
EP0012054A1
EP0012054A1 EP79400855A EP79400855A EP0012054A1 EP 0012054 A1 EP0012054 A1 EP 0012054A1 EP 79400855 A EP79400855 A EP 79400855A EP 79400855 A EP79400855 A EP 79400855A EP 0012054 A1 EP0012054 A1 EP 0012054A1
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EP
European Patent Office
Prior art keywords
interval
ions
grouper
ion beam
electric field
Prior art date
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Granted
Application number
EP79400855A
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English (en)
French (fr)
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EP0012054B1 (de
Inventor
Jacques Pottier
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H05H7/18—Cavities; Resonators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means

Definitions

  • the present invention relates to an ion beam grouper-unbundler, at asymmetrical intervals, and operating in a wide speed range. It finds application in ion acceleration installations.
  • an ion beam grouper or ungrouper is constituted by a resonant structure supplied by a high frequency or hyper-frequency source, and crossed by an ion beam so that the electric field established in the structure modulates the ion velocity appropriately.
  • the modulation on the speed has the effect of accelerating the slow ions more than the fast ions, which allows grouping in packets of small spatial extent at a determined distance from the consolidator; the speeds of the different ions constituting a pack are then distributed over a wider range.
  • Consolidators are used in ion acceleration systems when, for example, time of flight experiments or any injection into a high frequency accelerator is desired.
  • modulation has the effect of increasing low speeds and reducing high speeds, which makes it possible to reduce the speed dispersion of the ions.
  • Such an apparatus is used when it is desired to use monoenergetic ions, without particular concern over the width of the packet of ions.
  • FIGS 1 and 2 recall, in broad outline, the principles of construction and operation of these two devices.
  • FIG. 1 On part (a) of FIG. 1 is shown a resonant structure constituted by a wall 2 closed at its two ends by lateral faces 4 and 6 crossed respectively by inlet 8 and outlet 10 conduits of a beam d 'ions 12.
  • the structure shown further comprises a sliding tube 14 connected to the wall 2 by a conductive support 16. This tube slip is separated from the conduits 8 and 10 by two identical intervals I 1 and 1 2 . All these parts are conductive and for example metallic.
  • Part (b) of this same figure 1 illustrates the electrical diagram of the structure shown in part (a).
  • These two conduits 8 and 10 are connected to ground (or more generally to a reference potential) and the sliding tube 14 is brought to an alternating voltage V due to the high frequency (or hyper-frequency) field prevailing in the structure (this voltage V being counted from said reference potential).
  • the intervals I 1 and 1 2 each have a length 1 and their centers are distant from the length L. The same mean electric field V / 1 therefore prevails in these two intervals.
  • the diagrams in FIG. 2 illustrate the operation of the device in FIG. 1.
  • the ions of average speed penetrate in the interval I 1 at the instant t 0 (part a), the distance z which they travel is plotted on the ordinate as a function of the times on the abscissa.
  • These ions are subjected (b) to an electric field E 0 during their crossing of the interval I 1 , this field modifying their speed slightly, (this modification of speed is generally small compared to the speed proper).
  • a decoupler placed at a distance z receives ions at time t ' o and applies a field E' 0 to them .
  • Faster ions have reached the interaction interval of the unbundler at time t 'prior to t' 0 . They are subjected to a field E ' 1 weaker than E' 0 .
  • the slower ions which reach the ungrouper at t ' 2 , they see in the interaction interval a field E' 2 greater than E ' 0 .
  • the ions are driven at substantially equal speeds, but correlatively, they occupy an extended part of the space.
  • the voltages usually encountered in ion beam groupers are defined by two imperatives: the speed modulation provided to the beam must be low compared to the speed of said beam, and the voltage d acceleration must be great in front of the natural fluctuations of the beam. In practice, voltages of the order of a few tens of kilovolts or less are used.
  • the voltages used in the unbundlers are of the order of magnitude of the dispersion in beam energy and can be between 10 kV and 100 kV approximately.
  • FIG. '1 is, among the known structures, that which most closely resembles the invention. We can consider that it is formed of a first part constituted by the tube 16, the faces 4 and 6 and the wall 2, this part being equivalent to a resonant line in X / 4, if ⁇ is the wavelength of the electromagnetic field introduced into the structure and of a second part constituted by the intervals Il and I 2 which are zones of a capacitive nature.
  • This structure of the prior art requires that the actions exerted by the electric field on the ions in the two interaction intervals are cumulative. This implies that the ions travel the distance L separating these two intervals in a time which is a odd multiple of the half-period T of the field. This structure of the prior art therefore only works correctly if the ions are driven at a speed close to 2L / T (or a multiple of this speed).
  • the subject of the invention is precisely a grouper-unbundler which simultaneously remedies these two drawbacks.
  • the grouper-unbundler of the invention is of the type which includes two intervals and, as such, it benefits from the advantage offered by this family of devices, namely a small footprint.
  • the grouper-unbundler of the invention does not have the disadvantage of having a speed range close and this thanks to an original arrangement of the two interaction intervals.
