DK1436097T3 - System til fastgørelse af et ultralydselement til et integreret kredsløb - Google Patents
System til fastgørelse af et ultralydselement til et integreret kredsløb Download PDFInfo
- Publication number
- DK1436097T3 DK1436097T3 DK02751556.8T DK02751556T DK1436097T3 DK 1436097 T3 DK1436097 T3 DK 1436097T3 DK 02751556 T DK02751556 T DK 02751556T DK 1436097 T3 DK1436097 T3 DK 1436097T3
- Authority
- DK
- Denmark
- Prior art keywords
- layer
- transducer
- elements
- ultrasonic sensor
- redistribution
- Prior art date
Links
- 238000002604 ultrasonography Methods 0.000 title description 2
- 239000010410 layer Substances 0.000 claims description 159
- 239000002184 metal Substances 0.000 claims description 44
- 229910052751 metal Inorganic materials 0.000 claims description 44
- 238000002161 passivation Methods 0.000 claims description 38
- 239000000523 sample Substances 0.000 claims description 36
- 239000004020 conductor Substances 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 21
- 239000000853 adhesive Substances 0.000 claims description 19
- 230000001070 adhesive effect Effects 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 229910000679 solder Inorganic materials 0.000 claims description 7
- 239000002998 adhesive polymer Substances 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000011324 bead Substances 0.000 claims 6
- 239000002356 single layer Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 62
- 238000001465 metallisation Methods 0.000 description 49
- 239000000758 substrate Substances 0.000 description 20
- 239000012528 membrane Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000003746 surface roughness Effects 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000012814 acoustic material Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229920001940 conductive polymer Polymers 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920002959 polymer blend Polymers 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
- A61B8/445—Details of catheter construction
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Claims (15)
1. Ultralydstransducerprobe, som omfatter: et probehus (110), en ultralydssensor (120), som er placeret i probehuset og har en flerhed af elementer (210), et integreret kredsløb (140), som er placeret i probehuset og tilknyttet et aktivt kredsløb (218), og et omfordelingslag (145) mellem ultralydssensoren (120) og det integrerede kredsløb (140), idet omfordelingslaget (145) har en første overflade, som indbefatter elektriske kontakter, der svarer til kontaktpuder (224) af det integrerede kredsløb, en anden overflade, som indbefatter metalkontakter (232), der svarer til ultralydssensorens (120) flerhed af elementer (210), og en flerhed af omfordelingsledere (222), som er dannet side om side mellem den første og anden overflade, kendetegnet ved, at hver af omfordelingsledeme er forbundet med én af de elektriske kontakter og én af metalkontakterne.
2. Transducerprobe ifølge krav 1, hvor ultralydssensoren og omfordelingslaget er konfigureret som et todimensionelt array.
3. Transducerprobe ifølge krav 1, hvor omfordelingslaget omfatter en første passiviseringslag (216) og et andet passiviseringslag (214), og hvor omfordelingsledeme er dannet i et enkelt lag mellem de to passiviseringslag.
4. Transducerprobe ifølge krav 1, hvor ultralydssensoren omfatter en mikrobearbejdet ultralydstransducer (MUT), og hvor omfordelingslaget er forbundet med ultralydssensoren under anvendelse af midler, der vælges blandt loddekugler, guldkugler, kugler af ledende klæbepolymer og klæbepolymertyndlinjebinding.
5. Transducerprobe ifølge krav 4, hvor ultralydssensoren omfatter en mikrobearbejdet ultralydstransducer (MUT) og hvor MUT'en yderligere indbefatter en elektrisk ledende via, som er tilknyttet hvert af en flerhed af MUT-elementer, idet den elektrisk ledende via er konfigureret til at tilvejebringe en elektrisk forbindelse mellem MUT-elementet og omfordelingslagets anden overflade.
6. Transducerprobe ifølge krav 1, som yderligere omfatter et klæbemateriale, der er placeret mellem ultralydssensoren og omfordelingslaget, hvor klæbematerialet er et dematchende lag.
7. Ultralydstransducerprobe ifølge krav 1, hvor hvert af ultralydssensorens flerhed af elementer indbefatter et elektrisk ledende akustisk lag.
8. Transducerprobe ifølge krav 7, hvor det elektrisk ledende akustiske lag er et bagbeklædningslag.
9. Transducerprobe ifølge krav 7, hvor det elektrisk ledende akustiske lag er et dematchende lag.
10. Ultralydstransducerprobe ifølge krav 1, hvor ultralydssensoren og det integrerede kredsløb er forbundet ved hjælp af en tyndlinjebinding.
