EP0012054B1 - Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken - Google Patents

Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken Download PDF

Info

Publication number
EP0012054B1
EP0012054B1 EP79400855A EP79400855A EP0012054B1 EP 0012054 B1 EP0012054 B1 EP 0012054B1 EP 79400855 A EP79400855 A EP 79400855A EP 79400855 A EP79400855 A EP 79400855A EP 0012054 B1 EP0012054 B1 EP 0012054B1
Authority
EP
European Patent Office
Prior art keywords
distance
ions
bundling device
over
interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP79400855A
Other languages
English (en)
French (fr)
Other versions
EP0012054A1 (de
Inventor
Jacques Pottier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP0012054A1 publication Critical patent/EP0012054A1/de
Application granted granted Critical
Publication of EP0012054B1 publication Critical patent/EP0012054B1/de
Expired legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H05H7/18—Cavities; Resonators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means

Definitions

  • the present invention relates to an ion beam grouper-unbundler, at asymmetrical intervals, and operating in a wide speed range. It finds application in ion acceleration installations.
  • a grouper or an ion beam ungrouper is constituted by a resonant structure supplied by a high frequency or hyper-frequency source, and crossed by an ion beam so that the electric field established in the structure modulates the velocity of the ions appropriately.
  • the modulation on the speed has the effect of accelerating the slow ions more than the fast ions, which allowed grouping in a packet of small spatial extent at a determined distance from the consolidator; the speeds of the different ions constituting a packet are then distributed over a wider range.
  • Consolidators are used in ion acceleration systems when, for example, time of flight experiments or any injection into a high frequency accelerator is desired.
  • modulation has the effect of increasing low speeds and reducing high speeds, which makes it possible to reduce the speed dispersion of the ions.
  • Such an apparatus is used when it is desired to use monoenergetic ions, without particular concern over the width of the packet of ions.
  • FIGS 1 and 2 recall, in broad outline, the principles of construction and operation of these two devices.
  • FIG. 1 On part (a) of FIG. 1 is shown a resonant structure constituted by a wall 2 closed at its two ends by lateral faces 4 and 6 crossed respectively by inlet 8 and outlet 10 conduits of a beam d 'ions 12.
  • the structure shown further comprises a sliding tube 14 connected to the wall 2 by a conductive support 16. This sliding tube is separated from the conduits 8 and 10 by two identical intervals 1, and 1 2 , All these parts are conductive and for example metallic.
  • Part (b) of this same figure 1 illustrates the electrical diagram of the structure shown in part (a).
  • These two conduits 8 and 10 are connected to ground (or more generally to a reference potential) and the sliding tube 14 is brought to an alternating voltage V due to the high frequency (or hyper-frequency) field prevailing in the structure (this voltage V being counted from said reference potential).
  • the intervals I 1 and I 2 each have a length / and their centers are distant from the length L. The same mean electric field V / 1 therefore prevails in these two intervals.
  • the diagrams in FIG. 2 illustrate the operation of the device in FIG. 1.
  • the ions of average speed penetrate in the interval I 1 at the instant t 0 (part a), the distance z which they travel is plotted on the ordinate as a function of the times on the abscissa.
  • These ions are subjected (b) to an electric field E o during their crossing of the interval I 1 , this field modifying their speed slightly (this modification of speed is generally small compared to the speed proper).
  • Faster ions than the previous ones have reached the interval I 1 at time t, prior to t o . They are subjected to a field E, weaker than E o .
  • the mechanism is analogous to the difference that it tends to reduce the energy deficit of slow ions and to reduce the excess energy of fast ions.
  • a decoupler placed at a distance z receives ions at time to and applies an E ô field to them.
  • Faster ions have reached the interaction interval of the unbundler at the moment prior to t ' 0 . They are subjected to a field E ' 1 weaker than E ' 0 .
  • the slower ions which reach the ungrouper at t ' 2 , they see in the interaction interval a field E ' 2 greater than E ' 0 .
  • the ions are driven at substantially equal speeds, but correspondingly, they occupy an extended part of the space.
  • the voltages used in the unbundlers are of the order of magnitude of the energy dispersion of the beam and can be between 10 kV and 100 kV approximately.
  • FIG. 1 is, among the known structures, that which most closely resembles the invention. We can consider that it is formed of a first part constituted by the support 16, the faces 4 and 6 and the wall 2, this part being equivalent to a resonant line in ⁇ / 4, if ⁇ is the wavelength of the electromagnetic field introduced into the structure and of a second part constituted by the intervals 1, and 1 2 which are zones of a capacitive nature.
  • This structure of the prior art requires that the actions exerted by the electric field on the ions in the two interaction intervals are cumulative. This implies that the ions travel the distance L separating these two intervals in a time which is an odd multiple of the half-period T of the field. This structure of the prior art therefore only works correctly if the ions are driven at a speed close to 2L / T (or a multiple of this speed).