  • the grouper-unbundler of the invention can therefore operate in a wide range of speeds while having a small footprint.
  • the present invention relates to an ion beam grouping-ungrouping unit, of the type which includes a resonant structure supplied by a high frequency or hyper frequency generator, this structure comprising a cylindrical wall closed by two lateral faces traversed respectively by an inlet duct and a beam outlet duct, and comprising a sliding tube disposed between said ducts and defining with the inlet duct a first interval and with the outlet duct a second interval, the ion beam being introduced into this structure through the inlet duct, first undergoing, in the first interval, a first action from the electric field which prevails there, then traversing the sliding tube and finally undergoing in the second interval a second action on the part of the electric field which reigns there and leaving the structure by the outlet conduit;
  • this consolidator-unbundler is characterized in that the two intervals defined by the sliding tube and the inlet and outlet conduits are highly asymmetrical, one of the two intervals providing the ion beam with an electric field much lower than that offered by l 'other
  • the grouper-unbunder of the invention is characterized in that the interval with weak action has a length such that it is traversed by the ion beam in a large time in front of the half resonance period of the structure.
  • the grouper-unbunder of the invention is characterized in that the inlet and outlet conduits have different sections, the sliding tube having a flared shape passing from a small section equal to that of the 'one of the conduits with a strong section equal to that of the other conduit.
  • Figures 1 and 2 relate to the prior art and have already been described.
  • the first interval crossed by the ion beam is the predominantly acting interval, the second interval occurring negligibly. But it goes without saying that this order could be reversed, the beam being able to penetrate first in the interval with negligible action.
  • the structures described can also function as a grouper.
  • FIG. 3 firstly illustrate a first variant of the invention.
  • an inlet conduit 20 there is an inlet conduit 20, a sliding tube 22 and finally, an outlet tube 24.
  • An ion beam 26 successively passes through these three elements which are brought to respectively equal potentials at O, V and O.
  • the real structure is represented in FIG. 4. It is supplied by a source 28, high frequency or microwave, the means for coupling this source to the resonant structure not being shown explicitly, because they are well known to those skilled in the art.
  • the inlet conduit 20 and the sliding tube 22 define a first interval I 1 , of length 1 1 which is the seat of an electric field of average value V / 1 1 .
  • the length 1 1 is chosen to be short enough so that the transit time of the ions is less than the half-period T / 2 of the field. So we have: 1 1 ⁇ as in the prior art.
  • the sliding tube 22 and the outlet conduit 24 define a second interval I 2 , of length 1 2 much larger than 1 1 .
  • This difference between the lengths 1 1 and 1 2 has two consequences: the first is that the mean electric field V / 1 2 which prevails in the second interval is much weaker than the mean field V / 1 1 which prevails in the first; the second is that the length 1 2 is no longer small in front as is 1 1 , so that the transit time of the ions through this interval can reach or even exceed the period T of the field. It therefore changes direction during this transit, so that its net action on the ions is very weak.
  • FIG. 5 illustrates a second variant of the invention.
  • the device shown also comprises an inlet duct 30, a sliding tube 32 and an outlet duct 34.
  • this outlet duct has a larger section than the inlet duct.
  • the sliding tube then has a flared shape which constitutes a transition between the inlet and outlet conduits.
  • the average electric field V / 1 2 which prevails between the sliding tube 32 and the outlet pipe 34 is therefore the same as that which prevails between the inlet pipe 30 and the sliding pipe 32. But this is the field which prevails in an area distant from that crossed by the ion beam.
  • the field which acts on the ions is in fact different from that which prevails at the level of the outlet conduit.
  • I 0 is the modified Bessel function of the first kind and of order 0 and ⁇ the ratio of the speed v of the ions to that of light and ⁇ the wavelength of the field in vacuum. If we denote by x the quantity , the serial development of I 0 is: 1 + + ...
  • the field E 0 on the axis is therefore less than the field E a (which is on average equal to V / 1 2 ) and can be significantly less than this field.
  • E a which is on average equal to V / 1 2
  • I 0 ⁇ 28 we have I 0 ⁇ 28.
  • the second interval I 2 therefore plays a negligible role compared to that played by I 1 , because the field on the y axis is much weaker than in the first.
  • This already erased role played by the interval 1 2 can be further reduced in a third variant, if this interval is lengthened, as shown in FIG. 6, until it has a long length 1 2 in front of vT. Then, as in the variant illustrated in FIGS. 3 and 4, the field acts in directions which vary during the crossing of the ions, which reduces its net action.
  • the structure shown in this figure comprises a cavity 40, inlet 42 and outlet 44 conduits, a sliding tube 46, a spiral conductor 48 forming self-inductance; the spaces between the tube 46 and the conduits 42 and 44 constitute capacitive zones. This arrangement makes it possible to significantly reduce the size of the structure.
  • the cavity can be tunable by variations of certain dimensions.
EP79400855A 1978-11-23 1979-11-13 Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken Expired EP0012054B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7833103 1978-11-23
FR7833103A FR2442505A1 (fr) 1978-11-23 1978-11-23 Groupeur-degroupeur de faisceau d'ions a intervalles dissymetriques et fonctionnant dans une large gamme de vitesse

