NO173617C - Blanding paa basis av metylenklorid for fjerning av fotoresistfilmer - Google Patents

Blanding paa basis av metylenklorid for fjerning av fotoresistfilmer

Info

Publication number
NO173617C
NO173617C NO873030A NO873030A NO173617C NO 173617 C NO173617 C NO 173617C NO 873030 A NO873030 A NO 873030A NO 873030 A NO873030 A NO 873030A NO 173617 C NO173617 C NO 173617C
Authority
NO
Norway
Prior art keywords
methylene chloride
photoresist films
remove photoresist
chloride based
based blend
Prior art date
Application number
NO873030A
Other languages
English (en)
Other versions
NO873030D0 (no
NO873030L (no
NO173617B (no
Inventor
Michel Campos
Jean-Charles Boussaguet
Jean-Philippe Letullier
Original Assignee
Atochem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atochem filed Critical Atochem
Publication of NO873030D0 publication Critical patent/NO873030D0/no
Publication of NO873030L publication Critical patent/NO873030L/no
Publication of NO173617B publication Critical patent/NO173617B/no
Publication of NO173617C publication Critical patent/NO173617C/no

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/261—Alcohols; Phenols
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C17/00—Preparation of halogenated hydrocarbons
    • C07C17/38—Separation; Purification; Stabilisation; Use of additives
    • C07C17/42—Use of additives, e.g. for stabilisation
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5018—Halogenated solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/028—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons
    • C23G5/02854—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing halogenated hydrocarbons characterised by the stabilising or corrosion inhibiting additives
    • C23G5/02861—Oxygen-containing compounds
    • C23G5/0288—Epoxy compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/288—Removal of non-metallic coatings, e.g. for repairing
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/263—Ethers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/264—Aldehydes; Ketones; Acetals or ketals
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Detergent Compositions (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Dental Preparations (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Paints Or Removers (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
NO873030A 1986-07-21 1987-07-20 Blanding paa basis av metylenklorid for fjerning av fotoresistfilmer NO173617C (no)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8610529A FR2601703B1 (fr) 1986-07-21 1986-07-21 Composition a base de chlorure de methylene - son utilisation pour l'enlevement des films photoresist

Publications (4)

Publication Number Publication Date
NO873030D0 NO873030D0 (no) 1987-07-20
NO873030L NO873030L (no) 1988-01-22
NO173617B NO173617B (no) 1993-09-27
NO173617C true NO173617C (no) 1994-01-05

Family

ID=9337579

Family Applications (1)

Application Number Title Priority Date Filing Date
NO873030A NO173617C (no) 1986-07-21 1987-07-20 Blanding paa basis av metylenklorid for fjerning av fotoresistfilmer

Country Status (12)

Country Link
EP (1) EP0258079B1 (no)
JP (1) JPS6330848A (no)
AT (1) ATE72679T1 (no)
CA (1) CA1295205C (no)
DE (1) DE3776737D1 (no)
DK (1) DK170076B1 (no)
ES (1) ES2006203A6 (no)
FI (1) FI84630C (no)
FR (1) FR2601703B1 (no)
GR (1) GR3004213T3 (no)
IE (1) IE59867B1 (no)
NO (1) NO173617C (no)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3068622B2 (ja) * 1988-08-30 2000-07-24 キヤノン株式会社 画像処理装置
FR2661918B1 (fr) * 1990-05-10 1992-07-17 Atochem Composition nettoyante a base de 1,1,1,2,2-pentafluoro-3,3-dichloro-propane et de methyl tert-butyl ether.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3625763A (en) * 1968-12-04 1971-12-07 Bunker Ramo Conformal coating stripping method and composition
US3646229A (en) * 1970-07-13 1972-02-29 Dow Chemical Co Use of dimethoxymethane to inhibit a methylene chloride-aluminum reaction
CA1049567A (en) * 1973-02-23 1979-02-27 Diamond Shamrock Corporation Inhibition of aromatic compound degradation of methylene chloride
DE2716534A1 (de) * 1976-05-03 1977-12-01 Solvay Verfahren zur stabilisierung von methylenchlorid
US4438192A (en) * 1983-02-14 1984-03-20 The Dow Chemical Company Photoresist stripper composition and method of use
JPS6120946A (ja) * 1984-07-10 1986-01-29 Asahi Glass Co Ltd フォトレジスト剥離用組成物

Also Published As

Publication number Publication date
FR2601703A1 (fr) 1988-01-22
NO873030D0 (no) 1987-07-20
FI873189A (fi) 1988-01-22
JPH0449939B2 (no) 1992-08-12
ATE72679T1 (de) 1992-03-15
DE3776737D1 (de) 1992-03-26
FR2601703B1 (fr) 1993-05-07
IE59867B1 (en) 1994-04-20
ES2006203A6 (es) 1989-04-16
FI873189A0 (fi) 1987-07-20
FI84630B (fi) 1991-09-13
DK376787D0 (da) 1987-07-20
EP0258079B1 (fr) 1992-02-19
NO873030L (no) 1988-01-22
DK170076B1 (da) 1995-05-15
JPS6330848A (ja) 1988-02-09
DK376787A (da) 1988-01-22
IE871958L (en) 1989-01-21
FI84630C (fi) 1991-12-27
CA1295205C (fr) 1992-02-04
EP0258079A1 (fr) 1988-03-02
NO173617B (no) 1993-09-27
GR3004213T3 (no) 1993-03-31

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Legal Events

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