  • the subject of the invention is precisely a grouper-unbundler which simultaneously remedies these two drawbacks.
  • the grouper-unbundler of the invention is of the type which includes two intervals and, as such, it benefits from the advantage offered by this family of devices, namely a small footprint.
  • the grouper-unbundler of the invention does not have the disadvantage of having a narrow speed range and this thanks to an original arrangement of the two interaction intervals.
  • the grouper-unbundler of the invention can therefore operate in a wide range of speeds while having a small footprint.
  • the present invention relates to an ion beam grouping-ungrouping unit, of the type of cees which include a resonant structure supplied by a high frequency or hyper frequency generator, this structure comprising a cylindrical wall closed by two lateral faces traversed respectively by an inlet duct and an outlet duct for the beam, and comprising a sliding tube disposed between said ducts and defining with the inlet duct a first interval and with the outlet duct a second interval, the ion beam being introduced into this structure through the inlet duct, first undergoing, in the first interval, a first action on the part of the electric field which reigns there, then traversing the sliding tube and finally undergoing in the second interval a second action on the part of the electric field which reigns there and leaving the structure by the outlet conduit ;
  • this grouper-unbundler is characterized in that the two intervals defined by the sliding tube and the inlet and outlet conduits are highly asymmetrical, one of the two intervals providing the ion beam with an electric field much lower
  • the grouper-unbunder of the invention is characterized in that the interval with weak action has a length such that it is traversed by the ion beam in a large time in front of the half resonance period of the structure.
  • the grouper-unbunder of the invention is characterized in that the inlet and outlet conduits have different sections, the sliding tube having a flared shape passing from a small section equal to that of the 'one of the conduits with a strong section equal to that of the other conduit.
  • Figures 1 and 2 relate to the prior art and have already been described.
  • the first interval crossed by the ion beam is the predominantly acting interval, the second interval occurring negligibly. But it goes without saying that this order could be reversed, the beam being able to penetrate first in the interval with negligible action.
  • the structures described can also function as a grouper.
  • FIG. 3 firstly illustrate a first variant of the invention.
  • an inlet conduit 20 there is an inlet conduit 20, a sliding tube 22 and finally, an outlet tube 24.
  • An ion beam 26 successively passes through these three elements which are brought to respectively equal potentials at 0, V and O.
  • the real structure is represented in FIG. 4. It is supplied by a source 28, high frequency or microwave, the means for coupling this source to the resonant structure not being shown explicitly, because they are well known to those skilled in the art.
  • the inlet conduit 20 and the sliding tube define a first interval I 1 , of length 1, which is the seat of an electric field of average value V / I 1 .
  • the length I 1 is chosen to be sufficiently short so that the transit time of the ions is less than the half-period T / 2 of the field. So we have: as in the prior art.
  • the sliding tube 22 and the outlet conduit 24 define a second interval 1 2 , of length 1 2 much greater than 1,.
  • FIG. 5 illustrates a second variant of the invention.
  • the device shown also comprises an inlet duct 30, a sliding tube 32 and an outlet duct 34.
  • this outlet duct has a larger section than the inlet duct.
  • the sliding tube then has a flared shape which constitutes a transition between the inlet and outlet conduits.
  • the average electric field V / I 2 which prevails between the sliding tube 32 and the outlet pipe 34 is therefore the same as that which prevails between the inlet pipe 30 and the sliding pipe 32. But it is the field which reigns in an area distant from that crossed by the ion beam. The field which acts on the ions is in fact different from that which prevails at the level of exit conduit.
  • I 0 is the modified Bessel function of the first kind and of order 0 and ⁇ the ratio of the speed v of the ions to that of light and to the wavelength of the field in vacuum. If we denote by x the quantity the serial development of I 0 is:
  • the field E o on the axis is therefore less than the field E a (which is on average equal to V / 12) and can be significantly less than this field.
  • E a which is on average equal to V / 12
  • the second interval 1 2 therefore plays a negligible role compared to that enjoyed by I 1 , because the field on the y axis is much weaker than in the first.
  • This already erased role played by the interval 1 2 can be reduced in a third variant, if this interval is lengthened, as shown in FIG. 6, until presenting a length 1 2 large in front of vT. Then, as in the variant illustrated in FIGS. 3 and 4, the field acts in directions which vary during the crossing of the ions, which reduces its net action.
  • the structure shown in this figure comprises a cavity 40, inlet 42 and outlet 44 ducts, a sliding tube 46, a spiral conductor 48 forming self-inductance; the spaces between the tube 46 and the conduits 42 and 44 constitute capacitive zones. This arrangement significantly reduces the size of the structure.
  • the cavity can be tunable by variations of certain dimensions.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)

