HUE062220T2 - Heteroátmenettel rendelkezõ hátoldali kibocsátású napelemszerkezet, valamint eljárás és berendezés ennek elõállítására - Google Patents

Heteroátmenettel rendelkezõ hátoldali kibocsátású napelemszerkezet, valamint eljárás és berendezés ennek elõállítására

Info

Publication number
HUE062220T2
HUE062220T2 HUE20760910A HUE20760910A HUE062220T2 HU E062220 T2 HUE062220 T2 HU E062220T2 HU E20760910 A HUE20760910 A HU E20760910A HU E20760910 A HUE20760910 A HU E20760910A HU E062220 T2 HUE062220 T2 HU E062220T2
Authority
HU
Hungary
Prior art keywords
heterojunction
solar cell
cell structure
producing same
emitter solar
Prior art date
Application number
HUE20760910A
Other languages
English (en)
Inventor
Jun Zhao
Marcel Koenig
Original Assignee
Meyer Burger Germany Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=72193503&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=HUE062220(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Meyer Burger Germany Gmbh filed Critical Meyer Burger Germany Gmbh
Publication of HUE062220T2 publication Critical patent/HUE062220T2/hu

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
    • H01L31/072Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
    • H01L31/0745Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
    • H01L31/0747Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0224Electrodes
    • H01L31/022408Electrodes for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/022425Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Energy (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Photovoltaic Devices (AREA)
HUE20760910A 2019-09-05 2020-07-31 Heteroátmenettel rendelkezõ hátoldali kibocsátású napelemszerkezet, valamint eljárás és berendezés ennek elõállítására HUE062220T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102019123785.8A DE102019123785A1 (de) 2019-09-05 2019-09-05 Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben

Publications (1)

Publication Number Publication Date
HUE062220T2 true HUE062220T2 (hu) 2023-10-28

Family

ID=72193503

Family Applications (1)

Application Number Title Priority Date Filing Date
HUE20760910A HUE062220T2 (hu) 2019-09-05 2020-07-31 Heteroátmenettel rendelkezõ hátoldali kibocsátású napelemszerkezet, valamint eljárás és berendezés ennek elõállítására

Country Status (15)

Country Link
EP (2) EP4203078A1 (hu)
JP (1) JP2022547903A (hu)
CN (1) CN113302751B (hu)
AU (1) AU2020343894A1 (hu)
DE (1) DE102019123785A1 (hu)
DK (1) DK3997741T3 (hu)
ES (1) ES2948512T3 (hu)
FI (1) FI3997741T3 (hu)
HR (1) HRP20230567T1 (hu)
HU (1) HUE062220T2 (hu)
PL (1) PL3997741T3 (hu)
PT (1) PT3997741T (hu)
SI (1) SI3997741T1 (hu)
TW (1) TW202129988A (hu)
WO (1) WO2021044232A1 (hu)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019123785A1 (de) 2019-09-05 2021-03-11 Meyer Burger (Germany) Gmbh Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben
DE102019123758A1 (de) 2019-09-05 2021-03-11 Schaeffler Technologies AG & Co. KG Wellgetriebe zur variablen Ventilsteuerung einer Brennkraftmaschine
FR3131083A1 (fr) * 2021-12-16 2023-06-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Cellule photovoltaïque a contacts passives et a revêtement antireflet

