EA031170B9 - Способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах - Google Patents

Способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах

Info

Publication number
EA031170B9
EA031170B9 EA201690385A EA201690385A EA031170B9 EA 031170 B9 EA031170 B9 EA 031170B9 EA 201690385 A EA201690385 A EA 201690385A EA 201690385 A EA201690385 A EA 201690385A EA 031170 B9 EA031170 B9 EA 031170B9
Authority
EA
Eurasian Patent Office
Prior art keywords
layer
short circuit
metal
display device
light emitting
Prior art date
Application number
EA201690385A
Other languages
English (en)
Other versions
EA201690385A1 (ru
EA031170B1 (ru
Inventor
Кай-Юань Ко
Original Assignee
Шэньчжэнь Чайна Стар Оптоэлектроникс Текнолоджи Ко., Лтд.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Шэньчжэнь Чайна Стар Оптоэлектроникс Текнолоджи Ко., Лтд. filed Critical Шэньчжэнь Чайна Стар Оптоэлектроникс Текнолоджи Ко., Лтд.
Publication of EA201690385A1 publication Critical patent/EA201690385A1/ru
Publication of EA031170B1 publication Critical patent/EA031170B1/ru
Publication of EA031170B9 publication Critical patent/EA031170B9/ru

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • H01L27/1244—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits for preventing breakage, peeling or short circuiting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00—Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301—Details of OLEDs
    • H10K2102/341—Short-circuit prevention

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

Предложен способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах. Способ включает в себя формирование неорганического слоя на подложке; формирование металлического слоя, содержащего две металлические дорожки, на неорганическом слое; формирование органического слоя на двух металлических дорожках; формирование слоя оксида индия-олова на органическом слое; нанесение покрытия фоторезистивного слоя; выполнение этапа экспонирования фоторезистивного слоя с помощью фотошаблона, имеющего прозрачную область, непрозрачный материал, расположенный в прозрачной области, при этом ширина непрозрачного материала меньше ширины прозрачной области; выполнение этапа проявления фоторезистивного слоя и выполнение этапа травления для удаления части слоя оксида индия-олова и части органического слоя. Настоящее изобретение может предотвратить короткое замыкание между металлическими дорожками.
EA201690385A 2013-08-19 2013-11-28 Способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах EA031170B9 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310361689.6A CN103426820B (zh) 2013-08-19 2013-08-19 避免有机发光二极管显示设备中金属线路短路的方法
PCT/CN2013/088056 WO2015024321A1 (zh) 2013-08-19 2013-11-28 避免有机发光二极管显示设备中金属线路短路的方法

Publications (3)

Publication Number Publication Date
EA201690385A1 EA201690385A1 (ru) 2016-07-29
EA031170B1 EA031170B1 (ru) 2018-11-30
EA031170B9 true EA031170B9 (ru) 2019-03-29

Family

ID=49651372

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201690385A EA031170B9 (ru) 2013-08-19 2013-11-28 Способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах

Country Status (7)