Claims (4)

1. lonen-Bündelungsvorrichtung von der Art, welche eine von einem Hochfrequenz- oder Hyperfrequenzgenerator gespeiste Resonanzstruktur aufweist, welche eine Zylinderwandung, die durch zwei Seitenflächen geschlossen ist, durch die ein Eintrittsroh,r bzw. ein Austrittsrohr für das Strahlenbündel hindurchgehen, und eine Driftröhre umfaßt, welche zwischen den beiden Rohren angeordnet ist und mit dem Eintrittsrohr einen ersten Zwischenraum und mit dem Austrittsrohr einen zweiten Zwischenraum festlegt, wobei der lonenstrahl in diese Strucktur durch das Eintrittsrohr zuführbar ist und zunächst in dem ersten Zwischenraum einer ersten Wirkung durch das dort vorliegende elektrische Feld ausgesetzt ist, dann die Driftröhre durchläuft und in dem zweiten Zwischenraum einer zweiten Wirkung des dort vorliegenden, elektrischen Feldes ausgesetzt ist und die Struktur durch das Austrittsrohr verläßt, dadurch gekennzeichnet, daß die zwei durch die Driftröhre und das Eintrittsrohr und das Austrittsrohr festgelegten Zwischenräume sehr ungleich sind, wobei in dem einen der beiden Zwischenräume für den lonenstrahl ein sehr viel kleineres elektrisches Feld als in dem anderen Zwischenraum vorhanden ist und die in dem einen Zwischenraum durch das elektrisehe Feld auf die Ionen ausgeübte Wirkung gegenüber derjenigen vernachlässigbar ist, welche in dem anderen Zwischenraum ausgeübt wird.
2. lonen-Bündelungsvorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß das Eintrittsrohr und das Austrittsrohr unterschiedliche Querschnitte aufweisen und daß die Driftröhre eine sich erweiternde Form aufweist, die von einem kleinen Querschnitt, der gleich demjenigen von einem der Rohre ist, zu einem großen Querschnitt übergeht, der gleich demjenigen des anderen Rohres ist.
3. lonen-Bündelungsvorrichtung nach irgendeinem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß der Zwischenraum mit der schwachen Wirkung eine derartige Längenabmessung aufweist, welche von dem lonenstrahl in einer Zeit durchlaufen wird, welche gegenüber einer Halbperiode der Resonanz der Struktur groß ist.
4. lonen-Bündelungsvorrichtung nach einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Struktur von der Art mit einer linearen Viertelwellenlänge oder spiralförmig oder schraubenförmig oder mit einem örtlichen induktiven Widerstand ist.
EP79400855A 1978-11-23 1979-11-13 Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken Expired EP0012054B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR7833103 1978-11-23
FR7833103A FR2442505A1 (fr) 1978-11-23 1978-11-23 Groupeur-degroupeur de faisceau d'ions a intervalles dissymetriques et fonctionnant dans une large gamme de vitesse