Publications (2)

Publication Number Publication Date
EP0012054A1 true EP0012054A1 (de) 1980-06-11
EP0012054B1 EP0012054B1 (de) 1982-06-02

Family

ID=9215240

Family Applications (1)

Application Number Title Priority Date Filing Date
EP79400855A Expired EP0012054B1 (de) 1978-11-23 1979-11-13 Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken

Country Status (5)

Country Link
US (1) US4284923A (de)
EP (1) EP0012054B1 (de)
JP (1) JPS5574100A (de)
DE (1) DE2963034D1 (de)
FR (1) FR2442505A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3430984A1 (de) * 1984-08-23 1986-03-06 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur registrierung von teilchen oder quanten mit hilfe eines detektors
RU2554111C1 (ru) * 2014-02-04 2015-06-27 Объединенный Институт Ядерных Исследований Способ аксиальной инжекции пучка в компактный циклотрон со сверхвысоким магнитным полем

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527413A1 (fr) * 1982-05-19 1983-11-25 Commissariat Energie Atomique Accelerateur lineaire de particules chargees comportant des tubes de glissement
US4641103A (en) * 1984-07-19 1987-02-03 John M. J. Madey Microwave electron gun
US6583429B2 (en) * 2001-08-23 2003-06-24 Axcelis Technologies, Inc. Method and apparatus for improved ion bunching in an ion implantation system
US6635890B2 (en) * 2001-08-23 2003-10-21 Axcelis Technologies, Inc. Slit double gap buncher and method for improved ion bunching in an ion implantation system
US8013290B2 (en) * 2006-07-31 2011-09-06 Bruker Daltonik Gmbh Method and apparatus for avoiding undesirable mass dispersion of ions in flight
US7735400B2 (en) * 2007-08-20 2010-06-15 Ho-Tien Chen Torque releasing clutch for a screw driver blade
JP6022045B2 (ja) * 2012-05-31 2016-11-09 シーメンス アクチエンゲゼルシヤフトＳｉｅｍｅｎｓ Ａｋｔｉｅｎｇｅｓｅｌｌｓｃｈａｆｔ 荷電粒子ビームをパケット化する方法及び装置

Family Cites Families (10)

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CA503447A (en) * 1954-06-01 Goudet Georges Vacuum tubes for ultra high frequencies
BE481272A (de) * 1945-12-17
FR1074994A (fr) * 1953-02-23 1954-10-11 Csf Accélérateur linéaire de structure coaxiale à champs électrique et magnétique croisés
US2770755A (en) * 1954-02-05 1956-11-13 Myron L Good Linear accelerator
US3387171A (en) * 1960-06-10 1968-06-04 Varian Associates Device for modulating beams of charged particles utilizing a long interaction gap
US3366886A (en) * 1965-10-24 1968-01-30 Hugh L. Dryden Linear accelerator frequency control system
SU197037A1 (ru) * 1966-01-06 1973-12-10 Физико-Технический Институт Ан Украинской Сср Ускор юща система линейного ускорител ионов
US3710163A (en) * 1971-02-02 1973-01-09 B Rudiak Method for the acceleration of ions in linear accelerators and a linear accelerator for the realization of this method
SU368673A1 (ru) * 1971-05-20 1973-01-26 Усилительный клистрон
JPS533225B2 (de) * 1972-04-18 1978-02-04

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
REVIEW OF SCIENTIFIC INSTRUMENTS, Vol. 32, No. 6, 1961, pages 621-634 * Page 624, colonne de droite; figure 7 * *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3430984A1 (de) * 1984-08-23 1986-03-06 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur registrierung von teilchen oder quanten mit hilfe eines detektors
RU2554111C1 (ru) * 2014-02-04 2015-06-27 Объединенный Институт Ядерных Исследований Способ аксиальной инжекции пучка в компактный циклотрон со сверхвысоким магнитным полем

Also Published As

Publication number Publication date
FR2442505A1 (fr) 1980-06-20
FR2442505B1 (de) 1983-06-17
DE2963034D1 (en) 1982-07-22
EP0012054B1 (de) 1982-06-02
JPS5574100A (en) 1980-06-04
US4284923A (en) 1981-08-18

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