BE846557A - Procede de preparation de monocristaux semiconducteurs a concentration reglable en dopant - Google Patents

Procede de preparation de monocristaux semiconducteurs a concentration reglable en dopant

Info

Publication number
BE846557A
BE846557A BE170910A BE170910A BE846557A BE 846557 A BE846557 A BE 846557A BE 170910 A BE170910 A BE 170910A BE 170910 A BE170910 A BE 170910A BE 846557 A BE846557 A BE 846557A
Authority
BE
Belgium
Prior art keywords
doping concentration
single crystals
semiconductor single
preparing semiconductor
adjustable doping
Prior art date
Application number
BE170910A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE846557A publication Critical patent/BE846557A/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE170910A 1975-09-25 1976-09-24 Procede de preparation de monocristaux semiconducteurs a concentration reglable en dopant BE846557A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752542867 DE2542867A1 (de) 1975-09-25 1975-09-25 Verfahren zur herstellung von halbleitereinkristallen mit einstellbarer dotierstoffkonzentration

Publications (1)

Publication Number Publication Date
BE846557A true BE846557A (fr) 1977-03-24

Family

ID=5957446

Family Applications (1)

Application Number Title Priority Date Filing Date
BE170910A BE846557A (fr) 1975-09-25 1976-09-24 Procede de preparation de monocristaux semiconducteurs a concentration reglable en dopant

Country Status (7)

Country Link
JP (1) JPS5240966A (fr)
BE (1) BE846557A (fr)
DE (1) DE2542867A1 (fr)
DK (1) DK381276A (fr)
FR (1) FR2325425A1 (fr)
IT (1) IT1066181B (fr)
NL (1) NL7609300A (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156993A (ja) * 1983-02-23 1984-09-06 Komatsu Denshi Kinzoku Kk Ｃｚ単結晶のド−プ方法およびその装置
JPS61227986A (ja) * 1985-03-30 1986-10-11 Shin Etsu Handotai Co Ltd 単結晶シリコン棒の製造方法
DE19936838A1 (de) * 1999-08-05 2001-02-15 Wacker Siltronic Halbleitermat Verfahren zur Herstellung eines mit Stickstoff dotierten Einkristalls
CN1432075A (zh) * 2000-05-10 2003-07-23 Memc电子材料有限公司 用于将砷掺杂剂加入硅晶体生长工艺中的方法和装置
WO2003027362A1 (fr) * 2001-09-28 2003-04-03 Memc Electronic Materials, Inc. Procede de preparation de silicium monocristallin dope a l'arsenic au moyen d'un distributeur de dopants immerge
US7922817B2 (en) 2008-04-24 2011-04-12 Memc Electronic Materials, Inc. Method and device for feeding arsenic dopant into a silicon crystal growing apparatus

Also Published As

Publication number Publication date
DK381276A (da) 1977-03-26
DE2542867A1 (de) 1977-03-31
JPS5240966A (en) 1977-03-30
IT1066181B (it) 1985-03-04
FR2325425A1 (fr) 1977-04-22
NL7609300A (nl) 1977-03-29

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