Publications (2)

Publication Number Publication Date
EP0012054A1 EP0012054A1 (de) 1980-06-11
EP0012054B1 true EP0012054B1 (de) 1982-06-02

Family

ID=9215240

Family Applications (1)

Application Number Title Priority Date Filing Date
EP79400855A Expired EP0012054B1 (de) 1978-11-23 1979-11-13 Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken

Country Status (5)

Country Link
US (1) US4284923A (de)
EP (1) EP0012054B1 (de)
JP (1) JPS5574100A (de)
DE (1) DE2963034D1 (de)
FR (1) FR2442505A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527413A1 (fr) * 1982-05-19 1983-11-25 Commissariat Energie Atomique Accelerateur lineaire de particules chargees comportant des tubes de glissement
US4641103A (en) * 1984-07-19 1987-02-03 John M. J. Madey Microwave electron gun
DE3430984A1 (de) * 1984-08-23 1986-03-06 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur registrierung von teilchen oder quanten mit hilfe eines detektors
US6635890B2 (en) * 2001-08-23 2003-10-21 Axcelis Technologies, Inc. Slit double gap buncher and method for improved ion bunching in an ion implantation system
US6583429B2 (en) * 2001-08-23 2003-06-24 Axcelis Technologies, Inc. Method and apparatus for improved ion bunching in an ion implantation system
US8013290B2 (en) * 2006-07-31 2011-09-06 Bruker Daltonik Gmbh Method and apparatus for avoiding undesirable mass dispersion of ions in flight
US7735400B2 (en) * 2007-08-20 2010-06-15 Ho-Tien Chen Torque releasing clutch for a screw driver blade
WO2013178275A1 (de) * 2012-05-31 2013-12-05 Siemens Aktiengesellschaft Verfahren und vorrichtung zum paketieren eines strahls geladener teilchen
RU2554111C1 (ru) * 2014-02-04 2015-06-27 Объединенный Институт Ядерных Исследований Способ аксиальной инжекции пучка в компактный циклотрон со сверхвысоким магнитным полем

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA503447A (en) * 1954-06-01 Goudet Georges Vacuum tubes for ultra high frequencies
BE481272A (de) * 1945-12-17
FR1074994A (fr) * 1953-02-23 1954-10-11 Csf Accélérateur linéaire de structure coaxiale à champs électrique et magnétique croisés
US2770755A (en) * 1954-02-05 1956-11-13 Myron L Good Linear accelerator
US3387171A (en) * 1960-06-10 1968-06-04 Varian Associates Device for modulating beams of charged particles utilizing a long interaction gap
US3366886A (en) * 1965-10-24 1968-01-30 Hugh L. Dryden Linear accelerator frequency control system
SU197037A1 (ru) * 1966-01-06 1973-12-10 Физико-Технический Институт Ан Украинской Сср Ускор юща система линейного ускорител ионов
US3710163A (en) * 1971-02-02 1973-01-09 B Rudiak Method for the acceleration of ions in linear accelerators and a linear accelerator for the realization of this method
SU368673A1 (ru) * 1971-05-20 1973-01-26 Усилительный клистрон
JPS533225B2 (de) * 1972-04-18 1978-02-04