Country Link
US (1) US9076992B2 (ru)
JP (1) JP6096390B2 (ru)
KR (1) KR101790104B1 (ru)
CN (1) CN103426820B (ru)
EA (1) EA031170B9 (ru)
GB (1) GB2534055B (ru)
WO (1) WO2015024321A1 (ru)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103441099B (zh) * 2013-08-19 2015-04-22 深圳市华星光电技术有限公司 避免有机发光二极管显示设备中金属线路短路的方法
CN104868224B (zh) * 2014-02-21 2018-07-06 联想(北京)有限公司 一种电子设备
WO2017146058A1 (ja) * 2016-02-22 2017-08-31 シャープ株式会社 半導体装置および半導体装置の製造方法
JP7220320B2 (ja) * 2017-10-30 2023-02-09 株式会社ジャパンディスプレイ 半導体装置
CN111430435B (zh) * 2020-04-15 2022-12-06 京东方科技集团股份有限公司 显示面板、显示装置以及显示面板的制造方法
CN112635493B (zh) * 2020-12-21 2022-09-20 昆山国显光电有限公司 显示面板的制备方法、显示面板和显示装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3305235B2 (ja) * 1997-07-01 2002-07-22 松下電器産業株式会社 アクティブ素子アレイ基板
JP2001109395A (ja) * 1999-10-01 2001-04-20 Sanyo Electric Co Ltd Ｅｌ表示装置
KR100413668B1 (ko) * 2001-03-29 2003-12-31 엘지.필립스 엘시디 주식회사 액정표시장치용 어레이기판 제조방법
JP4869497B2 (ja) * 2001-05-30 2012-02-08 株式会社半導体エネルギー研究所 表示装置
TW548862B (en) * 2002-05-30 2003-08-21 Au Optronics Corp Method of preventing anode of active matrix organic light emitting diode from breaking
JP2004030977A (ja) 2002-06-21 2004-01-29 Samsung Nec Mobile Display Co Ltd 有機電界発光素子の製造方法
KR100858802B1 (ko) * 2002-07-31 2008-09-17 삼성에스디아이 주식회사 전자 발광 소자의 제조방법
CA2412379A1 (en) * 2002-11-22 2004-05-22 Luxell Technolgies Inc. Transparent-cathode for top-emission organic light-emitting diodes
JP4193170B2 (ja) 2003-01-09 2008-12-10 富士電機ホールディングス株式会社 表示素子の欠陥修復方法
JP4741177B2 (ja) * 2003-08-29 2011-08-03 株式会社半導体エネルギー研究所 表示装置の作製方法
KR100903101B1 (ko) 2005-02-07 2009-06-16 삼성모바일디스플레이주식회사 유기전계 발광표시장치 및 그의 제조방법
JP5235269B2 (ja) * 2005-12-19 2013-07-10 エルジー ディスプレイ カンパニー リミテッド 画像表示装置およびその製造方法
US20080258138A1 (en) * 2007-04-23 2008-10-23 Samsung Electronics Co., Ltd. Thin film transistor array panel and fabricating method thereof, and flat panel display with the same
JP2008309985A (ja) * 2007-06-14 2008-12-25 Toppan Printing Co Ltd カラーフィルタ用フォトマスク及びそれを用いたカラーフィルタの製造方法
JP2009110793A (ja) * 2007-10-30 2009-05-21 Kyocera Corp 画像表示装置の製造方法およびそれに用いる露光マスク
JP5046915B2 (ja) * 2007-12-27 2012-10-10 京セラ株式会社 表示装置用基板、表示装置、及び表示装置用基板の製造方法
JP5565047B2 (ja) * 2010-03-31 2014-08-06 大日本印刷株式会社 有機エレクトロルミネッセンス素子およびその製造方法
KR101212225B1 (ko) * 2010-05-06 2012-12-13 삼성디스플레이 주식회사 유기 발광 표시 장치
CN102034935B (zh) * 2010-09-27 2012-07-04 南京邮电大学 高对比度顶发光型有机发光二极管
JP2012235310A (ja) 2011-04-28 2012-11-29 Sony Corp 信号処理装置および方法、プログラム、並びにデータ記録媒体
KR20140007688A (ko) * 2012-07-10 2014-01-20 삼성디스플레이 주식회사 쇼트 불량 리페어 방법, 상기 리페어 방법에 의해 제조된 표시 장치 및 유기 발광 표시 장치
CN102751312B (zh) * 2012-07-27 2015-10-28 南京中电熊猫液晶显示科技有限公司 一种oled显示器及其制造方法

Also Published As

Publication number Publication date
WO2015024321A1 (zh) 2015-02-26
KR20160034381A (ko) 2016-03-29
JP6096390B2 (ja) 2017-03-15
CN103426820A (zh) 2013-12-04
EA201690385A1 (ru) 2016-07-29
CN103426820B (zh) 2015-04-22
US9076992B2 (en) 2015-07-07
KR101790104B1 (ko) 2017-10-25
JP2016527692A (ja) 2016-09-08
EA031170B1 (ru) 2018-11-30
GB2534055B (en) 2019-01-02
US20150140714A1 (en) 2015-05-21
GB201603702D0 (en) 2016-04-20
GB2534055A (en) 2016-07-13

Similar Documents

Publication Publication Date Title
EA031170B9 (ru) Способ предотвращения короткого замыкания между металлическими дорожками в дисплее на органических светодиодах
TW201613087A (en) Organic light emitting display device
TW201614870A (en) Semiconductor light emitting device and method for manufacturing the same
MY170159A (en) Organic light emitting diode with light extracting layer
JP2012008541A5 (ja) 光検出装置、及び、タッチパネル
JP2015529959A5 (ru)
JP2010198415A5 (ru)
JP2010166038A5 (ru)
IN2014DN03390A (ru)
JP2012048264A5 (ja) 半導体装置
JP2010062549A5 (ja) 半導体装置の作製方法、及び半導体装置
EP2983044A3 (en) Halftone phase shift photomask blank and making method
TW201614890A (en) Electroluminescent devices for lighting applications
TW200708181A (en) Organic electroluminescent display panel and fabricatiing method thereof
JP2015144233A5 (ru)
JP2014235958A5 (ru)
BR112015030081A2 (pt) laminados de vitrificação que redirecionam luz do dia
TW200729476A (en) Organic light emitting display and method of fabricating the same
TW201613156A (en) Light-emitting device, module, and electronic device
SG11201807712YA (en) Method for manufacturing reflective mask blank, reflective mask blank, method for manufacturing reflective mask, reflective mask, and method for manufacturing semiconductor device
GB201217534D0 (en) Display device
SG11201907839RA (en) Phase shift mask blank, phase shift mask and manufacturing method for phase shift mask
TW201614825A (en) Organic light emitting diode display device
EA201492043A1 (ru) Органическое фотонное устройство
EA201890520A1 (ru) Гибкая сенсорная панель и дисплейная oled-панель

Legal Events

Date Code Title Description
TH4A Publication of the corrected specification to eurasian patent
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ BY KZ KG TJ TM