EA201290412A1 - Способ структурирования поверхности ионным травлением, структурированная поверхность и применения - Google Patents

Способ структурирования поверхности ионным травлением, структурированная поверхность и применения

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Publication number
EA201290412A1
EA201290412A1 EA201290412A EA201290412A EA201290412A1 EA 201290412 A1 EA201290412 A1 EA 201290412A1 EA 201290412 A EA201290412 A EA 201290412A EA 201290412 A EA201290412 A EA 201290412A EA 201290412 A1 EA201290412 A1 EA 201290412A1
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EA
Eurasian Patent Office
Prior art keywords
etching
structuring
oxide
hybrid
less
Prior art date
Application number
EA201290412A
Other languages
English (en)
Inventor
Элин Зондергард
Себастьен Ле Руа
Альбан Летайер
Этьен Бартель
Констанс Мань
Original Assignee
Сэн-Гобэн Гласс Франс
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Сэн-Гобэн Гласс Франс filed Critical Сэн-Гобэн Гласс Франс
Publication of EA201290412A1 publication Critical patent/EA201290412A1/ru

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C03C14/004—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00—Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/005—Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to introduce in the glass such metals or metallic ions as Ag, Cu
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0236—Special surface textures
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00—Nature of the non-vitreous component
    • C03C2214/08—Metals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/77—Coatings having a rough surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Laminated Bodies (AREA)

Abstract

Изобретение относится к способу структурирования поверхности, т.е. формирования по меньшей мере одной совокупности неоднородностей или структурных элементов (2) с субмикронной высотой Н и по меньшей мере одним микронным или субмикронным характерным поперечным размером W, называемым шириной, на поверхности материала (1), в частности стекла, путем ионного травления пучком ионов, необязательно нейтрализованным, отличающемуся тем, что он включает следующие этапы: предоставление упомянутого материала с толщиной, по меньшей мере равной 100 нм, причем материал является твердым гибридным и содержащим простой или смешанный оксид элемента(ов), причем мольное процентное содержание оксида в материале составляет по меньшей мере 40%, в частности между 40 и 94%; и по меньшей мере одно вещество другой природы, чем элемент или элементы оксида, и являющееся, в частности, металлом, причем мольное процентное содержание веществ(а) в материале составляет от 6 до 50 мол.% и ниже процентного содержания упомянутого оксида, причем по меньшей мере большая часть вещества имеет наибольший характерный размер менее 50 нм, в частности, упомянутый гибридный материал является метастабильным перед упомянутым травлением; необязательный нагрев упомянутого гибридного материала перед упомянутым травлением; структурирование поверхности упомянутого гибридного материала при продолжительности травления менее одного часа на поверхности травления более 1 смдо тех пор, пока не будет сформирована упомянутая совокупность структурных элементов, причем структурирование необязательно сопровождается нагреванием гибридного материала.
EA201290412A 2009-12-01 2010-11-24 Способ структурирования поверхности ионным травлением, структурированная поверхность и применения EA201290412A1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0905805A FR2953213B1 (fr) 2009-12-01 2009-12-01 Procede de structuration de surface par abrasion ionique,surface structuree et utilisations
PCT/FR2010/052507 WO2011067511A1 (fr) 2009-12-01 2010-11-24 Procede de structuration de surface par abrasion ionique, surface structuree et utilisations

Publications (1)

Publication Number Publication Date
EA201290412A1 true EA201290412A1 (ru) 2012-12-28

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Family Applications (1)

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EA201290412A EA201290412A1 (ru) 2009-12-01 2010-11-24 Способ структурирования поверхности ионным травлением, структурированная поверхность и применения

Country Status (9)

Country Link
US (1) US9371250B2 (ru)
EP (1) EP2507183A1 (ru)
JP (1) JP6050118B2 (ru)
KR (1) KR101874127B1 (ru)
CN (1) CN102712527B (ru)
BR (1) BR112012013341A2 (ru)
EA (1) EA201290412A1 (ru)
FR (1) FR2953213B1 (ru)
WO (1) WO2011067511A1 (ru)

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US9154138B2 (en) 2013-10-11 2015-10-06 Palo Alto Research Center Incorporated Stressed substrates for transient electronic systems
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US9622483B2 (en) 2014-02-19 2017-04-18 Corning Incorporated Antimicrobial glass compositions, glasses and polymeric articles incorporating the same
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US9780044B2 (en) 2015-04-23 2017-10-03 Palo Alto Research Center Incorporated Transient electronic device with ion-exchanged glass treated interposer
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JP7119417B2 (ja) * 2018-02-22 2022-08-17 Ａｇｃ株式会社 透光性構造体
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CN112960910A (zh) * 2021-01-29 2021-06-15 深圳市宏海福新材料有限公司 一种长效易洁防雾玻璃镜片及其制作方法
CN112979172B (zh) * 2021-02-05 2022-12-27 业成科技（成都）有限公司 基板表面结构的制造方法
CN115724591A (zh) * 2021-08-31 2023-03-03 广东艾檬电子科技有限公司 基于电场控制的微孔加工方法

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Also Published As

Publication number Publication date
FR2953213B1 (fr) 2013-03-29
EP2507183A1 (fr) 2012-10-10
KR20120117997A (ko) 2012-10-25
CN102712527A (zh) 2012-10-03
JP6050118B2 (ja) 2016-12-21
KR101874127B1 (ko) 2018-07-03
BR112012013341A2 (pt) 2016-03-01
US20120288676A1 (en) 2012-11-15
CN102712527B (zh) 2015-10-07
JP2013512178A (ja) 2013-04-11
US9371250B2 (en) 2016-06-21
WO2011067511A1 (fr) 2011-06-09
FR2953213A1 (fr) 2011-06-03

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