Also Published As

Publication number Publication date
FR2442505B1 (de) 1983-06-17
EP0012054A1 (de) 1980-06-11
JPS5574100A (en) 1980-06-04
DE2963034D1 (en) 1982-07-22
FR2442505A1 (fr) 1980-06-20
US4284923A (en) 1981-08-18

Similar Documents

Publication Publication Date Title
CH623182A5 (de)
EP0012054B1 (de) Ionen-Bündelungsvorrichtung für einen weiten Geschwindigkeitsbereich mit zwei ungleichen Beschleunigungsstrecken
EP0013222A1 (de) Diodenphasenschieber für Mikrowellen und elektronisch abtastende Antenne mit einem solchen Schieber
EP0094889B1 (de) Linearbeschleuniger von geladenen Teilchen mit Beschleunigungsrohren
WO2013007797A1 (fr) Oscillateur spintronique et utilisation de celui-ci dans des dispositifs radiofréquence
EP0022700A1 (de) Vorrichtung mit magnetostatischen Wellen, die eine Struktur zum Auswechseln leitender Streifen enthält
EP0467818B1 (de) Übergangsstück zwischen elektromagnetischen Hohlleitern, insbesondere zwischen einem Rundhohlleiter und einem Koaxialhohlleiter
EP0078188B1 (de) Breitband-Hochfrequenzanordnung zur Erzeugung von harmonischer gerader Ordnung eines Eingangssignals und deren Verwendung in einem H.F.-System
FR3024802A1 (fr) Source multibande a cornet coaxial avec systemes de poursuite monopulse pour antenne a reflecteur
EP0353153A1 (de) Für die Verstärkung elektromagnetischer Abstrahlung vorgesehene magnetische Oszillations- und Führungseinrichtung für geladene Teilchen
EP0335788A1 (de) Mikrowellenphasenschieber
FR2530075A1 (fr) Tube electronique avec interaction transversale du type cyclotron
EP0475802A1 (de) Klystron mit breitem Augenblicksband
EP0714030B1 (de) Simulator für elektromagnetische Pulse
FR2544128A1 (fr) Dispositif d'injection d'un faisceau d'electrons pour generateur d'ondes radioelectriques pour hyperfrequences
EP0762529B1 (de) Iris-Polarisator für Antennenprimärstrahler
EP0124395A1 (de) Elektronenstrahlerzeuger für Mikrowellengeneratoren
EP0380397B1 (de) Gegentakt-Modulator für ein elektromagnetisches Mikrowellensignal hoher Leistung
FR2576477A1 (fr) Ensemble accelerateur lineaire de particules chargees
FR2691287A1 (fr) Nouveau circuit de sortie à interaction étendue pour un klystron relativiste large bande.
EP0514255A1 (de) Elektronzyklotronresonanz-Ionenquelle
EP0921587B1 (de) Mikrowellenfilter mit steiler Oberflanke
BE507972A (de)
FR2588714A1 (fr) Accelerateur d'ions a haute frequence
FR2535918A1 (fr) Dispositif de protection contre les surtensions

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): CH DE GB NL

17P Request for examination filed

Effective date: 19801108

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Designated state(s): CH DE GB NL

REF Corresponds to:

Ref document number: 2963034

Country of ref document: DE

Date of ref document: 19820722

PLBI Opposition filed

Free format text: ORIGINAL CODE: 0009260

26 Opposition filed

Opponent name: SIEMENS AG, BERLIN UND MUENCHEN

Effective date: 19830228

PLBN Opposition rejected

Free format text: ORIGINAL CODE: 0009273

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: OPPOSITION REJECTED

27O Opposition rejected

Effective date: 19840312

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19891028

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19891114

Year of fee payment: 11

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19891130

Year of fee payment: 11

Ref country code: GB

Payment date: 19891130

Year of fee payment: 11

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19901113

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Effective date: 19901130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19910601

GBPC Gb: european patent ceased through non-payment of renewal fee
NLV4 Nl: lapsed or anulled due to non-payment of the annual fee
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19910801