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3825585B2 (ja) 1999-07-26 2006-09-27 三洋電機株式会社 光起電力素子の製造方法
JP4171428B2 (ja) 2003-03-20 2008-10-22 三洋電機株式会社 光起電力装置
US7781669B2 (en) 2005-02-25 2010-08-24 Sanyo Electric Co., Ltd. Photovoltaic cell
JP5127252B2 (ja) 2007-02-02 2013-01-23 京セラ株式会社 光電変換素子の製造方法
US20090211627A1 (en) * 2008-02-25 2009-08-27 Suniva, Inc. Solar cell having crystalline silicon p-n homojunction and amorphous silicon heterojunctions for surface passivation
US7951637B2 (en) 2008-08-27 2011-05-31 Applied Materials, Inc. Back contact solar cells using printed dielectric barrier
US20110068367A1 (en) 2009-09-23 2011-03-24 Sierra Solar Power, Inc. Double-sided heterojunction solar cell based on thin epitaxial silicon
US20120085397A1 (en) 2010-10-11 2012-04-12 Choul Kim Solar cell
JP5496856B2 (ja) 2010-11-02 2014-05-21 三洋電機株式会社 光起電力素子の製造方法
JP2011023759A (ja) 2010-11-02 2011-02-03 Sanyo Electric Co Ltd 光起電力素子の製造方法
JP2012243797A (ja) * 2011-05-16 2012-12-10 Mitsubishi Electric Corp 太陽電池の製造方法
DE102012104289A1 (de) * 2012-05-16 2013-11-21 Roth & Rau Ag Heterokontakt-Solarzelle und Verfahren zu deren Herstellung
EP2682990B2 (en) 2012-07-02 2023-11-22 Meyer Burger (Germany) GmbH Methods of manufacturing hetero-junction solar cells with edge isolation
JP5868290B2 (ja) * 2012-08-23 2016-02-24 三菱電機株式会社 光起電力装置およびその製造方法
CN104584237B (zh) * 2012-08-29 2017-03-08 三菱电机株式会社 光生伏打元件及其制造方法
CN104795463B (zh) 2014-01-21 2017-02-15 上海理想万里晖薄膜设备有限公司 一种生产异质结太阳能电池的pecvd设备及工作方法
CN105154852A (zh) 2014-06-12 2015-12-16 上海理想万里晖薄膜设备有限公司 异质结太阳能电池pecvd工艺受硼污染解决方法
CN106601855A (zh) * 2015-10-14 2017-04-26 钧石(中国)能源有限公司 一种双面发电异质结太阳能电池的制备方法
KR101778128B1 (ko) 2016-01-20 2017-09-13 엘지전자 주식회사 태양전지
CN109004053B (zh) 2017-06-06 2024-03-29 通威太阳能(成都)有限公司 双面受光的晶体硅/薄膜硅异质结太阳电池及制作方法
CN108091719A (zh) 2017-11-15 2018-05-29 君泰创新(北京)科技有限公司 异质结太阳能电池及其制备方法
CN109256440A (zh) 2018-09-17 2019-01-22 浙江爱旭太阳能科技有限公司 一种选择性钝化接触晶体硅太阳能电池及其制备方法
CN109411551B (zh) 2018-12-13 2023-12-15 江苏爱康能源研究院有限公司 多步沉积的高效晶硅异质结太阳能电池电极结构及其制备方法
CN109461780B (zh) 2018-12-13 2023-12-15 江苏爱康能源研究院有限公司 高匹配度的高效晶硅异质结太阳能电池电极结构及其制备方法
CN209328935U (zh) * 2019-03-06 2019-08-30 中国科学院上海微系统与信息技术研究所 镀膜设备
JP2020161551A (ja) * 2019-03-25 2020-10-01 パナソニック株式会社 太陽電池セル及び太陽電池モジュール
DE102019123785A1 (de) 2019-09-05 2021-03-11 Meyer Burger (Germany) Gmbh Rückseitenemitter-Solarzellenstruktur mit einem Heteroübergang sowie Verfahren und Vorrichtung zur Herstellung derselben

Also Published As

Publication number Publication date
DK3997741T3 (da) 2023-06-26
DE102019123785A1 (de) 2021-03-11
CN113302751A (zh) 2021-08-24
SI3997741T1 (sl) 2023-10-30
EP3997741A1 (de) 2022-05-18
HRP20230567T1 (hr) 2023-09-15
PT3997741T (pt) 2023-06-21
TW202129988A (zh) 2021-08-01
JP2022547903A (ja) 2022-11-16
EP3997741B1 (de) 2023-03-29
PL3997741T3 (pl) 2023-09-11
CN113302751B (zh) 2022-07-12
FI3997741T3 (fi) 2023-06-20
AU2020343894A1 (en) 2022-02-24
EP4203078A1 (de) 2023-06-28
WO2021044232A1 (de) 2021-03-11
ES2948512T3 (es) 2023-09-13

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