DK170076B1 - Methylenchloridbaseret middel og fremgangsmåde til fjernelse af fotoresistente folier som baserer sig på anvendelse af midlet - Google Patents

Methylenchloridbaseret middel og fremgangsmåde til fjernelse af fotoresistente folier som baserer sig på anvendelse af midlet Download PDF

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Publication number
DK170076B1
DK170076B1 DK376787A DK376787A DK170076B1 DK 170076 B1 DK170076 B1 DK 170076B1 DK 376787 A DK376787 A DK 376787A DK 376787 A DK376787 A DK 376787A DK 170076 B1 DK170076 B1 DK 170076B1
Authority
DK
Denmark
Prior art keywords
methylene chloride
based agent
photoresistant
agent according
agent
Prior art date
Application number
DK376787A
Other languages
Danish (da)
English (en)
Other versions
DK376787A (da
DK376787D0 (da
Inventor
Michel Campos
Jean-Charles Boussaguet
Jean-Philippe Letullier
Original Assignee
Atochem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atochem filed Critical Atochem
Publication of DK376787D0 publication Critical patent/DK376787D0/da
Publication of DK376787A publication Critical patent/DK376787A/da
Application granted granted Critical
Publication of DK170076B1 publication Critical patent/DK170076B1/da

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/261—Alcohols; Phenols
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C07C17/42—Use of additives, e.g. for stabilisation
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5018—Halogenated solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/028—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons
    • C23G5/02854—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons characterised by the stabilising or corrosion inhibiting additives
    • C23G5/02861—Oxygen-containing compounds
    • C23G5/0288—Epoxy compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/288—Removal of non-metallic coatings, e.g. for repairing
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/263—Ethers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/264—Aldehydes; Ketones; Acetals or ketals
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Wood Science & Technology (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Emergency Medicine (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Detergent Compositions (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Dental Preparations (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Paints Or Removers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
DK376787A 1986-07-21 1987-07-20 Methylenchloridbaseret middel og fremgangsmåde til fjernelse af fotoresistente folier som baserer sig på anvendelse af midlet DK170076B1 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8610529 1986-07-21
FR8610529A FR2601703B1 (fr) 1986-07-21 1986-07-21 Composition a base de chlorure de methylene - son utilisation pour l'enlevement des films photoresist

Publications (3)

Publication Number Publication Date
DK376787D0 DK376787D0 (da) 1987-07-20
DK376787A DK376787A (da) 1988-01-22
DK170076B1 true DK170076B1 (da) 1995-05-15

Family

ID=9337579

Family Applications (1)

Application Number Title Priority Date Filing Date
DK376787A DK170076B1 (da) 1986-07-21 1987-07-20 Methylenchloridbaseret middel og fremgangsmåde til fjernelse af fotoresistente folier som baserer sig på anvendelse af midlet

Country Status (12)

Country Link
EP (1) EP0258079B1 (no)
JP (1) JPS6330848A (no)
AT (1) ATE72679T1 (no)
CA (1) CA1295205C (no)
DE (1) DE3776737D1 (no)
DK (1) DK170076B1 (no)
ES (1) ES2006203A6 (no)
FI (1) FI84630C (no)
FR (1) FR2601703B1 (no)
GR (1) GR3004213T3 (no)
IE (1) IE59867B1 (no)
NO (1) NO173617C (no)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3068622B2 (ja) * 1988-08-30 2000-07-24 キヤノン株式会社 画像処理装置
FR2661918B1 (fr) * 1990-05-10 1992-07-17 Atochem Composition nettoyante a base de 1,1,1,2,2-pentafluoro-3,3-dichloro-propane et de methyl tert-butyl ether.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3625763A (en) * 1968-12-04 1971-12-07 Bunker Ramo Conformal coating stripping method and composition
US3646229A (en) * 1970-07-13 1972-02-29 Dow Chemical Co Use of dimethoxymethane to inhibit a methylene chloride-aluminum reaction
CA1049567A (en) * 1973-02-23 1979-02-27 Diamond Shamrock Corporation Inhibition of aromatic compound degradation of methylene chloride
DE2716534A1 (de) * 1976-05-03 1977-12-01 Solvay Verfahren zur stabilisierung von methylenchlorid
US4438192A (en) * 1983-02-14 1984-03-20 The Dow Chemical Company Photoresist stripper composition and method of use
JPS6120946A (ja) * 1984-07-10 1986-01-29 Asahi Glass Co Ltd フォトレジスト剥離用組成物

Also Published As

Publication number Publication date
IE59867B1 (en) 1994-04-20
DE3776737D1 (de) 1992-03-26
ES2006203A6 (es) 1989-04-16
JPH0449939B2 (no) 1992-08-12
CA1295205C (fr) 1992-02-04
NO873030D0 (no) 1987-07-20
FI84630C (fi) 1991-12-27
FI873189A0 (fi) 1987-07-20
JPS6330848A (ja) 1988-02-09
NO173617C (no) 1994-01-05
NO173617B (no) 1993-09-27
ATE72679T1 (de) 1992-03-15
DK376787A (da) 1988-01-22
EP0258079A1 (fr) 1988-03-02
FR2601703B1 (fr) 1993-05-07
DK376787D0 (da) 1987-07-20
FR2601703A1 (fr) 1988-01-22
EP0258079B1 (fr) 1992-02-19
NO873030L (no) 1988-01-22
FI873189A (fi) 1988-01-22
GR3004213T3 (no) 1993-03-31
FI84630B (fi) 1991-09-13
IE871958L (en) 1989-01-21

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ROE which was carried out by NMFS, samples were also analyzed by NCA for residual nitrite and chloride concentrations. The results of these findings are presented in this report.

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