DK381276A - Fremgangsmade til fremstilling af halvlederenkrystaller med indstillelig koncentration af doteringsstoffer - Google Patents
Fremgangsmade til fremstilling af halvlederenkrystaller med indstillelig koncentration af doteringsstofferInfo
- Publication number
- DK381276A DK381276A DK381276A DK381276A DK381276A DK 381276 A DK381276 A DK 381276A DK 381276 A DK381276 A DK 381276A DK 381276 A DK381276 A DK 381276A DK 381276 A DK381276 A DK 381276A
- Authority
- DK
- Denmark
- Prior art keywords
- dotors
- procedure
- preparation
- semiconductor crystals
- adjustable concentration
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
- C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19752542867 DE2542867A1 (de) | 1975-09-25 | 1975-09-25 | Verfahren zur herstellung von halbleitereinkristallen mit einstellbarer dotierstoffkonzentration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK381276A true DK381276A (da) | 1977-03-26 |
Family
ID=5957446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK381276A DK381276A (da) | 1975-09-25 | 1976-08-24 | Fremgangsmade til fremstilling af halvlederenkrystaller med indstillelig koncentration af doteringsstoffer |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5240966A (de) |
| BE (1) | BE846557A (de) |
| DE (1) | DE2542867A1 (de) |
| DK (1) | DK381276A (de) |
| FR (1) | FR2325425A1 (de) |
| IT (1) | IT1066181B (de) |
| NL (1) | NL7609300A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59156993A (ja) * | 1983-02-23 | 1984-09-06 | Komatsu Denshi Kinzoku Kk | Ｃｚ単結晶のド−プ方法およびその装置 |
| JPS61227986A (ja) * | 1985-03-30 | 1986-10-11 | Shin Etsu Handotai Co Ltd | 単結晶シリコン棒の製造方法 |
| DE19936838A1 (de) * | 1999-08-05 | 2001-02-15 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung eines mit Stickstoff dotierten Einkristalls |
| EP1282733A1 (de) * | 2000-05-10 | 2003-02-12 | MEMC Electronic Materials, Inc. | Verfahren und vorrichtung zur zuführung von arsen als dotierungsstoff bei einem verfahren zur züchtung von siliziumeinkristallen |
| WO2003027362A1 (en) * | 2001-09-28 | 2003-04-03 | Memc Electronic Materials, Inc. | Process for preparing an arsenic-doped single crystal silicon using a submersed dopant feeder |
| US7922817B2 (en) | 2008-04-24 | 2011-04-12 | Memc Electronic Materials, Inc. | Method and device for feeding arsenic dopant into a silicon crystal growing apparatus |
-
1975
- 1975-09-25 DE DE19752542867 patent/DE2542867A1/de active Pending
-
1976
- 1976-07-23 JP JP8737476A patent/JPS5240966A/ja active Pending
- 1976-08-20 NL NL7609300A patent/NL7609300A/xx not_active Application Discontinuation
- 1976-08-24 DK DK381276A patent/DK381276A/da unknown
- 1976-09-22 IT IT5138376A patent/IT1066181B/it active
- 1976-09-24 BE BE170910A patent/BE846557A/xx unknown
- 1976-09-24 FR FR7628759A patent/FR2325425A1/fr not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240966A (en) | 1977-03-30 |
| DE2542867A1 (de) | 1977-03-31 |
| FR2325425A1 (fr) | 1977-04-22 |
| NL7609300A (nl) | 1977-03-29 |
| IT1066181B (it) | 1985-03-04 |
| BE846557A (fr) | 1977-03-24 |
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