DK3167694T4 - Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter, inklusiv graphen - Google Patents

Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter, inklusiv graphen Download PDF

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Publication number
DK3167694T4
DK3167694T4 DK15730237.3T DK15730237T DK3167694T4 DK 3167694 T4 DK3167694 T4 DK 3167694T4 DK 15730237 T DK15730237 T DK 15730237T DK 3167694 T4 DK3167694 T4 DK 3167694T4
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Denmark
Prior art keywords
including graphene
graphite products
plasma synthesis
plasma
synthesis
Prior art date
Application number
DK15730237.3T
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English (en)
Other versions
DK3167694T5 (da
DK3167694T3 (da
Inventor
Dale Andrew Pennington
Aaron Robert Clayton
Katarzyna Luiza Juda
Catharina Paukner
Lukasz Kurzepa
John Cooper Robert Henry St
Krzysztof Kazimierz Koziol
Jerome Yi-Zhe Joaug
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Levidian Nanosystems Ltd
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=51266610&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DK3167694(T4) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Levidian Nanosystems Ltd filed Critical Levidian Nanosystems Ltd
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Publication of DK3167694T3 publication Critical patent/DK3167694T3/da
Publication of DK3167694T4 publication Critical patent/DK3167694T4/da
Publication of DK3167694T5 publication Critical patent/DK3167694T5/da

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/126—Microwaves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
    • B01J19/122—Incoherent waves
    • B01J19/129—Radiofrequency
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/15—Nano-sized carbon materials
    • C01B32/182—Graphene
    • C01B32/184—Preparation
    • C01B32/186—Preparation by chemical vapour deposition [CVD]
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/4622—Microwave discharges using waveguides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0869—Feeding or evacuating the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0892—Materials to be treated involving catalytically active material
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2204/00—Structure or properties of graphene
    • C01B2204/04—Specific amount of layers or specific thickness

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electromagnetism (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nanotechnology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Plasma Technology (AREA)
DK15730237.3T 2014-06-13 2015-06-12 Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter der indbefatter graphen DK3167694T5 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB1410639.7A GB201410639D0 (en) 2014-06-13 2014-06-13 Apparatus and method for plasma synthesis of graphitic products including graphene
PCT/GB2015/051745 WO2015189643A1 (en) 2014-06-13 2015-06-12 Apparatus and method for plasma synthesis of graphitic products including graphene

Publications (3)

Publication Number Publication Date
DK3167694T3 DK3167694T3 (da) 2018-08-06
DK3167694T4 true DK3167694T4 (da) 2022-07-18
DK3167694T5 DK3167694T5 (da) 2022-08-29

Family

ID=51266610

Family Applications (1)

Application Number Title Priority Date Filing Date
DK15730237.3T DK3167694T5 (da) 2014-06-13 2015-06-12 Apparat og fremgangsmåde til plasmasyntese af grafitiske produkter der indbefatter graphen

Country Status (12)

Country Link
US (2) US11802052B2 (da)
EP (1) EP3167694B9 (da)
JP (1) JP6752782B2 (da)
CA (1) CA2951878C (da)
DK (1) DK3167694T5 (da)
GB (2) GB201410639D0 (da)
IL (1) IL249457B (da)
MY (1) MY179001A (da)
PL (1) PL3167694T5 (da)
SA (1) SA516380482B1 (da)
TR (1) TR201809765T4 (da)
WO (1) WO2015189643A1 (da)

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Also Published As

Publication number Publication date
DK3167694T5 (da) 2022-08-29
US20240010499A1 (en) 2024-01-11
GB2527209A (en) 2015-12-16
JP6752782B2 (ja) 2020-09-09
TR201809765T4 (tr) 2018-07-23
GB2527209B (en) 2019-08-28
WO2015189643A1 (en) 2015-12-17
SA516380482B1 (ar) 2023-01-31
GB201510364D0 (en) 2015-07-29
PL3167694T5 (pl) 2022-09-12
EP3167694B1 (en) 2018-05-02
EP3167694B9 (en) 2022-08-10
US20170113935A1 (en) 2017-04-27
JP2017523121A (ja) 2017-08-17
PL3167694T3 (pl) 2018-10-31
GB201410639D0 (en) 2014-07-30
IL249457A0 (en) 2017-02-28
EP3167694B2 (en) 2022-04-13
DK3167694T3 (da) 2018-08-06
US11802052B2 (en) 2023-10-31
CA2951878A1 (en) 2015-12-17
MY179001A (en) 2020-10-26
EP3167694A1 (en) 2017-05-17
IL249457B (en) 2022-01-01
CA2951878C (en) 2023-04-25

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