DE2963034D1 - Ion beam bundling device with two acceleration intervals of differing lengths, working in a broad range of speeds - Google Patents

Ion beam bundling device with two acceleration intervals of differing lengths, working in a broad range of speeds

Info

Publication number
DE2963034D1
DE2963034D1 DE7979400855T DE2963034T DE2963034D1 DE 2963034 D1 DE2963034 D1 DE 2963034D1 DE 7979400855 T DE7979400855 T DE 7979400855T DE 2963034 T DE2963034 T DE 2963034T DE 2963034 D1 DE2963034 D1 DE 2963034D1
Authority
DE
Germany
Prior art keywords
speeds
working
ion beam
broad range
bundling device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE7979400855T
Other languages
English (en)
Inventor
Jacques Pottier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Application granted granted Critical
Publication of DE2963034D1 publication Critical patent/DE2963034D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers
    • H05H7/18—Cavities; Resonators
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Particle Accelerators (AREA)
DE7979400855T 1978-11-23 1979-11-13 Ion beam bundling device with two acceleration intervals of differing lengths, working in a broad range of speeds Expired DE2963034D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7833103A FR2442505A1 (fr) 1978-11-23 1978-11-23 Groupeur-degroupeur de faisceau d'ions a intervalles dissymetriques et fonctionnant dans une large gamme de vitesse

Publications (1)

Publication Number Publication Date
DE2963034D1 true DE2963034D1 (en) 1982-07-22

Family

ID=9215240

Family Applications (1)

Application Number Title Priority Date Filing Date
DE7979400855T Expired DE2963034D1 (en) 1978-11-23 1979-11-13 Ion beam bundling device with two acceleration intervals of differing lengths, working in a broad range of speeds

Country Status (5)

Country Link
US (1) US4284923A (de)
EP (1) EP0012054B1 (de)
JP (1) JPS5574100A (de)
DE (1) DE2963034D1 (de)
FR (1) FR2442505A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2527413A1 (fr) * 1982-05-19 1983-11-25 Commissariat Energie Atomique Accelerateur lineaire de particules chargees comportant des tubes de glissement
US4641103A (en) * 1984-07-19 1987-02-03 John M. J. Madey Microwave electron gun
DE3430984A1 (de) * 1984-08-23 1986-03-06 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur registrierung von teilchen oder quanten mit hilfe eines detektors
US6635890B2 (en) * 2001-08-23 2003-10-21 Axcelis Technologies, Inc. Slit double gap buncher and method for improved ion bunching in an ion implantation system
US6583429B2 (en) * 2001-08-23 2003-06-24 Axcelis Technologies, Inc. Method and apparatus for improved ion bunching in an ion implantation system
US8013290B2 (en) * 2006-07-31 2011-09-06 Bruker Daltonik Gmbh Method and apparatus for avoiding undesirable mass dispersion of ions in flight
US7735400B2 (en) * 2007-08-20 2010-06-15 Ho-Tien Chen Torque releasing clutch for a screw driver blade
EP2823694A1 (de) * 2012-05-31 2015-01-14 Siemens Aktiengesellschaft Verfahren und vorrichtung zum paketieren eines strahls geladener teilchen
RU2554111C1 (ru) * 2014-02-04 2015-06-27 Объединенный Институт Ядерных Исследований Способ аксиальной инжекции пучка в компактный циклотрон со сверхвысоким магнитным полем

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA503447A (en) * 1954-06-01 Goudet Georges Vacuum tubes for ultra high frequencies
BE481272A (de) * 1945-12-17
FR1074994A (fr) * 1953-02-23 1954-10-11 Csf Accélérateur linéaire de structure coaxiale à champs électrique et magnétique croisés
US2770755A (en) * 1954-02-05 1956-11-13 Myron L Good Linear accelerator
US3387171A (en) * 1960-06-10 1968-06-04 Varian Associates Device for modulating beams of charged particles utilizing a long interaction gap
US3366886A (en) * 1965-10-24 1968-01-30 Hugh L. Dryden Linear accelerator frequency control system
SU197037A1 (ru) * 1966-01-06 1973-12-10 Физико-Технический Институт Ан Украинской Сср Ускор юща система линейного ускорител ионов
US3710163A (en) * 1971-02-02 1973-01-09 B Rudiak Method for the acceleration of ions in linear accelerators and a linear accelerator for the realization of this method
SU368673A1 (ru) * 1971-05-20 1973-01-26 Усилительный клистрон
JPS533225B2 (de) * 1972-04-18 1978-02-04

Also Published As

Publication number Publication date
FR2442505A1 (fr) 1980-06-20
FR2442505B1 (de) 1983-06-17
EP0012054B1 (de) 1982-06-02
EP0012054A1 (de) 1980-06-11
US4284923A (en) 1981-08-18
JPS5574100A (en) 1980-06-04

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Legal Events

Date Code Title Description
8339 Ceased/non-payment of the annual fee