11. Transducerprobe ifølge krav 10, som yderligere omfatter: et felt, som er tilknyttet det integrerede kredsløb og indrettet til at svare til placeringen af hvert af ultralyds sensorens flerhed af elementer, en leder, som er tilknyttet puden og hvert af ultralydssensorens elementer, og hvor hver leder er forbundet med hvert af ultralydssensorens flerhed af elementer under anvendelse af en klæbepolymertyndlinjebinding.
12. Transducerprobe ifølge krav 11, som yderligere omfatter et passiviseringslag, der er påført over og eksponerer lederen, hvor passiviseringslaget og lederen er planeret for at udjævne det integrerede kredsløbs overflade.
13. Ultralydstransducerprobe ifølge krav 1, hvor det integrerede kredsløb omfatter en flerhed af elektriske puder, som svarer til placeringen af hvert af flerheden af elementer, og omfordelingslaget yderligere omfatter en flerhed af elektriske kontakter (222), som svarer til de elektriske puder, idet de elektriske kontakter er elektrisk forbundet med hvert af flerheden af transducerelementer.
14. Transducerprobe ifølge krav 12, hvor hver af de elektriske kontakter er forbundet med hvert af flerheden af transducerelementer under anvendelse af midler, der vælges blandt loddekugler, guldkugler og kugler af ledende klæbepolymer.
15. Fremgangsmåde til konstruktion af en ultralydstransducerprobe (100), hvilken fremgangsmåde omfatter følgende trin: tilvejebringelse af etprobehus (110), tilvejebringelse af en ultralydssensor (120) i probehuset, idet ultralydssensoren har en flerhed af elementer, tilvejebringelse af et integreret kredsløb (140), som er tilknyttet et aktivt kredsløb (218) i probehuset, og tilvejebringelse af et omfordelingslag (145) med en første overflade, som indbefatter elektriske kontakter, en anden overflade, som indbefatter metalkontakter (232), og en flerhed af omfordelingsledere (222), som er dannet side om side mellem den første og den anden overflade, hvor hver af omfordelingslederne er forbundet med én af de elektriske kontakter, og forbindelse af det integrerede kredsløbs kontaktpuder (224) til de elektriske kontakter og forbindelse af ultralydssensorens elementer til metalkontakterne.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/919,470 US6551248B2 (en) | 2001-07-31 | 2001-07-31 | System for attaching an acoustic element to an integrated circuit |
| PCT/IB2002/003145 WO2003013181A2 (en) | 2001-07-31 | 2002-07-26 | System for attaching an acoustic element to an integrated circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK1436097T3 true DK1436097T3 (da) | 2016-04-18 |
Family
ID=25442151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK02751556.8T DK1436097T3 (da) | 2001-07-31 | 2002-07-26 | System til fastgørelse af et ultralydselement til et integreret kredsløb |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6551248B2 (da) |
| EP (1) | EP1436097B1 (da) |
| JP (1) | JP2005507581A (da) |
| KR (1) | KR20040019258A (da) |
| CN (1) | CN1327976C (da) |
| DK (1) | DK1436097T3 (da) |
| WO (1) | WO2003013181A2 (da) |
Families Citing this family (114)
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-
2001
- 2001-07-31 US US09/919,470 patent/US6551248B2/en not_active Expired - Lifetime
-
2002
- 2002-07-26 WO PCT/IB2002/003145 patent/WO2003013181A2/en active Application Filing
- 2002-07-26 EP EP02751556.8A patent/EP1436097B1/en not_active Expired - Lifetime
- 2002-07-26 KR KR10-2003-7004354A patent/KR20040019258A/ko not_active Application Discontinuation
- 2002-07-26 DK DK02751556.8T patent/DK1436097T3/da active
- 2002-07-26 JP JP2003518221A patent/JP2005507581A/ja not_active Abandoned
- 2002-07-26 CN CNB028030753A patent/CN1327976C/zh not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| EP1436097A2 (en) | 2004-07-14 |
| JP2005507581A (ja) | 2005-03-17 |
| US6551248B2 (en) | 2003-04-22 |
| CN1327976C (zh) | 2007-07-25 |
| US20030028108A1 (en) | 2003-02-06 |
| WO2003013181A2 (en) | 2003-02-13 |
| KR20040019258A (ko) | 2004-03-05 |
| EP1436097B1 (en) | 2016-02-03 |
| WO2003013181A3 (en) | 2004-05-06 |
| CN1531467A (zh) | 2004-09-22 |
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