DK3997741T3 - Bagsideemitter-solcellestruktur med en heteroovergang samt fremgangsmåde og apparat til fremstilling af denne - Google Patents

Bagsideemitter-solcellestruktur med en heteroovergang samt fremgangsmåde og apparat til fremstilling af denne Download PDF

Info

Publication number
DK3997741T3
DK3997741T3 DK20760910.8T DK20760910T DK3997741T3 DK 3997741 T3 DK3997741 T3 DK 3997741T3 DK 20760910 T DK20760910 T DK 20760910T DK 3997741 T3 DK3997741 T3 DK 3997741T3
Authority
DK
Denmark
Prior art keywords
hetero
junction
manufacture
solar cell
same
Prior art date
Application number
DK20760910.8T
Other languages
English (en)
Inventor
Jun Zhao
Marcel König
Original Assignee
Meyer Burger Germany Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=72193503&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK3997741(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Meyer Burger Germany Gmbh filed Critical Meyer Burger Germany Gmbh
Application granted granted Critical
Publication of DK3997741T3 publication Critical patent/DK3997741T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0224—Electrodes
    • H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
    • H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Photovoltaic Devices (AREA)
DK20760910.8T 2019-09-05 2020-07-31 Bagsideemitter-solcellestruktur med en heteroovergang samt fremgangsmåde og apparat til fremstilling af denne DK3997741T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102019123785.8A DE102019123785A1 (de) 2019-09-05 2019-09-05 Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben
PCT/IB2020/057263 WO2021044232A1 (de) 2019-09-05 2020-07-31 Rückseitenemitter-solarzellenstruktur mit einem heteroübergang sowie verfahren und vorrichtung zur herstellung derselben

Publications (1)

Publication Number Publication Date
DK3997741T3 true DK3997741T3 (da) 2023-06-26

Family

ID=72193503

Family Applications (1)

Application Number Title Priority Date Filing Date
DK20760910.8T DK3997741T3 (da) 2019-09-05 2020-07-31 Bagsideemitter-solcellestruktur med en heteroovergang samt fremgangsmåde og apparat til fremstilling af denne

Country Status (15)

Country Link
EP (2) EP4203078A1 (da)
JP (1) JP2022547903A (da)
CN (1) CN113302751B (da)
AU (1) AU2020343894A1 (da)
DE (1) DE102019123785A1 (da)
DK (1) DK3997741T3 (da)
ES (1) ES2948512T3 (da)
FI (1) FI3997741T3 (da)
HR (1) HRP20230567T1 (da)
HU (1) HUE062220T2 (da)
PL (1) PL3997741T3 (da)
PT (1) PT3997741T (da)
SI (1) SI3997741T1 (da)
TW (1) TW202129988A (da)
WO (1) WO2021044232A1 (da)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019123785A1 (de) 2019-09-05 2021-03-11 Meyer Burger (Germany) Gmbh Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben
DE102019123758A1 (de) 2019-09-05 2021-03-11 Schaeffler Technologies AG & Co. KG Wellgetriebe zur variablen Ventilsteuerung einer Brennkraftmaschine
FR3131083B1 (fr) 2021-12-16 2024-09-20 Commissariat Energie Atomique Cellule photovoltaïque a contacts passives et a revêtement antireflet

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3825585B2 (ja) 1999-07-26 2006-09-27 三洋電機株式会社 光起電力素子の製造方法
JP4171428B2 (ja) 2003-03-20 2008-10-22 三洋電機株式会社 光起電力装置
EP2439780B1 (en) 2005-02-25 2019-10-02 Panasonic Intellectual Property Management Co., Ltd. Photovoltaic cell
JP5127252B2 (ja) * 2007-02-02 2013-01-23 京セラ株式会社 光電変換素子の製造方法
US20090211627A1 (en) * 2008-02-25 2009-08-27 Suniva, Inc. Solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation
JP2012501550A (ja) 2008-08-27 2012-01-19 アプライド マテリアルズ インコーポレイテッド 印刷誘電体障壁を使用するバックコンタクト太陽電池
US20110068367A1 (en) 2009-09-23 2011-03-24 Sierra Solar Power, Inc. Double-sided heterojunction solar cell based on thin epitaxial silicon
US20120085397A1 (en) 2010-10-11 2012-04-12 Choul Kim Solar cell
JP2011023759A (ja) 2010-11-02 2011-02-03 Sanyo Electric Co Ltd 光起電力素子の製造方法
JP5496856B2 (ja) 2010-11-02 2014-05-21 三洋電機株式会社 光起電力素子の製造方法
JP2012243797A (ja) * 2011-05-16 2012-12-10 Mitsubishi Electric Corp 太陽電池の製造方法
DE102012104289A1 (de) * 2012-05-16 2013-11-21 Roth & Rau Ag Heterokontakt-Solarzelle und Verfahren zu deren Herstellung
EP2682990B2 (en) 2012-07-02 2023-11-22 Meyer Burger (Germany) GmbH Methods of manufacturing hetero-junction solar cells with edge isolation
JP5868290B2 (ja) * 2012-08-23 2016-02-24 三菱電機株式会社 光起電力装置およびその製造方法
JP5908095B2 (ja) * 2012-08-29 2016-04-26 三菱電機株式会社 光起電力素子およびその製造方法
CN104795463B (zh) 2014-01-21 2017-02-15 上海理想万里晖薄膜设备有限公司 一种生产异质结太阳能电池的pecvd设备及工作方法
CN105154852A (zh) 2014-06-12 2015-12-16 上海理想万里晖薄膜设备有限公司 异质结太阳能电池pecvd工艺受硼污染解决方法
CN106601855A (zh) 2015-10-14 2017-04-26 钧石(中国)能源有限公司 一种双面发电异质结太阳能电池的制备方法
KR101778128B1 (ko) 2016-01-20 2017-09-13 엘지전자 주식회사 태양전지
CN109004053B (zh) 2017-06-06 2024-03-29 通威太阳能（成都）有限公司 双面受光的晶体硅/薄膜硅异质结太阳电池及制作方法
CN108091719A (zh) 2017-11-15 2018-05-29 君泰创新（北京）科技有限公司 异质结太阳能电池及其制备方法
CN109256440A (zh) 2018-09-17 2019-01-22 浙江爱旭太阳能科技有限公司 一种选择性钝化接触晶体硅太阳能电池及其制备方法
CN109411551B (zh) 2018-12-13 2023-12-15 江苏爱康能源研究院有限公司 多步沉积的高效晶硅异质结太阳能电池电极结构及其制备方法
CN109461780B (zh) 2018-12-13 2023-12-15 江苏爱康能源研究院有限公司 高匹配度的高效晶硅异质结太阳能电池电极结构及其制备方法
CN209328935U (zh) * 2019-03-06 2019-08-30 中国科学院上海微系统与信息技术研究所 镀膜设备
JP2020161551A (ja) * 2019-03-25 2020-10-01 パナソニック株式会社 太陽電池セル及び太陽電池モジュール
DE102019123785A1 (de) 2019-09-05 2021-03-11 Meyer Burger (Germany) Gmbh Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben

Also Published As

Publication number Publication date
FI3997741T3 (fi) 2023-06-20
EP3997741A1 (de) 2022-05-18
EP3997741B1 (de) 2023-03-29
AU2020343894A1 (en) 2022-02-24
CN113302751A (zh) 2021-08-24
ES2948512T3 (es) 2023-09-13
TW202129988A (zh) 2021-08-01
WO2021044232A1 (de) 2021-03-11
PT3997741T (pt) 2023-06-21
HRP20230567T1 (hr) 2023-09-15
CN113302751B (zh) 2022-07-12
EP4203078A1 (de) 2023-06-28
DE102019123785A1 (de) 2021-03-11
JP2022547903A (ja) 2022-11-16
HUE062220T2 (hu) 2023-10-28
PL3997741T3 (pl) 2023-09-11
SI3997741T1 (sl) 2023-10-30

Similar Documents

Publication Publication Date Title
EP3843448A4 (en) CELL MEASUREMENT PROCESS AND DEVICE
DK3997741T3 (da) Bagsideemitter-solcellestruktur med en heteroovergang samt fremgangsmåde og apparat til fremstilling af denne
DK3566225T3 (da) Metode og apparat til detektering af hoste i baggrunden
ZA201804730B (en) Thin-film solar cell
SG11202006781PA (en) Cell reselection method, apparatus and system
DK3045925T3 (da) Fremgangsmåde og system til iterativ bestemmelse af ladetilstanden for en battericelle
EP3739037A4 (en) CELL CULTURE PROCESS AND DEVICE
HUE065776T2 (hu) Egységcella beállító berendezés és elektróda elrendezés elõállítására szolgáló eljárás a berendezés alkalmazásával
EP3664157C0 (en) SOLAR CELL AND METHOD FOR THE PRODUCTION THEREOF
IL280549A (en) Material and method for manufacturing a cell-receiving scaffold
DK3912203T3 (da) Battericellemodul, placeringsapparat til fremstilling af battericellemoduler samt fremgangsmåde til fremstilling af battericellemoduler
DK3669988T3 (da) Materialereducerende apparat med et system til at gøre det muligt for en reducerende rotor at blive selektivt konfigureret i flere forskellige reducerende konfigurationer
EP3743121A4 (en) CELL CULTURE DEVICE AND METHOD
DK3969640T3 (da) Elektrolysecelle og fremgangsmåde til fremstilling af elektrolysecellen
EP4024947A4 (en) CELL RESELECTION METHOD AND DEVICE
EP3745150C0 (en) METHOD AND DEVICE FOR DETERMINING THE DEGRADATION OF A BATTERY MODULE OR A BATTERY CELL
DK3638902T3 (da) Apparat og fremgangsmåder til at bestemme isdannelsesrisiko i vindmøller
PL3675224T3 (pl) Aparat do mocowania ogniwa akumulatorowego i sposób mocowania ogniwa akumulatorowego
EP3780731A4 (en) INTERCELLULAR TRANSFER PROCESS AND DEVICE
SG11202012280YA (en) Cell culture system and cell culture method
SG11202012278XA (en) Cell culture system and cell culture method
IL283007A (en) System and method for cell culture
SG11202006336QA (en) Endcap, assembly and method for improving accuracy in fiber-endcap-fixture alignment
DK3966929T3 (da) Solcellemodulholdeanordning og fremgangsmåde til fremstilling af en solcellemodulholdeanordning
DK3730697T3 (da) Adapter til et hurtigskiftesystem og hurtigskiftesystem med en sådan adapter